ClassID:

205220

H01J37/1475 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Details; Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement; Arrangements for directing or deflecting the discharge along a desired path; Deflecting along given lines; Scanning means magnetic

Recent Application in this class:
#1
20260074141
2026-03-12

EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER

#2
20260018369
2026-01-15

LENS WITH A SCANNING SYSTEM, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF SCANNING A CHARGED PARTICLE BEAM

#3
20250308836
2025-10-02

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

#4
20250308835
2025-10-02

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

#5
20250246397
2025-07-31

CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF

#6
20250210300
2025-06-26

PARTICLE-OPTICAL ARRANGEMENT, IN PARTICULAR MULTI-BEAM PARTICLE MICROSCOPE, WITH A MAGNET ARRANGEMENT FOR SEPARATING A PRIMARY AND A SECONDARY PARTICLE-OPTICAL BEAM PATH

#7
20250210299
2025-06-26

PARTICLE BEAM TREATMENT APPARATUS, DEFLECTION MAGNET APPARATUS, AND PARTICLE BEAM ADJUSTMENT METHOD

#8
20250166963
2025-05-22

Method and System for Imaging a Sample

#9
20250157782
2025-05-15

METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD

#10
20250087450
2025-03-13

Optics for In-Situ Scanning Electron Microscope Repair

#11
20250054720
2025-02-13

Electron gun and system and method using electron gun

#12
20250037961
2025-01-30

BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION

#13
20240395495
2024-11-28

COMPACT 2D SCANNER MAGNET WITH TRAPEZOIDAL COILS

#14
20240087837
2024-03-14

MAGNETIC MULTIPOLE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF INFLUENCING A CHARGED PARTICLE BEAM PROPAGATING ALONG AN OPTICAL AXIS

#15
20240029998
2024-01-25

Dual source injector with switchable analyzing magnet

#16
20240014002
2024-01-11

CHARGED PARTICLE BEAM APPARATUS

#17
20230343550
2023-10-26

Charged Particle Beam System and Control Method Therefor

#18
20230335368
2023-10-19

ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM

#19
20230326707
2023-10-12

EXAMINING, ANALYZING AND/OR PROCESSING AN OBJECT USING AN OBJECT RECEIVING CONTAINER

#20
20230307210
2023-09-28

Dual source injector with switchable analyzing magnet

#21
20230260744
2023-08-17

METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUCT, AND MATERIAL PROCESSING DEVICE FOR CARRYING OUT THE METHOD

#22
20230260741
2023-08-17

ION IMPLANTER AND ION IMPLANTATION METHOD

#23
20230238211
2023-07-27

A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSESSMENT TOOL

#24
20230238206
2023-07-27

Compact 2D Scanner Magnet with Double-Helix Coils

#25
20230113759
2023-04-13

CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

#26
20220392735
2022-12-08

METHOD FOR INSPECTING A SPECIMEN AND CHARGED PARTICLE BEAM DEVICE

#27
20220216028
2022-07-07

CATHODOLUMINESCENCE ELECTRON MICROSCOPE

#28
20220175981
2022-06-09

Supported X-ray horn for controlling e-beams

#29
20220172920
2022-06-02

Beam deflection device, aberration corrector, monochromator, and charged particle beam device

#30
20220157556
2022-05-19

Wien filter and charged particle beam imaging apparatus

#31
20220108865
2022-04-07

Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning

#32
20220102105
2022-03-31

Charged particle beam device

#33
20220102104
2022-03-31

Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system

#34
20210310348
2021-10-07

WIDE FIELD-OF-VIEW CHARGED PARTICLE FILTER

#35
20210241992
2021-08-05

Examining, analyzing and/or processing an object using an object receiving container

#36
20210233737
2021-07-29

Electron Beam Apparatus

#37
20210217577
2021-07-15

Multi-beam particle beam system and method for operating same

#38
20210110990
2021-04-15

Imaging apparatus and related control unit

#39
20210066022
2021-03-04

Wien filter and charged particle beam imaging apparatus

#40
20210005417
2021-01-07

Charged particle beam application apparatus

#41
20200388465
2020-12-10

Ion implantation method and ion implanter for performing the same

#42
20200335299
2020-10-22

Charged particle scanners

#43
20200273672
2020-08-27

Plasma processing apparatus and plasma processing method

#44
20200234914
2020-07-23

Low voltage scanning electron microscope and method for specimen observation

#45
20200227231
2020-07-16

Scanning electron microscope with objective lens below sample stage

#46
20200194221
2020-06-18

Scan and corrector magnet designs for high throughput scanned beam ion implanter

#47
20200185190
2020-06-11

Charged particle beam device, and observation method and elemental analysis method using the same

#48
20200185186
2020-06-11

Charged particle beam device and electrostatic lens

#49
20200152419
2020-05-14

Charged particle beam device and optical-axis adjusting method thereof

#50
20200152413
2020-05-14

Control method for multi-phase winding deflection scanning device

#51
20200066478
2020-02-27

Scanning magnet design with enhanced efficiency

#52
20200043695
2020-02-06

Charged particle beam device

#53
20200020503
2020-01-16

Deflection scanning device with multi-phase winding and deflection scanning system

#54
20190378686
2019-12-12

Charged particle beam control device

#55
20190362935
2019-11-28

Reflection-mode electron-beam inspection using ptychographic imaging

#56
20190362928
2019-11-28

Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical system

#57
20190318909
2019-10-17

Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam

#58
20190311879
2019-10-10

Focusing magnet and charged particle irradiation apparatus

#59
20190311878
2019-10-10

Focusing magnet and charged particle irradiation apparatus

#60
20190295807
2019-09-26

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

#61
20190295806
2019-09-26

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

#62
20190259565
2019-08-22

COMPACT DEFLECTING MAGNET

#63
20190259564
2019-08-22

Signal separator for a multi-beam charged particle inspection apparatus

#64
20190252152
2019-08-15

Charged particle beam steering arrangement

#65
20190237293
2019-08-01

Deflection sensitivity calculation method and deflection sensitivity calculation system

#66
20190198286
2019-06-27

Compact deflecting magnet

#67
20190131104
2019-05-02

Charged particle beam device

#68
20190074159
2019-03-07

Scanning electron microscope

#69
20180374673
2018-12-27

Charged particle beam device and optical-axis adjusting method thereof

#70
20180337019
2018-11-22

Scanning transmission electron microscope and method of image generation

#71
20180315578
2018-11-01

Compact deflecting magnet

#72
20180254167
2018-09-06

Patterned substrate imaging using multiple electron beams

#73
20170372867
2017-12-28

Left-right canted-cosine-theta magnets

#74
20170338078
2017-11-23

Scanning electron microscope and method of use thereof

#75
20170229281
2017-08-10

Charged particle beam irradiation apparatus

#76
20170076908
2017-03-16

Techniques and apparatus for manipulating an ion beam

#77
20160365221
2016-12-15

Analyzing energy of charged particles

#78
20160351372
2016-12-01

Ion beam scanner for an ion implanter

#79
20160332002
2016-11-17

Particle beam irradiation system

#80
20160225577
2016-08-04

Magnetic field fluctuation for beam smoothing

#81
20160189917
2016-06-30

SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION

#82
20160189913
2016-06-30

Combined multipole magnet and dipole scanning magnet

#83
20160064180
2016-03-03

Apparatus of plural charged particle beams with multi-axis magnetic lenses

#84
20160027610
2016-01-28

Annular cooling fluid passage for magnets

#85
20150348747
2015-12-03

Charged-particle beam device

#86
20150262863
2015-09-17

MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS

#87
20150108362
2015-04-23

Apparatus to control an ion beam

#88
20150108361
2015-04-23

Dual stage scanner for ion beam control

#89
20150069261
2015-03-12

Method for transmitting a broadband ion beam and ion implanter

#90
20150069259
2015-03-12

Charged particle optical device

#91
20150060662
2015-03-05

Apparatus of plural charged particle beams with multi-axis magnetic lens

#92
20140367583
2014-12-18

Annular cooling fluid passage for magnets

#93
20140212595
2014-07-31

Magnetic field fluctuation for beam smoothing

#94
20130256552
2013-10-03

Ion beam bending magnet for a ribbon-shaped ion beam

#95
20130119263
2013-05-16

Ion implant apparatus and a method of implanting ions

#96
20130043414
2013-02-21

System for magnetic shielding

#97
20130009056
2013-01-10

Integrable magnetic field compensation for use in scanning and transmission electron microscopes

#98
20120321049
2012-12-20

System and method for X-ray source weight reduction

#99
20120298041
2012-11-29

Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device

#100
20110266456
2011-11-03

Magnetic scanning system with improved efficiency

#101
20100237231
2010-09-23

Apparatus and method for ion beam implantation using scanning and spot beams

#102
20100155597
2010-06-24

Particle optical device with magnet assembly

#103
20100140494
2010-06-10

Collimator magnet for ion implantation system

#104
20100102244
2010-04-29

Methods and systems for treating cancer using external beam radiation

#105
20090121149
2009-05-14

TECHNIQUES FOR SHAPING AN ION BEAM

#106
20080121822
2008-05-29

Ion implantation apparatus

#107
20080116390
2008-05-22

Delivery of a Charged Particle Beam

#108
20080093551
2008-04-24

Electric charged particle beam microscopy and electric charged particle beam microscope

#109
20080067436
2008-03-20

System for magnetic scanning and correction of an ion beam

#110
20080067406
2008-03-20

Irradiating device and method for controlling the same

#111
20080067398
2008-03-20

Analyzing electromagnet

#112
20070176123
2007-08-02

Ion implanter having a superconducting magnet

#113
20070075259
2007-04-05

Deflecting electromagnet and ion beam irradiating apparatus

#114
20060169911
2006-08-03

Electron confinement inside magnet of ion implanter

#115
20060043311
2006-03-02

Thermal compensation in magnetic field influencing of an electron beam

#116
20060017010
2006-01-26

Magnet for scanning ion beams

#117
20050040137
2005-02-24

Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors

#118
20050035292
2005-02-17

Charged particle deflecting system

#119
16218884
2020-02-04

Scan and corrector magnet designs for high throughput scanned beam ion implanter

#120
15047007
2017-05-30

Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device