Patents-Review.com
ClassID:

207205 ⎘

H01L21/263 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Bombardment with radiation with high-energy radiation

Sub-classes:
Recent Application in this class:
#1
20260010079
2026-01-08

APERTURE CORRECTION AMOUNT CALCULATION METHOD FOR APERTURE ARRAY SUBSTRATE, APERTURE ARRAY SUBSTRATE, BLANKING APERTURE ARRAY SUBSTRATE, MULTIPLE CHARGED-PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHARGED-PARTICLE BEAM WRITING METHOD

 #2
20250357181
2025-11-20

GROUND RETURN PATH FOR WAFER PROCESS CHAMBER

 #3
20250293002
2025-09-18

Workpiece Processing Apparatus with Outer Gas Channel Insert

 #4
20250253126
2025-08-07

CHARGED PARTICLE BEAM WRITING APPARATUS, SHOT DATA CORRECTION METHOD AND CHARGED PARTICLE BEAM WRITING METHOD

 #5
20250218740
2025-07-03

Plasma Strip Tool With Movable Insert

 #6
20250201709
2025-06-19

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

 #7
20250201542
2025-06-19

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #8
20250157822
2025-05-15

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #9
20250069956
2025-02-27

ION BEAM INSPECTION AND REPAIR WITH INCREASED SECONDARY ELECTRON YIELD

 #10
20240234085
2024-07-11

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION BEAM AND AN INNOVATIVE SCANNING STRATEGY

 #11
20240162041
2024-05-16

METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR WAFER

 #12
20240136150
2024-04-25

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION BEAM AND AN INNOVATIVE SCANNING STRATEGY

 #13
20240071754
2024-02-29

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing

 #14
20240047200
2024-02-08

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #15
20230276716
2023-08-31

METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS FOR QUANTUM COMPUTER

 #16
20230230814
2023-07-20

Method and Apparatus for Plasma Processing

 #17
20230154719
2023-05-18

Charged particle source module

 #18
20230054142
2023-02-23

Processing method for semiconductor surface defects and preparation method for semiconductor devices

 #19
20220376104
2022-11-24

TRANSISTORS INCLUDING SEMICONDUCTOR SURFACE MODIFICATION AND RELATED FABRICATION METHODS

 #20
20220310359
2022-09-29

Enhanced ignition in inductively coupled plasmas for workpiece processing

 #21
20220293398
2022-09-15

SUBSTRATE PROCESSING APPARATUS

 #22
20220277938
2022-09-01

SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING METHOD

 #23
20220223380
2022-07-14

MICROWAVE SUPPLY MECHANISM, PLASMA TREATMENT APPARATUS, AND PLASMA TREATMENT METHOD

 #24
20220208523
2022-06-30

Workpiece Processing Apparatus with Outer Gas Channel Insert

 #25
20220208518
2022-06-30

Directly Driven Hybrid ICP-CCP Plasma Source

 #26
20220208514
2022-06-30

Grid Assembly for Plasma Processing Apparatus

 #27
20220068611
2022-03-03

Plasma strip tool with movable insert

 #28
20220037200
2022-02-03

Method for manufacturing semiconductor device, method for packaging semiconductor chip, method for manufacturing shallow trench isolation (STI)

