207234 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AB compounds with or without impurities, e.g. doping materials; Treatment of semiconductor bodies using processes or apparatus not provided for in groups - to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
METHOD FOR PRODUCING SEMICONDUCTOR WAFER AND SEMICONDUCTOR WAFER
#2PROCESSING METHOD AND COMPUTER-READABLE STORAGE MEDIUM
#3Method for making memory device including a superlattice gettering layer
#4SEMICONDUCTOR DEVICE STRUCTURE HAVING GATE DIELECTRIC LAYER
#5EPITAXIAL WAFER AND PRODUCTION METHOD THEREFOR
#6PROCESSING METHOD OF BONDED WAFER
#7METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#8PROCESSING METHOD OF BONDED WAFER
#9METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#10Method for enhancing stability of N-type semiconductor through oxygen elimination
#11BONDED STRUCTURES
#12BONDED STRUCTURES
#13METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE
#14METHOD FOR PRODUCING AN EPITAXIAL WAFER
#15METHOD FOR PRODUCING A SEMICONDUCTOR STRUCTURE COMPRISING AN INTERFACE REGION INCLUDING AGGLOMERATES
#16Vertical power semiconductor device and manufacturing method
#17GETTERING LAYER FORMING DEVICE AND PROCESSING APPARATUS
#18METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS FOR QUANTUM COMPUTER
#19DETACHABLE TEMPORARY SUBSTRATE COMPATIBLE WITH VERY HIGH TEMPERATURES AND PROCESS FOR TRANSFERRING A WORKING LAYER FROM SAID SUBSTRATE
#20INTEGRATED CIRCUIT WITH GETTER LAYER FOR HYDROGEN ENTRAPMENT
#21Semiconductor structure and method for forming thereof
#22Method of manufacturing monocrystalline silicon substrate
#23Silicon carbide semiconductor device and manufacturing method thereof
#24Manufacturing method for semiconductor silicon wafer
#25METHOD FOR VERIFICATION OF CONDUCTIVITY TYPE OF SILICON WAFER
#26Bonded structures
#27Semiconductor structure and method for forming thereof
#28Exposure apparatus, exposure method, and method for manufacturing semiconductor apparatus
#29Phosphorus fugitive emission control
#30Thermal mitigation die using back side etch
#31Vertical power semiconductor device including a field stop region having a plurality of impurity peaks
#32Method for suspending a thin layer on a cavity with a stiffening effect obtained by pressurizing the cavity by implanted species
#33Semiconductor device structure having gate dielectric layer
#34Gettering property evaluation apparatus
#35METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE
#36Defect reduction of semiconductor layers and semiconductor devices by anneal and related methods
#37Semiconductor device and method for manufacturing semiconductor device
#38Semiconductor chip gettering
#39Solar cells with improved lifetime, passivation and/or efficiency
#40Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium
#41Phosphorus fugitive emission control
#42Method for manufacturing electronic device and method for removing impurity using same
#43Semiconductor device and method for manufacturing semiconductor device
#44Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensor
#45METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WATER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#46Semiconductor chip gettering
#47GETTERING LAYER FORMING APPARATUS, GETTERING LAYER FORMING METHOD AND COMPUTER-READABLE RECORDING MEDIUM
#48Thermal processing method for silicon wafer
#49Defect reduction of semiconductor layers and semiconductor devices by anneal and related methods
#50Peeling method and method of manufacturing semiconductor device
#51Method of manufacturing semiconductor device, and semiconductor device
#52METHOD FOR MAKING A SEMICONDUCTOR DEVICE INCLUDING A SUPERLATTICE HAVING NITROGEN DIFFUSED THEREIN
#53METHOD FOR PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#54METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#55Low resistant contact method and structure
#56Methods for film modification
#57Silicon germanium alloy fins with reduced defects
#58Integrated structures and methods of forming integrated structures
#59Apparatus and process for electron beam mediated plasma etch and deposition processes
#60Method for modifying substrates based on crystal lattice dislocation density
#61Method for manufacturing semiconductor device
#62Method for forming semiconductor device structure having oxide layer
#63Methods and systems for packaging an integrated circuit
#64Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium
#65External gettering method and device
#66Light assisted platelet formation facilitating layer transfer from a semiconductor donor substrate
#67Method of producing a wafer from an ingot including a peel-off detecting step
#68Integrated structures and methods of forming integrated structures
#69MOSFETs with multiple dislocation planes
#70Bonded structures
#71Methods and apparatus for gettering impurities in semiconductors
#72Solar cells with improved lifetime, passivation and/or efficiency
#73Semiconductor device
#74Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensor
#75Method for producing semiconductor epitaxial wafer and method of producing solid-state imaging device
#76Semiconductor device and method for manufacturing semiconductor device
#77Method for making a semiconductor device including a superlattice as a gettering layer
