Patents-Review.com
ClassID:

207339 ⎘

H01L21/67178 - page 2 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere; Apparatus not specifically provided for elsewhere; Apparatus for manufacture or treatment; Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement

Recent Application in this class:
#301
20120009528
2012-01-12

Coating and developing apparatus and method

 #302
20110312190
2011-12-22

COATING METHOD AND COATING APPARATUS

 #303
20110311340
2011-12-22

Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program

 #304
20110308458
2011-12-22

Thin Film Deposition Apparatus

 #305
20110297085
2011-12-08

Substrate processing apparatus, substrate processing method, and storage medium

 #306
20110270465
2011-11-03

Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon

 #307
20110242508
2011-10-06

INTERFACE SYSTEM

 #308
20110240597
2011-10-06

Substrate treatment method, coating film removing apparatus, and substrate treatment system

 #309
20110236845
2011-09-29

Heat processing apparatus and heat processing method

 #310
20110211825
2011-09-01

Coating and developing apparatus, substrate processing method, and storage medium

 #311
20110209826
2011-09-01

Substrate processing method, computer-readable storage medium, and substrate processing system

 #312
20110208344
2011-08-25

Substrate processing system, substrate processing method and storage medium

 #313
20110201169
2011-08-18

Thermal treatment equipment and method for heat-treating

 #314
20110200923
2011-08-18

Substrate treatment method

 #315
20110200321
2011-08-18

Coating and developing apparatus, developing method and non-transitory medium

 #316
20110183073
2011-07-28

Developing treatment method, program, computer storage medium and developing treatment system

 #317
20110120650
2011-05-26

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING SYSTEM

 #318
20110086514
2011-04-14

Substrate processing method

 #319
20110079252
2011-04-07

Substrate processing apparatus

 #320
20110078898
2011-04-07

Substrate processing apparatus

 #321
20110073469
2011-03-31

ELECTROCHEMICAL DEPOSITION SYSTEM

 #322
20110063588
2011-03-17

Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus

 #323
20110061683
2011-03-17

Liquid processing apparatus for substrate, method for generating processing liquid, and computer readable recording medium storing program for generating processing liquid therein

 #324
20110049393
2011-03-03

Lithography Machine and Substrate Handling Arrangement

 #325
20110045195
2011-02-24

Resist solution supply apparatus, resist solution supply method, and computer storage medium

 #326
20110033626
2011-02-10

Coating treatment method and coating treatment apparatus

 #327
20110027727
2011-02-03

Substrate developing method, substrate processing method and developing solution supply nozzle

 #328
20110014562
2011-01-20

Substrate processing apparatus and substrate processing method

 #329
20100330273
2010-12-30

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE

 #330
20100326353
2010-12-30

COATING AND DEVELOPING APPARATUS

 #331
20100316961
2010-12-16

Substrate treatment method and substrate treatment apparatus

 #332
20100307683
2010-12-09

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

 #333
20100300353
2010-12-02

Coating and developing apparatus

 #334
20100280654
2010-11-04

Substrate processing sequence in a Cartesian robot cluster tool

 #335
20100239986
2010-09-23

Substrate processing method

 #336
20100236587
2010-09-23

Substrate processing apparatus

 #337
20100221915
2010-09-02

METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING

 #338
20100221436
2010-09-02

Substrate processing apparatus and substrate processing method

 #339
20100216077
2010-08-26

Developing apparatus and developing method

 #340
20100192844
2010-08-05

Apparatus and method for treating substrate

 #341
20100159402
2010-06-24

Method, program and system for processing substrate

 #342
20100156434
2010-06-24

Testing apparatus

 #343
20100139889
2010-06-10

Multiple slot load lock chamber and method of operation

 #344
20100136257
2010-06-03

SUBSTRATE PROCESSING APPARATUS

 #345
20100130022
2010-05-27

Nozzle and apparatus and method for processing substrate using the nozzle

 #346
20100129526
2010-05-27

SUBSTRATE PROCESSING APPARATUS

 #347
20100129182
2010-05-27

Substrate processing system

 #348
20100116293
2010-05-13

Substrate processing system and method of controlling the same

 #349
20100093183
2010-04-15

UNIT FOR SUPPLYING CHEMICAL LIQUID AND APPARATUS AND METHOD FOR TREATING SUBSTRATE USING THE SAME

 #350
20100081097
2010-04-01

SUBSTRATE PROCESSING APPARATUS

 #351
20100040779
2010-02-18

Liquid processing apparatus, liquid processing method and storage medium

 #352
20100025367
2010-02-04

High throughput chemical treatment system and method of operating

 #353
20100021621
2010-01-28

Coating and developing system control method of controlling coating and developing system

 #354
20100020297
2010-01-28

Method for improving surface roughness of processed film of substrate and apparatus for processing substrate

 #355
20100000682
2010-01-07

Processing system

 #356
20090291558
2009-11-26

Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing

 #357
20090254226
2009-10-08

Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon

 #358
20090225285
2009-09-10

Substrate processing method, computer storage medium and substrate processing system

 #359
20090214963
2009-08-27

Substrate processing method, computer-readable storage medium, and substrate processing system

 #360
20090214759
2009-08-27

Solution treatment apparatus and solution treatment method

 #361
20090211040
2009-08-27

Substrate processing apparatus

 #362
20090203211
2009-08-13

MULTI-CHAMBER SYSTEM HAVING COMPACT INSTALLATION SET-UP FOR AN ETCHING FACILITY FOR SEMICONDUCTOR DEVICE MANUFACTURING

 #363
20090176181
2009-07-09

System for improved pressure control in horizontal diffusion furnace scavenger system for controlling oxide growth

 #364
20090173364
2009-07-09

Substrate processing apparatus and substrate processing method using the same

 #365
20090165950
2009-07-02

Apparatus for treating substrate and method for transferring substrate using the same

 #366
20090165712
2009-07-02

Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates

 #367
20090165711
2009-07-02

SUBSTRATE TREATING APPARATUS WITH SUBSTRATE REORDERING

 #368
20090139833
2009-06-04

MULTI-LINE SUBSTRATE TREATING APPARATUS

 #369
20090139450
2009-06-04

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

 #370
20090120472
2009-05-14

Substrate cleaning and processing apparatus with magnetically controlled spin chuck holding pins

 #371
20090120362
2009-05-14

Temperature measurement in a substrate processing apparatus

 #372
20090067958
2009-03-12

Stacked process modules for a semiconductor handling system

 #373
20090067956
2009-03-12

Cluster tool architecture for processing a substrate

 #374
20090064929
2009-03-12

Cluster tool architecture for processing a substrate

 #375
20090064928
2009-03-12

Cluster tool architecture for processing a substrate

 #376
20090060493
2009-03-05

Method of developing a substrate and apparatus for performing the same

 #377
20090053904
2009-02-26

Substrate processing method and computer storage medium

 #378
20090044747
2009-02-19

Substrate treating system

 #379
20090033898
2009-02-05

Developing apparatus, developing method and storage medium

 #380
20090025637
2009-01-29

Substrate treatment apparatus

 #381
20090014126
2009-01-15

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #382
20090014125
2009-01-15

Substrate processing system and method

 #383
20090013927
2009-01-15

Stage apparatus and coating treatment device

 #384
20090008381
2009-01-08

Temperature setting method of thermal processing plate, temperature setting apparatus of thermal processing plate, program, and computer-readable recording medium recording program thereon

 #385
20090000543
2009-01-01

Parallel substrate treatment for a plurality of substrate treatment lines

 #386
20080311286
2008-12-18

Thermal treatment equipment and method for heat-treating

 #387
20080308039
2008-12-18

Apparatus for processing a substrate

 #388
20080308038
2008-12-18

Apparatus for processing a substrate

 #389
20080305434
2008-12-11

Developing apparatus and developing method

 #390
20080304940
2008-12-11

Integrated post-exposure bake track

 #391
20080296316
2008-12-04

COAT/DEVELOP MODULE WITH SHARED DISPENSE

 #392
20080283515
2008-11-20

Temperature control for performing heat process in coating/developing system for resist film

 #393
20080268383
2008-10-30

Coating and developing system, coating and developing method and storage medium

 #394
20080241403
2008-10-02

Coating and developing system, coating and developing method and storage medium

 #395
20080241402
2008-10-02

Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium

 #396
20080223293
2008-09-18

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

 #397
20080209758
2008-09-04

Pocket ventilator

 #398
20080206036
2008-08-28

Magnetic media processing tool with storage bays and multi-axis robot arms

 #399
20080206023
2008-08-28

Semiconductor substrate processing apparatus with horizontally clustered vertical stacks