 #29
20220013362
2022-01-13

Electron beam lithography with dynamic fin overlay correction

 #30
20210398812
2021-12-23

Semiconductor device and method of manufacturing semiconductor device

 #31
20210384033
2021-12-09

SHOWER PLATE, SUBSTRATE TREATMENT DEVICE, AND SUBSTRATE TREATMENT METHOD

 #32
20210376068
2021-12-02

Method of forming a semiconductor device

 #33
20210327678
2021-10-21

Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system

 #34
20210242084
2021-08-05

Substrate processing system and substrate processing method

 #35
20210242027
2021-08-05

Substrate processing method, modification device and substrate processing system

 #36
20210202302
2021-07-01

Substrates including useful layers

 #37
20210143252
2021-05-13

Semiconductor device and method for producing semiconductor device

 #38
20210098252
2021-04-01

Semiconductor device and method for manufacturing the same

 #39
20210091175
2021-03-25

Semiconductor device and method for manufacturing semiconductor device

 #40
20210050213
2021-02-18

Enhanced ignition in inductively coupled plasmas for workpiece processing

 #41
20200381515
2020-12-03

Semiconductor device and method of manufacturing semiconductor device

 #42
20200373418
2020-11-26

Semiconductor device and manufacturing method of semiconductor device

 #43
20200219971
2020-07-09

Semiconductor device and method for manufacturing semiconductor device

 #44
20200219806
2020-07-09

Fabricating unique chips using a charged particle multi-beamlet lithography system

 #45
20200144360
2020-05-07

Method of manufacturing a semiconductor device in which a lifetime of carriers is controlled

 #46
20200098651
2020-03-26

Systems and methods for controlling plasma instability in semiconductor fabrication

 #47
20200075293
2020-03-05

Method and apparatus for plasma processing

 #48
20200051820
2020-02-13

Manufacturing method of semiconductor device

 #49
20200043693
2020-02-06

Charged particle source module

 #50
20200013712
2020-01-09

Fabricating unique chips using a charged particle multi-beamlet lithography system

 #51
20190371607
2019-12-05

Apparatus and method for bonding substrates

 #52
20190355582
2019-11-21

Method of manufacturing semiconductor device

 #53
20190341259
2019-11-07

Substrate treating apparatus and substrate treating method

 #54
20190319091
2019-10-17

Method of forming a semiconductor device

 #55
20190319090
2019-10-17

Semiconductor device and method for producing semiconductor device

 #56
20190259846
2019-08-22

Wrap around contact

 #57
20190259582
2019-08-22

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

 #58
20190221471
2019-07-18

Method for transferring a useful layer

 #59
20190214462
2019-07-11

Semiconductor device and method of manufacturing semiconductor device

 #60
20190181221
2019-06-13

Semiconductor device and method for producing semiconductor device

 #61
20190174584
2019-06-06

Solder reflow apparatus and method of manufacturing an electronic device

 #62
20190157435
2019-05-23

Method of manufacturing a semiconductor device having an undulated profile of net doping in a drift zone

 #63
20190148536
2019-05-16

Semiconductor device having super junction metal oxide semiconductor structure and fabrication method for the same

 #64
20190131440
2019-05-02

Power semiconductor device and method of fabricating the same

 #65
20190115211
2019-04-18

Semiconductor device and method for manufacturing the same

 #66
20190103274
2019-04-04

METHOD OF TRANSFERRING MICRO DEVICE

 #67
20190067462
2019-02-28

Semiconductor device having semiconductor regions with an impurity concentration distribution which decreases from a respective peak toward different semiconductor layers

 #68
20190035676
2019-01-31

Method for manufacturing semiconductor device having via formed by ion beam

 #69
20180350962
2018-12-06

Semiconductor device and manufacturing method of semiconductor device

 #70
20180350902
2018-12-06

Semiconductor device and method for manufacturing semiconductor device

 #71
20180350901
2018-12-06

Semiconductor device and method for producing semiconductor device

 #72
20180337050
2018-11-22

Semiconductor device and method of manufacturing semiconductor device

 #73
20180331176
2018-11-15

Semiconductor device and method for producing semiconductor device

 #74
20180308771
2018-10-25

Proton radiation as a tool for selective degradation and physics based device model test and calibration

 #75
20180248003
2018-08-30

Semiconductor device and method for manufacturing semiconductor device

 #76
20180226486
2018-08-09

Production method for semiconductor device

 #77
20180219085
2018-08-02

Semiconductor device having multiple field stop layers

 #78
20180219076
2018-08-02

Methods for forming wrap around contact

 #79
20180219062
2018-08-02

Method of manufacturing semiconductor device

 #80
20180197982
2018-07-12

Semiconductor device with a guard structure and corresponding methods of manufacture

 #81
20180197737
2018-07-12

High electron mobility transistor manufacturing method and high electron mobility transistor

