Patents-Review.com
ClassID:

205211 ⎘

H01J37/141 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Lenses magnetic Electromagnetic lenses

Sub-classes:
Recent Application in this class:
#1
20260074139
2026-03-12

MAGNETIC MAGNIFICATION CONTROL FOR ELECTRON MICROSCOPES

 #2
20260066214
2026-03-05

APPARATUS FOR A CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVICE, METHOD OF ANALYZING A MAGNETIC LENS FOR A CHARGED PARTICLE BEAM DEVICE, AND NON-TRANSITORY MEDIUM

 #3
20260018369
2026-01-15

LENS WITH A SCANNING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF SCANNING A CHARGED PARTICLE BEAM

 #4
20250391629
2025-12-25

ABERRATION CORRECTION IN CHARGED PARTICLE SPECTROSCOPY

 #5
20250343025
2025-11-06

MULTI-BEAM PARTICLE MICROSCOPE WITH IMPROVED MULTI-BEAM GENERATOR FOR FIELD CURVATURE CORRECTION AND MULTI-BEAM GENERATOR

 #6
20250323010
2025-10-16

MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND ADJUSTING METHOD THEREOF

 #7
20250323006
2025-10-16

ELECTRON BEAM DEVICE FOR SURFACE TREATMENT

 #8
20250308838
2025-10-02

AUTOMATIC CORRECTION OF ENERGY DEPENDENT DEFOCUS IN PARTICLE BEAM SYSTEMS DUE TO A CONFIGURATION CHANGE

 #9
20250285830
2025-09-11

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND DRIFT CORRECTION METHOD FOR MULTIPLE SECONDARY ELECTRON BEAMS

 #10
20250210299
2025-06-26

PARTICLE BEAM TREATMENT APPARATUS, DEFLECTION MAGNET APPARATUS, AND PARTICLE BEAM ADJUSTMENT METHOD

 #11
20250174426
2025-05-29

OBJECTIVE LENS COVER AND CHARGED PARTICLE BEAM APPARATUS INCLUDING THE SAME

 #12
20250174425
2025-05-29

ELECTROMAGNETIC LENS, SCANNING ELECTRON MICROSCOPE, AND MULTI-ELECTRON BEAM INSPECTION APPARATUS

 #13
20250132121
2025-04-24

METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS

 #14
20250125114
2025-04-17

DRY ELECTRON SOURCE ENVIRONMENT

 #15
20250046563
2025-02-06

MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS

 #16
20240429016
2024-12-26

MAGNETIC VECTOR POTENTIAL-BASED LENS

 #17
20240373591
2024-11-07

TRANSMISSION ELECTRON MICROSCOPE

 #18
20240371597
2024-11-07

MULTIPOLE ELEMENT, IMAGE ERROR CORRECTOR AND PARTICLE BEAM SYSTEM

 #19
20240274395
2024-08-15

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DEMAGNETIZING MAGNETIC LENS

 #20
20240242933
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #21
20240242919
2024-07-18

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

 #22
20240234081
2024-07-11

CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD

 #23
20240212969
2024-06-27

CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE APPARATUS

 #24
20240194442
2024-06-13

CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS

 #25
20240145209
2024-05-02

Objective lens system for fast scanning large FOV

 #26
20240145208
2024-05-02

CHARGED PARTICLE APPARATUS AND METHOD

 #27
20240136147
2024-04-25

CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD

 #28
20240120171
2024-04-11

REDUCTION OF POWER CONSUMPTION FOR A CHARGED PARTICLE SYSTEM

 #29
20240112878
2024-04-04

CHARGED PARTICLE MICROSCOPE HAVING VACUUM IN SPECIMEN CHAMBER

 #30
20240021403
2024-01-18

Adjustable Permanent Magnetic Lens Having Thermal Control Device

 #31
20240014000
2024-01-11

MINIATURE ELECTRON OPTICAL COLUMN WITH A LARGE FIELD OF VIEW

 #32
20240006148
2024-01-04

ABERRATION CORRECTOR AND ELECTRON MICROSCOPE

 #33
20230377830
2023-11-23

Automated ion-beam alignment for dual-beam instrument

 #34
20230377829
2023-11-23

Charged particle beam device and axis adjustment method thereof

 #35
20230360878
2023-11-09

Adjustable Permanent Magnetic Lens Having Shunting Device

 #36
20230335368
2023-10-19

ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM

 #37
20230326704
2023-10-12

MINIATURE HYBRID ELECTRON BEAM COLUMN

 #38
20230238206
2023-07-27

Compact 2D Scanner Magnet with Double-Helix Coils

 #39
20230230796
2023-07-20

CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR ADJUSTING IMAGE CAPTURING CONDITIONS IN SAID CHARGED PARTICLE BEAM DEVICE

