205212 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Lenses magnetic; Electromagnetic lenses Means for interchanging parts of the lens, e.g. pole pieces, within the tube
CHARGED PARTICLE LENS
#2LENS FOR A CHARGED PARTICLE BEAM APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF FOCUSING A CHARGED PARTICLE BEAM
#3MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEAM INSPECTION APPARATUS, AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD
#4MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD
#5Multipole unit and charged particle beam device
#6COMPOSITE SOLENOID MAGNETIC LENS
#7Multistage-connected multipole, multistage multipole unit, and charged particle beam device
#8Charged particle beam device
#9Charged particle beam apparatus
#10Scanning transmission electron microscope with an objective electromagnetic lens and a method of use thereof
#11Desktop electron microscope and combined round-multipole magnetic lens thereof
#12Desktop electron microscope and wide range tunable magnetic lens thereof
#13Scanning electron microscope
#14Configurable charged-particle apparatus
#15Electric-magnetic field-generating element and assembling method for same