 #82
20180182628
2018-06-28

Substrate treating apparatus and substrate treating method

 #83
20180182623
2018-06-28

Method of forming fine patterns of a semiconductor device

 #84
20180175216
2018-06-21

Semiconductor device

 #85
20180175142
2018-06-21

Power semiconductor device and method therefor

 #86
20180138265
2018-05-17

Power semiconductor device and method therefor

 #87
20180130658
2018-05-10

Apparatus and method for bonding substrates

 #88
20180120704
2018-05-03

Fabricating unique chips using a charged particle multi-beamlet lithography system

 #89
20180102423
2018-04-12

Semiconductor device having a variable carbon concentration

 #90
20180076100
2018-03-15

Systems and methods for detection of plasma instability by electrical measurement

 #91
20180047815
2018-02-15

Metallization and its use in, in particular, an IGBT or a diode

 #92
20180047564
2018-02-15

METHOD TO TUNE CONTACT CD AND REDUCE MASK COUNT BY TILTED ION BEAM

 #93
20180019306
2018-01-18

Semiconductor device containing oxygen-related thermal donors

 #94
20180012987
2018-01-11

Semiconductor device having super junction metal oxide semiconductor structure and fabrication method for the same

 #95
20180006114
2018-01-04

Semiconductor device including crystal defect region and method for manufacturing the same

 #96
20180005831
2018-01-04

Method of reducing an impurity concentration in a semiconductor body

 #97
20180005829
2018-01-04

Semiconductor device and manufacturing method of semiconductor device

 #98
20170373182
2017-12-28

Semiconductor devices and methods for forming a semiconductor device

 #99
20170372966
2017-12-28

Semiconductor layer separation from single crystal silicon substrate by infrared irradiation of porous silicon separation layer

 #100
20170358649
2017-12-14

Method of manufacturing a semiconductor device having an impurity concentration

 #101
20170352768
2017-12-07

Semiconductor device manufacturing method

 #102
20170345888
2017-11-30

Semiconductor device and method for producing semiconductor device

 #103
20170338236
2017-11-23

Non-overlapped-extension-implantation nonvolatile memory device capable of being treated with anti-fuse operation

 #104
20170323778
2017-11-09

Plasma poisoning to enable selective deposition

 #105
20170317163
2017-11-02

Semiconductor device and method for producing semiconductor device

 #106
20170301751
2017-10-19

Semiconductor device and method of manufacturing the same

 #107
20170301547
2017-10-19

Method for manufacturing nonvolatile memory thin film device by using neutral particle beam generation apparatus

 #108
20170288021
2017-10-05

Semiconductor device having a super junction structure

 #109
20170271447
2017-09-21

Semiconductor device and method of manufacturing semiconductor device

 #110
20170250413
2017-08-31

Method forming a graphene oxide-reduced graphene oxide junction

 #111
20170243938
2017-08-24

Semiconductor wafer and method of manufacturing semiconductor devices in a semiconductor wafer

 #112
20170236714
2017-08-17

Method for removing crystal originated particles from a crystalline silicon body using an etch process

 #113
20170186838
2017-06-29

Method of forming a semiconductor device

 #114
20170154963
2017-06-01

CONTROLLED DOPING FROM LOW TO HIGH LEVELS IN WIDE BANDGAP SEMICONDUCTORS

 #115
20170148613
2017-05-25

Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system

 #116
20170141002
2017-05-18

Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability

 #117
20170141001
2017-05-18

Systems and methods for detection of plasma instability by optical diagnosis

 #118
20170140968
2017-05-18

Systems and methods for controlling plasma instability in semiconductor fabrication

 #119
20170140938
2017-05-18

Method of forming a semiconductor device

 #120
20170103882
2017-04-13

Method of manufacturing semiconductor wafers and method of manufacturing a semiconductor device

 #121
20170084693
2017-03-23

Semiconductor device including crystal defect region and method for manufacturing the same

 #122
20170084610
2017-03-23

Semiconductor device

 #123
20170077001
2017-03-16

Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system

 #124
20170069553
2017-03-09

Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system

 #125
20170069482
2017-03-09

Float zone silicon wafer manufacturing system and related process

 #126
20170062268
2017-03-02

SOI wafer manufacturing process and SOI wafer

 #127
20170040192
2017-02-09

Thin heated substrate support

 #128
20170018434
2017-01-19

Semiconductor device and semiconductor device manufacturing method

 #129
20170011948
2017-01-12

Semiconductor structures including carrier wafers and attached device wafers, and methods of forming such semiconductor structures

 #130
20170005163
2017-01-05

Power semiconductor device edge structure

 #131
20160379983
2016-12-29

Integrated circuit structure

 #132
20160372541
2016-12-22

Semiconductor device and method of manufacturing semiconductor device

 #133
20160372329
2016-12-22

Methods for forming a semiconductor device and a semiconductor device

 #134
20160365250
2016-12-15

Semiconductor device and method of manufacturing the semiconductor device

 #135
20160351671
2016-12-01

Methods for forming wrap around contact

 #136
20160351400
2016-12-01

Semiconductor device and method of manufacturing semiconductor device

 #137
20160343568
2016-11-24

Method for forming surface oxide layer on amorphous silicon

 #138
20160336409
2016-11-17

Semiconductor device having an impurity concentration and method of manufacturing thereof

 #139
20160315142
2016-10-27

Method for manufacturing vertical super junction drift layer of power semiconductor devices

 #140
20160315140
2016-10-27

Semiconductor device and manufacturing method of semiconductor device

 #141
20160307757
2016-10-20

Method for controlling surface charge on wafer surface in semiconductor fabrication

 #142
20160284835
2016-09-29

Semiconductor device having super junction metal oxide semiconductor structure and fabrication method for the same

 #143
20160284825
2016-09-29

Semiconductor device having multiple field stop layers

 #144
20160284796
2016-09-29

Manufacturing method for semiconductor device

 #145
20160284608
2016-09-29

Methods for reducing metal contamination on a surface of a sapphire substrate by plasma treatment

 #146
20160276289
2016-09-22

Wafer structure for electronic integrated circuit manufacturing

 #147
20160268366
2016-09-15

Semiconductor device and method for producing semiconductor device

 #148
20160268136
2016-09-15

Non-ambipolar electric pressure plasma uniformity control

 #149
20160268135
2016-09-15

Wafer structure for electronic integrated circuit manufacturing

 #150
20160254374
2016-09-01

Semiconductor device and method for manufacturing the same

 #151
20160254235
2016-09-01

Semiconductor device security

 #152
20160254227
2016-09-01

Semiconductor device security

 #153
20160225626
2016-08-04

Method for producing a semiconductor

 #154
20160225625
2016-08-04

Apparatus and method for bonding substrates including changing a stoichiometry of oxide layers formed on the substrates

 #155
20160211385
2016-07-21

Manufacturing method for semiconductor device with point defect region doped with transition metal