 #40
20230178333
2023-06-08

ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMPLE HOLDER

 #41
20230170180
2023-06-01

Methods and apparatuses for adjusting beam condition of charged particles

 #42
20230113759
2023-04-13

CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

 #43
20230091222
2023-03-23

Multi-electron beam inspection apparatus, multipole array control method, and multi-electron beam inspection method

 #44
20230056463
2023-02-23

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

 #45
20230015805
2023-01-19

Electromagnetic Lens

 #46
20230005709
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

 #47
20230005704
2023-01-05

Scanning electron microscope device and electron beam inspection apparatus

 #48
20220415611
2022-12-29

Multi-source charged particle illumination apparatus

 #49
20220415604
2022-12-29

PARTICLE BEAM SYSTEM HAVING A MULTI-POLE LENS SEQUENCE FOR INDEPENDENTLY FOCUSSING A MULTIPLICITY OF INDIVIDUAL PARTICLE BEAMS, AND ITS USE AND ASSOCIATED METHOD

 #50
20220367141
2022-11-17

Monochromator device and methods of use thereof

 #51
20220254597
2022-08-11

Charged particle beam device

 #52
20220216028
2022-07-07

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

 #53
20220199356
2022-06-23

CHARGED PARTICLE BEAM APPARATUS

 #54
20220108869
2022-04-07

Stage driving system and apparatus or device such as apparatus of charged-particle beam comprising the same

 #55
20220108865
2022-04-07

Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning

 #56
20220076914
2022-03-10

Magnetic immersion electron gun

 #57
20210398772
2021-12-23

TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM

 #58
20210366756
2021-11-25

System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

 #59
20210305011
2021-09-30

In situ angle measurement using channeling

 #60
20210305007
2021-09-30

DUAL BEAM BIFOCAL CHARGED PARTICLE MICROSCOPE

 #61
20210249218
2021-08-12

MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTICLE BEAM DEVICE

 #62
20210233737
2021-07-29

Electron Beam Apparatus

 #63
20210217577
2021-07-15

Multi-beam particle beam system and method for operating same

 #64
20210193437
2021-06-24

Multiple charged-particle beam apparatus with low crosstalk

 #65
20210193433
2021-06-24

Apparatus of plural charged-particle beams

 #66
20210151279
2021-05-20

Charged particle beam device and axis adjustment method thereof

 #67
20210104379
2021-04-08

Exposure device

 #68
20210027976
2021-01-28

Beam irradiation device

 #69
20200395189
2020-12-17

Aberration corrector and multiple electron beam irradiation apparatus

 #70
20200381212
2020-12-03

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS AND METHODS OF OPERATING THE SAME

 #71
20200381206
2020-12-03

Particle-optical apparatus and particle beam system

 #72
20200373117
2020-11-26

Multipole lens, aberration corrector using the same, and charged particle beam apparatus

 #73
20200335298
2020-10-22

Current source apparatus and method

 #74
20200312612
2020-10-01

Method of controlling transmission electron microscope and transmission electron microscope

 #75
20200286711
2020-09-10

Atom probe inspection device, field ion microscope, and distortion correction method

 #76
20200273657
2020-08-27

Interferometric electron microscope

 #77
20200266024
2020-08-20

Electron beam irradiation device and electron beam irradiation method

 #78
20200266020
2020-08-20

Electron gun and electron beam application device

 #79
20200243297
2020-07-30

Deflector and charged particle beam system

 #80
20200243296
2020-07-30

Objective lens arrangement usable in particle-optical systems

 #81
20200234912
2020-07-23

Methods and apparatuses for adjusting beam condition of charged particles

 #82
20200227235
2020-07-16

Charged particle beam lithography system

 #83
20200176215
2020-06-04

Systems and methods of cooling objective lens of a charged-particle beam system

 #84
20200168431
2020-05-28

Charged particle beam apparatus and control method of charged particle beam apparatus

