ClassID:

207176

H01L21/203 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using physical deposition, e.g. vacuum deposition, sputtering

Sub-classes:
Recent Application in this class:
#1
20220190250
2022-06-16

Metal plate for deposition mask, and deposition mask and manufacturing method therefor

#2
20220165863
2022-05-26

Split-gate MOSFET with gate shield

#3
20220149283
2022-05-12

Metal plate for deposition mask, and deposition mask and manufacturing method therefor

#4
20210388501
2021-12-16

Semiconductor deposition monitoring device

#5
20210325337
2021-10-21

METHOD OF FORMING ION SENSORS

#6
20210189549
2021-06-24

Manufacturing method for semiconductor laminated film, and semiconductor laminated film

#7
20210143009
2021-05-13

Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate

#8
20210125864
2021-04-29

Method of forming interconnect for semiconductor device

#9
20210118676
2021-04-22

Microelectronic devices with conductive contacts to silicide regions, and related devices

#10
20210082675
2021-03-18

Sputtering method and sputtering apparatus

#11
20210057169
2021-02-25

Method for manufacturing perovskite solar cell module and perovskite solar cell module

#12
20210047720
2021-02-18

Compound semiconductor, method for manufacturing same, and nitride semiconductor

#13
20210043457
2021-02-11

Light-emitting device, method for manufacturing the same, and projector

#14
20210028018
2021-01-28

Pressurizing device and pressurizing method

#15
20200365405
2020-11-19

Focus ring adjustment assembly of a system for processing workpieces under vacuum

#16
20200365377
2020-11-19

Plasma processing apparatus having a focus ring adjustment assembly

#17
20200361094
2020-11-19

End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum

#18
20200350188
2020-11-05

INLINE VACUUM PROCESSING SYSTEM WITH SUBSTRATE AND CARRIER COOLING

#19
20200243331
2020-07-30

Methods for using remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition to grow layers in light emitting devices

#20
20200227640
2020-07-16

Metal plate for deposition mask, and deposition mask and manufacturing method therefor

#21
20200227273
2020-07-16

HARD MASK AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

#22
20200203158
2020-06-25

Methods for using remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition to grow layers in light emitting devices

#23
20200052130
2020-02-13

Amorphous oxide semiconductor film, oxide sintered body, thin film transistor, sputtering target, electronic device, and amorphous oxide semiconductor film production method

#24
20190390325
2019-12-26

Sputtering device

#25
20190327828
2019-10-24

Method and apparatus for fabricating a stretchable electronic element

#26
20190304785
2019-10-03

Method for forming epitaxial layer at low temperature

#27
20190259951
2019-08-22

Metal plate for deposition mask, and deposition mask and manufacturing method therefor

#28
20190252504
2019-08-15

n-Type SiC single crystal substrate, method for producing same and SiC epitaxial wafer

#29
20190242008
2019-08-08

Manufacturing method for semiconductor laminated film, and semiconductor laminated film

#30
20190237334
2019-08-01

Film carrier, film application apparatus, film application method, and film to be applied used in display panel

#31
20190214252
2019-07-11

Semiconductor crystal substrate, infrared detector, and method for producing semiconductor crystal substrate

#32
20190194796
2019-06-27

Compound semiconductor, method for manufacturing same, and nitride semiconductor

#33
20190177835
2019-06-13

Textured processing chamber components and methods of manufacturing same

#34
20190139769
2019-05-09

Pressurizing device and pressurizing method

#35
20190055629
2019-02-21

METHOD OF MAKING A TANTALUM SPUTTERING TARGET WITH INCREASED DEPOSITION RATE

#36
20190013239
2019-01-10

Method for preparing ceramic package substrate with copper-plated dam

#37
20180337049
2018-11-22

TFT substrate and manufacturing method thereof

#38
20180265965
2018-09-20

APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE

#39
20180261437
2018-09-13

Semiconductor manufacturing apparatus

#40
20180249570
2018-08-30

Radio frequency power source device, and power source for dual cathodes

#41
20180174842
2018-06-21

Quantum doping method and use in fabrication of nanoscale electronic devices

#42
20180166591
2018-06-14

Photoelectric conversion device, method of manufacturing the same, and camera

#43
20180067330
2018-03-08

PROCESSING DEVICE AND COLLIMATOR

#44
20180053664
2018-02-22

Bonding device for chip on film and display panel and bonding method for the same

#45
20180047904
2018-02-15

Vapor deposition unit, vapor deposition device, and vapor deposition method

#46
20180013005
2018-01-11

Semiconductor device and method of manufacturing the same

#47
20170140907
2017-05-18

Sputtering apparatus and processing apparatus

#48
20160155852
2016-06-02

Semiconductor device and method of manufacturing the same

#49
20140110249
2014-04-24

SPUTTERING TARGET, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR

#50
20130276983
2013-10-24

INJECTION MEMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA PROCESSING APPARATUS HAVING THE SAME

#51
13964192
2018-01-16

Quantum doping method and use in fabrication of nanoscale electronic devices