206637 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Electron or ion beam tubes for processing objects; Processing objects on a microscale Focused ion beam
LAMELLA HOLE TRENCH FILL METHOD
#2AUTOMATED CHEMICAL SWITCHING FOR MATERIAL DELAYERING
#3HEIGHT MEASUREMENTS USING FOCUS LINE
#4SPLIT RING RESONATOR ION BEAM SOURCE
#5STANDARD SAMPLE FOR USE IN TRANSMISSION ELECTRON MICROSCOPE, METHOD OF PREPARING THE SAME, METHOD OF ADJUSTING TRANSMISSION ELECTRON MICROSCOPE, AND METHOD OF ANALYZING OBSERVATION IMAGE OBTAINED WITH TRANSMISSION ELECTRON MICROSCOPE
#6OPTIMIZATION AND ALIGNMENT OF SHAPED CHARGED PARTICLE BEAMS
#7LAMELLA PREPARATION FROM THICK HPF SAMPLES
#8METHOD AND SYSTEM FOR 3D RECONSTRUCTION OF WAFER STRUCTURE BY DIAGONAL MILLING
#9METHOD FOR PREPARING TEM SAMPLE
#10DETECTING AND ADJUSTING LAMELLA DEFORMATION
#11METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
#12Focused Ion Beam System
#13SITU PROTECTIVE POLYMER VIA MILLING-EXCITATION
#14CHARGED PARTICLE BEAM DEVICE
#15METHOD FOR POSITIONING OBJECTS IN A PARTICLE BEAM MICROSCOPE WITH THE AID OF A FLEXIBLE PARTICLE BEAM BARRIER
#16Focused Ion Beam System
#173D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAGES OBTAINED DURING DELAYERING OF THE SAMPLE
#18MICROSCOPY IMAGING METHOD AND SYSTEM
#19ION MILLING DEVICE
#20MACHINING METHOD AND CHARGED PARTICLE BEAM DEVICE
#21ADAPTIVE SLICE DEPTH IN SLICE & VIEW WORKFLOW
#22Focused Ion Beam System
#23BEAM ANGLE ROTATION AND SAMPLE ROTATION
#24SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACTIVE MATERIALS
#25NANOSCALE FAILURE ANALYSIS METHOD
#26DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE OF A CHARGED PARTICLE BEAM DEVICE FROM FOCUSED ION BEAM GEOMETRY INDUCED CONSTRAINTS
#27CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
#28SEM NAVIGATION BY FOCUSED ION BEAM SYSTEM WITH CRYO COOLING SAMPLE STAGE
#29POST-TREATMENT PROCESSES FOR ION BEAM ETCHING OF MAGNETIC TUNNEL JUNCTION AND STRUCTURES FORMED BY THE SAME
#30JIG AND SAMPLE PROCESSING METHOD
#313D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGHPUT AND ACCURACY
#32FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION
#33METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INVESTIGATION DEVICE TO PERFORM SUCH METHOD
#34Entropy based image processing for focused ion beam delayer-edge slices detection
#35FOCUSED ION BEAM SYSTEM
#36FOCUSED ION BEAM DEVICE
#37DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE THINNING
#38FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
#39CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION IN CRYO ELECTRON MICROSCOPY APPLICATIONS
#40Integrated Circuit with FIB-Ready Structures
#413D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUME INSPECTION METHOD
#42Device For Interfacing A Sample Transfer Device To An Analytic Or Sample Preparation Device And A Container For Transporting A Sample Under Environmentally Controlled Conditions
#43Systems and methods for performing sample lift-out for highly reactive materials
#44Transmission charged particle microscope with an electron energy loss spectroscopy detector
#45SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
#46FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAMETERS BY GAS FLOW CONTROL
#47Method and device for preparing a microscopic sample from a volume sample
#48METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION BEAM AND AN INNOVATIVE SCANNING STRATEGY
#49IN-LINE DEPTH MEASUREMENTS BY AFM
#50CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
#51METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELLA FOR ANALYSIS IN A CRYO-CHARGED PARTICLE MICROSCOPE
#52Fiducial guided cross-sectioning and lamella preparation with tomographic data collection
#53METHOD OF SAMPLE PREPARATON AND ANALYSIS
#54METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION BEAM AND AN INNOVATIVE SCANNING STRATEGY
#55METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
#56ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS INJECTION NOZZLE IN FIB SYSTEMS
#57ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USING ACCELERATED IONS
#58METHOD AND SYSTEM FOR PREPARING A SPECIMEN
#59Focused Ion Beam Apparatus
#60Charged Particle Beam Device
#61METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
#62Automated ion-beam alignment for dual-beam instrument
#63Methods and structures for semiconductor device testing
#64Ion Milling Device and Ion Milling Method
#65Method for cross-section sample preparation
#66DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
#67Reduced charging by low negative voltage in FIB systems
#68Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
#693D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#70Method and system for analyzing three-dimensional features
