Patents-Review.com
ClassID:

206993 ⎘

H01L21/02043 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof; Cleaning Cleaning before device manufacture, i.e. Begin-Of-Line process

Sub-classes:
Recent Application in this class:
#1
20250226245
2025-07-10

SUBSTRATE PROCESSING SYSTEM

 #2
20250174453
2025-05-29

A METHOD OF CLEANING A SEMICONDUCTOR SUBSTRATE FOR A SOLAR CELL, AND A CORRESPONDING CLEANING SYSTEM

 #3
20250125141
2025-04-17

EPITAXIAL WAFER AND A METHOD FOR MANUFACTURING AN EPITAXIAL WAFER

 #4
20250100161
2025-03-27

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

 #5
20250062153
2025-02-20

SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION

 #6
20240371625
2024-11-07

STACKED WAFER STRUCTURE AND METHOD FOR FORMING THE SAME

 #7
20240266163
2024-08-08

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

 #8
20240213050
2024-06-27

WAFER SEPARATION APPARATUS AND METHOD, AND METHOD FOR MANUFACTURING SILICON WAFER

 #9
20240183028
2024-06-06

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

 #10
20240087913
2024-03-14

Shutter disk

 #11
20230386887
2023-11-30

System and method for ring frame cleaning and inspection

 #12
20230352295
2023-11-02

Post-CMP cleaning and apparatus

 #13
20230317508
2023-10-05

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH PRE-CLEANING TREATMENT

 #14
20230191619
2023-06-22

System with substrate carrier deterioration detection and repair

 #15
20230178360
2023-06-08

Device Having Cleaning Bodies

 #16
20230059594
2023-02-23

ENHANCED PROCESS FOR QUBIT FABRICATION

 #17
20230045597
2023-02-09

METHODS AND APPARATUS FOR MINIMIZING VOIDS FOR CHIP ON WAFER COMPONENTS

 #18
20220376132
2022-11-24

METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT

 #19
20220344150
2022-10-27

Stacked wafer structure and method for forming the same

 #20
20220336207
2022-10-20

Methods for aluminum oxide surface recovery

 #21
20220328308
2022-10-13

Treatments to enhance material structures

 #22
20220306971
2022-09-29

Cleaning Compositions

 #23
20220262629
2022-08-18

Treatments to enhance material structures

 #24
20220262620
2022-08-18

Post-CMP cleaning and apparatus

 #25
20220246432
2022-08-04

Conformal high concentration boron doping of semiconductors

 #26
20220145221
2022-05-12

Cleaning compositions

 #27
20220028702
2022-01-27

Shutter disk

 #28
20220020855
2022-01-20

Gate-last ferroelectric field effect transistor and manufacturing method thereof

 #29
20210398798
2021-12-23

Methods and apparatus for aluminum oxide surface recovery

 #30
20210371972
2021-12-02

Methods and apparatus for precleaning and treating wafer surfaces

 #31
20210257247
2021-08-19

System and method for ring frame cleaning and inspection

 #32
20210118665
2021-04-22

Substrate carrier deterioration detection and repair

 #33
20210111020
2021-04-15

Treatments to enhance material structures

 #34
20210082691
2021-03-18

Method of cleaning substrate processing apparatus, and substrate processing system

 #35
20210074552
2021-03-11

Shutter disk

 #36
20210057527
2021-02-25

Group III-V compound semiconductor substrate and group III-V compound semiconductor substrate with epitaxial layer

 #37
20210050233
2021-02-18

SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MIXTURES

 #38
20200388492
2020-12-10

METHOD FOR MANUFACTURING SiC EPITAXIAL WAFER

 #39
20200332231
2020-10-22

Cleaning compositions

 #40
20200139677
2020-05-07

Device modified substrate article and methods for making

 #41
20200091010
2020-03-19

In-situ integrated chambers

 #42
20200066605
2020-02-27

Semiconductor substrate manufacturing method

 #43
20200052075
2020-02-13

Group III-V compound semiconductor substrate and group III-V compound semiconductor substrate with epitaxial layer

 #44
20190385851
2019-12-19

Conformal high concentration boron doping of semiconductors

 #45
20190363002
2019-11-28

System and method for ring frame cleaning and inspection

 #46
20190341255
2019-11-07

Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers

 #47
20190300825
2019-10-03

Cleaning compositions

 #48
20190295850
2019-09-26

Cutting apparatus

 #49
20190244804
2019-08-08

Post-CMP cleaning and apparatus

 #50
20190206678
2019-07-04

Method for producing an epitaxial layer on a growth plate

 #51
20190181013
2019-06-13

Method of enhancing a DLC coated surface for enhanced multipaction resistance

 #52
20190131119
2019-05-02

Substrate carrier deterioration detection and repair

 #53
20190062947
2019-02-28

Method and apparatus for surface preparation prior to epitaxial deposition

 #54
20180308720
2018-10-25

Systems and methods for treating substrates with cryogenic fluid mixtures

 #55
20180254180
2018-09-06

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #56
20180204897
2018-07-19

Manufacture method of AMOLED pixel drive circuit

 #57
20180200764
2018-07-19

Substrate processing apparatus, substrate processing method and recording medium

 #58
20180175156
2018-06-21

Binary metal oxide based interlayer for high mobility channels

 #59
20180166288
2018-06-14

Methods for titanium silicide formation using TiClprecursor and silicon-containing precursor