#78Semiconductor device including a superlattice as a gettering layer
#79Methods and systems for packaging semiconductor devices to improve yield
#80Gettering layer forming method
#81Gettering layer forming method
#82Method for eliminating metal composites from polycrystalline silicon cell piece
#83Epitaxial wafer manufacturing method and epitaxial wafer
#84Method and device for passivating defects in semiconductor substrates
#85Gettering layer formation and substrate
#86Solar cells with improved lifetime, passivation and/or efficiency
#87Low resistance contact method and structure
#88Peeling method and method of manufacturing semiconductor device
#89MOSFETs with multiple dislocation planes
#90Avalanche diode having an enhanced defect concentration level and method of making the same
#91Semiconductor device structure having a doped passivation layer
#92Semiconductor device containing oxygen-related thermal donors
#93Semiconductor device having IGBT and diode with field stop layer formed of hydrogen donor and helium
#94Integrated structures and methods of forming integrated structures
#95Integrated circuit devices
#96Method of manufacturing a semiconductor device having an impurity concentration
#97Semiconductor device
#98Method of producing semiconductor epitaxial wafer and method of producing solid-state image sensor
#99Method for heat treatment of silicon single crystal wafer
#100Method for manufacturing epitaxial silicon wafer and vapor phase growth device
#101Semiconductor device having a defined oxygen concentration
#102Workpiece evaluating method
#103Trench metal insulator metal capacitor with oxygen gettering layer
#104Method for removing crystal originated particles from a crystalline silicon body using an etch process
#105Surface photovoltage calibration standard
#106Removing particulate contaminants from the backside of a wafer or reticle
#107Method for producing low-permittivity spacers
#108Cleaning method
#109Silicon germanium alloy fins with reduced defects
#110Silicon germanium alloy fins with reduced defects
#111Methods of forming integrated structures
#112Methods and systems to improve yield in multiple chips integration processes
#113Flash memory having water vapor induced air gaps and fabricating method thereof
#114External gettering method and device
#115Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensing device
#116Epitaxial silicon wafer and method for producing the epitaxial silicon wafer
#117Silicon wafer and method for manufacturing same
#118Method for heat treatment of silicon single crystal wafer
#119Integrated circuit devices and methods of manufacturing the same
#120Semiconductor chip arrangement and method thereof
#121Method for heat treatment of silicon single crystal wafer
#122Method to form dual channel semiconductor material fins
#123Gallium nitride apparatus with a trap rich region
#124Epitaxial wafer manufacturing method and epitaxial wafer
#125Semiconductor device having an impurity concentration and method of manufacturing thereof
#126Apparatus and method for removing particles present on a wafer using photoelectrons and an electric field
#127Silicon wafer and method for manufacturing the same
#128Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensor
#129Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state image sensing device
#130Semiconductor device and manufacturing method thereof
#131Semiconductor manufacturing method
#132Peeling method and method of manufacturing semiconductor device
#133Gate and gate forming process
#134MOSFETs with multiple dislocation planes
#135Semiconductor device with a semiconductor body containing hydrogen-related donors
#136SOI based FINFET with strained source-drain regions
#137Peeling method and method of manufacturing semiconductor device
#138METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#139METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#140METHOD OF PRODUCING SEMICONDUCTOR EPITAXIAL WAFER, SEMICONDUCTOR EPITAXIAL WAFER, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
#141Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state image sensing device
#142Polishing pad and method for manufacturing same
#143Semiconductor chip arrangement
#144Method for fabricating nitride semiconductor device with silicon layer
#145Semiconductor device and method for manufacturing semiconductor device
#146Avalanche diode having an enhanced defect concentration level and method of making the same
#147Method for manufacturing a semiconductor wafer, and semiconductor device having a low concentration of interstitial oxygen
#148Semiconductor device and method for forming the same
#149METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#150External gettering method and device
#151Method of outgassing a mask material deposited over a workpiece in a process tool
#152Channel region dopant control in fin field effect transistor
#153Manufacturing method of epitaxial silicon wafer
#154SEMICONDUCTOR DEVICE
#155METHOD FOR PURIFYING METALLURGICAL SILICON
#156Epitaxial silicon wafer having reduced stacking faults
#157Method of reducing an impurity concentration in a semiconductor body, method of manufacturing a semiconductor device and semiconductor device
#158OXIDE MEDIA FOR GETTERING IMPURITIES FROM SILICON WAFERS