 #400
20080206022
2008-08-28

Mult-axis robot arms in substrate vacuum processing tool

 #401
20080206021
2008-08-28

Stacked process chambers for magnetic media processing tool

 #402
20080206020
2008-08-28

Flat-panel display processing tool with storage bays and multi-axis robot arms

 #403
20080202892
2008-08-28

Stacked process chambers for substrate vacuum processing tool

 #404
20080202687
2008-08-28

Stacked process chambers for flat-panel display processing tool

 #405
20080202686
2008-08-28

Self-contained process modules for magnetic media processing tool

 #406
20080202420
2008-08-28

Semiconductor substrate processing apparatus with horizontally clustered vertical stacks

 #407
20080202419
2008-08-28

Gas manifold directly attached to substrate processing chamber

 #408
20080202417
2008-08-28

Self-contained process modules for vacuum processing tool

 #409
20080202410
2008-08-28

Multi-substrate size vacuum processing tool

 #410
20080199282
2008-08-21

Cluster tool architecture for processing a substrate

 #411
20080198342
2008-08-21

Substrate processing apparatus with integrated top and edge cleaning unit

 #412
20080198341
2008-08-21

Substrate processing apparatus with integrated cleaning unit

 #413
20080196658
2008-08-21

SUBSTRATE PROCESSING APPARATUS INCLUDING A SUBSTRATE REVERSING REGION

 #414
20080193654
2008-08-14

Coating treatment method and coating treatment apparatus

 #415
20080176002
2008-07-24

SUBSTRATE TREATMENT METHOD, COATING FILM REMOVING APPARATUS, AND SUBSTRATE TREATMENT SYSTEM

 #416
20080145799
2008-06-19

Substrate developing method, substrate processing method and developing solution supply nozzle

 #417
20080142500
2008-06-19

Method of measuring a heating plate temperature, substrate processing device and computer-readable recording medium with computer program recorded thereon for measuring the heating plate temperature

 #418
20080124489
2008-05-29

Coating film forming apparatus and method

 #419
20080092805
2008-04-24

Substrate treating apparatus

 #420
20080089774
2008-04-17

Method and apparatus for semiconductor processing

 #421
20080085173
2008-04-10

Linear semiconductor processing facilities

 #422
20080073031
2008-03-27

METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING

 #423
20080057728
2008-03-06

Apparatus for manufacturing a semiconductor device

 #424
20080038095
2008-02-14

APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES

 #425
20080035181
2008-02-14

Cleaning apparatus

 #426
20080014333
2008-01-17

Coating and developing apparatus, substrate processing method, and storage medium

 #427
20080014058
2008-01-17

Scheduling method for processing equipment

 #428
20080011713
2008-01-17

Substrate processing apparatus, substrate processing method and substrate manufacturing method

 #429
20080008837
2008-01-10

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR HEAT-TREATING SUBSTRATE

 #430
20070298188
2007-12-27

Substrate processing apparatus

 #431
20070280816
2007-12-06

Multiple slot load lock chamber and method of operation

 #432
20070274711
2007-11-29

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #433
20070269296
2007-11-22

Methods and apparatus for vertically orienting substrate processing tools in a clean space

