207142 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide Changing the shape of the semiconductor body, e.g. forming recesses,
TRENCH BASED SEMICONDUCTOR DEVICES WITH EPITAXIALLY REGROWN LAYERS
#2DESIGN AND MANUFACTURE OF SELF-ALIGNED POWER MOSFETS
#3Off Axis Laser-Based Surface Processing Operations for Semiconductor Wafers
#4DESIGN AND MANUFACTURE OF SELF-ALIGNED POWER MOSFETS
#5WAFER PROCESSING MACHINE WITH AUXILIARY WORKSTATIONS
#6SEMICONDUCTOR DEVICE
#7MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#8TEMPERATURE CONTROLLED SUBSTRATE CARRIER AND POLISHING COMPONENTS
#9Off Axis Laser-Based Surface Processing Operations for Semiconductor Wafers
#10Laser Edge Shaping for Semiconductor Wafers
#11Disc Grinding for Semiconductor Wafers on Polishing System
#12MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR SUBSTRATE
#13SUBSTRATE FOR ELECTRONIC DEVICE
#14SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#15Methods of Semiconductor Device Fabrication Involving Porous Silicon Carbide
#16METHODS FOR MANUFACTURING POWER SEMICONDUCTOR DEVICES AND POWER SEMICONDUDCTOR STRUCTURES
#17SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#18SEMICONDUCTOR DEVICE
#19Semiconductor Device and Method of Forming Silicon Carbide Switch-Back Engineered Substrate
#20MANUFACTURING METHOD AND POWER SEMICONDUCTOR DEVICE
#21SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
#22RECESSED REGIONS OF A JUNCTION TERMINATION EXTENSION FOR SEMICONDUCTOR DEVICES
#23TOP SURFACE OF A JUNCTION TERMINATION EXTENSION FOR SEMICONDUCTOR DEVICES
#24Plasma Etched Compound Semiconductor
#25SiC TRENCH BOTTOM CORNER ROUNDING
#26SEMICONDUCTOR DEVICE
#27SIDEWALL DOPANT SHIELDING METHODS AND APPROACHES FOR TRENCHED SEMICONDUCTOR DEVICE STRUCTURES
#28LARGE DIAMETER SILICON CARBIDE WAFERS
#29METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
#30SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
#31SEMICONDUCTOR DEVICES WITH ADDITIONAL MESA STRUCTURES FOR REDUCED SURFACE ROUGHNESS
#32METHOD OF MANUFACTURING CHIPS
#33DESIGN AND MANUFACTURE OF SELF-ALIGNED POWER MOSFETs
#34SILICON CARBIDE SEMICONDUCTOR DEVICE
#35SiC MOSFET Including Trench with Rounded Corners
#36HEAT TREATMENT ENVIRONMENT EVALUATION METHOD AND SILICON CARBIDE SUBSTRATE
#37Insulated-gate semiconductor device and method of manufacturing the same
#38ELECTRICAL DISCHARGE MACHINING OF SEMICONDUCTORS
#39Methods for forming polycrystalline channel on dielectric films with controlled grain boundaries
#40Methods of forming semiconductor devices in a layer of epitaxial silicon carbide
#41FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON 3C-SIC, AND 3C-SIC ELECTRONIC DEVICE
#42SILICON CARBIDE DEVICE WITH METALLIC INTERFACE LAYERS AND METHOD OF MANUFACTURING
#43SiC SEMICONDUCTOR DEVICE
#44MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#45Method for manufacturing semiconductor device
#46Insulated-gate semiconductor device and method of manufacturing the same
#47SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#48Single sided channel mesa power junction field effect transistor
#49SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
#50METHODS OF SPLITTING A SEMICONDUCTOR WORK PIECE
#51SEMICONDUCTOR DEVICE
#52Etching method and etching apparatus
#53TOP VIA ON SUBTRACTIVELY ETCHED CONDUCTIVE LINE
#54Directional modification of patterning structure to enhance pattern elongation process margin
#55Semiconductor power devices having multiple gate trenches and methods of forming such devices
#56Separation method of wafer
#57Silicon carbide semiconductor device with a contact region having edges recessed from edges of the well region
#58SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#59Sidewall dopant shielding methods and approaches for trenched semiconductor device structures
#60Insulated-gate semiconductor device
#61METHOD AND APPARATUS FOR ETCHING TARGET OBJECT
#62WIDE BANDGAP WAFER BACKSIDE CAPPED BY A DETECTION FACILITATING LAYER
#63Method of forming a semiconductor device
#64Semiconductor substrate processing methods
#65And manufacture of self-aligned power devices
#66Fabricating a silicon carbide and nitride structures on a carrier substrate
#67Top via on subtractively etched conductive line
#68Methods of re-using a silicon carbide substrate
#69Silicon carbide trench semiconductor device
#70Self-aligned implants for silicon carbide (SiC) technologies and fabrication method
#71Large diameter silicon carbide wafers
#72Method, Substrate and Apparatus
#73Method of manufacturing silicon carbide semiconductor device, method of manufacturing silicon carbide substrate, and silicon carbide substrate
#74SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#75Semiconductor wafer including silicon carbide wafer and method for manufacturing silicon carbide semiconductor device
#76SYSTEMS AND METHODS FOR PRECISION FABRICATION OF AN ORIFICE WITHIN AN INTEGRATED CIRCUIT
#77Methods of reducing the electrical and thermal resistance of SiC substrates and device made thereby
