Patents-Review.com
ClassID:

207339 ⎘

H01L21/67178 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere; Apparatus not specifically provided for elsewhere; Apparatus for manufacture or treatment; Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement

Recent Application in this class:
#1
20250364284
2025-11-27

BUFFER CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE CHAMBER

 #2
20250349586
2025-11-13

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #3
20250218871
2025-07-03

EXPANDING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMICONDUCTOR CHIP

 #4
20250210390
2025-06-26

SUBSTRATE PROCESSING APPARATUS

 #5
20250201585
2025-06-19

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #6
20250140584
2025-05-01

SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS OF SUBSTRATE TREATMENT LINES ON MULTIPLE STORIES FOR SIMULTANEOUSLY TREATING A PLURALITY OF SUBSTRATES

 #7
20250125175
2025-04-17

SUBSTRATE PROCESSING APPARATUS

 #8
20240373683
2024-11-07

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

 #9
20240339337
2024-10-10

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #10
20240334759
2024-10-03

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

 #11
20240334758
2024-10-03

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

 #12
20240254628
2024-08-01

Substrate processing apparatus

 #13
20240253079
2024-08-01

SUBSTRATE PROCESSING METHOD

 #14
20240249968
2024-07-25

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

 #15
20240231232
2024-07-11

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #16
20240222969
2024-07-04

POWER SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING SYSTEM GROUP

 #17
20240194505
2024-06-13

TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE

 #18
20240194497
2024-06-13

SUBSTRATE PROCESSING APPARATUS

 #19
20240071791
2024-02-29

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING THE SAME

 #20
20240030047
2024-01-25

SUBSTRATE TREATING APPARATUS

 #21
20240018661
2024-01-18

SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSING ZONES

 #22
20230402303
2023-12-14

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #23
20230395402
2023-12-07

CHAMBER FOR DEGASSING SUBSTRATES

 #24
20230352326
2023-11-02

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

 #25
20230317479
2023-10-05

TRANSFER CHAMBER AND WAFER PROCESSING MODULE COMPRISING TRANSFER CHAMBER

 #26
20230307277
2023-09-28

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #27
20230298927
2023-09-21

Substrate transfer mechanism and substrate transferring method

 #28
20230260806
2023-08-17

SUBSTRATE PROCESSING SYSTEM WITH VERTICAL ARRANGEMENT STRUCTURE

 #29
20230234152
2023-07-27

Device for shifting at least one sub-assembly between a provisioning zone and working zone

 #30
20230230865
2023-07-20

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

 #31
20230207355
2023-06-29

APPARATUS AND METHOD FOR TREATING A SUBSTRATE

 #32
20230207354
2023-06-29

Side storage pods, equipment front end modules, and methods for processing substrates

 #33
20230197481
2023-06-22

Apparatus and method for treating substrate including process chambers and transfer chamber

 #34
20230197480
2023-06-22

Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium

 #35
20230154772
2023-05-18

SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SUBSTRATE PROCESSING SYSTEMS

 #36
20230073468
2023-03-09

Bubble measurement unit, substrate treating apparatus including the same, and bubble measurement method

 #37
20230067579
2023-03-02

Substrate processing apparatus and method

 #38
20230062737
2023-03-02

Transfer robot for reduced footprint platform architecture

 #39
20230061965
2023-03-02

SUBSTRATE TREATMENT LINE

 #40
20230056038
2023-02-23

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #41
20230051256
2023-02-16

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

 #42
20230042033
2023-02-09

SUBSTRATE TREATING APPARATUS

 #43
20230024139
2023-01-26

TRAY ELEVATING AND LOWERING APPARATUS OF TEST HANDLER

 #44
20230021035
2023-01-19

LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTERING

 #45
20230016879
2023-01-19

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #46
20230008351
2023-01-12

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

 #47
20220413397
2022-12-29

Support unit, bake apparatus and substrate treating apparatus including the same

 #48
20220277971
2022-09-01

SUBSTRATE TREATING APPARATUS

 #49
20220270912
2022-08-25

Substrate transfer mechanism and substrate transferring method

 #50
20220230904
2022-07-21

Substrate processing system and method for controlling substrate processing system

