MOBILE RADIATION DETECTOR SYSTEM FOR ION IMPLANTERS

ION IMPLANTATION APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME

ION IMPLANTATION DEVICE WITH ENERGY FILTER HAVING ADDITIONAL THERMAL ENERGY DISSIPATION SURFACE AREA

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

ION IMPLANTER

ION IMPLANTATION SYSTEM AND METHOD OF OPERATION

Automatic Beam Uniformity Correction Through Generative AI Modeling

ADJUSTABLE EXIT ANGLE SOURCE FOR IONS AND NEUTRAL PARTICLES

IN-SITU ION BEAM ANGLE MEASUREMENT

ION IMPLANTER AND ION IMPLANTATION METHOD

Actively Cooled Gas Line For Ion Source

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS

HELICAL VOLTAGE STANDOFF

Active Cooling Of Quartz Enveloped Heaters In Vacuum

CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY

Linear accelerator coil including multiple fluid channels

Adjustable support for arc chamber of ion source

Ion source repeller

Load lock device having optical measuring device for acquiring distance

FRACTIONING DEVICE

Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam

Ion implanter, ion implantation method, and semiconductor device manufacturing method

Method and systems useful for producing aluminum ions

Ion source with single-slot tubular cathode

REFLECTANCE REDUCTION OF SUBSTRATE FOR TRANSMITTING INFRARED LIGHT

Semiconductor wafer with modified surface and fabrication method thereof

Dual cathode ion source

Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control

Scan and corrector magnet designs for high throughput scanned beam ion implanter

Cylindrical shaped arc chamber for indirectly heated cathode ion source

Ion source with tailored extraction shape

Two die sides with PTI. PTO. TDI, TCK, TMS, TDO, PTIO contact points method

Methods and systems for plasma deposition and treatment

CARBON MATERIALS FOR CARBON IMPLANTATION

METHODS FOR INCREASING BEAM CURRENT IN ION IMPLANTATION

Dual cathode ion source

Compact high energy ion implantation system

Ion source and ion implantation apparatus

In-situ wafer temperature measurement and control

Ion implantation apparatus and measurement device

Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Method and device for implanting ions in wafers

Ion implantation apparatus and measurement device

Energy filter for processing a power semiconductor device

Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation

Ion implantation amount adjustment device and method, ion implantation apparatus and determination method

Semiconductor wafer with modified surface and fabrication method thereof

System and method for in-situ beamline film stabilization or removal in the AEF region

Device for modulating the intensity of a particle beam from a charged particle source

Tattletale ion-implanted nanoparticles

Ionization vacuum measuring cell

Low profile extraction electrode assembly

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING SAME

Wafer cooling system and method

Dual cathode ion source

Ion implantation method and ion implantation apparatus

Phosphine co-gas for carbon implants

Ion beam irradiation apparatus and substrate processing apparatus

Ion implantation apparatus and ion implantation method

Superjunction structure in a power semiconductor device

Energy filter for processing a power semiconductor device

Ion implanter comprising integrated ventilation system

Negative ribbon ion beams from pulsed plasmas

Apparatus for exhaust cooling

DOPANT COMPOSITIONS FOR ION IMPLANTATION

Ion source repeller shield comprising a labyrinth seal

High-throughput system and method for post-implantation single wafer warm-up

METHODS FOR ATOM INCORPORATION INTO MATERIALS USING A PLASMA AFTERGLOW

Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator

Ion implanter

Ion implantation system and process

Grid, method of manufacturing the same, and ion beam processing apparatus

Techniques and apparatus for manipulating an ion beam

Carbon materials for carbon implantation

Light bath for particle suppression

Apparatus and method for generating high current negative hydrogen ion beam

Method of manufacturing optical member

Ion implantation apparatus and method for processing plurality of wafers using the same

STORAGE AND SUB-ATMOSPHERIC DELIVERY OF DOPANT COMPOSITIONS FOR CARBON ION IMPLANTATION

Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

METHODS, SYSTEMS AND APPARATUS FOR ACCELERATING LARGE PARTICLE BEAM CURRENTS

Resonant enhancement of photoionization of gaseous atoms

Apparatus and method for controlling implant process

Bipolar wafer charge monitor system and ion implantation system comprising same

Adjustable mass resolving aperture

Adjustable mass resolving aperture

Magnetic field fluctuation for beam smoothing

Marking plastic-based products

METHOD AND ION IMPLANTER FOR LOW TEMPERATURE IMPLANTATION

SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION

Laser-Induced Borane Production for Ion Implantation

Method and apparatus for neutral beam processing based on gas cluster ion beam technology and articles produced thereby

Apparatus and method to control an ion beam

Boron implanting using a co-gas

Microbolometer devices in CMOS and BiCMOS technologies

High energy ion implanter, beam current adjuster, and beam current adjustment method

