207174 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy Epitaxial regrowth of non-monocrystalline semiconductor materials, e.g. lateral epitaxy by seeded solidification, solid-state crystallization, solid-state graphoepitaxy, explosive crystallization, grain growth in polycrystalline materials
Sub-classes:Methods and apparatus for forming backside power rails
#2Control device and control method for single-wafer processing epitaxial growth apparatus, and epitaxial wafer production system
#3High performance 3D vertical transistor device enhancement design
#4Semiconductor device and method of manufacturing the same
#5Semiconductor epitaxy bordering isolation structure
#6Optical modulator with region epitaxially re-grown over polycrystalline silicon
#7Optical modulator with region epitaxially re-grown over polycrystalline silicon
#8Electrical isolation structure and process
#9Semiconductor epitaxy bordering isolation structure
#10Methods of forming crystalline semiconductor material, and methods of forming transistors
#11Producing method for thin film transistor with different crystallinities
#12Silicon carbide stacked substrate and manufacturing method thereof
#13Method for producing a semiconductor chip and semiconductor chip
#14Epitaxial silicon wafer, and method for manufacturing epitaxial silicon wafer
#15Method for producing SiC composite substrate
#16Semiconductor epitaxy bordering isolation structure
#17Composite spacer enabling uniform doping in recessed fin devices
#18Semiconductor chip, semiconductor wafer and method for manufacturing semiconductor wafer
#19Semiconductor epitaxy bordering isolation structure
#20FinFET device and method of forming the same
#21Composite spacer enabling uniform doping in recessed fin devices
#22Method for producing a semiconductor chip and semiconductor chip
#23Substrates with buried isolation layers and methods of formation thereof
#24Forming zig-zag trench structure to prevent aspect ratio trapping defect escape
#25High-throughput deposition of a voltage-tunable dielectric material
#26Semiconductor arrangement and formation thereof
#27Fin-FET
#28Wafer warpage reduction
#29Fabrication of ultra-shallow junctions
#30FABRICATING METHOD OF SEMICONDUCTOR CHIP
#31Fin-FET and method of forming the same
#32Field effect transistor structure with abrupt source/drain junctions
#33Semiconductor substrate with solid phase epitaxial regrowth with reduced depth of doping profile and method of producing same
#34Semiconductor substrate with solid phase epitaxial regrowth with reduced junction leakage and method of producing same
#35METHOD FOR CRYSTALLIZATION OF AMORPHOUS SILICON BY JOULE HEATING
#36Field effect transistor structure with abrupt source/drain junctions
#37Method of producing a semiconductor element in a substrate
#38Method for re-crystallization of layer structures by means of zone melting, a device for this purpose and use thereof
#39Source and Drain Formation in Silicon on Insulator Device
#40Method and apparatus for performing assessments
#41PROCESS FOR MANUFACTURING A SEMICONDUCTOR DEVICE, A SEMICONDUCTOR DEVICE AND A HIGH-FREQUENCY CIRCUIT
#42Low defect Si:C layer with retrograde carbon profile
#43Thin film transistor and method of fabricating the same
#44Planar substrate with selected semiconductor crystal orientations formed by localized amorphization and recrystallization of stacked template layers
#45Method for producing a semiconductor substrate
#46Method for fabricating low-defect-density changed orientation Si
#47Manufacture of silicon-based devices having disordered sulfur-doped surface layers
#48Semiconductor thin film and method of manufacturing the same and semiconductor device and method of manufacturing the same
#49Epitaxy of Silicon-Carbon Substitutional Solid Solutions by Ultra-Fast Annealing of Amorphous Material
#50METHOD FOR FORMING ULTRA-SHALLOW HIGH QUALITY JUNCTIONS BY A COMBINATION OF SOLID PHASE EPITAXY AND LASER ANNEALING
#51Strain-inducing film formation by liquid-phase epitaxial re-growth
#52Semiconductor device and method of manufacturing the same
#53Process for producing a photoelectric conversion device
#54Method of manufacturing semiconductor device
#55Method of fabricating semiconductor device
#56Thin film transistor and method of fabricating the same
#57Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
#58Semiconductor thin film device
#59Method of increasing a free carrier concentration in a semiconductor substrate
#60UNIFORM SEEDING TO CONTROL GRAIN AND DEFECT DENSITY OF CRYSTALLIZED SILICON FOR USE IN SUB-MICRON THIN FILM TRANSISTORS
#61Method for producing distinct first and second active semi-conducting zones and use thereof for fabricating C-MOS structures
#62Manufacturing method of semiconductor device
#63Method for annealing silicon thin films and polycrystalline silicon thin films prepared therefrom
#64METHOD FOR FORMING SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND ELECTROOPTIC DEVICE, APPARATUS FOR PERFORMING THE SAME, AND SEMICONDUCTOR DEVICE AND ELECTROOPTIC DEVICE
#65Thin film transistor and method of fabricating the same
#66Multiple crystal orientations on the same substrate
#67Method of manufacturing an AMOLED
#68METHOD OF CRYSTALLIZING AMORPHOUS SEMICONDUCTOR FILM
#69Method for forming polycrystalline silicon thin film
#70METHOD OF FABRICATING A THIN FILM TRANSISTOR
#71Method of manufacturing semiconductor device
#72Method of fabricating polysilicon film
#73Fabrication method for crystalline semiconductor films on foreign substrates
#74Semiconductor device and its manufacturing method
#75Method of forming a crystalline phase material
#76Semiconductor device having freestanding semiconductor layer
#77Method for manufacturing semiconductor device
#78Apparatus and method for manufacturing semiconductor device, and electronic apparatus
#79Method of fabricating a field effect transistor structure with abrupt source/drain junctions
#80Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device
#81Method for manufacturing semiconductor elemental device forming an amorphous high dielectric film and an amorphous silicon film
#82Silicon film, crystalline film and method for manufacturing the same