 #51
20220068682
2022-03-03

Substrate processing apparatus and substrate processing method

 #52
20220023923
2022-01-27

Substrate processing device

 #53
20220020613
2022-01-20

Stacked thermal processing chamber modules for remote radiative heating in semiconductor device manufacture

 #54
20210317592
2021-10-14

Apparatus for electrochemically processing semiconductor substrates

 #55
20210313347
2021-10-07

Stacked structure for a vertical memory device

 #56
20210300693
2021-09-30

Tower lift, tower lift driving method, and machine readable medium

 #57
20210285107
2021-09-16

Semiconductor tool having controllable ambient environment processing zones

 #58
20210278768
2021-09-09

Substrate processing apparatus and substrate processing method

 #59
20210265178
2021-08-26

Substrate treating apparatus

 #60
20210265177
2021-08-26

SUBSTRATE TREATING APPARATUS

 #61
20210233784
2021-07-29

Film processing method

 #62
20210217636
2021-07-15

Process chamber and substrate processing apparatus including the same

 #63
20210217634
2021-07-15

Substrate processing apparatus and method of manufacturing semiconductor device

 #64
20210210364
2021-07-08

Substrate processing apparatus

 #65
20210195754
2021-06-24

Systems for coating a substrate

 #66
20210191270
2021-06-24

Substrate treating method

 #67
20210159293
2021-05-27

Substrate treating apparatus and substrate transporting method

 #68
20210143042
2021-05-13

System and method for wafer processing

 #69
20210134634
2021-05-06

Substrate accommodating unit and maintenance method for vacuum transfer unit in substrate transfer apparatus

 #70
20210134626
2021-05-06

Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates

 #71
20210118711
2021-04-22

Substrate processing apparatus, substrate processing method and recording medium

 #72
20210111050
2021-04-15

Substrate processing device

 #73
20210111042
2021-04-15

Apparatus and method for treating substrate

 #74
20210103225
2021-04-08

Coating and developing apparatus and coating and developing method

 #75
20210103224
2021-04-08

Coating and developing apparatus and coating and developing method

 #76
20210082721
2021-03-18

Substrate treating apparatus

 #77
20210078036
2021-03-18

Substrate processing apparatus, film formation unit, substrate processing method and film formation method

 #78
20210050241
2021-02-18

Substrate processing system, substrate processing method and computer-readable recording medium

 #79
20210043479
2021-02-11

Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

 #80
20210026257
2021-01-28

Post exposure processing apparatus

 #81
20210020475
2021-01-21

Substrate treating apparatus and substrate transporting method

 #82
20210020473
2021-01-21

Substrate treating system and substrate transporting method

 #83
20210013071
2021-01-14

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

 #84
20210001357
2021-01-07

Nozzle apparatus, apparatus and method for treating substrate

 #85
20200388523
2020-12-10

WAFER ALIGNER

 #86
20200381281
2020-12-03

Transfer method and transfer system for transferring substrate between transfer device and substrate stage

 #87
20200357662
2020-11-12

Tank, substrate processing apparatus, and method of using the tank

 #88
20200211880
2020-07-02

Substrate treating apparatus and substrate transporting method

 #89
20200203202
2020-06-25

Substrate processing apparatus, substrate processing method and recording medium

 #90
20200194289
2020-06-18

Hybrid system architecture for thin film deposition

 #91
20200176289
2020-06-04

METHOD AND APPARATUS FOR MULTILEVEL FABRICATORS

 #92
20200152475
2020-05-14

Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus

 #93
20200131641
2020-04-30

Semiconductor tool having controllable ambient environment processing zones

 #94
20200098610
2020-03-26

Substrate treating apparatus

 #95
20200098602
2020-03-26

Substrate treating apparatus and substrate treating method

 #96
20200083071
2020-03-12

Reduced footprint platform architecture with linear vacuum transfer module

 #97
20200013639
2020-01-09

Substrate processing apparatus and method of manufacturing semiconductor device

 #98
20190391499
2019-12-26

Lithographic apparatus, method of transferring a substrate and device manufacturing method