Mass analyzing electromagnet and ion beam irradiation apparatus

Ion beam treatment method for producing superhydrophilic glass materials

Implant masking and alignment system with rollers

Annular cooling fluid passage for magnets

Isotopically-enriched boron-containing compounds, and methods of making and using same

STRUCTURES INCLUDING ION BEAM-MIXED LITHIUM ION BATTERY ELECTRODES, METHODS OF MAKING, AND METHODS OF USE THEREOF

Ion implantation apparatus and control method for ion implantation apparatus

Beam irradiation apparatus and beam irradiation method

Ion implantation apparatus

Ion implantation apparatus

Ion implanter provided with a plurality of plasma source bodies

Angular scanning using angular energy filter

Ion implanter and ion implantation method

Method and apparatus for neutral beam processing based on gas cluster ion beam technology

Technique for temperature measurement and calibration of semiconductor workpieces using infrared

MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS

Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation

Platen support structure

High-energy ion implanter, beam collimator, and beam collimation method

METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATION

Ion implantation apparatus and method of controlling ion implantation apparatus

Ion sources, systems and methods

Using wafer geometry to improve scanner correction effectiveness for overlay control

Ion implantation device

Deceleration apparatus for ribbon and spot beams

Particle beam transport apparatus

Insulation structure and insulation method

Insulation structure of high voltage electrodes for ion implantation apparatus

High-throughput system and method for post-implantation single wafer warm-up

Sapphire property modification through ion implantation

Method for manufacturing semiconductor device

Ion generation method and ion source

Three dimensional metal deposition technique

Inert atmospheric pressure pre-chill and post-heat

System and method of ion beam source for semiconductor ion implantation

Double ended electrode manipulator

Ion beam bending magnet for a ribbon-shaped ion beam

Ion implantation apparatus and ion implantation method

Methods and systems for determining a critical dimension and overlay of a specimen

PLATEN CLEANING METHOD

Method of Anion Production from Atoms and Molecules

Ion implantation method and ion implantation apparatus

HEAT LIP SEAL FOR CRYOGENIC PROCESSING

Semiconductor structure made using improved multiple ion implantation process

Method and apparatus for forming the doped cryo-biology specimen of electron microscope

Method of ionization

Ion sources, systems and methods

Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same

Semiconductor structure made using improved multiple ion implantation process

Isotopically-enriched boron-containing compounds, and methods of making and using same

Ion implantation system and ion implantation method using the same

Deceleration apparatus for ribbon and spot beams

ION BEAM DISTRIBUTION

Apparatus and method of temperature control during cleaving processes of thick materials

Ion source

Effective algorithm for warming a twist axis for cold ion implantations

Electrostatic chuck cleaning during semiconductor substrate processing

Method for modifying a material layer using gas cluster ion beam processing

Method for low temperature ion implantation

RF-driven ion source with a back-streaming electron dump

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

Magnet for ion beam irradiation apparatus equipped with protective member that covers plurality of magnetic field concentrating members

Method for modifying an etch rate of a material layer using energetic charged particles

Isotopically-enriched boron-containing compounds, and methods of making and using same

Ion beam processing apparatus

Isotopically-enriched boron-containing compounds, and methods of making and using same

Method for treating non-planar structures using gas cluster ion beam processing

Method and apparatus for uniformly implanting a wafer with an ion beam

PLATEN TO CONTROL CHARGE ACCUMULATION

COLD IMPLANT FOR OPTIMIZED SILICIDE FORMATION

CARBON MATERIALS FOR CARBON IMPLANTATION

External cathode ion source

Off-axis ion milling device for manufacture of magnetic recording media and method for using the same

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDMENT APPARATUS

Ion implanter

Methods and systems for determining a critical dimension and overlay of a specimen

Method for modifying a material layer using gas cluster ion beam processing

Ion implantation systems

Vapor compression refrigeration chuck for ion implanters

Ion implantation ion source, system and method

Cathode having electron production and focusing grooves, ion source and related method

Ion implantation apparatus, substrate clamping mechanism, and ion implantation method

Method and apparatus for extracting ions from an ion source for use in ion implantation

REDUCED IMPLANT VOLTAGE DURING ION IMPLANTATION

Method and apparatus for controlling beam current uniformity in an ion implanter

Implant uniformity control

Platen cleaning method

Extraction electrode manipulator

Hydrogen ion implanter using a broad beam source

Electrospray deposition: devices and methods thereof

COATING AND ION BEAM MIXING APPARATUS AND METHOD TO ENHANCE THE CORROSION RESISTANCE OF THE MATERIALS AT THE ELEVATED TEMPERATURE USING THE SAME