 #85
20200168430
2020-05-28

ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND ELECTRON BEAM IMAGE ACQUISITION METHOD

 #86
20200152419
2020-05-14

Charged particle beam device and optical-axis adjusting method thereof

 #87
20200135428
2020-04-30

Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

 #88
20200051774
2020-02-13

Charged particle beam optical system, exposure apparatus, exposure method and device manufacturing method

 #89
20200043698
2020-02-06

Electron optical system and multi-beam image acquiring apparatus

 #90
20200035447
2020-01-30

Apparatus and method for inspecting a sample using a plurality of charged particle beams

 #91
20190362928
2019-11-28

Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system

 #92
20190360951
2019-11-28

Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection method

 #93
20190355547
2019-11-21

Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method

 #94
20190355546
2019-11-21

MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELECTRON BEAM IMAGE ACQUISITION METHOD

 #95
20190337085
2019-11-07

Electron beam column for three-dimensional printing device, three-dimensional printing device, and three-dimensional printing method

 #96
20190326087
2019-10-24

Charged particle beam device and scanning electron microscope

 #97
20190311879
2019-10-10

Focusing magnet and charged particle irradiation apparatus

 #98
20190311878
2019-10-10

Focusing magnet and charged particle irradiation apparatus

 #99
20190304737
2019-10-03

Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus

 #100
20190295816
2019-09-26

Interference optical system unit, charged particle beam interference apparatus, and method for observing charged particle beam interference image

 #101
20190295808
2019-09-26

Magnetic lens and exciting current control method

 #102
20190295806
2019-09-26

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

 #103
20190295805
2019-09-26

Electron beam device

 #104
20190287754
2019-09-19

Beam irradiation device

 #105
20190279837
2019-09-12

Electron microscope

 #106
20190206654
2019-07-04

Measuring device and measuring method

 #107
20190189388
2019-06-20

Composite beam apparatus

 #108
20190172677
2019-06-06

Apparatus of plural charged-particle beams

 #109
20190172676
2019-06-06

Charged particle beam apparatus and method for adjusting imaging conditions for the same

 #110
20190157035
2019-05-23

Ion implanter and method of controlling ion implanter

 #111
20190103247
2019-04-04

Charged particle beam device and scanning electron microscope

 #112
20190096632
2019-03-28

CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND METHOD FOR REDUCING ELECTRIFICATION OF SUBSTRATE

 #113
20190096628
2019-03-28

Objective lens system for fast scanning large FOV

 #114
20190074159
2019-03-07

Scanning electron microscope

 #115
20180374673
2018-12-27

Charged particle beam device and optical-axis adjusting method thereof

 #116
20180358199
2018-12-13

Charged particle beam device and scanning electron microscope

 #117
20180342366
2018-11-29

Charged particle beam writing method and charged particle beam writing apparatus

 #118
20180286625
2018-10-04

Particle-optical apparatus and particle beam system

 #119
20180190469
2018-07-05

Aberration correction method, aberration correction system, and charged particle beam apparatus

 #120
20180130633
2018-05-10

Objective lens and transmission electron microscope

 #121
20180076001
2018-03-15

Composite beam apparatus

 #122
20180040452
2018-02-08

Inspection device

 #123
20180033588
2018-02-01

Charged particle beam device and scanning electron microscope

 #124
20170338078
2017-11-23

Scanning electron microscope and method of use thereof

 #125
20170309447
2017-10-26

Systems and methods for measuring magnetic fields produced within microscopes

 #126
20170309440
2017-10-26

Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method

 #127
20170294287
2017-10-12

Objective lens arrangement usable in particle-optical systems

 #128
20170236683
2017-08-17

Particle beam apparatus and method for operating a particle beam apparatus

 #129
20170236682
2017-08-17

System and method for high power pulse generator

 #130
20170236681
2017-08-17

Method of aberration correction and charged particle beam system

 #131
20170213689
2017-07-27

Charged particle beam lens apparatus, charged particle beam column, and charged particle beam exposure apparatus