 #99
20190377272
2019-12-12

Post exposure processing apparatus

 #100
20190371633
2019-12-05

Substrate processing apparatus and method of manufacturing semiconductor device

 #101
20190348311
2019-11-14

Chamber for degassing substrates

 #102
20190341259
2019-11-07

Substrate treating apparatus and substrate treating method

 #103
20190341255
2019-11-07

Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers

 #104
20190273005
2019-09-05

Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate

 #105
20190267266
2019-08-29

Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

 #106
20190252223
2019-08-15

Substrate processing apparatus

 #107
20190228964
2019-07-25

Method for processing substrate

 #108
20190221457
2019-07-18

SUBSTRATE TREATING APPARATUS

 #109
20190221455
2019-07-18

Apparatus for treating substrate

 #110
20190218041
2019-07-18

Semiconductor wafer handling and transport

 #111
20190212653
2019-07-11

Substrate treatment apparatus, substrate treatment method, and computer storage medium

 #112
20190198359
2019-06-27

Substrate processing apparatus and method of manufacturing semiconductor device

 #113
20190172741
2019-06-06

Substrate treatment apparatus

 #114
20190164930
2019-05-30

Chip bonding device and bonding method thereof

 #115
20190157118
2019-05-23

Cleaning apparatus and substrate processing apparatus

 #116
20190152722
2019-05-23

Substrate processing device

 #117
20190146345
2019-05-16

Substrate processing apparatus, substrate processing method, and computer-readable recording medium

 #118
20190139791
2019-05-09

Substrate processing apparatus, substrate processing method and recording medium

 #119
20190131150
2019-05-02

Polishing apparatus and polishing method

 #120
20190131144
2019-05-02

Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method

 #121
20190115239
2019-04-18

Substrate alignment apparatus, substrate processing apparatus, and substrate processing method

 #122
20190109032
2019-04-11

Methods and apparatus for novel fabricators with Cleanspace

 #123
20190109028
2019-04-11

Substrate transfer device, transfer method and photolithography apparatus

 #124
20190105748
2019-04-11

SEAL-LESS AIRLOCK WAFER STAGE

 #125
20190103291
2019-04-04

Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport block

 #126
20190096719
2019-03-28

Substrate treating apparatus

 #127
20190096715
2019-03-28

Chamber for degassing substrates

 #128
20190084118
2019-03-21

Substrate processing apparatus, substrate processing method, and computer-readable recording medium

 #129
20190076763
2019-03-14

Treatment solution supply apparatus and substrate treatment system

 #130
20190067077
2019-02-28

Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method

 #131
20190041755
2019-02-07

Development unit, substrate processing apparatus, development method and substrate processing method

 #132
20190035698
2019-01-31

Processing apparatus and processing method

 #133
20190025700
2019-01-24

Substrate treating apparatus and substrate treating method

 #134
20190019698
2019-01-17

Substrate treating apparatus

 #135
20190013220
2019-01-10

Substrate processing device

 #136
20190012847
2019-01-10

Substrate processing apparatus and controller

 #137
20180374725
2018-12-27

Side storage pods, equipment front end modules, and methods for processing substrates

 #138
20180369856
2018-12-27

Coating method, coating apparatus and recording medium

 #139
20180366356
2018-12-20

Substrate processing apparatus, substrate processing method and recording medium

 #140
20180366349
2018-12-20

Process chamber and substrate processing apparatus including the same

 #141
20180330974
2018-11-15

Liquid processing apparatus

 #142
20180315625
2018-11-01

Film processing unit and substrate processing apparatus

 #143
20180315623
2018-11-01

Film processing unit, substrate processing apparatus and substrate processing method

