H01J2237/31737 - CPC Classification Index

ClassID:

206630 ⎘

H01J2237/31737 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale; Direct-write microstructures using ions

Recent Application in this class:

20240310722

2024-09-19

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

20210104375

2021-04-08

Low keV ion beam image restoration by machine learning for object localization

20200211822

2020-07-02

Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system

20160090645

2016-03-31

Method for structuring an object with the aid of a particle beam apparatus

20120273458

2012-11-01

Method and apparatus for processing a substrate with a focused particle beam

20120112323

2012-05-10

Apparatus and method for controlled particle beam manufacturing

20120068067

2012-03-22

Gas field ion microscopes having multiple operation modes

20100098922

2010-04-22

APPARATUS AND METHOD FOR CONTROLLED PARTICLE BEAM MANUFACTURING

20100068406

2010-03-18

Electrospray deposition: devices and methods thereof

#10

20100032302

2010-02-11

Method to direct pattern metals on a substrate

#11

20090095923

2009-04-16

Installation and method of nanofabrication

#12

20070284695

2007-12-13

Apparatus and method for controlled particle beam manufacturing

#13

20070284538

2007-12-13

Apparatus and method for controlled particle beam manufacturing

#14

20070284537

2007-12-13

Apparatus and method for controlled particle beam manufacturing

#15

20070284527

2007-12-13

Apparatus and method for controlled particle beam manufacturing

#16

20070278428

2007-12-06

Apparatus and method for controlled particle beam manufacturing

#17

20070278419

2007-12-06

Apparatus and method for controlled particle beam manufacturing

#18

20070278418

2007-12-06

Apparatus and method for controlled particle beam manufacturing

#19

20070045534

2007-03-01

Apparatus and method for controlled particle beam manufacturing

#20

20060144821

2006-07-06

Method for engraving irreproducible pattern on the surface of a diamond

#21

20060043312

2006-03-02

Enhanced scanning control of charged particle beam systems

#22

20060038137

2006-02-23

Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same

#23

20050279934

2005-12-22

Charged particle beam system

#24

20050077486

2005-04-14

Device and method of positionally accurate implantation of individual particles in a substrate surface

#25

16015772

2020-03-31

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

#26

14809985

2017-01-31

Precision deposition using miniature-column charged particle beam arrays

#27

14745463

2016-09-27

Precision deposition using miniature-column charged particle beam arrays