 #434
20070254493
2007-11-01

Integrated thermal unit having vertically arranged bake and chill plates

 #435
20070243711
2007-10-18

Substrate treatment method for etching a base film using a resist pattern

 #436
20070238028
2007-10-11

Substrate treatment method and substrate treatment apparatus

 #437
20070237608
2007-10-11

CLUSTER DEVICE HAVING DUAL STRUCTURE

 #438
20070231763
2007-10-04

Vertical type of thermal processing apparatus and method of using the same

 #439
20070218706
2007-09-20

Heat treating apparatus, heat treating method, and storage medium

 #440
20070197046
2007-08-23

Substrate processing method and substrate processing apparatus

 #441
20070186850
2007-08-16

Substrate processing apparatus and substrate processing method

 #442
20070177870
2007-08-02

Substrate processing apparatus

 #443
20070169373
2007-07-26

Heat processing apparatus and heat processing method

 #444
20070166031
2007-07-19

Substrate processing apparatus

 #445
20070148985
2007-06-28

Method of manufacturing trench structure for device

 #446
20070147982
2007-06-28

Method of retaining a substrate during a substrate transferring process

 #447
20070147979
2007-06-28

Substrate gripper for a substrate handling robot

 #448
20070147976
2007-06-28

Substrate processing sequence in a cartesian robot cluster tool

 #449
20070147832
2007-06-28

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS

 #450
20070144439
2007-06-28

Cartesian cluster tool configuration for lithography type processes

 #451
20070128890
2007-06-07

STACKED ANNEALING SYSTEM

 #452
20070128356
2007-06-07

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #453
20070127916
2007-06-07

Substrate processing apparatus and substrate processing method

 #454
20070127898
2007-06-07

STACKED ANNEALING SYSTEM

 #455
20070122752
2007-05-31

Semiconductor device manufacturing method that recovers damage of the etching target while supplying a predetermined recovery gas

 #456
20070117400
2007-05-24

Substrate treating apparatus

 #457
20070105380
2007-05-10

SUBSTRATE PROCESSING APPARATUS

 #458
20070105379
2007-05-10

Substrate processing apparatus

 #459
20070095278
2007-05-03

Substrate processing system and method of controlling the same

 #460
20070089852
2007-04-26

Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus

 #461
20070089673
2007-04-26

Coating and developing apparatus, and coating and developing method

 #462
20070077768
2007-04-05

Substrate processing method

 #463
20070071439
2007-03-29

SUBSTRATE PROCESSING APPARATUS

 #464
20070068920
2007-03-29

Bake unit, method for cooling heating plate used in the bake unit, apparatus and method for treating substrates with the bake unit

 #465
20070056514
2007-03-15

Coating and developing apparatus

 #466
20070051314
2007-03-08

MOVABLE TRANSFER CHAMBER AND SUBSTRATE-TREATING APPARATUS INCLUDING THE SAME

 #467
20070051306
2007-03-08

Spatially-arranged chemical processing station

 #468
20070048449
2007-03-01

Substrate processing apparatus and substrate processing method

 #469
20060291990
2006-12-28

Semiconductor substrate processing apparatus with a passive substrate gripper

 #470
20060291855
2006-12-28

Substrate processing apparatus

 #471
20060291854
2006-12-28

Substrate processing apparatus

 #472
20060291830
2006-12-28

Stacked annealing system

 #473
20060288606
2006-12-28

Pocket ventilator

 #474
20060286300
2006-12-21

Cluster tool architecture for processing a substrate

 #475
20060278165
2006-12-14

Cluster tool architecture for processing a substrate

 #476
20060266290
2006-11-30

Substrate processing system

 #477
20060263177
2006-11-23

Linear semiconductor processing facilities

 #478
20060251817
2006-11-09

Coating method and coating apparatus

 #479
20060241813
2006-10-26

Optimized cluster tool transfer process and collision avoidance design

 #480
20060237127
2006-10-26

Method for improving surface roughness of processed film of substrate and apparatus for processing substrate

 #481
20060222478
2006-10-05

Processing apparatus, and system and program for monitoring and controlling fan filter unit

 #482
20060201616
2006-09-14

Coating and developing system

 #483
20060201615
2006-09-14

Coating and developing system

 #484
20060201423
2006-09-14

Coating/developing device and method

 #485
20060198633
2006-09-07

Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording medium

 #486
20060194445
2006-08-31

Semiconductor manufacturing apparatus and method

 #487
20060189103
2006-08-24

Solution treatment apparatus and solution treatment method

 #488
20060183340
2006-08-17

Coating and developing apparatus and coating and developing method

 #489
20060183240
2006-08-17

Substrate processing apparatus

 #490
20060182540
2006-08-17

Cluster device having dual structure

 #491
20060182536
2006-08-17

Cartesian robot cluster tool architecture

 #492
20060182535
2006-08-17

Cartesian robot design

 #493
20060177586
2006-08-10

Coating and developing system and coating and developing method

 #494
20060165409
2006-07-27

Coating and developing system and coating and developing method

 #495
20060165408
2006-07-27

Coating and developing apparatus and coating and developing method

 #496
20060164613
2006-07-27

Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning

 #497
20060162858
2006-07-27

Coating and developing system and coating and developing method

 #498
20060162646
2006-07-27

Coating and developing system and coating and developing method

 #499
20060160333
2006-07-20

Thermal treatment equipment and method for heat-treating

 #500
20060159449
2006-07-20

Substrate processing apparatus

 #501
20060158240
2006-07-20

Distributed temperature control system for point of dispense temperature control on track systems utilizing mixing of hot and cold streams

