ION BEAM SPUTTERING APPARATUS AND METHOD

Single beam plasma source

Ion beam sputtering apparatus and method

Metal plating of grids for ion beam sputtering

Specimen preparation device

Ion beam sample preparation and coating apparatus and methods

Method for increased target utilization in ion beam deposition tools

Formation of an alignment film for a liquid crystal on a substrate

PLUME STEERING

ION BEAM DISTRIBUTION

Closed drift ion source

Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION METHOD

Process for manufacturing single-wall carbon nanotubes

DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME

Method and apparatus for surface processing of a substrate using an energetic particle beam

Alignment film forming apparatus and method

Method and system for increasing throughput during location specific processing of a plurality of substrates

"Iontron" ion beam deposition source and a method for sputter deposition of different layers using this source

THIN FILM FORMING APPARATUS

APPARATUS FOR REACTIVE SPUTTERING

Deposition on charge sensitive materials with ion beam deposition

Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus