205281 ⎘
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources Glow discharge
Sub-classes:RADICAL-ACTIVATED ETCHING OF METAL OXIDES
#2PLASMA PROCESSING APPARATUS
#3DEVICE AND METHOD FOR PLASMA GENERATION IN A WIDE PRESSURE RANGE AND SYSTEM AND METHOD FOR OPTICAL GAS ANALYSIS/DETECTION BY MEANS OF SUCH A DEVICE
#4Glow Discharge Cell and Related Glow Discharge Assembly
#5Method and Apparatus for Plasma Processing
#6Plasma processing methods using multiphase multifrequency bias pulses
#7VISUALIZATION DEVICE AND RELATED SYSTEMS AND METHODS
#8Symmetric VHF source for a plasma reactor
#9Solution glow discharge plasma chamber with ventilation
#10RADICAL-ACTIVATED ETCHING OF METAL OXIDES
#11Ultra-large area scanning reactive ion etching machine and etching method thereof
#12PLASMA PROCESSING APPARATUS
#13Nitriding apparatus and nitriding method
#14Symmetric VHF source for a plasma reactor
#15Glow plasma gas measurement signal processing
#16System and method for plasma head helium measurement
#17Method and device for the reduction of contaminants in a plasma reactor, especially contamination by lubricants
#18Multi-electrode/multi-modal atmospheric pressure glow discharge plasma ionization device
#19PLASMA PROCESSING APPARATUS AND METHOD
#20Current switch device including first and second electrodes and first and second grids
#21GLOW PLASMA STABILIZATION
#22Apparatus and method for large-scale high throughput quantitative characterization and three-dimensional reconstruction of material structure
#23Visualization device and related systems and methods
#24Plasma processing apparatus and method
#25Method and apparatus for the thermal treatment of a substrate
#26Device and Method for Producing a Corrosion-Protected Steel Product
#27Method for nitriding grain-oriented electrical steel sheet
#28Integrated Thermal Management for Surface Treatment with Atmospheric Plasma
#29Epitaxial Growth Using Atmospheric Plasma Preparation Steps
#30Plasma treatment device and structure of reaction vessel for plasma treatment
#31Device and method for vacuum coating
#32Hydrophilic Coating Methods for Chemically Inert Substrates
#33Treating Particles
#34Display device and method of manufacturing display device
#35Symmetric VHF source for a plasma reactor
#36APPARATUS AND METHOD FOR SPUTTERING HARD COATINGS
#37Ion beam materials processing system with grid short clearing system for gridded ion beam source
#38High temperature electrolysis glow discharge device
#39METHOD OF STRENGTHENING GLASS USING PLASMA TORCHES AND/OR ARC JETS, AND ARTICLES MADE ACCORDING TO THE SAME
#40Visualization device and related systems and methods
#41Epitaxial growth using atmospheric plasma preparation steps
#42Glow discharge spectroscopy method and system for measuring in situ the etch depth of a sample
#43Apparatus and methods for generating reactive gas with glow discharges
#44Plasma processing apparatus and method
#45High temperature electrolysis glow discharge method
#46Apparatus and a method for plating an Nd—Fe—B magnet
#47Method of manufacturing an upper electrode of a plasma processing device
#48Water/wastewater recycle and reuse with plasma, activated carbon and energy system
#49Glow discharge mass spectrometry method and device
#50Gas cooled plasma spraying device
#51Method and device for manufacturing a barrier layer on a flexible substrate
#52System and methods for plasma application
#53Carbon film forming apparatus, carbon film forming method, and magnetic recording medium manufacturing method
#54Apparatus for generating reactive gas with glow discharges and methods of use
#55Treating particles
#56Deposition device and deposition method
#57Symmetric VHF source for a plasma reactor
#58Dual discharge modes operation for remote plasma
#59Substrate processing apparatus
#60Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities
#61High temperature electrolysis glow discharge device
#62Water/wastewater recycle and reuse with plasma, activated carbon and energy system
#63METHODS OF MODULATING TACKINESS
#64PLASMA PROCESSING DEVICE
#65Method and device for manufacturing a barrier layer on a flexible substrate
#66PLASMA GENERATOR AND CLEANING AND PURIFYING APPARATUS INCLUDING THE SAME
#67Plasma processing apparatus and method
#68PLASMA GENERATOR, AND CLEANING AND PURIFYING APPARATUS AND SMALL-SIZED ELECTRICAL APPLIANCE USING PLASMA GENERATOR
#69Microplasma ion source for focused ion beam applications
#70Arc extinction arrangement and method for extinguishing arcs
#71Ion bombardment apparatus and method for cleaning of surface of base material using the same
#72Method for manufacturing electrophotographic photosensitive member
#73Ion bombardment treatment apparatus and method for cleaning of surface of base material using the same
#74Method of strengthening glass using plasma torches and/or arc jets, and articles made according to the same
#75Plasma booster for plasma treatment installation
#76Surface-treatment method for a fluororesin molded body, and fluororesin molded body
#77E-beam enhanced decoupled source for semiconductor processing
#78Manufacturing method of crystalline semiconductor film and manufacturing method of semiconductor device
#79Symmetric VHF source for a plasma reactor
#80Heat treatment apparatus
#81Plasma processing apparatus and method
#82Preparation of mist, process and apparatus for forming new materials by mist gas discharge
#83Apparatus and method for sputtering hard coatings
#84System and methods for plasma application
#85Etching apparatus and etching method for substrate bevel
#86PLASMA TREATMENT APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE WITH ATMOSPHERIC PRESSURE GLOW DISCHARGE ELECTRODE CONFIGURATION
#87Plasma Reactor, and Method for the Production of Monocrystalline Diamond Layers
#88Plasma booster for plasma treatment installation
#89Continuous film forming apparatus
#90Substrate processing apparatus
#91SHORT PULSE ATMOSPHERIC PRESSURE GLOW DISCHARGE METHOD AND APPARATUS
#92Thin film transistor
#93Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film
#94Apparatus for depositing silicon-based thin film and method for depositing silicon-based thin film
#95Method for forming amorphous carbon film
#96HYBRID PHOTOVOLTAICALLY ACTIVE LAYER AND METHOD FOR FORMING SUCH A LAYER
#97AC-excited microcavity discharge device and method
#98Plasma CVD apparatus and film deposition method
#99TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMPLANTATION
#100Etching apparatus and etching method for substrate bevel
#101Electromagnetic treatment in atmospheric-plasma coating process
#102Plasma booster for plasma treatment installation
#103Atmospheric glow discharge with concurrent coating deposition
#104Glow discharge drilling apparatus and glow discharge drilling method
#105GAS DECOMPOSITION APPARATUS AND GAS TREATMENT CARTRIDGE
#106Method and arrangement for controlling a glow discharge plasma under atmospheric conditions
#107Plasma processing apparatus and method
#108Plasma enhanced chemical vapor deposition system for forming carbon nanotubes
#109Method and apparatus for stabilizing of the glow plasma discharges
#110Atmospheric glow discharge with concurrent coating deposition
#111Radical-activated etching of metal oxides
#112Microplasma ion source for focused ion beam applications