Patents-Review.com
ClassID:

206629 ⎘

H01J2237/31735 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale Direct-write microstructures

Sub-classes:
Recent Application in this class:
#1
20260148930
2026-05-28

METHOD AND APPARATUS FOR ELECTRON BEAM EXPOSURE

 #2
20180261423
2018-09-13

Control method and control program for focused ion beam device

 #3
20180216223
2018-08-02

Charged particle device and wiring method

 #4
20150344353
2015-12-03

Electron sensitive glass and optical circuits, microstructures formed therein

 #5
20150299842
2015-10-22

Charged particle device and wiring method

 #6
20120112323
2012-05-10

Apparatus and method for controlled particle beam manufacturing

 #7
20110282021
2011-11-17

Apparatus and method for modifying physical properties of nanostructure using focused electron beam, and nano-barcode and serial-junction nanowire fabricated thereby

 #8
20100098922
2010-04-22

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

 #9
20090189094
2009-07-30

Electron beam writing method, fine pattern writing system, and manufacturing method of uneven pattern carrying substrate

 #10
20080302961
2008-12-11

Sample relocation method in charged particle beam apparatus and charged particle beam apparatus as well as sample for transmission electron microscope

 #11
20080087842
2008-04-17

Multivalent ion generating source and charged particle beam apparatus using such ion generating source

 #12
20080026329
2008-01-31

SURFACE MODIFICATION OF POLYMER SURFACE USING ION BEAM IRRADIATION

 #13
20070284695
2007-12-13

Apparatus and method for controlled particle beam manufacturing

 #14
20070284538
2007-12-13

Apparatus and method for controlled particle beam manufacturing

 #15
20070284537
2007-12-13

Apparatus and method for controlled particle beam manufacturing

 #16
20070284527
2007-12-13

Apparatus and method for controlled particle beam manufacturing

 #17
20070278428
2007-12-06

Apparatus and method for controlled particle beam manufacturing

 #18
20070278419
2007-12-06

Apparatus and method for controlled particle beam manufacturing

 #19
20070278418
2007-12-06

Apparatus and method for controlled particle beam manufacturing

 #20
20070045534
2007-03-01

Apparatus and method for controlled particle beam manufacturing

 #21
20060214105
2006-09-28

Micromachining process, system and product

 #22
20060192141
2006-08-31

Method and devices for producing corpuscular radiation systems

 #23
20050211922
2005-09-29

Minute three dimensional structure producing apparatus and method

 #24
20050185562
2005-08-25

Method and apparatus for constant linear velocity electron beam substrate processing

 #25
16015772
2020-03-31

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

 #26
14809985
2017-01-31

Precision deposition using miniature-column charged particle beam arrays

 #27
14745463
2016-09-27

Precision deposition using miniature-column charged particle beam arrays