#83Method for fabricating low-defect-density changed orientation Si
#84Method for manufacturing a semiconductor thin film
#85Method for producing insulated gate thin film semiconductor device
#86Heating treatment device, heating treatment method and fabrication method of semiconductor device
#87Electro-optical device and semiconductor circuit
#88MIS semiconductor device and method of fabricating the same
#89Method for manufacturing a semconductor device
#90Method of crystallizing amorphous semiconductor thin film and method of fabricating poly crystalline thin film transistor using the same
#91Thin film transistor and method of fabricating the same
#92Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them
#93Method for fabricating a semiconductor device
#94Semiconductor array and method for manufacturing a semiconductor array
#95Method of fabricating poly crystalline silicon TFT
#96Process for manufacturing a semiconductor device, a semiconductor device and a high-frequency circuit
#97Method for fabricating thin film transistor using metal catalyst layer
#98Method of manufacturing a semiconductor film and method of manufacturing a semiconductor device by transferring crystallization promoting material in the first semiconductor film to the second semiconductor film through a barrier film
#99Pulse sequencing lateral growth method
#100Manufacturing method of semiconductor device
#101Large-grain p-doped polysilicon films for use in thin film transistors
#102Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
#103Method for forming polycrystalline silicon thin film transistor
#104Method of fabricating thin film transistor
#105Method for fabricating thin film transistor
#106Thin film transistor and method of fabricating the same
#107Thin film transistor and method of fabricating the same
#108Display device, manufacturing method thereof, and television set
#109N-type transistor with antimony-doped ultra shallow source and drain
#110Method of fabricating semiconductor device and semiconductor fabricated by the same method
#111Method of fabricating a poly-crystalline silicon thin film and method of fabricating a semiconductor device using the same
#112Thin film transistor with low angle grain boundaries in a channel layer
#113Method of manufacturing semiconductor device having a circuit including thin film transistors
#114Void free, silicon filled trenches in semiconductors
#115Method of fabricating thin film transistor using metal induced lateral crystallization by etch-stopper layer patterns
#116Method of fabricating semiconductor device and semiconductor fabricated by the same method
#117Method of crystallizing amorphous semiconductor thin film and method of fabricating poly-crystalline thin film transistor using the same
#118Semiconductor device, electro-optic device, integrated circuit, and electronic apparatus
#119Method of manufacturing transistors
#120Method of forming gate insulation film using plasma method of fabricating poly-silicon thin film transistor using the same
#121Method for forming contact plug of semiconductor device
#122Semiconductor device and process for fabricating the same
#123Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
#124Process for fabricating semiconductor device
#125Method of manufacturing a semiconductor on a silicon on insulator (SOI) substrate using solid epitaxial regrowth (SPER) and semiconductor device made thereby
#126Method for manufacturing semiconductor device
#127Method of manufacturing a semiconductor device
#128Semiconductor device and manufacturing method therefor
#129Method of forming smooth polycrystalline silicon electrodes for molecular electronic devices
#130Method of fabricating polysilicon thin film and thin film transistor using polysilicon fabricated by the same method
#131Isotropic polycrystalline silicon
#132Display device having thin film transistors
#133Etchant for nickel silicide
#134Semiconductor device
#135Low-fluence irradiation for lateral crystallization enabled by a heating source
#136Semiconductor device and method of fabricating the same
#137Semiconductor device and method for fabricating the same
#138Method for manufacturing semiconductor device
#139Laminated silicon gate electrode
#140Planar substrate with selected semiconductor crystal orientations formed by localized amorphization and recrystallization of stacked template layers
#141Method of forming a refractory metal silicide
#142Process for long crystal lateral growth in silicon films by UV and IR pulse sequencing
#143Method of manufacturing a semiconductor device
#144Method of manufacturing a semiconductor method of manufacturing a thin-film transistor and thin-film transistor
#145Method of uniform seeding to control grain and defect density of crystallized silicon for use in sub-micron thin film transistors
#146Method of increasing a free carrier concentration in a semiconductor substrate
#147Capping layer for crystallizing germanium, and substrate having thin crystallized germanium layer
#148Method of manufacturing a semiconductor device
#149Method of manufacturing semiconductor device
#150Method of manufacturing semiconductor device
#151Manufacturing method of semiconductor and manufacturing method of semiconductor device
#152Method for manufacturing semiconductor device
#153Isotropic polycrystalline silicon and method for producing same
#154Method of manufacturing a semiconductor device
#155Method for manufacturing semiconductor device, and laser irradiation apparatus
#156Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy
#157Semiconductor device and method for manufacturing semiconductor device
#158Method of fabricating semiconductor device
#159[METHOD OF FABRICATING POLYSILICON FILM]
#160Method of fabricating polysilicon film
#161[METHOD OF FABRICATING POLYSILICON FILM]
#162Method of fabricating a field effect transistor structure with abrupt source/drain junctions
#163Methods of forming a refractory metal silicide
#164Semiconductor device and method of manufacturing the same
#165Method of forming freestanding semiconductor layer
#166Semiconductor memory device and method for manufacturing the same