 #502
20060152694
2006-07-13

Substrate processing apparatus

 #503
20060152693
2006-07-13

Substrate processing apparatus

 #504
20060134536
2006-06-22

Method and system for determining post exposure bake endpoint

 #505
20060134340
2006-06-22

Coat/develop module with independent stations

 #506
20060134330
2006-06-22

Cluster tool architecture for processing a substrate

 #507
20060132730
2006-06-22

Developer endpoint detection in a track lithography system

 #508
20060130767
2006-06-22

Purged vacuum chuck with proximity pins

 #509
20060130751
2006-06-22

Cluster tool substrate throughput optimization

 #510
20060130750
2006-06-22

Cluster tool architecture for processing a substrate

 #511
20060130747
2006-06-22

Coat/develop module with shared dispense

 #512
20060090849
2006-05-04

Substrate processing apparatus

 #513
20060086460
2006-04-27

Developing treatment apparatus

 #514
20060079096
2006-04-13

Computer readable storage medium for controlling substrate processing apparatus

 #515
20060026857
2006-02-09

Multi-chambers system having compact installation set-up for an etching facility for semiconductor device manufacturing

 #516
20060024446
2006-02-02

Substrate processing apparatus and substrate processing method

 #517
20060011133
2006-01-19

Insulation film formation device

 #518
20060006164
2006-01-12

Versatile semi-toroidal processing furnace with automatic and reconfigurable wafer exchange

 #519
20050287821
2005-12-29

Substrate processing system, coating/developing apparatus, and substrate processing apparatus

 #520
20050279281
2005-12-22

Substrate processing apparatus

 #521
20050269291
2005-12-08

Method of operating a processing system for treating a substrate

 #522
20050269030
2005-12-08

Processing system and method for treating a substrate

 #523
20050268849
2005-12-08

Film forming apparatus and film forming method

 #524
20050236092
2005-10-27

Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing

 #525
20050223980
2005-10-13

Substrate processing device, substrate processing method, and developing device

 #526
20050223837
2005-10-13

Methods and systems for driving robotic components of a semiconductor handling system

 #527
20050196536
2005-09-08

Film-forming method

 #528
20050194096
2005-09-08

Method and apparatus for semiconductor processing

 #529
20050161159
2005-07-28

Substrate treating apparatus

 #530
20050150451
2005-07-14

Position adjusting method and substrate processing system

 #531
20050147930
2005-07-07

Developing solution supply nozzle with stirrer

 #532
20050130445
2005-06-16

Substrate processing method and substrate processing apparatus

 #533
20050120578
2005-06-09

Methods and systems for handling a workpiece in vacuum-based material handling system

 #534
20050118009
2005-06-02

Stacked process modules for a semiconductor handling system

 #535
20050113976
2005-05-26

Software controller for handling system

 #536
20050113964
2005-05-26

Sensor methods and systems for semiconductor handling

 #537
20050111956
2005-05-26

Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system

 #538
20050063799
2005-03-24

Reduced footprint tool for automated processing of microelectronic substrates

 #539
20050061441
2005-03-24

Substrate treating apparatus

 #540
20050061248
2005-03-24

Substrate processing apparatus

 #541
20050061247
2005-03-24

Substrate processing apparatus, and combined system of functional blocks for use in substrate processing apparatus

 #542
20050061242
2005-03-24

Substrate processing apparatus for performing photolithography

 #543
20050058440
2005-03-17

Thermal processing apparatus, thermal processing method, and substrate processing apparatus

 #544
20050042555
2005-02-24

Coating and developing apparatus and pattern forming method

 #545
20050027387
2005-02-03

Substrate processing apparatus and substrate processing method