207175 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy; Epitaxial regrowth of non-monocrystalline semiconductor materials, e.g. lateral epitaxy by seeded solidification, solid-state crystallization, solid-state graphoepitaxy, explosive crystallization, grain growth in polycrystalline materials using a coherent energy beam, e.g. laser or electron beam
III-N HETEROEPITAXIAL DEVICES ON ROCK SALT SUBSTRATES
#2Manufacturing method for array substrate
#3SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
#4Base substrate, functional element, and method for manufacturing base substrate
#5Laser crystallizing apparatus and method of manufacturing display apparatus
#6Semiconductor device and semiconductor device production system
#7Producing method for thin film transistor with different crystallinities
#8Semiconductor device and semiconductor device production system
#9Crystallized silicon vertical diode on BEOL for access device for confined PCM arrays
#10Laser annealing method, laser annealing apparatus, and manufacturing process for thin film transistor
#11Laser annealing method, laser annealing apparatus, and manufacturing process for thin film transistor
#12Technique and related semiconductor devices based on crystalline semiconductor material formed on the basis of deposited amorphous semiconductor material
#13Polysilicon thin film and manufacturing method thereof, TFT and manufacturing method thereof, and display panel
#14Laser annealing method and laser annealing device
#15Laser system
#16Semiconductor device and semiconductor device production system
#17Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device
#18Polysilicon thin film and manufacturing method thereof, TFT and manufacturing method thereof, and display panel
#19Annealing apparatus using two wavelengths of radiation
#20Laser annealing method, laser annealing apparatus, and manufacturing process for thin film transistor
#21Semiconductor device and method for manufacturing the same
#22Semiconductor device and semiconductor device production system
#23Laser annealing device including tunable mask and method of using the same
#24Lift-off method
#25Semiconductor device
#26Annealing apparatus using two wavelengths of radiation
#27Thermal processing by scanning a laser line beam
#28Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions
#29Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device
#30Laser annealing device and method
#31Semiconductor device and method for manufacturing the same
#32Bonding head
#33Single-shot semiconductor processing system and method having various irradiation patterns
#34Flat panel display device comprising polysilicon thin film transistor and method of manufacturing the same
#35Semiconductor device, and method of forming the same
#36Annealing apparatus using two wavelengths of continuous wave laser radiation
#37METHOD OF MANUFACTURING THIN FILM TRANSISTOR, THIN FILM TRANSISTOR, AND DISPLAY UNIT
#38Annealing apparatus using two wavelengths of continuous wave laser radiation
#39Annealing apparatus using two wavelengths of laser radiation
#40Annealing apparatus using two wavelengths of continuous wave laser radiation
#41SEMICONDUCTOR DEVICE INCLUDING A CRYSTAL SEMICONDUCTOR LAYER, ITS FABRICATION AND ITS OPERATION
#42Method of manufacturing thin film transistor, thin film transistor, and display unit
#43Scanned laser light source
#44Semiconductor device and method for manufacturing the same
#45Semiconductor device and manufacturing method thereof
#46Crystalline semiconductor film manufacturing method and crystalline semiconductor film manufacturing apparatus
#47Semiconductor device
#48Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device
#49Laser irradiation apparatus and manufacturing method of semiconductor device
#50Method of manufacturing semiconductor device
#51Method for manufacturing thin film integrated circuit, and element substrate
#52Single-shot semiconductor processing system and method having various irradiation patterns
#53Laser mask and crystallization method using the same
#54Laser thin film poly-silicon annealing optical system
#55Laser mask and crystallization method using the same
#56ELECTRO-OPTICAL DEVICE AND THIN FILM TRANSISTOR AND METHOD FOR FORMING THE SAME
#57Thermal flux processing by scanning a focused line beam
#58Semiconductor device and manufacturing method thereof
#59Semiconductor device and method for manufacturing the same
#60Semiconductor device and method of fabricating the same
#61Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus for the semiconductor thin film
#62Annealing apparatus using two wavelengths of continuous wave laser radiation
#63Silicon crystallization apparatus and silicon crystallization method thereof
#64Method of manufacturing a polycrystalline semiconductor thin film
#65Crystallization apparatus, crystallization method, device and phase modulation element
#66Semiconductor device and manufacturing method thereof
#67Light exposure apparatus and manufacturing method of semiconductor device using the same
#68Single-shot semiconductor processing system and method having various irradiation patterns
#69Stacked transistors and electronic devices including the same
#70Method and apparatus for irradiating laser
#71Semiconductor device
#72Laser mask and crystallization method using the same
#73LASER ANNEALING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#74Laser treatment apparatus and method of manufacturing semiconductor device
#75Method for manufacturing a semiconductor device
#76Semiconductor device including a crystal semiconductor layer
#77Liquid crystal display device having drive circuit
#78Laser irradiation apparatus with means for applying magnetic field
#79Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions
#80Method for manufacturing thin film integrated circuit, and element substrate
#81Method of manufacturing nanowire
#82Method for manufacturing semiconductor device and laser irradiation apparatus
#83Method of manufacturing thin film transistor, thin film transistor, and display unit
#84Semiconductor device and semiconductor device production system
#85Thin-film transistor (TFT) device
#86SEMICONDUCTOR THIN FILM FORMING SYSTEM
#87Buffer layer for promoting electron mobility and thin film transistor having the same
#88Method of annealing using two wavelengths of continuous wave laser radiation
#89Systems and methods for creating crystallographic-orientation controlled poly-silicon films
#90Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same
#91METHOD OF MANUFACTURING POLYSILICON THIN FILM AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR HAVING THE SAME
#92Laser mask and crystallization method using the same
#93Thin film transistor having a three-portion gate electrode and liquid crystal display using the same
#94Semiconductor device and method for manufacturing the same
#95Crystallization method, thin film transistor manufacturing method, thin film transistor, display, and semiconductor device
#96Semiconductor device and manufacturing method thereof
#97Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
#98Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device
#99Method of manufacturing thin film transistor
#100Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
#101Laser mask and crystallization method using the same
#102Semiconductor structure having multilayer of polysilicon and display panel applied with the same
#103Process for fabricating semiconductor device
#104Laser annealing method and semiconductor device fabricating method
#105INCREASED NANOSECOND LASER PULSE-TO-PULSE ENERGY REPEATABILITY USING ACTIVE LASER PULSE ENERGY CONTROL
#106Polysilicon film having smooth surface and method of forming the same
#107Manufacturing method of a semiconductor substrate using a damaged region
#108Method of manufacturing semiconductor device
#109Method and system for optical characterization of optical crystallization
#110Focus determination for laser-mask imaging systems
#111Image Display Device And Method For Manufacturing The Same
#112Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus
#113Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same
#114Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device
#115Laser annealing method and laser annealing device
#116Systems and methods for inducing crystallization of thin films using multiple optical paths
#117Method for forming polysilicon by illuminating a laser beam at the amorphous silicon substrate through a mask
#118Laser mask and method of crystallization using the same
#119Laser irradiation apparatus and method of manufacturing semiconductor device
#120Light exposure apparatus and manufacturing method of semiconductor device using the same
#121Display device and manufacturing method thereof
#122Apparatus and method of crystallizing amorphous silicon
#123Method of manufacturing thin film transistor, thin film transistor, and display unit
#124Method of and apparatus for manufacturing semiconductor thin film, and method of manufacturing thin film transistor
#125Method for manufacturing semiconductor device and heat treatment method
#126System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques
#127Substrate with marker, manufacturing method thereof, laser irradiation apparatus, laser irradiation method, light exposure apparatus, and manufacturing method of semiconductor device
#128Semiconductor device
#129Polysilicon thin film transistor array panel and manufacturing method thereof
#130Display device
#131Method for selective laser crystallization and display panel fabricated by using the same
#132Semiconductor thin film crystallization device and semiconductor thin film crystallization method
#133Fabrication method for polycrystalline silicon thin film and apparatus using the same
#134Laser crystallization apparatus and crystallization method
#135Buried seed one-shot interlevel crystallization
#136METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
#137Method of manufacturing a semiconductor device
#138Method of fabricating liquid crystal display device having drive circuit
#139Semiconductor thin film, thin film transistor, method of manufacturing the semiconductor thin film, method of manufacturing the thin film transistor, and manufacturing device of semiconductor thin film
#140Laser Spike Anneal With Plural Light Sources
#141Thin-film transistor, method for manufacturing thin-film transistor, and display using thin-film transistors
#142Electro-optical device and thin film transistor and method for forming the same
#143Thermal flux processing by scanning a focused line beam
#144Method and apparatus for forming crystalline portions of semiconductor film
#145Laser mask and method of crystallization using the same
#146Method of forming poly-si pattern, diode having poly-si pattern, multi-layer cross point resistive memory device having poly-si pattern, and method of manufacturing the diode and the memory device
#147Method for manufacturing semiconductor device
#148Method of deciding focal plane and method of crystallization using thereof
#149Laser annealing method wherein reflected beams are minimized
#150Method for fabricating polysilicon film
#151Method of laser annealing using two wavelengths of radiation
#152Surface Modification Method for Solid Sample, Impurity Activation Method, and Method for Manufacturing Semiconductor Device
#153Method of crystallizing amorphous silicon and device fabricated using the same
#154SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A LTPS FILM
#155Display device including thin film transistors
#156METHOD AND SYSTEM OF BEAM ENERGY CONTROL
#157METHOD AND APPARATUS FOR FORMING A SEMICONDUCTOR SUBSTRATE WITH A LAYER STRUCTURE OF ACTIVATED DOPANTS
#158Laser annealing method and semiconductor device fabricating method
#159Process and system for laser annealing and laser-annealed semiconductor film
#160Method and apparatus for irradiating laser
#161Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
#162Polysilicon film having smooth surface and method of forming the same
#163Thin Film Transistor (TFT) and Method for Fabricating the Same
#164Method for fabricating semiconductor film and semiconductor device and laser processing apparatus
#165Epitaxy of Silicon-Carbon Substitutional Solid Solutions by Ultra-Fast Annealing of Amorphous Material
#166METHOD FOR FORMING ULTRA-SHALLOW HIGH QUALITY JUNCTIONS BY A COMBINATION OF SOLID PHASE EPITAXY AND LASER ANNEALING
#167Semiconductor device and method of fabricating the same
#168Methods of fabricating silicon-on-insulator substrates having a laser-formed single crystalline film
#169Strain-inducing film formation by liquid-phase epitaxial re-growth
#170Semiconductor element, semiconductor device, and method of manufacturing the same
#171Method of manufacturing a semiconductor device
#172Methods of forming single crystalline layers and methods of manufacturing semiconductor devices having such layers
#173Crystallization method, thin film transistor manufacturing method, thin film transistor, display, and semiconductor device
#174METHOD FOR CRYSTALLIZING A SEMICONDUCTOR THIN FILM
#175Laser treatment apparatus and method of manufacturing semiconductor device
#176Beam irradiation apparatus, beam irradiation method, and method for manufacturing semiconductor device
#177Laser irradiation method and method of manufacturing a semiconductor device
#178Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, device, and light modulation element
#179Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask
#180Method for manufacturing a semiconductor device and laser irradiation method and laser irradiation apparatus
#181Semiconductor device
#182POLYSILICON STRUCTURE, THIN FILM TRANSISTOR PANEL USING THE SAME, AND MANUFACTURING METHOD OF THE SAME
#183Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
#184Laser irradiation method, laser irradiation apparatus, and method for manufacturing semiconductor device
#185Method of forming a semiconductor thin film
#186SEMICONDUCTOR THIN FILM FORMING SYSTEM
#187Polysilicon structure, thin film transistor panel using the same, and manufacturing method of the same
#188Method for manufacturing thin film integrated circuit, and element substrate
#189Laser irradiation apparatus and laser irradiation method
#190Manufacturing method of semiconductor film and image display device
#191Semiconductor device and method for manufacturing the same
#192METHOD OF FABRICATING POLYCRYSTALLINE SILICON FILM AND METHOD OF FABRICATING THIN FILM TRANSISTOR USING THE SAME
#193Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
#194Crystallization apparatus, crystallization method, device and phase modulation element
#195Laser irradiation apparatus and laser irradiation method
#196Method of manufacturing nanowire
#197Laser processing apparatus and laser processing process
#198Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile
#199Method of fabricating semiconductor device
#200Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus
#201Thin film transistor and method of fabricating the same
#202Laser beam irradiation method and method of manufacturing a thin firm transistor
#203Laser irradiation apparatus and laser irradiation method and method for manufacturing semiconductor device
#204Method for fabricating image display device
#205DISPLAY PANEL AND METHOD FOR MANUFACTURING THE SAME
#206Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
#207Semiconductor device including a crystal semiconductor layer, its fabrication and its operation
#208Scanning laser light source
#209Thin film transistor having a three-portion gate electrode and liquid crystal display using the same
#210Thermal flux processing by scanning a focused line beam
#211Manufacturing method of semiconductor device
#212Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus
#213Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device
#214Semiconductor circuit and method of fabricating the same
#215Laser irradiation apparatus and manufacturing method of semiconductor device
#216Semiconductor device and manufacturing method thereof
#217Methods for fabricating polysilicon film and thin film transistors
#218Semiconductor thin film forming method and semiconductor device
#219Apparatus and methods for thermally processing undoped and lightly doped substrates without pre-heating
#220Manufacturing method of a display device
#221Semiconductor device and semiconductor device production system
#222Polysilicon thin film fabrication method
#223Laser irradiation apparatus and laser irradiation method
#224Sequential lateral solidification device and method of crystallizing silicon using the same
#225Laser irradiating apparatus and method of manufacturing semiconductor apparatus
#226Method of manufacturing silicon wafer
#227Laser irradiation device
#228Method of semiconductor thin film crystallization and semiconductor device fabrication
#229Method for manufacturing semiconductor device
#230Method for manufacturing a thin-film transistor
#231Crystallization apparatus and method of amophous silicon
#232Apparatus for fabricating a display device
#233Polysilicon thin film transistor and method of fabricating the same
#234METHOD OF CRYSTALLIZING AMORPHOUS SEMICONDUCTOR FILM
#235Semiconductor device and semiconductor device producing system
#236Process for manufacturing a thin-film transistor (TFT) device and TFT device manufactured by the process
#237Thin-film transistor, method for manufacturing thin-film transistor, and display using thin-film transistors
#238Manufacturing method of semiconductor device
#239Method for manufacturing semiconductor device
#240Laser beam pattern mask and crystallization method using the same
#241Laser treatment device, laser treatment method, and semiconductor device fabrication method
#242Crystallization mask, crystallization method, and method of manufacturing thin film transistor including crystallized semiconductor
#243Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions
#244Method and system for producing crystalline thin films with a uniform crystalline orientation
#245Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
#246Method for manufacturing semiconductor device
#247Method of and apparatus for in-situ monitoring of crystallization state
#248Laser irradiation apparatus
#249Method of manufacturing semiconductor device
#250Semiconductor device and manufacturing method thereof
#251Semiconductor thin film manufacturing method, electronic device, and liquid crystal display device
#252Laser crystallization method suppressing propagation of cracks forming a display device
#253Semiconductor device and method for manufacturing the same
#254Image display device and method for manufacturing the same
#255Method of manufacturing semiconductor device
#256Method of fabricating polysilicon film
#257Semiconductor thin film decomposing method, decomposed semiconductor thin film, decomposed semiconductor thin film evaluation method, thin film transistor made of decomposed semiconductor thin film, and image display device having circuit constituted of thin film transistors
#258Laser thermal annealing of lightly doped silicon substrates
#259Digital light valve
#260Semiconductor device and its manufacturing method
#261Laser thermal annealing of lightly doped silicon substrates
#262Method for manufacturing semiconductor device and laser irradiation apparatus
#263Thin film transistor and thin film transistor substrate including a polycrystalline semiconductor thin film having a large heat capacity part and a small heat capacity part
#264FILM CONTROL METHOD AND DEVICE THEREOF
#265Method and apparatus for crystallizing silicon, method of forming a thin film transistor, a thin film transistor and a display apparatus using same
#266Method for manufacturing a semiconductor device that includes adding noble gas to a semiconductor film and then irradiating the semiconductor film with laser light in the presence of a magnetic field
#267Dual wavelength thermal flux laser anneal
#268Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same
#269Method for manufacturing semiconductor apparatus, and semiconductor apparatus and electric appliance
#270Method for manufacturing both a semiconductor crystalline film and semiconductor device
#271Thin film semiconductor device, method of manufacturing the same, and display
#272Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus
#273Crystallized semiconductor device, method for producing same and crystallization apparatus
#274Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly
#275Crystallized film and process for production thereof
#276Method of fabricating a polycrystalline silicon thin film transistor
#277Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices
#278Method of laser beam maching and laser beam machining apparatus
#279Method of fabricating semiconductor device
#280Semiconductor structure having multilayer of polysilicon and display panel applied with the same
#281Semiconductor fabricating apparatus
#282Crystallized semicoductor thin film manufacturing method and its manufacturing apparatus
#283Method of forming channel region of TFT composed of single crystal Si
#284Method of annealing polycrystalline silicon using solid-state laser and devices built thereon
#285Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device
#286Polysilicon film, thin film transistor using the same, and method for forming the same
#287Method of fabricating a polycrystalline film by crystallizing an amorphous film with laser light
#288Method of manufacturing a stacked transistor having a polycrystalline Si film
#289Method for manufacturing semiconductor device
#290System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques
#291Method of manufacturing an active matrix substrate and an image display device using the same
#292MIS semiconductor device and method of fabricating the same
#293Method for selective laser crystallization and display panel fabricated by using the same
#294Semiconductor device and manufacturing method thereof
#295Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
#296Laser irradiation apparatus
#297Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them
#298Method of manufacturing a polysilicon layer and a mask used therein
#299Systems and methods for creating crystallographic-orientation controlled poly-silicon films
#300Method for fabricating a semiconductor device