#78Method for manufacturing substrate, method for manufacturing semiconductor device, substrate, and semiconductor device
#79Methods for forming polycrystalline channel on dielectric films with controlled grain boundaries
#80Semiconductor device
#81Semiconductor device, inverter circuit, driving device, vehicle, and elevator
#82Semiconductor device, inverter circuit, drive device, vehicle, and elevator
#83Temperature controlled substrate carrier and polishing components
#84Manufacture of self-aligned power devices
#85METHOD FOR MANUFACTURING SiC EPITAXIAL WAFER
#86METHOD OF SEGMENTING SUBSTRATE WITH METAL FILM
#87VERTICAL POWER TRANSISTOR WITH HIGH CONDUCTIVITY AND HIGH BLOCKING BEHAVIOR
#88Optical elements
#89Semiconductor wafer thinning systems and related methods
#90Insulated-gate semiconductor device and method of manufacturing the same
#91Methods to design and uniformly co-fabricate small vias and large cavities through a substrate
#92Preliminary trenches formed in kerf regions for die singulation
#93Semiconductor device
#94Systems and methods for precision fabrication of an orifice within an integrated circuit
#95Systems and methods for precision fabrication of an orifice within an integrated circuit
#96Methods of reducing the electrical and thermal resistance of SiC substrates and device made thereby
#97Insulated-gate semiconductor device and method of manufacturing the same
#98Method and apparatus for etching target object
#99Method for manufacturing device
#100Optical elements and method for fabricating the same
#101Method of manufacturing a semiconductor device
#102Methods for fabricating and etching porous silicon carbide structures
#103Silicon carbide semiconductor device and manufacturing method therefor
#104Semiconductor device and method for manufacturing semiconductor device
#105DIE SAWING SINGULATION SYSTEMS AND METHODS
#106Semiconductor substrate processing methods
#107Semiconductor device and method of manufacturing the same
#108Silicon carbide semiconductor device
#109Semiconductor device
#110Semiconductor device
#111Semiconductor wafer thinning systems and related methods
#112Method of forming a semiconductor device
#113High voltage silicon carbide Schottky diode flip chip array
#114Forming semiconductor devices in silicon carbide
#115Silicon carbide semiconductor device having a gate electrode formed in a trench structure
#116Method of manufacturing silicon carbide semiconductor device, and method of manufacturing silicon carbide substrate
#117SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
#118Silicon carbide semiconductor device with horizontal and vertical current flow
#119Catalyst-assisted chemical etching with a vapor-phase etchant
#120Planarization method
#121Insulated-gate semiconductor device and method of manufacturing the same
#122Semiconductor device, and method for manufacturing semicondcutor device
#123Method of manufacturing semiconductor device
#124Method of manufacturing silicon carbide semiconductor device
#125Semiconductor device and method for manufacturing same
#126Semiconductor device and method of manufacturing semiconductor device
#127Method of manufacturing a semiconductor device
#128SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
#129Semiconductor device with junction termination zone
#130Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device
#131Semiconductor device
#132Semiconductor device
#133SILICON CARBIDE SEMICONDUCTOR DEVICE
#134Semiconductor device and method for manufacturing the same
#135Field effect transistor devices with buried well protection regions
#136Method for gallium nitride on diamond semiconductor wafer production
#137SHORT CHANNEL TRENCH POWER MOSFET
#138Method for manufacturing compound semiconductor device and compound semiconductor device
#139Compound semiconductor device and method for manufacturing the same
#140TRENCH TYPE JUNCTION BARRIER SCHOTTKY DIODE WITH VOLTAGE REDUCING LAYER AND MANUFACTURING METHOD THEREOF
#141Fabrication of Trench-Gated Wide-Bandgap Devices
#142SILICON CARBIDE WAFER AND POSITIONING EDGE PROCESSING METHOD THEREOF
#143Silicon carbide substrate and method for manufacturing the same
#144Trench vertical JFET with ladder termination
#145METHODS FOR FORMING THERMOELECTRIC ELEMENTS
#146Etching method
#147Semiconductor device, method for manufacturing semiconductor device, inverter circuit, driving device, vehicle, and elevator
#148Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device
#149Heat treatment vessel for single-crystal silicon carbide substrate and etching method
#150Sidewall spacer with controlled geometry
#151Silicon carbide semiconductor device
#152Silicon carbide semiconductor device and a method of manufacturing a silicon carbide semiconductor device
#153Vertical Transistor Device with a Variable Gate Dielectric Thickness
#154SILICON CARBIDE POWER TRANSISTOR APPARATUS AND METHOD OF PRODUCING SAME
#155Method for manufacturing silicon-carbide semiconductor element
#156Vertical JFET made using a reduced masked set
#157Method of manufacturing a silicon carbide semiconductor device by removing amorphized portions
#158Semiconductor device and method of manufacturing semiconductor device
#159Integrated magnetic tunnel junction (MTJ) in back end of line (BEOL) interconnects
#160Insulated gate bipolar transistor and preparation method therefor
#161Semiconductor device and method of manufacturing semiconductor device
#162Insulated gate switching device and method for manufacturing the same
#163Method of manufacturing switching element
#164Semiconductor device and method for manufacturing the same
#165Semiconductor device
#166Manufacturing method of semiconductor device
#167Silicon carbide semiconductor element and method of manufacturing silicon carbide semiconductor
#168Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device
#169Silicon carbide semiconductor device
#170METHOD FOR MANUFACTURING THIN SiC WAFER AND THIN SiC WAFER
#171Silicon carbide semiconductor base, method of crystal axis alignment in silicon carbide semiconductor base, and method of manufacturing silicon carbide semiconductor device
#172Method for forming shallow trenches of the dual active regions
#173Methods of reducing the electrical and thermal resistance of SiC substrates and devices made thereby
#174SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#175Semiconductor device and method for manufacturing the same
#176Forming electrode trenches by using a directed ion beam and semiconductor device with trench electrode structures
#177Manufacturing method of SiC substrate
#178Silicon carbide substrate and method for manufacturing the same
#179Semiconductor device
#180Structure and method to achieve compressively strained Si NS
#181Silicon carbide semiconductor device and method of manufacturing the same
#182Semiconductor storage device
#183Self-anchored catalyst metal-assisted chemical etching
#184METHOD FOR MANUFACTURING THIN SiC WAFER AND THIN SiC WAFER
#185SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
#186Method of manufacturing silicon carbide semiconductor device
#187Method of forming a semiconductor device
#188METHOD OF PRODUCING SILICON CARBIDE EPITAXIAL SUBSTRATE, SILICON CARBIDE EPITAXIAL SUBSTRATE, AND SILICON CARBIDE SEMICONDUCTOR DEVICE
#189METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE AND SILICON CARBIDE SEMICONDUCTOR DEVICE
#190Method of manufacturing a semiconductor device
#191Method of manufacturing semiconductor device
#192Trench structure on SiC substrate and method for fabricating thereof
#193Trench vertical JFET with ladder termination
#194SURFACE TREATMENT METHOD FOR SiC SUBSTRATES, SiC SUBSTRATE, AND SEMICONDUCTOR PRODUCTION METHOD
#195SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
#196Silicon-carbide transistor device with a shielded gate
#197Method for estimating depth of latent scratches in SiC substrates
#198Method of manufacturing a silicon carbide semiconductor device by removing amorphized portions
#199Field effect transistor devices with buried well protection regions
#200Silicon carbide semiconductor device and method for producing the same
#201Method for processing wide-bandgap semiconductor substrate and apparatus therefor
#202PLASMA ETCHING METHOD
#203Wafer processing method
#204Silicon carbide semiconductor with trench gate
#205Methods of forming power semiconductor devices having superjunction structures with pillars having implanted sidewalls
#206Silicon carbide semiconductor device and manufacturing method of silicon carbide semiconductor device
#207Method for Protecting a Surface of a Substrate and Semiconductor Device
#208Methods of reducing the electrical and thermal resistance of SiC substrates and devices made thereby
#209Semiconductor device and method of manufacturing semiconductor device
#210Wafer thinning method
#211Wafer thinning method
#212VERTICAL JFET MADE USING A REDUCED MASK SET
#213Vertical JFET made using a reduced mask set
#214Method for manufacturing silicon carbide semiconductor device
#215Heat treatment method and heat treatment apparatus for semiconductor substrate
#216Silicon carbide semiconductor device and method for manufacturing same
#217Silicon carbide substrate, semiconductor device, and methods for manufacturing them
#218Semiconductor device
#219Processing a semiconductor wafer
#220Waveguide fabrication method
#221Transistor and fabrication method thereof
#222Semiconductor devices with a thermally conductive layer
#223Thin plate separating method
#224Method for manufacturing silicon carbide semiconductor device
#225Semiconductor device and method for manufacturing the same
#226Power semiconductor rectifier with controllable on-state voltage
#227Manufacturing method of semiconductor device
#228Semiconductor substrate arrangements and a method for forming a semiconductor substrate arrangement
#229Method for manufacturing silicon carbide semiconductor device by selectively removing silicon from silicon carbide substrate to form protective carbon layer on silicon carbide substrate for activating dopants