Ion implantation with heavy halogenide compounds

Maskless Doping Technique for Solar Cells

Methods for implanting B22Hx and its ionized lower mass byproducts

Ion source for generating negatively charged ions

Ion implanting apparatus

Cooled cleaving implant

VAPOR DELIVERY SYSTEM USEFUL WITH ION SOURCES AND VAPORIZERS FOR USE IN SUCH SYSTEM

Ion beam irradiating apparatus, and method of producing semiconductor device

TECHNIQUES FOR COLD IMPLANTATION OF CARBON-CONTAINING SPECIES

Methods for in situ surface treatment in an ion implantation system

Apparatus and methods for ion beam implantation using ribbon and spot beams

Ion sources, systems and methods

Vapor delivery to devices under vacuum

Ion implanters

RF electron source for ionizing gas clusters

TECHNIQUES FOR SHAPING AN ION BEAM

Double plasma ion source

NOVEL METHODS FOR CLEANING ION IMPLANTER COMPONENTS

UNIFORMITY CONTROL FOR ION BEAM ASSISTED ETCHING

Sealing between vacuum chambers

Ion implanting apparatus for forming ion beam shape

Positioning device for positioning an aperture plate in an ion beam

Scanning electron microscope

Elevated temperature RF ion source

Ion implantation method and semiconductor device manufacturing method

Ion doping apparatus, ion doping method, semiconductor device and method of fabricating semiconductor device

External cathode ion source

Ion source and method for operating same

Cathode having electron production and focusing grooves, ion source and related method

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

Electrostatic chuck with separated electrodes

Charged particle beam apparatus

Divergent charged particle implantation for improved transistor symmetry

Shielding assembly for semiconductor manufacturing apparatus and method of using the same

APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSES OF THICK FILM MATERIALS

Gas Bearing Spindles

Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam

Method to measure ion beam angle

Divergent Charged Particle Implantation for Improved Transistor Symmetry

Techniques for confining electrons in an ion implanter

Ion implantation apparatus

Delivery of a Charged Particle Beam

Method and device for ion beam processing of surfaces

Techniques for forming shallow junctions

Ion implanter with function of compensating wafer cut angle and ion implantation method using the same

Multivalent ion generating source and charged particle beam apparatus using such ion generating source

Dual mode ion source for ion implantation

Methods for beam current modulation by ion source parameter modulation

Beam tuning with automatic magnet pole rotation for ion implanters

Ion source

Analyzing electromagnet

Electrostatic chuck cleaning during semiconductor substrate processing

Techniques for temperature-controlled ion implantation

Dual mode ion source for ion implantation

Techniques for temperature-controlled ion implantation

Apparatus and method for ion beam implantation using ribbon and spot beams

Beam processing system and beam processing method

Use of scanning theme implanters and annealers for selective implantation and annealing

ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD

Method and apparatus for scanning a workpiece through an ion beam

Ion implantation ion source, system and method

Electromagnet with active field containment

Apparatus and method for controlling ion beam

Method for preparing a source material for ion implantation

Dual mode ion source for ion implantation

Technique for improving uniformity of a ribbon beam

Filament member, ion source, and ion implantation apparatus

Filament member, ion source, and ion implantation apparatus

Method and apparatus for extracting ions from an ion source for use in ion implantation

Dual mode ion source for ion implantation

Ion implantation ion source, system and method

Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions

Faraday cup assembly and method of controlling the same

Ion source element, ion implanter having the same and method of modifying the same

Deflecting electromagnet and ion beam irradiating apparatus

ION IMPLANTING APPARATUS AND METHOD

Ion beam irradiation apparatus

Methods and apparatus for ion beam angle measurement in two dimensions

Method and apparatus for extracting ions from an ion source for use in ion implantation

Method and apparatus for extracting ions from an ion source for use in ion implantation

Methods and apparatus for enabling multiple process steps on a single substrate

Method of measuring ion beam position

Methods and apparatus for ion beam angle measurement in two dimensions

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms

Ion implantation cooling system

Ion doping system, ion doping method and semiconductor device

Method for controlling a vaporizer of ion implantation equipment during indium implantation process

Divergent charged particle implantation for improved transistor symmetry

Reduced particle generation from wafer contacting surfaces on wafer paddle and handling facilities

Dual mode ion source for ion implantation

Methods for cleaning ion implanter components

Method for implanting dopants within a substrate by tilting the substrate relative to the implant source

Methods and systems for determining a presence of macro and micro defects on a specimen

Scanning electron microscope

Moving vacuum chamber stage with air bearing and differentially pumped grooves

Apparatus for ion implantation

Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough

Doping method, doping apparatus, and control system for doping apparatus

Ion implantation apparatus for use in manufacturing of semiconductor device

Scanning mechanism of an ion implanter

Ion beam system

Monatomic boron ion source and method

Monatomic dopant ion source and method

Ion implantation ion source, system and method

Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights

Mounting mechanism for plasma extraction aperture

Ion sources

monitoring on an ion implanter

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system

Ion implantation simulation apparatus, method, and program

Apparatus, method and program for ion implantation simulation, and computer readable storage medium having stored therein the program