#159Structure and method for metal gate stack oxygen concentration control using an oxygen diffusion barrier layer and a sacrificial oxygen gettering layer
#160Epitaxial wafer and a method of manufacturing thereof
#161Microwave anneal (MWA) for defect recovery
#162Method for removing crystal originated particles from a crystalline silicon body
#163Semiconductor device and method for manufacturing semiconductor device
#164Semiconductor device having a field-effect structure and a nitrogen concentration profile
#165Semiconductor device and method for forming the same
#166Semiconductor device and method of fabricating the same
#167Semiconductor device with vertically inhomogeneous heavy metal doping profile
#168Three-dimensional integrated circuit device fabrication including wafer scale membrane
#169Silicon wafers with suppressed minority carrier lifetime degradation
#170SCR component with temperature-stable characteristics
#171Semiconductor component having a passivation layer and production method
#172Cup-like getter scheme
#173Method for manufacturing semiconductor device using a gettering layer
#174Method of manufacturing a semiconductor heteroepitaxy structure
#175METHOD OF FORMING SALICIDE BLOCK WITH REDUCED DEFECTS
#176SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
#177Method for producing semiconductor device
#178Solid-state image pick-up device and manufacturing method thereof, image-pickup apparatus, semiconductor device and manufacturing method thereof, and semiconductor substrate
#179MOSFETs with multiple dislocation planes
#180Method for fabricating semiconductor device
#181Redistribution layer contacting first wafer through second wafer
#182Semiconductor device and method for manufacturing semiconductor device
#183Metal structures and methods of using same for transporting or gettering materials disposed within semiconductor substrates
#184Peeling method and method of manufacturing semiconductor device
#185Method for decreasing an excess carrier induced degradation in a silicon substrate
#186Semiconductor manufacturing apparatus and device manufacturing method using substrate distortion correction
#187Method of healing defect at junction of semiconductor device using germanium
#188Dislocation engineering using a scanned laser
#189Dislocation engineering using a scanned laser
#190Method, system, and apparatus for preparing substrates and bonding semiconductor layers to substrates
#191Method for manufacturing solar cells, attenuating lid phenomena
#192Method for processing a semiconductor carrier, a semiconductor chip arrangement and a method for manufacturing a semiconductor device
#193Silicon wafer and method for producing the same
#194Method for producing a semiconductor device and field-effect semiconductor device
#195Method of forming gettering layer
#196Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensing device
#197LARGE HIGH-QUALITY EPITAXIAL WAFERS
#198Bonding-substrate fabrication method, bonding substrate, substrate bonding method, bonding-substrate fabrication apparatus, and substrate assembly
#199Systems and methods for preparation of epitaxially textured thick films
#200Solid-state image pick-up device and manufacturing method thereof, image-pickup apparatus, semiconductor device and manufacturing method thereof, and semiconductor substrate
#201Semiconductor device and method of fabricating the same
#202Method for growing an epitaxial film on a phosphorous-doped silicon wafer
#203Methods for manufacturing metal gates
#204Substrate of semiconductor device, for gettering metallic impurity
#205Method of producing a vertically inhomogeneous platinum or gold distribution in a semiconductor substrate and in a semiconductor device
#206Method for the production of a substrate comprising embedded layers of getter material
#207DIMENSIONAL SILICA-BASED POROUS SILICON STRUCTURES AND METHODS OF FABRICATION
#208Method of manufacturing a semiconductor apparatus
#209In-situ gettering method for removing metal impurities from the surface and interior of a upgraded metallurgical grade silicon wafer
#210Processes for suppressing minority carrier lifetime degradation in silicon wafers
#211Method for heat-treating a silicon substrate for the production of photovoltaic cells, and photovoltaic cell production method
#212METHOD OF FABRICATION OF A THREE-DIMENSIONAL INTEGRATED CIRCUIT DEVICE USING A WAFER SCALE MEMBRANE
#213APPARATUS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT DEVICE FABRICATION INCLUDING WAFER SCALE MEMBRANE
#214Methods and systems of retrieving documents
#215Dislocation Engineering Using a Scanned Laser
#216Semiconductor device
#217Wafer processing method
#218Semiconductor device and method for manufacturing semiconductor device
#219Method for manufacturing semiconductor device
#220Thinned semiconductor components having lasered features and method of fabrication
#221Method of fabricating polycrystalline silicon layer, TFT fabricated using the same, method of fabricating TFT, and organic light emitting diode display device having the same
#222Peeling method and method of manufacturing semiconductor device
#223External gettering method and device
#224Methods for reducing the metal content in the device layer of SOI structures and SOI structures produced by such methods
#225Methods of fabricating high-K metal gate devices
#226Method for manufacturing semiconductor wafer