 #132
20170178862
2017-06-22

Multiple charged particle beam apparatus

 #133
20170154756
2017-06-01

Apparatus of plural charged-particle beams

 #134
20170154751
2017-06-01

System and method for irradiating a product

 #135
20170133198
2017-05-11

Apparatus and method for inspecting a sample using a plurality of charged particle beams

 #136
20170125208
2017-05-04

Pattern inspection apparatus and pattern inspection method

 #137
20170069415
2017-03-09

Superconducting magnetic field stabilizer

 #138
20170062196
2017-03-02

Charged particle image measuring device and imaging mass spectrometry apparatus

 #139
20170040139
2017-02-09

Electron beam device

 #140
20170018395
2017-01-19

Nano-patterned system and magnetic-field applying device thereof

 #141
20160379797
2016-12-29

Charged Particle Beam Apparatus

 #142
20160268098
2016-09-15

SCANNING ELECTRON MICROSCOPE CAPABLE OF CONTROLLING BEAM SPOT AND MEASUREMENT METHOD USING THE SAME

 #143
20160247658
2016-08-25

Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip

 #144
20160233049
2016-08-11

Charged particle beam device

 #145
20160225576
2016-08-04

Multipole lens and charged particle beam system

 #146
20160217968
2016-07-28

Objective lens system for fast scanning large FOV

 #147
20160217967
2016-07-28

Charged particle beam device

 #148
20160189913
2016-06-30

Combined multipole magnet and dipole scanning magnet

 #149
20160064180
2016-03-03

Apparatus of plural charged particle beams with multi-axis magnetic lenses

 #150
20160056011
2016-02-25

Aberration correction apparatus, device having the same, and method for correcting aberration of charged particles

 #151
20160042911
2016-02-11

Desktop electron microscope and combined round-multipole magnetic lens thereof

 #152
20160042910
2016-02-11

Desktop electron microscope and wide range tunable magnetic lens thereof

 #153
20160020063
2016-01-21

Charged particle beam writing apparatus and charged particle beam writing method

 #154
20150364290
2015-12-17

Charged particle beam application device

 #155
20150332889
2015-11-19

Multipole lens, aberration corrector, and electron microscope

 #156
20150311037
2015-10-29

Ion implanter and ion implantation method

 #157
20150311029
2015-10-29

Transmission electron microscope

 #158
20150294833
2015-10-15

Charged particle beam apparatus

 #159
20150287566
2015-10-08

Multipole lens, method of fabricating same, and charged particle beam system

 #160
20150283405
2015-10-08

Rotatable targeting magnet apparatus and method of use thereof in conjunction with a charged particle cancer therapy system

 #161
20150279610
2015-10-01

Notched magnetic lens for improved sample access in an SEM

 #162
20150279609
2015-10-01

Method for removing foreign substances in charged particle beam device, and charged particle beam device

 #163
20150273240
2015-10-01

Fast magnet method and apparatus used in conjunction with a charged particle cancer therapy system

 #164
20150258350
2015-09-17

Cancer surface searing apparatus and method of use thereof

 #165
20150228443
2015-08-13

Charged particle beam apparatus

 #166
20150144787
2015-05-28

Electron microscope

 #167
20150129772
2015-05-14

SURFACE MICRO-MACHINED MULTI-POLE ELECTROMAGNETS

 #168
20150083926
2015-03-26

Notched magnetic lens for improved sample access in an SEM

 #169
20150076362
2015-03-19

Charged particle beam apparatus

 #170
20150060662
2015-03-05

Apparatus of plural charged particle beams with multi-axis magnetic lens

 #171
20150021476
2015-01-22

Magnetic lens for focusing a beam of charged particles

 #172
20140319346
2014-10-30

Inspection system by charged particle beam and method of manufacturing devices using the system

 #173
20140166893
2014-06-19

Electromagnetic lens for electron beam exposure apparatus

 #174
20140034831
2014-02-06

Inspection system by charged particle beam and method of manufacturing devices using the system

