ANGLED ION IMPLANT TO ENABLE VOID-FREE FILLING OF HIGH ASPECT RATIO TRENCH

BEAM CONDITIONING FOR DEFECT CONTROL IN BEAMLINE ION IMPLANTER

ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS

ION BEAM IRRADIATION METHOD AND ION BEAM IRRADIATION APPARATUS

A Method for the Simulation of an Energy-Filtered Ion Implantation (EFII)

A Method for the Simulation of an Energy-Filtered Ion Implantation (EFII)

Energy filter element for ion implantation systems for the use in the production of wafers

HIGH INCIDENCE ANGLE GRAPHITE FOR PARTICLE CONTROL WITH DEDICATED LOW SPUTTER YIELD ION BEAM

Energy filter element for ion implantation systems for the use in the production of wafers

Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism

Energy filter element for ion implantation systems for the use in the production of wafers

POROUS CARBONACEOUS VACUUM CHAMBER LINERS

Multiple arc chamber source

LOW EMISSION CLADDING AND ION IMPLANTER

Low emission cladding and ion implanter

Electostatic filter and method for controlling ion beam properties using electrostatic filter

Ion injecting device using vacant baffle and faraday cups, and ion injecting method thereof, for detecting content of suspending particles

Method and device for implanting ions in wafers

Conductive beam optic containing internal heating element

Energy filter element for ion implantation systems for the use in the production of wafers

Hydrogen co-gas when using aluminum iodide as an ion source material

GALLIUM IMPLANTATION CLEANING METHOD

GALLIUM IMPLANTATION CLEANING METHOD

In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source

Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products

ULTRA-THIN CORROSION RESISTANT HARD OVERCOAT FOR HARD DISK MEDIA

Ion source liner having a lip for ion implantation systems

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS HAVING VARIED GEOMETRIES

Light bath for particle suppression

Combined electrostatic lens system for ion implantation

Reduced trace metals contamination ion source for an ion implantation system

System and method for controlling ion implanter

METHOD FOR INJECTING DOPANT INTO SUBSTRATE TO BE PROCESSED, AND PLASMA DOPING APPARATUS

Ion generator and ion generating method

Ion implantation with charge and direction control

Ion source and a method for in-situ cleaning thereof

ION IMPLANTATION TUNING TO ACHIEVE SIMULTANEOUS MULTIPLE IMPLANT ENERGIES

In-vacuum high speed pre-chill and post-heat stations

Beam line design to reduce energy contamination

Ion implantation with charge and direction control

Beam line system of ion implanter

Adjustable louvered plasma electron flood enclosure

Ion implantation ion source, system and method

Mass analysis magnet for a ribbon beam

Fastening apparatus

Ion source and a method for in-situ cleaning thereof

ENERGY CONTAMINATION MONITOR WITH NEUTRAL CURRENT DETECTION

Post-decel magnetic energy filter for ion implantation systems

ACCELERATOR PARTICLE BEAM APPARATUS AND METHOD FOR LOW CONTAMINATE PROCESSING

Graphite member for beam-line internal member of ion implantation apparatus

IN-VACUUM PROTECTIVE LINERS

Ion implanters

METHODS FOR MONITORING IMPLANTER PERFORMANCE

Ion beam guide tube

Profile adjustment in plasma ion implanter

Contamination reduction during ion implantation

METHOD AND APPARATUS FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION

Ion implanters

System and method for two-dimensional beam scan across a workpiece of an ion implanter

Techniques for reducing contamination during ion implantation

TECHNIQUES FOR REMOVING MOLECULAR FRAGMENTS FROM AN ION IMPLANTER

Sensor for ion implanter

Ion beam guide tube

ION IMPLANTATION ION SOURCE, SYSTEM AND METHOD

Electrostatic chuck to limit particle deposits thereon

Ion implantation ion source, system and method

Ion beam contamination determination

Determining ion beam parallelism using refraction method

Electromagnet with active field containment

ELECTROSTATIC PARTICLE GETTERING IN AN ION IMPLANTER

Ion implantation system and control method

Ion implantation system and control method

Fluorine based cleaning of an ion source

Techniques for reducing effects of photoresist outgassing

Techniques for preventing parasitic beamlets from affecting ion implantation

Dual mode ion source for ion implantation

Ion implanter with contaminant collecting surface

Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases

Method and apparatus for the production of purified liquids and vapors

Technique for improving ion implanter productivity

Resonance method for production of intense low-impurity ion beams of atoms and molecules

Analyzing chamber including a leakage ion beam detector and mass analyzer including the same

Profile adjustment in plasma ion implanter

Charged beam dump and particle attractor

Particulate prevention in ion implantation

Beam stop and beam tuning methods

Ion implantation system and control method

Ion beam measurement apparatus and method

Ion implantation method and method for manufacturing semiconductor device

Removing byproducts of physical and chemical reactions in an ion implanter

Irradiation system ion beam and method to enhance accuracy of irradiation

Irradiation system with ion beam

Method to increase low-energy beam current in irradiation system with ion beam

Ion implantation ion source, system and method

Ion implantation apparatus and partical collection structure thereof

Method of controlling implant dosage and pressure compensation factor in-situ

Utilization of an ion gauge in the process chamber of a semiconductor ion implanter

Ion implantation method and method for manufacturing semiconductor device

Ion implantation ion source, system and method

System and method for hi-precision ion implantation