#230Semiconductor device
#231Insulated gate bipolar device
#232Method of forming a trench in a semiconductor device
#233Method for manufacturing silicon carbide semiconductor device
#234Silicon carbide semiconductor device having a trench with side walls and method for manufacturing same
#235SILICON CARBIDE SUBSTRATE, SILICON CARBIDE SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SILICON CARBIDE SUBSTRATE
#236SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
#237Silicon carbide semiconductor substrate, method for manufacturing silicon carbide semiconductor substrate, and method for manufacturing silicon carbide semiconductor device
#238Silicon carbide semiconductor device and method for manufacturing same
#239Semiconductor device and method of manufacturing the same
#240Method of forming a silicon-carbide device with a shielded gate
#241Silicon carbide epitaxial wafer, method for manufacturing silicon carbide epitaxial wafer, device for manufacturing silicon carbide epitaxial wafer, and silicon carbide semiconductor element
#242Silicon carbide semiconductor device and method for producing the same
#243SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
#244Manufacturing method of silicon carbide semiconductor device
#245Silicon carbide static induction transistor and process for making a silicon carbide static induction transistor
#246Method of polishing SiC substrate
#247Method for producing SiC substrate
#248Method for treating the surface of a silicon-carbide substrate including a removal step in which a modified layer produced by polishing is removed by heating under Si vapor pressure
#249Silicon carbide semiconductor device and method for manufacturing same
#250Method for manufacturing silicon-carbide semiconductor element
#251Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device
#252Silicon-carbide semiconductor device and method for manufacturing the same
#253Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device
#254Method of manufacturing silicon carbide semiconductor device
#255Method of manufacturing silicon carbide semiconductor device
#256Method of producing a junction field-effect transistor (JFET)
#257Methods for forming thermoelectric elements
#258Method for manufacturing SiC substrate
#259Silicon carbide semiconductor device
#260Semiconductor devices with a thermally conductive layer and methods of their fabrication
#261Silicon carbide semiconductor device and manufacturing method therefor
#262Method for manufacturing silicon carbide semiconductor device
#263Semiconductor element, semiconductor element manufacturing method, semiconductor module, semiconductor module manufacturing method, and semiconductor package
#264Method and system for transient voltage suppression
#265Silicon carbide semiconductor device and method of manufacturing same
#266Semiconductor device and method for manufacturing same
#267Composition for advanced node front-and-back-end of line chemical mechanical polishing
#268Silicon carbide semiconductor device and method for producing the same
#269Method for manufacturing silicon carbide semiconductor device
#270Manufacturing method for silicon carbide semiconductor device
#271Fabrication method of silicon carbide semiconductor device
#272Method for manufacturing a semiconductor device by thermal treatment with hydrogen
#273Edge termination technique for high voltage power devices having a negative feature for an improved edge termination structure
#274SiC semiconductor element and manufacturing method thereof
#275Plasma etching method
#276Semiconductor device and method for fabricating the same
#277SCHOTTKY BARRIER DIODE AND METHOD OF MANUFACTURING THE SAME
#278Silicon carbide semiconductor device
#279Semiconductor device and method of manufacturing the same
#280Polishing agent and polishing method
#281Semiconductor device and method of manufacturing the device
#282METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
#283Silicon carbide semiconductor element and method for fabricating the same
#284Trench MOS transistor having a trench doped region formed deeper than the trench gate
#2854h-SiC semiconductor element and semiconductor device
#286Methods for fabricating semiconductor devices
#287Method for manufacturing silicon carbide semiconductor device
#288Trench type Schottky junction semiconductor device and manufacturing method thereof
#289Silicon carbide semiconductor device
#290METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
#291Method for manufacturing a semiconductor device
#292Silicon carbide semiconductor device and method for manufacturing same
#293Method for manufacturing semiconductor device
#294Method of manufacturing semiconductor device
#295METHOD FOR MANUFACTURING COMBINED SUBSTRATE HAVING SILICON CARBIDE SUBSTRATE
#296METHOD AND APPARATUS FOR SELECTIVELY GROWING DOPED EPITAXIAL FILM
#297Silicon carbide insulated-gate bipolar transistor
#298Silicon carbide semiconductor device
#299SILICON CARBIDE SUBSTRATE
#300SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME