207176 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using physical deposition, e.g. vacuum deposition, sputtering
Sub-classes:Metal plate for deposition mask, and deposition mask and manufacturing method therefor
#2Split-gate MOSFET with gate shield
#3Metal plate for deposition mask, and deposition mask and manufacturing method therefor
#4Semiconductor deposition monitoring device
#5METHOD OF FORMING ION SENSORS
#6Manufacturing method for semiconductor laminated film, and semiconductor laminated film
#7Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate
#8Method of forming interconnect for semiconductor device
#9Microelectronic devices with conductive contacts to silicide regions, and related devices
#10Sputtering method and sputtering apparatus
#11Method for manufacturing perovskite solar cell module and perovskite solar cell module
#12Compound semiconductor, method for manufacturing same, and nitride semiconductor
#13Light-emitting device, method for manufacturing the same, and projector
#14Pressurizing device and pressurizing method
#15Focus ring adjustment assembly of a system for processing workpieces under vacuum
#16Plasma processing apparatus having a focus ring adjustment assembly
#17End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum
#18INLINE VACUUM PROCESSING SYSTEM WITH SUBSTRATE AND CARRIER COOLING
#19Methods for using remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition to grow layers in light emitting devices
#20Metal plate for deposition mask, and deposition mask and manufacturing method therefor
#21HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#22Methods for using remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition to grow layers in light emitting devices
#23Amorphous oxide semiconductor film, oxide sintered body, thin film transistor, sputtering target, electronic device, and amorphous oxide semiconductor film production method
#24Sputtering device
#25Method and apparatus for fabricating a stretchable electronic element
#26Method for forming epitaxial layer at low temperature
#27Metal plate for deposition mask, and deposition mask and manufacturing method therefor
#28n-Type SiC single crystal substrate, method for producing same and SiC epitaxial wafer
#29Manufacturing method for semiconductor laminated film, and semiconductor laminated film
#30Film carrier, film application apparatus, film application method, and film to be applied used in display panel
#31Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate
#32Compound semiconductor, method for manufacturing same, and nitride semiconductor
#33Textured processing chamber components and methods of manufacturing same
#34Pressurizing device and pressurizing method
#35METHOD OF MAKING A TANTALUM SPUTTERING TARGET WITH INCREASED DEPOSITION RATE
#36Method for preparing ceramic package substrate with copper-plated dam
#37TFT substrate and manufacturing method thereof
#38APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE
#39Semiconductor manufacturing apparatus
#40Radio frequency power source device, and power source for dual cathodes
#41Quantum doping method and use in fabrication of nanoscale electronic devices
#42Photoelectric conversion device, method of manufacturing the same, and camera
#43PROCESSING DEVICE AND COLLIMATOR
#44Bonding device for chip on film and display panel and bonding method for the same
#45Vapor deposition unit, vapor deposition device, and vapor deposition method
#46Semiconductor device and method of manufacturing the same
#47Sputtering apparatus and processing apparatus
#48Semiconductor device and method of manufacturing the same
#49SPUTTERING TARGET, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR
#50INJECTION MEMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA PROCESSING APPARATUS HAVING THE SAME
#51Quantum doping method and use in fabrication of nanoscale electronic devices