 #175
20130327951
2013-12-12

High brightness electron gun with moving condenser lens

 #176
20130306863
2013-11-21

ELEMENT FOR FAST MAGNETIC BEAM DEFLECTION

 #177
20130264477
2013-10-10

Particle-beam column corrected for both chromatic and spherical aberration

 #178
20130153782
2013-06-20

Multi-axis magnetic lens for focusing a plurality of charged particle beams

 #179
20130001418
2013-01-03

Multiple-column electron beam apparatus and methods

 #180
20120321049
2012-12-20

System and method for X-ray source weight reduction

 #181
20120298861
2012-11-29

Vector Potential Photoelectron Microscope

 #182
20120211654
2012-08-23

Scanning electron microscope

 #183
20120205550
2012-08-16

Objective lens

 #184
20120187290
2012-07-26

Apparatus for adjusting ion beam by bended bar magnets

 #185
20120145917
2012-06-14

Apparatus of plural charged particle beams with multi-axis magnetic lens

 #186
20120145900
2012-06-14

Apparatus of plural charged particle beams with multi-axis magnetic lens

 #187
20120062094
2012-03-15

Electron gun

 #188
20120049064
2012-03-01

Charged particle apparatus

 #189
20120037813
2012-02-16

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #190
20120032079
2012-02-09

Inspection system by charged particle beam and method of manufacturing devices using the system

 #191
20110309263
2011-12-22

Dual beam system

 #192
20110139996
2011-06-16

Multi-axis magnetic lens

 #193
20110018470
2011-01-27

Electron gun with magnetic immersion double condenser lenses

 #194
20110012018
2011-01-20

Magnetic lens, method for focusing charged particles and charged particle energy analyzer

 #195
20100090579
2010-04-15

Device for the field emission of particles and production method

 #196
20100038538
2010-02-18

Objective lens

 #197
20100025578
2010-02-04

Dual beam system

 #198
20090294664
2009-12-03

Electron beam apparatus

 #199
20090261266
2009-10-22

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #200
20090206258
2009-08-20

Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method

 #201
20090159810
2009-06-25

Particle-Optical Component

 #202
20090039280
2009-02-12

Magnetic lens assembly

 #203
20090032708
2009-02-05

Inspection system by charged particle beam and method of manufacturing devices using the system

 #204
20080315090
2008-12-25

Objective lens, electron beam system and method of inspecting defect

 #205
20080224062
2008-09-18

Lens coil cooling of a magnetic lens

 #206
20080169426
2008-07-17

Technique for reducing magnetic fields at an implant location

 #207
20080149833
2008-06-26

Electron microscope and combined illumination lens

 #208
20080135755
2008-06-12

Scanning electron microscope

 #209
20080116391
2008-05-22

Charged particle beam orbit corrector and charged particle beam apparatus

 #210
20080035860
2008-02-14

Dual beam system

 #211
20070235644
2007-10-11

Inspection system by charged particle beam and method of manufacturing devices using the system

 #212
20070187619
2007-08-16

Electromagnet with active field containment

 #213
20070181832
2007-08-09

Controlling the characteristics of implanter ion-beams

 #214
20070085019
2007-04-19

Cooling module for charged particle beam column elements

 #215
20070023697
2007-02-01

Controlling the characteristics of implanter ion-beams

 #216
20060169924
2006-08-03

Controlling the characteristics of implanter ion-beams

 #217
20060163488
2006-07-27

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

 #218
20060060790
2006-03-23

System and method for evaluation using electron beam and manufacture of devices

 #219
20060043311
2006-03-02

Thermal compensation in magnetic field influencing of an electron beam

 #220
20050263715
2005-12-01

Objective lens, electron beam system and method of inspecting defect

 #221
20050242294
2005-11-03

Controlling the characteristics of implanter ion-beams

 #222
20050035291
2005-02-17

Dual beam system

 #223
20050029466
2005-02-10

Multipole lens, charged-particle beam instrument fitted with multipole lenses, and method of fabricating multipole lens

 #224
20050017202
2005-01-27

Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams

 #225
20050012049
2005-01-20

Magnetic lens

 #226
16522415
2020-11-03

Corrector transfer optics for Lorentz EM