#71FOCUSED ION BEAM SYSTEM
#72METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED ION BEAM
#73METHOD OF FAILURE ANALYSIS FOR DEFECT LOCATIONS
#74Method for Preparing TEM Sample
#75Tweezers, Conveyance Device, and Method for Conveying Sample Piece
#76Sample Cartridge Holding Apparatus
#77Focused Ion Beam System and Method of Correcting Deviation of Field of View of Ion Beam
#78METHODS FOR ANALYZING INTERMOLECULAR INTERACTIONS IN MICROCRYSTALS
#79Systems and methods for performing sample lift-out for highly reactive materials
#80Systems and methods for performing sample lift-out for highly reactive materials
#81DEVICE FOR REDUCING ICE CONTAMINATION OF A SAMPLE, FOCUSED ION BEAM MILLING APPARATUS AND METHOD FOR FOCUSED ION BEAM MILLING OF A SAMPLE
#82Apparatus and Method for Milling Sample
#83Method Of Imaging And Milling A Sample
#84Semiconductor Analysis System
#85Analyzing a sidewall of hole milled in a sample to determine thickness of a buried layer
#86Microscopy imaging method for 3D tomography with predictive drift tracking for multiple charged particle beams
#87Reduced spatial/temporal overlaps to increase temporal overlaps to increase precision in focused ion beam FIB instruments for milling and imaging and focused ion beams for lithography
#883D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample
#89Protective shutter for charged particle microscope
#90Method for positioning objects in a particle beam microscope with the aid of a flexible particle beam barrier
#91Ion milling device
#92X-ray imaging in cross-section using un-cut lamella with background material
#93Method for cross-section sample preparation
#94Ion beam device
#95Method and device for preparing a microscopic sample from a volume sample
#96Method for preparing a TEM sample
#97Transmission charged particle microscope with an electron energy loss spectroscopy detector
#98Method for changing the spatial orientation of a micro-sample in a microscope system, and computer program product
#99Charged particle beam apparatus
#100Particle beam apparatus and composite beam apparatus
#101Method and system for iteratively cross-sectioning a sample to correlatively targeted sites
#102Method of material deposition
#103Focused ion beam apparatus, and control method for focused ion beam apparatus
#104Low keV ion beam image restoration by machine learning for object localization
#105System and method of preparing integrated circuits for backside probing using charged particle beams
#106Focused ion beam apparatus
#107Charged particle beam apparatus
#108Focused ion beam apparatus
#109Liquid metal ion source and focused ion beam apparatus
#110Method, device and system for the treatment of biological cryogenic samples by plasma focused ion beams
#111Method and apparatus for capturing volume information of three-dimensional samples
#112Milling a multi-layered object
#113High power wafer cooling
#114Transferring nanostructures from wafers to transparent substrates
#115Method of manufacturing emitter, emitter, and focused ion beam apparatus
#116Method of preparing thin film sample piece and charged particle beam apparatus
#117Composite charged particle beam apparatus and control method thereof
#118Method for cross-section sample preparation
#119Charged particle beam device
#120Method and system for cross-sectioning a sample with a preset thickness or to a target site
#121Measurement and endpointing of sample thickness
#122Charged particle beam apparatus and sample processing observation method
#123Charged particle beam apparatus
#124Method of sample preparation using dual ion beam trenching
#125Dose-based end-pointing for low-kV FIB milling in TEM sample preparation
#126Ion source device
#127Automatic processing device
#128DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
#129Method for operating a plurality of FIB-SEM systems
#130Tomography-assisted TEM prep with requested intervention automation workflow
#131Charged particle beam system and method
#132Sensor characteristic evaluation method and charged particle beam device
#133Rock sample preparation method by using focused ion beam for minimizing curtain effect
#134Combined SEM-CL and FIB-IOE microscopy
#135Compact deflecting magnet
#136Endpointing for focused ion beam processing
#137Cross section processing observation method and charged particle beam apparatus
#138Charged particle beam apparatus
#139Tomography-assisted TEM prep with requested intervention automation workflow
#140Specimen preparation and inspection in a dual-beam charged particle microscope
#141Device with ion column and scanning electron microscope
#142Method for removal of matter
#143Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus
#144Method for the in situ preparation of microscopic specimens
