Method of manufacturing electronic device capable of controlling threshold voltage and ion implanter controller and system that perform the method

Method of correction for wafer crystal cut error in semiconductor processing

Ion implanting apparatus

Rubber plate used in an ion implanter and method of preparing the same

Ion implanter electrodes

Ion beam slit extraction with mass separation

Ion source, ion implanting device, and manufacturing method of semiconductor devices

Ion implantation ion source, system and method

Method for preparing a source material including forming a paste for ion implantation

Tetrode extraction apparatus for ion source

Scan and corrector magnet designs for high throughput scanned beam ion implanter

Wafer temperature control with consideration to beam power input

Apparatus and method for improved ion beam current

Dual cathode ion source

Two-axis variable width mass resolving aperture with fast acting shutter motion

Electrode, accelerator column and ion implantation apparatus including same

Pedestal alignment tool for an orienter pedestal of an ion implant device

Beam current density distribution adjustment device and ion implanter

Cam actuated filament clamp