 #156
20160211323
2016-07-21

Semiconductor device, method of manufacturing the same, and power module

 #157
20160190231
2016-06-30

Semiconductor switch

 #158
20160172298
2016-06-16

Semiconductor device and manufacturing method of the same

 #159
20160163786
2016-06-09

Semiconductor device and method for producing semiconductor device

 #160
20160141399
2016-05-19

Method for forming a semiconductor device and a semiconductor device

 #161
20160111489
2016-04-21

Semiconductor device and method for manufacturing semiconductor device

 #162
20160101598
2016-04-14

Composite substrate and method for manufacturing same

 #163
20160099186
2016-04-07

Method for postdoping a semiconductor wafer

 #164
20160087064
2016-03-24

Semiconductor device, and method of manufacturing semiconductor device

 #165
20160079065
2016-03-17

Laser annealing device including tunable mask and method of using the same

 #166
20160064233
2016-03-03

Processing systems and methods for halide scavenging

 #167
20160043204
2016-02-11

Diodes and methods of manufacturing diodes

 #168
20160043065
2016-02-11

Semiconductor multi-project or multi-product wafer process

 #169
20160035881
2016-02-04

Semiconductor device including a super junction MOSFET

 #170
20160005805
2016-01-07

MIM capacitors for leakage current improvement

 #171
20160005622
2016-01-07

Method for reducing nonuniformity of forward voltage of semiconductor wafer

 #172
20150371858
2015-12-24

Method for treating a semiconductor wafer

 #173
20150364613
2015-12-17

Semiconductor device

 #174
20150332930
2015-11-19

Processing systems and methods for halide scavenging

 #175
20150270365
2015-09-24

Selective dielectric spacer deposition for exposing sidewalls of a finFET

 #176
20150270157
2015-09-24

Semiconductor device and manufacturing method therefor

 #177
20150270130
2015-09-24

Method for removing crystal originated particles from a crystalline silicon body

 #178
20150262834
2015-09-17

Temperature ramping using gas distribution plate heat

 #179
20150262821
2015-09-17

Method of creation of defects using X-ray radiation and electric field and its application

 #180
20150255559
2015-09-10

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #181
20150255354
2015-09-10

Composite substrate with a high-performance semiconductor layer and method of manufacturing the same

 #182
20150242563
2015-08-27

Enhanced stitching by overlap dose and feature reduction

 #183
20150235727
2015-08-20

Operating process for an irradiation device

 #184
20150228586
2015-08-13

Semiconductor device and manufacturing method of the same

 #185
20150228488
2015-08-13

Semiconductor device manufacturing method and semiconductor manufacturing apparatus

 #186
20150221763
2015-08-06

Semiconductor device manufacturing method

 #187
20150214347
2015-07-30

Semiconductor device including undulated profile of net doping in a drift zone

 #188
20150206758
2015-07-23

Method for manufacturing semiconductor device

 #189
20150206690
2015-07-23

System and method for generating ions in an ion source

 #190
20150187930
2015-07-02

Semiconductor element including active region, low resistance layer and vertical drift portion

 #191
20150179441
2015-06-25

Semiconductor device and method for manufacturing the same

 #192
20150179205
2015-06-25

Pattern formation method, stamper manufacturing method, and magnetic recording medium manufacturing method

 #193
20150162193
2015-06-11

Plasma processing method and plasma processing apparatus

 #194
20150153320
2015-06-04

MANUFACTURABLE SUB-3 NANOMETER PALLADIUM GAP DEVICES FOR FIXED ELECTRODE TUNNELING RECOGNITION

 #195
20150140748
2015-05-21

Integrated circuit structure to resolve deep-well plasma charging problem and method of forming the same

 #196
20150137114
2015-05-21

Electronic device having carbon layer and method for manufacturing the same

 #197
20150115283
2015-04-30

SiC bipolar junction transistor with reduced carrier lifetime in collector and a defect termination layer

 #198
20150064934
2015-03-05

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #199
20150064890
2015-03-05

Method for producing a semiconductor

 #200
20150064882
2015-03-05

Gettering process for producing semiconductor device

 #201
20150050798
2015-02-19

Production method for a semiconductor device

 #202
20150050754
2015-02-19

Method for postdoping a semiconductor wafer

 #203
20150044825
2015-02-12

Compound semiconductor device and method of manufacturing the same

 #204
20150004807
2015-01-01

Drawing apparatus, and method of manufacturing article

 #205
20140374793
2014-12-25

Manufacturing method for semiconductor device

 #206
20140370718
2014-12-18

Etch process for reducing directed self assembly pattern defectivity using direct current positioning

 #207
20140367042
2014-12-18

SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA

 #208
20140357026
2014-12-04

Production method for semiconductor device

 #209
20140339681
2014-11-20

Method for fabricating a composite structure to be separated by exfoliation

 #210
20140315359
2014-10-23

Semiconductor device manufacturing method

 #211
20140312411
2014-10-23

Semiconductor device having super junction metal oxide semiconductor structure and fabrication method for the same

 #212
20140306127
2014-10-16

Method and system for modifying substrate relief features using ion implantation

 #213
20140302621
2014-10-09

Semiconductor device and manufacturing method therefor

 #214
20140299915
2014-10-09

Semiconductor device

 #215
20140284657
2014-09-25

Semiconductor device and method for manufacturing semiconductor device

 #216
20140273538
2014-09-18

NON-AMBIPOLAR ELECTRIC PRESSURE PLASMA UNIFORMITY CONTROL

 #217
20140273537
2014-09-18

High density plasma reactor with multiple top coils

 #218
20140273536
2014-09-18

Charged particle beam writing apparatus, aperture unit, and charged particle beam writing method

 #219
20140273489
2014-09-18

Processing systems and methods for halide scavenging

 #220
20140273488
2014-09-18

Processing systems and methods for halide scavenging

 #221
20140273481
2014-09-18

Processing systems and methods for halide scavenging

 #222
20140273406
2014-09-18

Processing systems and methods for halide scavenging

 #223
20140265846
2014-09-18

Scalable and uniformity controllable diffusion plasma source

 #224
20140262038
2014-09-18

Processing systems and methods for halide scavenging

 #225
20140256150
2014-09-11

Wafer processing method

 #226
20140246755
2014-09-04

Semiconductor device and method for producing semiconductor device

 #227
20140246750
2014-09-04

Semiconductor device and method for producing semiconductor device

 #228
20140242769
2014-08-28

Method of manufacturing a super-junction semiconductor device

 #229
20140239390
2014-08-28

Lateral devices containing permanent charge

 #230
20140217463
2014-08-07

Bipolar semiconductor switch and a manufacturing method therefor

 #231
20140217407
2014-08-07

Semiconductor device and method of manufacturing semiconductor device

 #232
20140187056
2014-07-03

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #233
20140162466
2014-06-12

Method and system for forming a pattern on a reticle using charged particle beam lithography

 #234
20140162381
2014-06-12

Laser annealing device and method

 #235
20140151858
2014-06-05

Increasing the doping efficiency during proton irradiation

 #236
20140127914
2014-05-08

Charged particle beam writing apparatus and charged particle beam writing method

 #237
20140073146
2014-03-13

Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device

 #238
20140070369
2014-03-13

Semiconductor device with point defect region doped with transition metal

 #239
20140061863
2014-03-06

Method for producing a semiconductor layer

 #240
20140048805
2014-02-20

Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly

 #241
20140038431
2014-02-06

Apparatus and methods for microwave processing of semiconductor substrates

 #242
20140034998
2014-02-06

Semiconductor device with laterally varying doping concentrations

 #243
20130334199
2013-12-19

THIN HEATED SUBSTRATE SUPPORT

 #244
20130273751
2013-10-17

Substrate processing with reduced warpage and/or controlled strain

 #245
20130256801
2013-10-03

Integrated circuit structure to resolve deep-well plasma charging problem and method of forming the same

 #246
20130193354
2013-08-01

Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample

 #247
20130137249
2013-05-30

Remote radical hydride dopant incorporation for delta doping in silicon

 #248
20130075783
2013-03-28

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #249
20130072034
2013-03-21

Substrate processing apparatus and method for manufacturing semiconductor device

 #250
20130056647
2013-03-07

Multi charged particle beam writing apparatus and multi charged particle beam writing method

 #251
20130049176
2013-02-28

Method for producing a semiconductor

 #252
20130049173
2013-02-28

Wafer structure for electronic integrated circuit manufacturing

 #253
20130049147
2013-02-28

Wafer structure for electronic integrated circuit manufacturing

 #254
20130037954
2013-02-14

Metallization and Its Use In, In Particular, an IGBT or a Diode

 #255
20130032896
2013-02-07

Semiconductor device and manufacturing method thereof

 #256
20120319163
2012-12-20

Semiconductor device including insulated gate bipolar transistor and diode

 #257
20120315747
2012-12-13

Semiconductor device and fabrication method

 #258
20120313225
2012-12-13

Integrated circuit having doped semiconductor body and method

 #259
20120267681
2012-10-25

Semiconductor device and method for manufacturing semiconductor device

 #260
20120193644
2012-08-02

BORON-DOPED DIAMOND SEMICONDUCTOR

 #261
20120169262
2012-07-05

Semiconductor device, method of manufacturing the same, and power module

 #262
20120125416
2012-05-24

Selective emitter solar cells formed by a hybrid diffusion and ion implantation process