#145Device processing method and device processing apparatus
#146Sample holder and electron microscope
#147Ion milling apparatus and sample holder
#148Compact deflecting magnet
#149Method of material deposition
#150Charged particle beam apparatus
#151Control method and control program for focused ion beam device
#152Microstructure manufacturing method and ION beam apparatus
#153Rock sample preparation method by using focused ion beam for minimizing curtain effect
#154Innovative source assembly for ion beam production
#155Charged particle beam apparatus
#156Charged particle beam apparatus and method for controlling charged beam apparatus
#157Methods, apparatuses, systems and software for treatment of a specimen by ion-milling
#158Detecting method and detecting equipment therefor
#159Microscopy imaging method and system
#160Apparatus with two or more particle beams for processing a specimen
#161Composite charged particle beam apparatus and control method thereof
#162Sample holder and focused ion beam apparatus
#163Focused ion beam apparatus
#164Method for structuring an object and associated particle beam system
#165High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
#166Ion beam device and sample observation method
#167Microscopy imaging method and system
#168Method of material deposition
#169Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics
#170Method for preparing cross-sections by ion beam milling
#171Method of performing electron diffraction pattern analysis upon a sample
#172Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics
#173Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
#174Resonant enhancement of photoionization of gaseous atoms
#175Lathe head for nano/micro machining of materials
#176Circuit tracing using a focused ion beam
#177Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
#178RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING
#179Circuit tracing using a focused ion beam
#180Method for processing and/or for observing an object, and particle beam device for carrying out the method
#181Sample holder and focused-ion-beam machining device provided therewith
#182Source for selectively providing positively or negatively charged particles for a focusing column
#183Deposition method and focused ion beam system
#184Method for S/TEM sample analysis
#185Ion milling device and processing method using the ion milling device
#186Method of specimen processing in an apparatus with two or more particle beams and apparatus for this processing
#187Endpointing for focused ion beam processing
#188Multi species ion source
#189Chicane blanker assemblies for charged particle beam systems and methods of using the same
#190Focused ion beam systems and methods of operation
#191Electron detection system
#192AutoSlice and view undercut method
#193Charged particle radiation device and specimen preparation method using said device
#194ACHROMATIC DUAL-FIB INSTRUMENT FOR MICROFABRICATION AND MICROANALYSIS
#195Total release method for sample extraction in an energetic-beam instrument
#196Apparatus for preparing a sample for microscopy
#197Plasma ion source for use with a focused ion beam column with selectable ions
#198Electron beam-induced etching
#199Integrated light optics and gas delivery in a charged particle lens
#200Imaging and processing for plasma ion source
#201Method and System of Creating a Symmetrical FIB Deposition
#202Ion implantation to alter etch rate
#203Method and apparatus for slice and view sample imaging
#204TEM sample preparation
#205Focused ion beam low kV enhancement
#206Method for creating S/TEM sample and sample structure
#207Multi-source plasma focused ion beam system
#208Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam
#209Focused ion beam apparatus
#210Cross-section processing and observation method and cross-section processing and observation apparatus
#211Multidimensional structural access
#212Charged particle beam device and sample preparation method
#213Methods, apparatuses, systems and software for treatment of a specimen by ion-milling
#214Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses
#215High aspect ratio structure analysis
#216Bulk deposition for tilted mill protection
#217Alignment marking for rock sample analysis
#218Charged particle beam apparatus
#219Method for S/TEM sample analysis
#220Charged particle beam apparatus and sample observation method
#221Atom probe tomography sample preparation for three-dimensional (3D) semiconductor devices
#222Focused ion beam system and method of making focal adjustment of ion beam
#223DROPLET CUTTING METHOD AND DROPLET CROSS-SECTION ANALYSIS METHOD
#224High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped
#225Focused ion beam low kV enhancement
#226Charged particle beam apparatus
#227Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