 #144
20180301358
2018-10-18

Substrate processing apparatus

 #145
20180301357
2018-10-18

Substrate processing apparatus

 #146
20180301356
2018-10-18

Substrate processing apparatus

 #147
20180253007
2018-09-06

Substrate processing apparatus, substrate processing method and storage medium

 #148
20180230598
2018-08-16

Substrate treating method and apparatus used therefor

 #149
20180224754
2018-08-09

Post exposure processing apparatus

 #150
20180211856
2018-07-26

Apparatus for electrochemically processing semiconductor substrates

 #151
20180207652
2018-07-26

Substrate treating apparatus

 #152
20180193884
2018-07-12

Substrate cleaning apparatus and cleaning method using the same

 #153
20180182628
2018-06-28

Substrate treating apparatus and substrate treating method

 #154
20180174872
2018-06-21

Chamber for degassing substrates

 #155
20180164700
2018-06-14

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER STORAGE MEDIUM

 #156
20180151409
2018-05-31

Substrate support unit, heat treatment unit, and substrate treating apparatus including the same

 #157
20180143540
2018-05-24

Exposure apparatus, exposure method and storage medium

 #158
20180141762
2018-05-24

Semiconductor wafer handling and transport

 #159
20180122660
2018-05-03

Substrates support apparatus, substrate treating system including the same, and substrate treating method

 #160
20180117641
2018-05-03

Apparatus and method for treating substrate

 #161
20180105951
2018-04-19

EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

 #162
20180102263
2018-04-12

APPARATUS AND METHOD FOR TREATING SUBSTRATE

 #163
20180095370
2018-04-05

Auxiliary exposure apparatus and exposure amount distribution acquisition method

 #164
20180090352
2018-03-29

Substrate processing method and substrate processing apparatus

 #165
20180076075
2018-03-15

Semiconductor process equipment

 #166
20180065843
2018-03-08

Substrate treatment method, computer storage medium and substrate treatment system

 #167
20180061688
2018-03-01

Substrate processing apparatus

 #168
20180056646
2018-03-01

Peripheral portion processing device and peripheral portion processing method

 #169
20180052393
2018-02-22

Substrate processing apparatus including transport device

 #170
20180047598
2018-02-15

Platform architecture to improve system productivity

 #171
20180047592
2018-02-15

Liquid processing apparatus and liquid processing method

 #172
20180044795
2018-02-15

Substrate processing apparatus and substrate processing method

 #173
20180025926
2018-01-25

SUBSTRATE PROCESSING APPARATUS

 #174
20180025917
2018-01-25

Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus

 #175
20170345688
2017-11-30

Apparatus and method for treating substrate and measuring the weight of the remaining liquid on the substrate

 #176
20170323823
2017-11-09

Method and apparatus for processing wafer-shaped articles

 #177
20170309504
2017-10-26

Substrate processing system

 #178
20170287760
2017-10-05

Substrate processing apparatus and method with processing unit selection based on usage rate and usage time

 #179
20170287749
2017-10-05

Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers

 #180
20170263491
2017-09-14

Substrate processing apparatus

 #181
20170198397
2017-07-13

Substrate processing apparatus

 #182
20170140962
2017-05-18

Substrate treating apparatus

 #183
20170136489
2017-05-18

Substrate treating apparatus

 #184
20170125272
2017-05-04

Multi-station tool with wafer transfer microclimate systems

 #185
20170120287
2017-05-04

Substrate treating apparatus

 #186
20170108781
2017-04-20

Lithographic apparatus, method of transferring a substrate and device manufacturing method

 #187
20170106389
2017-04-20

Substrate processing apparatus and substrate processing method

 #188
20170098553
2017-04-06

Substrate processing apparatus

 #189
20170053817
2017-02-23

Substrate treating apparatus

 #190
20170050211
2017-02-23

Substrate processing apparatus and substrate processing method

 #191
20170008017
2017-01-12

Substrate processing apparatus

 #192
20160372346
2016-12-22

Substrate treatment system, substrate transfer method and computer storage medium

 #193
20160372345
2016-12-22

Substrate treatment system, substrate transfer method and computer storage medium

