207168 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
Sub-classes:SELECTIVE PERIODIC EDGE DEPOSITION AND ETCH
#2DIODE WITH INTRINSIC EPITAXIAL LAYER
#3SUPPRESSION OF DOPANT HYDRIDE EVOLUTION FROM EPITAXIAL FILMS IN INTEGRATED CIRCUIT (IC) MANUFACTURING
#4SOURCE/DRAIN FORMATION WITH REDUCED SELECTIVE LOSS DEFECTS
#5CARRIER SUBSTRATE FOR SEMICONDUCTOR STRUCTURES SUITABLE FOR A TRANSFER BY TRANSFER PRINT AND MANUFACTURING OF THE SEMICONDUCTOR STRUCTURES ON THE CARRIER SUBSTRATE
#6EPITAXIAL STRUCTURE AND METHOD OF FORMING THE SAME
#7APPARATUS AND METHOD FOR DETECTING TENSION ABNORMALITY IN DICING TAPE
#8SUBSTRATES OF SEMICONDUCTOR DEVICES FOR HEAT DISSIPATION
#9Source/drain formation with reduced selective loss defects
#10Semiconductor substrate
#11BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
#12SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#13MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR
#14INTEGRATED CIRCUITS HAVING SOURCE/DRAIN STRUCTURE AND METHOD OF MAKING
#15Method for fabricating semiconductor device
#16Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device
#17METHOD AND CARRIER ELEMENT FOR PRODUCING A WAFER LAYER
#18Methods for conditioning a processing reactor
#19Source/drain formation with reduced selective loss defects
#20Integrated circuits having source/drain structure and method of making
#21SUBSTRATE PROCESSING APPARATUS WITH FLOW CONTROL RING, AND SUBSTRATE PROCESSING METHOD
#22Laser-Assisted Epitaxy and Etching for Manufacturing Integrated Circuits
#23Transistor interface between gate and active region
#24Source/drain formation with reduced selective loss defects
#25Method for manufacturing semiconductor device and semiconductor substrate
#26Epitaxial growth process for semiconductor device and semiconductor device comprising epitaxial layer formed by adopting the same
#27SEMICONDUCTOR SUBSTRATE AND METHOD OF FORMING THE SAME
#28Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device
#29Semiconductor structure and fabrication method thereof
#30Method for manufacturing panel using a glass substrate as the laser light transmitting member and laser processing apparatus
#31Device and method for measuring film longitudinal temperature field during nitride epitaxial growth
#32Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate
#33Nitride semiconductor device and method for fabricating nitride semiconductor device
#34Integration of epitaxially grown channel selector with two terminal resistive switching memory element
#35Integration of epitaxially grown channel selector with MRAM device
#36Compound semiconductor, method for manufacturing same, and nitride semiconductor
#37Method for manufacturing semiconductor device
#38Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device
#39Integrated circuits having source/drain structure and method of making
#40Two-stage seeded growth of large aluminum nitride single crystals
#41Crystal laminate, semiconductor device and method for manufacturing the same
#42Sense amplifier layout for FinFET technology
#43Method for manufacturing display device
#44Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device
#45Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device
#46Nitride semiconductor light-emitting element, method for manufacturing nitride semiconductor light-emitting element, and nitride semiconductor light-emitting device
#47Upper cone for epitaxy chamber
#48Two-stage seeded growth of large aluminum nitride single crystals
#49SILICON PHOTOANODE COMPRISING A THIN AND UNIFORM PROTECTIVE LAYER MADE OF TRANSITION METAL DICHALCOGENIDE AND METHOD OF MANUFACTURING SAME
#50Semiconductor device with super junction and process for the same
#51Method for producing a semiconductor chip and semiconductor chip
#52Laser irradiation device, thin-film transistor and thin-film transistor manufacturing method
#53Method for forming epitaxial layer at low temperature
#54Laser processing apparatus, semiconductor device manufacturing method, and amorphous silicon crystallization method
#55Annealing method, process chamber and annealing apparatus
#56Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus
#57Laser annealing method, laser annealing apparatus, and manufacturing process for thin film transistor
#58Laser annealing method, laser annealing apparatus, and manufacturing process for thin film transistor
#59Silicon carbide epitaxial substrate and method for manufacturing a silicon carbide semiconductor device
#60Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate
#61Compound semiconductor, method for manufacturing same, and nitride semiconductor
#62Laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device
#63Semiconductor device and method for manufacturing the same
#64Method of manufacturing epitaxial silicon wafer, epitaxial silicon wafer, and method of manufacturing solid-state image sensing device
#65Carbon nanotube transistor with carrier blocking using thin dielectric under contact
#66Epitaxial silicon wafer, and method for manufacturing epitaxial silicon wafer
#67Semiconductor optical device
#68Silicon carbide epitaxial substrate and silicon carbide semiconductor device
#69Thin film transistor, manufacturing process for thin film transistor, and laser annealing apparatus
#70Silicon carbide semiconductor device and method for manufacturing silicon carbide semiconductor device
#71Thin film transistor, manufacturing process for thin film transistor, and laser annealing apparatus
#72Epitaxial substrate
#73Two-stage seeded growth of large aluminum nitride single crystals
#74Sense amplifier layout for FinFET technology
#75Paste composition and method for forming silicon germanium layer
#76Silicon carbide epitaxial substrate having a silicon carbide layer and method of manufacturing silicon carbide semiconductor device
#77Method for manufacturing nitride semiconductor substrate
#78Dual channel FinFETs having uniform fin heights
#79Dual channel FinFETs having uniform fin heights
#80Semiconductor optical device
#81High-voltage semiconductor device
#82MANUFACTURE METHOD OF ARRAY SUBSTRATE
#83Carrier Substrate For Semiconductor Structures Suitable For A Transfer By Transfer Print And Manufacturing Of The Semiconductor Structures On The Carrier Substrate
#84Upper cone for epitaxy chamber
#85Composite semiconductor substrate
#86Laser annealing method, laser annealing apparatus, and manufacturing process for thin film transistor
#87Atmosphere formation apparatus and floatation conveyance method
#88SiC epitaxial wafer and method for manufacturing SiC epitaxial wafer
#89Nitride semiconductor template, manufacturing method thereof, and epitaxial wafer
#90Method for manufacturing epitaxial silicon wafer and vapor phase growth device
#91Method for producing a semiconductor chip and semiconductor chip
#92Trench metal insulator metal capacitor with oxygen gettering layer
#93Thin film transistor, manufacturing process for thin film transistor, and laser annealing apparatus
#94Semiconductor device
#95Light emitting diode device having III-nitride nanowires, a shell layer and a continuous layer
#96Methods for producing composite GaN nanocolumns and light emitting structures made from the methods
#97Semiconductor device and method for producing same
#98Method for producing epitaxial silicon carbide wafers
#99Sense amplifier layout for FinFET technology
#100Template for epitaxial growth, method for producing the same, and nitride semiconductor device
#101Injection control in semiconductor power devices
#102Multi-orientation SOI substrates for co-integration of different conductivity type semiconductor devices
#103Composite substrate, method for fabricating same, function element, and seed crystal substrate
#104Processing substrates using a temporary carrier
#105Manufacturing method of epitaxial silicon wafer
#106Semiconductor arrangement and formation thereof
#107Pillar-supported array of micro electron lenses
#108Nanoscale chemical templating with oxygen reactive materials
#109Composite substrate with a high-performance semiconductor layer and method of manufacturing the same
#110Nitride nanowires and method of producing such
#111Semiconductor device comprising epitaxially grown semiconductor material and an air gap
#112Epitaxial growth method
#113Epitaxial growth method
#114Semiconductor device and method of manufacturing the same
#115Nanowire device having graphene top and bottom electrodes and method of making such a device
#116Semiconductor component and method of manufacture
#117Sense amplifier layout for FinFET technology
#118Method of making nanostructure
#119Vertically oriented semiconductor device and shielding structure thereof
#120Photovoltaic semiconductor materials based on alloys of tin sulfide, and methods of production
#121Semiconductor device and manufacturing method
#122SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF AND OPERATING METHOD THEREOF
#123Facet-free strained silicon transistor
#124Self-aligned double-gate graphene transistor
#125Method of producing a nitride semiconductor crystal with precursor containing carbon and oxygen, and nitride semiconductor crystal and semiconductor device made by the method
#126Method to improve reliability of replacement gate device
#127Pseudomorphic high electron mobility transistor comprising doped low temperature buffer layer
#128SOLAR CELLS HAVING NANOWIRES AND METHODS OF FABRICATING NANOWIRES
#129Method of producing semiconductor device
#130Semiconductor device and method with greater epitaxial growth on 110 crystal plane
#131Structure for growth of nitride semiconductor layer, stacked structure, nitride-based semiconductor element, light source, and manufacturing method for same
#132Method for permanently bonding wafers
#133Semiconductor devices having fin structures, and methods of forming semiconductor devices having fin structures
#134Device with nitride nanowires having a shell layer and a continuous layer
#135METHOD FOR FABRICATING PATTERNED SILICON NANOWIRE ARRAY AND SILICON MICROSTRUCTURE
#136Oxide removal from semiconductor surfaces using a flux of indium atoms
#137Method for making epitaxial structure
#138Semiconductor devices having fin structures, and methods of forming semiconductor devices having fin structures
#139Method for fabricating semiconductor layer having textured surface and method for fabricating solar cell
#140Semiconductor device and manufacturing method
#141Semiconductor device with edge termination and method for manufacturing a semiconductor device
#142Integrated circuit resistor fabrication with dummy gate removal
#143Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates
#144Method for making a structure comprising at least one multi-thick active part
#145Method for cleaning film formation apparatus and method for manufacturing semiconductor device
#146SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
#147METHOD FOR MAKING SEMICONDUCTOR STRUCTURE
#148Method for fabricating a semiconductor device
#149Systems and methods integrating trench-gated thyristor with trench-gated rectifier
#150PLASMA REACTOR WITH CHAMBER WALL TEMPERATURE CONTROL
#151Method of manufacturing a semiconductor fin using sacrificial layer
#152Vertically oriented semiconductor device and shielding structure thereof
#153Light emitting ceramic substrate including group-III nitride
#154Method of producing nitride nanowires with different core and shell V/III flow ratios
#155Crystal producing apparatus, crystal producing method, substrate producing method, gallium nitride crystal, and gallium nitride substrate
#156Semiconductor device and method of manufacturing the same
#157Nanoscale chemical templating with oxygen reactive materials
#158Nanoscale chemical templating with oxygen reactive materials
#159Thin substrate fabrication using stress-induced spalling
#160Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system
#161Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system
#162SEMICONDUCTOR STRUCTURE AND METHOD FOR MAKING THE SAME
#163Semiconductor device and method of producing same
#164Method for fabricating a semiconductor device
#165Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
#166Methods of fabricating vertical semiconductor device utilizing phase changes in semiconductor materials
#167Semiconductor device and method for manufacturing semiconductor device
#168CRYSTALLIZATION METHOD OF AMORPHOUS SEMICONDUCTOR FILM, THIN FILM TRANSISTOR, AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR
#169Methods of forming catalytic nanopads
#170Nanoscale chemical templating with oxygen reactive materials
#171Nitride nanowires and method of producing such
#172Semiconductor device and manufacturing method
#173SEMICONDUCTOR DEVICE, FABRICATION METHOD OF THE SEMICONDUCTOR DEVICES
#174Solar cells having nanowires and methods of fabricating nanowires
#175Thin substrate fabrication using stress-induced substrate spalling
#176Heterojunction III-V photovoltaic cell fabrication
#177Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system
#178Nitride nanowires and method of producing such
#179Self-aligned three-dimensional non-volatile memory fabrication
#180Printable, flexible and stretchable diamond for thermal management
#181Epitaxial growth susceptor
#182Crystal producing apparatus, crystal producing method, substrate producing method, gallium nitride crystal, and gallium nitride substrate
#183Three dimensional scaffold and method of fabricating the same
#184Electrodes, inner layers, capacitors, electronic devices and methods of making thereof
#185Method of manufacturing nonvolatile organic memory device and nonvolatile organic memory device manufactured by the same
#186Interposer including at least one passive element at least partially defined by a recess formed therein, system including same, and wafer-scale interposer
#187Method of manufacturing an interposer including at least one passive element at least partially defined by a recess therein
#188Susceptor for epitaxial growth and epitaxial growth method
#189Regrowth method for fabricating wide-bandgap transistors, and devices made thereby
#190Elimination of defects in long aspect ratio trapping trench structures
#191Thin-film gallium nitride structures grown on graphene
#192Selective epitaxial overgrowth comprising air gaps