Patents-Review.com
ClassID:

205314 ⎘

H01J37/32321 - CPC Classification

Classification description:

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof; Gas-filled discharge tubes; Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources Discharge generated by other radiation

Sub-classes:
Recent Application in this class:
#1
20230280293
2023-09-07

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECTION APPARATUS

 #2
20200124546
2020-04-23

System and method for aligning electron beams in multi-beam inspection apparatus

 #3
20190382913
2019-12-19

METHOD AND APPARATUS FOR REMOVING PAINT ON METALLIC COMPONENTS

 #4
20190172686
2019-06-06

Methods for forming a metal silicide interconnection nanowire structure

 #5
20180122622
2018-05-03

ENHANCING GAS-PHASE REACTION IN A PLASMA USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES

 #6
20170368814
2017-12-28

Bonding device and method for producing plate-shaped bonded assembly

 #7
20160351377
2016-12-01

ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR

 #8
20160254123
2016-09-01

Shielded lid heater assembly

 #9
20160240376
2016-08-18

Method of fabricating two-dimensional layered chalcogenide film

 #10
20160118260
2016-04-28

Methods for forming a metal silicide interconnection nanowire structure

 #11
20150162169
2015-06-11

ETCHING APPARATUS AND METHOD

 #12
20150138545
2015-05-21

Handheld LIBS analyzer end plate purging structure

 #13
20150135808
2015-05-21

DROPLET CUTTING METHOD AND DROPLET CROSS-SECTION ANALYSIS METHOD

 #14
20130189848
2013-07-25

Shielded lid heater assembly

 #15
20120247644
2012-10-04

Bonding device and method for producing plate-shaped bonded assembly

 #16
20110254448
2011-10-20

Method and system for increasing the lifespan of a plasma

 #17
20110048251
2011-03-03

ENHANCING GAS-PHASE REACTION IN A PLASMA USING HIGH INTENSITY AND HIGH POWER ULTRASONIC ACOUSTIC WAVES

 #18
20100304146
2010-12-02

Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves

 #19
20100252198
2010-10-07

PLASMA PROCESSING APPARATUS AND METHOD

 #20
20100098885
2010-04-22

PLASMA SILANIZATION SUPPORT METHOD AND SYSTEM

 #21
20090236315
2009-09-24

Shielded lid heater assembly

 #22
20080113107
2008-05-15

SYSTEM AND METHOD FOR CONTAINMENT SHIELDING DURING PECVD DEPOSITION PROCESSES

 #23
20070235660
2007-10-11

Tunable uniformity in a plasma processing system

 #24
20070235427
2007-10-11

Apparatus and method for treating a workpiece with ionizing gas plasma

 #25
20070228009
2007-10-04

Plasma processing apparatus and method

 #26
20070190802
2007-08-16

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATER, AND SUBSTRATE TREATMENT SYSTEM

 #27
20060193996
2006-08-31

METHOD FOR PECVD DEPOSITION OF SELECTED MATERIAL FILMS

 #28
20050034666
2005-02-17

Plasma generation using multi-step ionization

 #29
20050006220
2005-01-13

Methods and apparatus for generating high-density plasma

 #30
15490429
2019-09-03

Method and apparatus for removing paint on metallic components