#228Method for processing and/or for observing an object, and particle beam device for carrying out the method
#229Automated slice milling for viewing a feature
#230High accuracy beam placement for local area navigation
#231Internal split Faraday shield for a plasma source
#232Ion milling device
#233Detection method for use in charged-particle microscopy
#234Electron beam-induced etching
#235Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby
#236Precursor for planar deprocessing of semiconductor devices using a focused ion beam
#237Transmission electron microscope sample fabrication
#238Charged particle beam irradiation apparatus
#239Source for selectively providing positively or negatively charged particles for a focusing column
#240Circuit tracing using a focused ion beam
#241Multi-source plasma focused ion beam system
#242Low energy ion milling or deposition
#243Focused ion beam system
#244Focused ion beam system, sample processing method using the same, and sample processing program using focused ion beam
#245Method for fabricating emitter
#246Method of fabricating nanotips with controlled profile
#247Ion beam device having gas introduction port disposed on structure maintained at ground potential
#248Ion beam system and method of operating an ion beam system
#249Method of depositing protective structures
#250Cross-section processing and observation method and cross-section processing and observation apparatus
#251Dual laser beam system used with an electron microscope and FIB
#252Composite charged particle beam apparatus and thin sample processing method
#253Sequencer for combining automated and manual-assistance jobs in a charged particle beam device
#254Multi species ion source
#255Ion beam device and machining method
#256Focused charged particle column for operation at different beam energies at a target
#257Imaging and processing for plasma ion source
#258Lathe head for nano/micro machining of materials
#259Particle-beam column corrected for both chromatic and spherical aberration
#260Automated ion beam idle
#261Method and Apparatus for Actively Monitoring an Inductively-Coupled Plasma Ion Source using an Optical Spectrometer
#262Ion beam apparatus
#263High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
#264Microplasma ion source for focused ion beam applications
#265Methods and apparatuses of using metal needle arrays for specimen lift-out and circuit edit
#266Method for preparing lamella
#267SYSTEM AND METHOD FOR SAMPLE ANALYSIS BY THREE DIMENSIONAL CATHODOLUMINESCENCE
#268Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions
#269Inductively coupled plasma source as an electron beam source for spectroscopic analysis
#270Internal Split Faraday Shield for an Inductively Coupled Plasma Source
#271Composite charged particle beam apparatus
#272CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION CORRECTION METHOD
#273Charged particle detector system comprising a conversion electrode
#274Devices and methods for cryo lift-out with in situ probe
#275Composite charged-particle-beam apparatus
#276Method of stack patterning using a ion etching
#277High accuracy beam placement for local area navigation
#278Charged particle beam apparatus, and sample processing and observation method
#279Particle beam device and method for use in a particle beam device
#280Charged particle beam device and sample observation method
#281Method and structure for controlling magnetic field distributions in an ExB Wien filter
#282COOLED MANIPULATOR TIP FOR REMOVAL OF FROZEN MATERIAL
#283Plasma source for charged particle beam system
#284Encapsulation of electrodes in solid media
#285Aberration-corrected wien ExB mass filter with removal of neutrals from the Beam
#286Wide aperature wien ExB mass filter
#287Ion beam system and method of operating ion beam system
#288SPECIMEN GRID HOLDER AND FOCUSED ION BEAM SYSTEM OR DUAL BEAM SYSTEM HAVING THE SAME
#289Apparatus and method for forming a solid immersion lens using a binary bitmap milling pattern
#290Method for rapid switching between a high current mode and a low current mode in a charged particle beam system
#291Liquid metal wetting of micro-fabricated charge-emission structures
#292Charged particle beam device, position specification method used for charged particle beam device, and program
#293Detector for use in charged-particle microscopy
#294Particle beam device and method for processing and/or analyzing a sample
#295Charged particle beam masking for laser ablation micromachining
#296Method of Depositing Protective Structures
#297Measurement and endpointing of sample thickness
#298SEMICONDUCTOR DEVICE
#299Charged particle source with multiple selectable particle emitters
#300Method for creating S/TEM sample and sample structure