 #194
20160358795
2016-12-08

Methods of prototyping and manufacturing with cleanspace fabricators

 #195
20160351430
2016-12-01

Apparatus for processing substrate

 #196
20160336204
2016-11-17

Chamber for degassing substrates

 #197
20160320713
2016-11-03

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER STORAGE MEDIUM

 #198
20160300734
2016-10-13

Substrate processing system

 #199
20160289839
2016-10-06

Substrate processing apparatus and substrate processing method

 #200
20160279651
2016-09-29

Exposure device and substrate processing apparatus

 #201
20160274469
2016-09-22

Substrate processing apparatus, substrate processing method and storage medium

 #202
20160240410
2016-08-18

SUBSTRATE LIFT ASSEMBLIES

 #203
20160163573
2016-06-09

SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES

 #204
20160163560
2016-06-09

Substrate processing method, storage medium and substrate processing system

 #205
20160132045
2016-05-12

Multilevel fabricators

 #206
20160126128
2016-05-05

Wafer aligner

 #207
20160126112
2016-05-05

Substrate liquid processing apparatus

 #208
20160101498
2016-04-14

Buffing apparatus and substrate processing apparatus

 #209
20160079099
2016-03-17

Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe

 #210
20160074772
2016-03-17

Device and method for applying a material to a substrate

 #211
20160054653
2016-02-25

Liquid processing method and storage medium

 #212
20160008841
2016-01-14

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

 #213
20160004173
2016-01-07

Apparatus for transferring a substrate in a lithography system

 #214
20150357188
2015-12-10

Film forming method, computer storage medium, and film forming system

 #215
20150287857
2015-10-08

Apparatus and method for the automatic assembly of photovoltaic panels

 #216
20150287624
2015-10-08

Substrate processing apparatus

 #217
20150279702
2015-10-01

Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus

 #218
20150249031
2015-09-03

Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator

 #219
20150241787
2015-08-27

Substrate processing method, program, computer-readable storage medium, and substrate processing system

 #220
20150235850
2015-08-20

Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

 #221
20150227136
2015-08-13

METHODS AND APPARATUS FOR VERTICALLY ORIENTING SUBSTRATE PROCESSING TOOLS IN A CLEAN SPACE

 #222
20150227047
2015-08-13

Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

 #223
20150221534
2015-08-06

STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

 #224
20150187621
2015-07-02

Substrate processing apparatus

 #225
20150132085
2015-05-14

Substrate processing system

 #226
20150116674
2015-04-30

Apparatus for treating substrate

 #227
20150069200
2015-03-12

Holder for semiconductor wafers and flat substrates

 #228
20150062545
2015-03-05

Pattern forming method, pattern forming apparatus, and computer readable storage medium

 #229
20150037911
2015-02-05

Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium

 #230
20140342558
2014-11-20

Substrate treating apparatus with substrate reordering

 #231
20140327890
2014-11-06

Coating and developing apparatus and method, and storage medium

 #232
20140285790
2014-09-25

Substrate treating apparatus

 #233
20140271083
2014-09-18

Semiconductor wafer handling and transport

 #234
20140261539
2014-09-18

Disk/pad clean with wafer and wafer edge/bevel clean module for chemical mechanical polishing

 #235
20140261172
2014-09-18

Substrate liquid processing apparatus and method for detecting abnormality of air flow

 #236
20140180469
2014-06-26

Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator

 #237
20140161983
2014-06-12

Substrate processing apparatus and substrate processing method

 #238
20140158791
2014-06-12

Treatment solution supply apparatus, treatment solution supply method, and computer storage medium

 #239
20140158299
2014-06-12

Multi-chamber semiconductor processing device

 #240
20140120477
2014-05-01

Substrate processing apparatus

 #241
20140106281
2014-04-17

Substrate processing method

 #242
20140105709
2014-04-17

Substrate processing apparatus

 #243
20140060424
2014-03-06

Processing cup and substrate processing apparatus

 #244
20140060423
2014-03-06

Substrate processing apparatus

 #245
20140030423
2014-01-30

Liquid processing apparatus, liquid processing method and storage medium for liquid processing

