207207 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Bombardment with radiation with high-energy radiation for heating, e.g. electron beam heating
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
#2LASER HEAT TREATMENT METHOD AND MANUFACTURING METHOD OF ELECTRONIC DEVICE USING THE SAME
#3SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR DEVICE
#4SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDUCTOR SUBSTRATES
#5SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
#6Semiconductor device and manufacturing method of semiconductor device
#7METHOD AND APPARATUS FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR
#8Carbon Assisted Semiconductor Dicing And Method
#9Method for manufacturing semiconductor device with impurity doped oxide semiconductor layer
#10SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
#11METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP IN A SEMICONDUCTOR WAFER REACTOR
#12FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON 3C-SIC, AND 3C-SIC ELECTRONIC DEVICE
#13RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
#14Selective carbon deposition on top and bottom surfaces of semiconductor substrates
#15Heating device for heating object material using laser beam and indirect heating method using laser beam
#16Method for manufacturing electronic device
#17Semiconductor device including transistor with doped oxide semiconductor and method for manufacturing the semiconductor device
#18SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
#19Laser-Assisted Epitaxy and Etching for Manufacturing Integrated Circuits
#20SYSTEM AND METHODS FOR A RADIANT HEAT CAP IN A SEMICONDUCTOR WAFER REACTOR
#21RF substrate structure and method of production
#22Method for Producing or Modifying Silicon Carbide-Containing Articles
#23SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#24Semiconductor device and manufacturing method of semiconductor device
#25Semiconductor substrate crack mitigation systems and related methods
#26Substrate treating apparatus and liquid supplying method
#27Process apparatus including a non-contact thermo-sensor
#28Heat treatment method and heat treatment apparatus of light irradiation type
#29Apparatus with doped surfaces, and related methods with in situ doping
#30A METHOD OF MAKING A GRAPHENE TRANSISTOR AND DEVICES
#31Apparatus for treating substrate and method for treating apparatus
#32Short-wave infrared detector array and fabrication methods thereof
#33Heating device for heating object material using laser beam and indirect heating method using laser beam
#34Semiconductor device including transistor with oxide semiconductor and method for manufacturing the semiconductor device
#35Semiconductor substrate crack mitigation systems and related methods
#36Heat treatment apparatus and heat treatment method
#37Method and apparatus for non line-of-sight doping
#38Multilayer graphene using chemical vapor deposition and method of manufacturing same
#39Method and apparatus for non line-of-sight doping
#40Semiconductor substrate crack mitigation systems and related methods
#41Light-irradiation heat treatment method and heat treatment apparatus
#42Methods for fabricating artificial neural networks (ANN) based on doped semiconductor resistive random access memory (RRAM) elements
#43Artificial neural networks (ANN) including a resistive element based on doped semiconductor elements
#44APPARATUS FOR ANNEALING A LAYER OF SEMICONDUCTOR MATERIAL, A METHOD OF ANNEALING A LAYER OF SEMICONDUCTOR MATERIAL, AND A FLAT PANEL DISPLAY
#45Heat treatment method including low temperature degassing before flash lamp anneal and heat treatment apparatus thereof
#46Technique and related semiconductor devices based on crystalline semiconductor material formed on the basis of deposited amorphous semiconductor material
#47Light-irradiation heat treatment method and heat treatment apparatus
#48Laser annealing device
#49Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
#50Synthesis and fabrication of transition metal dichalcogenide structures
#51Methods for fabricating anode shorted field stop insulated gate bipolar transistor
#52Semiconductor device
#53METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
#54Oxide semiconductor film and semiconductor device
#55Mechanisms for forming FinFETs with different fin heights
#56Heat treatment method for p-type semiconductor
#57SUBSTRATE PROCESSING APPARATUS
#58Plasma processing apparatus and plasma processing method
#59Semiconductor layer separation from single crystal silicon substrate by infrared irradiation of porous silicon separation layer
#60Semiconductor device manufacturing method
#61Method for reducing N-type FinFET source and drain resistance
#62Manufacturing method of monocrystalline silicon and monocrystalline silicon
#63DIRECT OPTICAL HEATING OF SUBSTRATES
#64Electrode assembly and method for manufacturing same
#65Semiconductor wafer and method of manufacturing semiconductor devices in a semiconductor wafer
#66LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD
#67Semiconductor device and method for manufacturing the same
