205220 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Arrangements for directing or deflecting the discharge along a desired path; Deflecting along given lines; Scanning means magnetic
EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER
#2LENS WITH A SCANNING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF SCANNING A CHARGED PARTICLE BEAM
#3METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
#4METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
#5CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF
#6PARTICLE-OPTICAL ARRANGEMENT, IN PARTICULAR MULTI-BEAM PARTICLE MICROSCOPE, WITH A MAGNET ARRANGEMENT FOR SEPARATING A PRIMARY AND A SECONDARY PARTICLE-OPTICAL BEAM PATH
#7PARTICLE BEAM TREATMENT APPARATUS, DEFLECTION MAGNET APPARATUS, AND PARTICLE BEAM ADJUSTMENT METHOD
#8Method and System for Imaging a Sample
#9METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD
#10Optics for In-Situ Scanning Electron Microscope Repair
#11Electron gun and system and method using electron gun
#12BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION
#13COMPACT 2D SCANNER MAGNET WITH TRAPEZOIDAL COILS
#14MAGNETIC MULTIPOLE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF INFLUENCING A CHARGED PARTICLE BEAM PROPAGATING ALONG AN OPTICAL AXIS
#15Dual source injector with switchable analyzing magnet
#16CHARGED PARTICLE BEAM APPARATUS
#17Charged Particle Beam System and Control Method Therefor
#18ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM
#19EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER
#20Dual source injector with switchable analyzing magnet
#21METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUCT, AND MATERIAL PROCESSING DEVICE FOR CARRYING OUT THE METHOD
#22ION IMPLANTER AND ION IMPLANTATION METHOD
#23A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSESSMENT TOOL
#24Compact 2D Scanner Magnet with Double-Helix Coils
#25CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE
#26METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE
#27CATHODOLUMINESCENCE ELECTRON MICROSCOPE
#28Supported X-ray horn for controlling e-beams
#29Beam deflection device, aberration corrector, monochromator, and charged particle beam device
#30Wien filter and charged particle beam imaging apparatus
#31Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning
#32Charged particle beam device
#33Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system
#34WIDE FIELD-OF-VIEW CHARGED PARTICLE FILTER
#35Examining, analyzing and/or processing an object using an object receiving container
#36Electron Beam Apparatus
#37Multi-beam particle beam system and method for operating same
#38Imaging apparatus and related control unit
#39Wien filter and charged particle beam imaging apparatus
#40Charged particle beam application apparatus
#41Ion implantation method and ion implanter for performing the same
#42Charged particle scanners
#43Plasma processing apparatus and plasma processing method
#44Low voltage scanning electron microscope and method for specimen observation
#45Scanning electron microscope with objective lens below sample stage
#46Scan and corrector magnet designs for high throughput scanned beam ion implanter
#47Charged particle beam device, and observation method and elemental analysis method using the same
#48Charged particle beam device and electrostatic lens
#49Charged particle beam device and optical-axis adjusting method thereof
#50Control method for multi-phase winding deflection scanning device
#51Scanning magnet design with enhanced efficiency
#52Charged particle beam device
#53Deflection scanning device with multi-phase winding and deflection scanning system
#54Charged particle beam control device
#55Reflection-mode electron-beam inspection using ptychographic imaging
#56Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system
#57Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam
#58Focusing magnet and charged particle irradiation apparatus
#59Focusing magnet and charged particle irradiation apparatus
#60Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#61Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method
#62COMPACT DEFLECTING MAGNET
#63Signal separator for a multi-beam charged particle inspection apparatus
#64Charged particle beam steering arrangement
#65Deflection sensitivity calculation method and deflection sensitivity calculation system
#66Compact deflecting magnet
#67Charged particle beam device
#68Scanning electron microscope
#69Charged particle beam device and optical-axis adjusting method thereof
#70Scanning transmission electron microscope and method of image generation
#71Compact deflecting magnet
#72Patterned substrate imaging using multiple electron beams
#73Left-right canted-cosine-theta magnets
#74Scanning electron microscope and method of use thereof
#75Charged particle beam irradiation apparatus
#76Techniques and apparatus for manipulating an ion beam
#77Analyzing energy of charged particles
#78Ion beam scanner for an ion implanter
#79Particle beam irradiation system
#80Magnetic field fluctuation for beam smoothing
#81SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION
#82Combined multipole magnet and dipole scanning magnet
#83Apparatus of plural charged particle beams with multi-axis magnetic lenses
#84Annular cooling fluid passage for magnets
#85Charged-particle beam device
#86MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS
#87Apparatus to control an ion beam
#88Dual stage scanner for ion beam control
#89Method for transmitting a broadband ion beam and ion implanter
#90Charged particle optical device
#91Apparatus of plural charged particle beams with multi-axis magnetic lens
#92Annular cooling fluid passage for magnets
#93Magnetic field fluctuation for beam smoothing
#94Ion beam bending magnet for a ribbon-shaped ion beam
#95Ion implant apparatus and a method of implanting ions
#96System for magnetic shielding
#97Integrable magnetic field compensation for use in scanning and transmission electron microscopes
#98System and method for X-ray source weight reduction
#99Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device
#100Magnetic scanning system with improved efficiency
#101Apparatus and method for ion beam implantation using scanning and spot beams
#102Particle optical device with magnet assembly
#103Collimator magnet for ion implantation system
#104Methods and systems for treating cancer using external beam radiation
#105TECHNIQUES FOR SHAPING AN ION BEAM
#106Ion implantation apparatus
#107Delivery of a Charged Particle Beam
#108Electric charged particle beam microscopy and electric charged particle beam microscope
#109System for magnetic scanning and correction of an ion beam
#110Irradiating device and method for controlling the same
#111Analyzing electromagnet
#112Ion implanter having a superconducting magnet
#113Deflecting electromagnet and ion beam irradiating apparatus
#114Electron confinement inside magnet of ion implanter
#115Thermal compensation in magnetic field influencing of an electron beam
#116Magnet for scanning ion beams
#117Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors
#118Charged particle deflecting system
#119Scan and corrector magnet designs for high throughput scanned beam ion implanter
#120Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device