 #60
20180122946
2018-05-03

Semiconductor devices and FinFETs

 #61
20180082832
2018-03-22

Apparatus and method of treating surface of semiconductor substrate

 #62
20180040710
2018-02-08

Binary metal oxide based interlayer for high mobility channels

 #63
20180040709
2018-02-08

Binary metal oxide based interlayer for high mobility channels

 #64
20180040708
2018-02-08

Binary metal oxide based interlayer for high mobility channels

 #65
20170350038
2017-12-07

VACUUM PLATFORM WITH PROCESS CHAMBERS FOR REMOVING CARBON CONTAMINANTS AND SURFACE OXIDE FROM SEMICONDUCTOR SUBSTRATES

 #66
20170341093
2017-11-30

Apparatus for spraying cryogenic fluids

 #67
20170316946
2017-11-02

Methods for chemical etching of silicon

 #68
20170287749
2017-10-05

Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers

 #69
20170182744
2017-06-29

Device modified substrate article and methods for making

 #70
20170125237
2017-05-04

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

 #71
20170092481
2017-03-30

Post-CMP cleaning and apparatus

 #72
20170062210
2017-03-02

Methods and apparatus for in-situ cleaning of copper surfaces and deposition and removal of self-assembled monolayers

 #73
20170053794
2017-02-23

AUTOMATIC CONTROL OF SPRAY BAR AND UNITS FOR CHEMICAL MECHANICAL POLISHING IN-SITU BRUSH CLEANING

 #74
20160372346
2016-12-22

Substrate treatment system, substrate transfer method and computer storage medium

 #75
20160372345
2016-12-22

Substrate treatment system, substrate transfer method and computer storage medium

 #76
20160303617
2016-10-20

Systems and methods for treating substrates with cryogenic fluid mixtures

 #77
20160268320
2016-09-15

Array substrate manufactured by reduced times of patterning processes manufacturing method thereof and display apparatus

 #78
20160168752
2016-06-16

Method for pretreatment of base substrate and method for manufacturing layered body using pretreated base substrate

 #79
20160149041
2016-05-26

Semiconductor devices and FinFETS

 #80
20160096210
2016-04-07

Systems and methods for treating substrates with cryogenic fluid mixtures

 #81
20160096209
2016-04-07

Systems and methods for treating substrates with cryogenic fluid mixtures

 #82
20160096207
2016-04-07

Systems and methods for treating substrates with cryogenic fluid mixtures

 #83
20160096206
2016-04-07

Systems and methods for treating substrates with cryogenic fluid mixtures

 #84
20160086775
2016-03-24

Apparatus and method for depositing electronically conductive pasting material

 #85
20160049289
2016-02-18

Apparatus and method of treating surface of semiconductor substrate

 #86
20150380249
2015-12-31

Methods for forming a molecular dopant monolayer on a substrate

 #87
20150368794
2015-12-24

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and cleaning completion determining method

 #88
20150340236
2015-11-26

METHOD FOR REDUCING DEFECTS IN POLYSILICON LAYERS

 #89
20150262862
2015-09-17

Method for producing nanocarbon film and nanocarbon film

 #90
20150255548
2015-09-10

Methods of forming semiconductor devices and FinFETs

 #91
20150221562
2015-08-06

Polishing method and polishing apparatus

 #92
20150194300
2015-07-09

Method of removing oxide from substrate and method of manufacturing semiconductor device using the same

 #93
20150155369
2015-06-04

Manufacturing method of low temperature polycrystalline silicon thin film and manufacturing method of thin film transistor

 #94
20150147836
2015-05-28

COMPOSITION FOR CLEANING FLAT PANEL DISPLAY AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME

 #95
20150118825
2015-04-30

Method for manufacturing bonded wafer

 #96
20140273398
2014-09-18

Methods for forming semiconductor materials in STI trenches

 #97
20140093984
2014-04-03

Substrate processing apparatus, substrate transfer method and storage medium

 #98
20130112224
2013-05-09

Substrate treatment system, substrate transfer method and computer storage medium

 #99
20130017672
2013-01-17

Plasma treatment method, plasma treatment apparatus, and semiconductor device manufacturing method

 #100
20120193753
2012-08-02

Methods for reducing the metal content in the device layer of SOI structures and SOI structures produced by such methods

 #101
20110309376
2011-12-22

METHOD OF CLEANING SILICON CARBIDE SEMICONDUCTOR, SILICON CARBIDE SEMICONDUCTOR, AND SILICON CARBIDE SEMICONDUCTOR DEVICE

 #102
20110297534
2011-12-08

Photolytic processing of materials with hydrogen

 #103
20110143541
2011-06-16

APPARATUS AND METHOD OF TREATING SURFACE OF SEMICONDUCTOR SUBSTRATE

 #104
20100155955
2010-06-24

METHOD FOR MANUFACTURING SYSTEM-IN-PACKAGE

 #105
20090142512
2009-06-04

Apparatus and method for depositing electrically conductive pasting material

 #106
20090065032
2009-03-12

Apparatus and method for removing photoresist from a substrate

 #107
20070204956
2007-09-06

Method of manufacturing a semiconductor device and wet processing apparatus

 #108
20070178701
2007-08-02

Method of processing a substrate

 #109
20060060213
2006-03-23

Manufacture of ultra-clean surfaces by selective

 #110
20060014330
2006-01-19

Method for manufacturing SOI wafer

 #111
20050221615
2005-10-06

Method of processing a substrate

 #112
20050221584
2005-10-06

Wafer processing method

 #113
14755800
2016-11-29

Method of depositing a diffusion barrier for copper interconnect applications