 #246
20140022521
2014-01-23

Substrate processing apparatus and substrate processing method

 #247
20130343841
2013-12-26

Semiconductor manufacturing systems

 #248
20130327363
2013-12-12

Substrate processing apparatus and substrate processing method

 #249
20130316516
2013-11-28

Bonding system and bonding method

 #250
20130280925
2013-10-24

Oxidation annealing device and method for fabricating thin film transistor using oxidation annealing

 #251
20130236838
2013-09-12

Substrate processing apparatus, substrate processing method, and storage medium

 #252
20130203189
2013-08-08

Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium

 #253
20130202388
2013-08-08

Substrate processing apparatus, substrate processing method and non-transitory storage medium

 #254
20130202387
2013-08-08

Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element

 #255
20130202386
2013-08-08

Substrate processing apparatus, substrate processing method and non-transitory computer-readable storage medium

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2013-05-09

Substrate treatment system, substrate transfer method and computer storage medium

 #257
20130112223
2013-05-09

Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium

 #258
20130078061
2013-03-28

Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium

 #259
20130078059
2013-03-28

Substrate processing apparatus, substrate processing method and storage medium

 #260
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2013-03-28

Holder for semiconductor wafers and flat substrates

 #261
20130068324
2013-03-21

Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus

 #262
20130044305
2013-02-21

Apparatus for transferring a substrate in a lithography system

 #263
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2013-02-14

Degassing apparatus adapted to process substrates in multiple tiers with second actuator

 #264
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2013-02-07

Method of processing a substrate in a lithography system

 #265
20130029282
2013-01-31

Apparatus and method for treating substrate

 #266
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2013-01-31

APPARATUS AND METHOD FOR TREATING SUBSTRATE

 #267
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2013-01-31

Apparatus and method for treating substrate

 #268
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2012-12-20

Cluster tool architecture for processing a substrate

 #269
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2012-12-20

Apparatus for cleaning substrate

 #270
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2012-12-06

Buffer units, substrate processing apparatuses, and substrate processing methods

 #271
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2012-12-06

Substrate processing apparatus and substrate processing method

 #272
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2012-11-29

Apparatus for fabricating semiconductor devices

 #273
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2012-11-08

Method of manufacturing semiconductor device and system for manufacturing semiconductor device

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2012-10-04

Substrate processing apparatus

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2012-08-23

Methods and apparatus for vertically orienting substrate processing tools in a clean space

 #276
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2012-07-19

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

 #277
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2012-06-28

LIQUID PROCESSING APPARATUS

 #278
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2012-06-28

Liquid processing apparatus

 #279
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2012-06-21

Substrate treating apparatus

 #280
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2012-06-14

Linear semiconductor processing facilities

 #281
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2012-06-14

Loadlock batch ozone cure

 #282
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2012-06-14

Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units

 #283
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2012-06-14

Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines

 #284
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2012-06-07

Substrate processing sequence in a cartesian robot cluster tool

 #285
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2012-05-31

Substrate treatment system, substrate treatment method, and non-transitory computer storage medium

 #286
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2012-05-17

Assembly method for vacuum processing apparatus

 #287
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2012-05-10

Substrate treatment apparatus, method of transferring substrate, and non-transitory computer storage medium

 #288
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2012-04-26

Imprint system for performing a treatment on a template

 #289
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2012-04-19

Method of and apparatus for heat-treating exposed substrate

 #290
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2012-04-12

Heat Treatment Apparatus and Heat Treatment Method

 #291
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2012-04-05

Module for ozone cure and post-cure moisture treatment

 #292
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2012-03-22

VACUUM PROCESSING SYSTEM

 #293
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2012-03-15

Coating and developing apparatus, coating and developing method and non-transitory tangible medium

 #294
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2012-03-08

Coating and developing apparatus, coating and developing method and non-transitory tangible medium

 #295
20120057861
2012-03-08

Coating and developing apparatus and method, and storage medium

 #296
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2012-03-01

Liquid processing apparatus, liquid processing method and storage medium

 #297
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2012-02-09

APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE

 #298
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2012-01-19

Substrate processing apparatus, and substrate transport method

 #299
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2012-01-19

Coating and developing apparatus and method, and storage medium

 #300
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2012-01-19

Stacked process modules for a semiconductor handling system