#227Method for isolation formation in manufacturing semiconductor device
#228Method of forming a gettering structure having reduced warpage and gettering a semiconductor wafer therewith
#229Dislocation Engineering Using a Scanned Laser
#230Epitaxial silicon wafer and method for manufacturing same
#231Epitaxial silicon wafer and method for manufacturing same
#232Method of manufacturing semiconductor device
#233Wafer, fabricating method of the same, and semiconductor substrate
#234Dimensional silica-based porous silicon structures and methods of fabrication
#235SILICON WAFER AND METHOD FOR PRODUCING THE SAME
#236Method for fabricating semiconductor device
#237Semiconductor substrate for solid-state imaging sensing device as well as solid-state image sensing device and method for producing the same
#238Semiconductor wafer pre-process annealing and gettering method and system for solar cell formation
#239EPITAXIAL SUBSTRATE AND METHOD FOR PRODUCING SAME
#240Epitaxial wafer and method of producing the same
#241Method of manufacturing semiconductor device having first conductive layer including aluminum
#242SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
#243Semi-insulating group III metal nitride and method of manufacture
#244Integrated circuitry
#245Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer
#246SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING SAME
#247Method of removing heavy metal in semiconductor substrate
#248Integrated circuit chip protected against laser attacks
#249Gettering structures and methods and their application
#250Method to reduce dislocation density in silicon using stress
#251DOUBLE-SIDED HETEROJUNCTION SOLAR CELL BASED ON THIN EPITAXIAL SILICON
#252Method for reprocessing semiconductor substrate, method for manufacturing reprocessed semiconductor substrate, and method for manufacturing SOI substrate
#253Silicon wafer
#254Solid-state imaging device, camera and method of producing the solid-state imaging device
#255METHOD FOR TREATING AN OXYGEN-CONTAINING SEMICONDUCTOR WAFER, AND SEMICONDUCTOR COMPONENT
#256Semiconductor thin film and semiconductor device
#257Method of Fabricating Upgraded Metallurgical Grade Silicon by External Gettering Procedure
#258SOI (silicon on insulator) structure semiconductor device and method of manufacturing the same
#259Methods for fabricating semiconductor components using thinning and back side laser processing
#260Solar cells
#261Solid-state image pick-up device and manufacturing method thereof, image-pickup apparatus, semiconductor device and manufacturing method thereof, and semiconductor substrate
#262Method of fabricating a semiconductor on insulator device having a frontside substrate contact
#263Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and method for producing the same
#264Structure and method for metal gate stack oxygen concentration control using an oxygen diffusion barrier layer and a sacrificial oxygen gettering layer
#265Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation
#266Dislocation engineering using a scanned laser
#267Methods of fabricating high-k metal gate devices
#268Solar cells fabricated by using CVD epitaxial Si films on metallurgical-grade Si wafers
#269Silicon wafer and method for producing the same
#270Semiconductor device gate structure including a gettering layer
#271METHOD FOR PRODUCING WAFER FOR BACKSIDE ILLUMINATION TYPE SOLID IMAGING DEVICE
#272Method of purifying a crystalline silicon substrate and process for producing a photovoltaic cell
#273WAFER MANUFACTURING METHOD AND WAFER OBTAINED THROUGH THE METHOD
#274Wafer processing method for improving gettering capabilities of wafers made therefrom
#275Wafer scale membrane for three-dimensional integrated circuit device fabrication
#276SILICON SUBSTRATE FOR SOLID-STATE IMAGING DEVICE AND METHOD FOR MANUFACTURING THE SAME
#277Method for surface treatment of semiconductor substrates
#278Method of peeling thin film device and method of manufacturing semiconductor device using peeled thin film device
#279Semiconductor device including a gettering layer and manufacturing method therefor
#280SILICON WAFER
#281Thin silicon wafer and method of manufacturing the same
#282SILICON WAFER AND PRODUCTION METHOD THEREOF
#283Integrated circuitry
#284Silicon substrate and manufacturing method thereof
#285Silicon substrate and manufacturing method thereof
#286Method for dry chemical treatment of substrates and also use thereof
#287GETTERING LAYER ON SUBSTRATE
#288Avalanche diode having an enhanced defect concentration level and method of making the same
#289STRUCTURE AND METHOD TO IMPROVE MOSFET RELIABILITY
#290INTEGRATION OF ION GETTERING MATERIAL IN DIELECTRIC
#291Epitaxial wafer and method of producing the same
#292Systems and methods for preparation of epitaxially textured thick films
#293Method for Trapping Implant Damage in a Semiconductor Substrate
#294Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices
#295Semiconductor device and method for fabricating same
#296BONDED SOI SUBSTRATE, AND METHOD FOR MANUFACTURING THE SAME
#297Wafer and method for producing a wafer
#298Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same
#299Solid-state imaging device, camera and method of producing the solid-state imaging device
#300Method of Forming an Integrated Circuit and Integrated Circuit