 #263
20120107998
2012-05-03

Ion implanted solar cells with in situ surface passivation

 #264
20120088329
2012-04-12

Semiconductor multi-project or multi-product wafer process

 #265
20120071007
2012-03-22

SUBSTRATE PROCESSING WITH REDUCED WARPAGE AND/OR CONTROLLED STRAIN

 #266
20120064706
2012-03-15

Semiconductor device and method of producing the same

 #267
20120043582
2012-02-23

Semiconductor device having both IGBT area and diode area

 #268
20120032188
2012-02-09

Compound semiconductor device and method of manufacturing the same

 #269
20120015508
2012-01-19

Method of manufacturing semiconductor device

 #270
20110300707
2011-12-08

Metallization and its use in, in particular, an IGBT or a diode

 #271
20110275202
2011-11-10

Semiconductor device and fabrication method

 #272
20110223546
2011-09-15

Method and system for modifying substrate relief features using ion implantation

 #273
20110147829
2011-06-23

Semiconductor device having super junction metal oxide semiconductor structure and fabrication method for the same

 #274
20110140243
2011-06-16

Reverse recovery using oxygen-vacancy defects

 #275
20110139230
2011-06-16

Ion implanted selective emitter solar cells with in situ surface passivation

 #276
20110139229
2011-06-16

Selective emitter solar cells formed by a hybrid diffusion and ion implantation process

 #277
20110130013
2011-06-02

Substrate processing method and semiconductor device manufacturing method including a proton injection step and a laser irradiation step

 #278
20110124160
2011-05-26

Semiconductor device and method of producing the same

 #279
20110120549
2011-05-26

THIN FILM SOLAR CELL AND MANUFACTURING METHOD THREOF, METHOD FOR INCREASING CARRIER MOBILITY IN SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE

 #280
20110079882
2011-04-07

Wafer and a method for manufacturing a wafer

 #281
20110042791
2011-02-24

METHOD FOR TREATING AN OXYGEN-CONTAINING SEMICONDUCTOR WAFER, AND SEMICONDUCTOR COMPONENT

 #282
20110028003
2011-02-03

Substrate processing with reduced warpage and/or controlled strain

 #283
20100283104
2010-11-11

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #284
20100210091
2010-08-19

Method for producing a semiconductor

 #285
20100167509
2010-07-01

Method for producing a buried n-doped semiconductor zone in a semiconductor body and semiconductor component

 #286
20100136774
2010-06-03

Method of fabricating a diode

 #287
20100025742
2010-02-04

TRANSISTOR HAVING A STRAINED CHANNEL REGION CAUSED BY HYDROGEN-INDUCED LATTICE DEFORMATION

 #288
20100015818
2010-01-21

Method for producing a stop zone in a semiconductor body and semiconductor component having a stop zone

 #289
20100013020
2010-01-21

Semiconductor device with semi-insulating substrate portions

 #290
20100009551
2010-01-14

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #291
20090322342
2009-12-31

Methods for automatically characterizing a plasma

 #292
20090311852
2009-12-17

Boron-doped diamond semiconductor

 #293
20090305486
2009-12-10

Method for producing a semiconductor layer

 #294
20090298270
2009-12-03

METHOD FOR PRODUCING A SEMICONDUCTOR

 #295
20090278287
2009-11-12

Substrate processing with reduced warpage and/or controlled strain

 #296
20090230513
2009-09-17

Compound semiconductor substrate and control for electrical property thereof

 #297
20090224284
2009-09-10

Semiconductor device and method of producing the same

 #298
20090186462
2009-07-23

Semiconductor device and fabrication method

 #299
20090184340
2009-07-23

Semiconductor device and method of producing the same

 #300
20090093079
2009-04-09

Method of producing an asymmetric architecture semi-conductor device