#68High-efficiency line-forming optical systems and methods for defect annealing and dopant activation
#69Mechanisms for forming FinFETs with different fin heights
#70Light-irradiation heat treatment method and heat treatment apparatus
#71Gate stack formed with interrupted deposition processes and laser annealing
#72Semiconductor device and method of manufacturing the semiconductor device
#73Semiconductor wafer and method of manufacturing semiconductor devices in a semiconductor wafer
#74Silicon carbide semiconductor device and method for manufacturing same
#75Application of thin insulating film layer in semiconductor device and method of manufacturing semiconductor device
#76Methods for fabricating anode shorted field stop insulated gate bipolar transistor
#77Apparatus and methods for annealing wafers
#78Oxide semiconductor film and semiconductor device
#79High-efficiency line-forming optical systems and methods for defect annealing and dopant activation
#80Laser annealing device including tunable mask and method of using the same
#81Adjusting the charge carrier lifetime in a bipolar semiconductor device
#82Mechanisms for forming FinFETs with different fin heights
#83Semiconductor device
#84LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD
#85Silicon carbide semiconductor device and method for manufacturing same
#86Semiconductor device and manufacturing method therefor
#87Mechanisms for forming FinFETs with different fin heights
#88DUAL WAVELENGTH ANNEALING METHOD AND APPARATUS
#89Plasma processing device, plasma processing method and method of manufacturing electronic devices
#90Low-k dielectric damage repair by vapor-phase chemical exposure
#91Method for manufacturing a semiconductor device
#92Plasma processing apparatus and plasma processing method
#93Semiconductor device with field stop layer and semiconductor device manufacturing method thereof
#94LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
#95Method for performing laser crystallization
#96Formation of localised molten regions in silicon containing multiple impurity types
#97Crystallization processing for semiconductor applications
#98SYSTEMS AND METHODS FOR PROCESSING THIN FILMS
#99Method and process to reduce stress based overlay error
#100Charged particle beam writing apparatus, aperture unit, and charged particle beam writing method
#101Processing system for electromagnetic wave treatment of a substrate at microwave frequencies
#102Process sheet resistance uniformity improvement using multiple melt laser exposures
#103Thermal processing method and thermal processing apparatus for heating substrate, and susceptor
#104Substrate rapid thermal heating system and methods
#105Apparatus and methods for improving the intensity profile of a beam image used to process a substrate
#106Heat treatment apparatus and heat treatment method for heating substrate by irradiating substrate with flash of light
#107APPARATUS AND METHOD FOR REDUCING RESIDUAL STRESS OF SEMICONDUCTOR
#108Short pulse fiber laser for LTPS crystallization
#109Site-isolated rapid thermal processing methods and apparatus
#110SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM
#111Laser annealing device and method
#112Sub-second annealing lithography techniques
#113Edge ring lip
#114METHODS OF THERMALLY PROCESSING A SUBSTRATE
#115Silicon carbide semiconductor device and method for manufacturing same
#116ANNEALING A SACRIFICIAL LAYER
#117Low-k dielectric damage repair by vapor-phase chemical exposure
#118Apparatus and method for improved control of heating and cooling of substrates
#119Two-beam laser annealing with improved temperature performance
#120Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
#121Laser annealing systems and methods with ultra-short dwell times
#122Laser annealing method, laser annealing apparatus, and method for manufacturing thin film transistor
#123Two-beam laser annealing with improved temperature performance
#124Crystallization processing for semiconductor applications
#125Apparatus and methods for annealing wafers
#126METHODS OF THERMALLY PROCESSING A SUBSTRATE
#127Methods for fabricating anode shorted field stop insulated gate bipolar transistor
#128LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD
#129Localized annealing of metal-silicon carbide ohmic contacts and devices so formed
#130Method of manufacturing silicon carbide semiconductor apparatus
#131Crystallization processing for semiconductor applications
#132Oxide semiconductor film and semiconductor device
#133Rapid thermal processing systems and methods for treating microelectronic substrates
#134Method of mask forming and method of three-dimensional microfabrication
#135Apparatus and method for improved control of heating and cooling of substrates
#136SYSTEMS AND METHODS FOR PROCESSING THIN FILMS
#137Method of reducing an inter-atomic bond strength in a substance
#138Heating treatment device, heating treatment method and fabrication method of semiconductor device
#139Localized annealing of metal-silicon carbide ohmic contacts and devices so formed
#140Systems and methods for processing thin films
#141Electron flood lithography