207386 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Closed carriers characterised by the construction of the closed carrier
Environmental control in a reticle SMIF pod
#302Reticle pod with isolation system
#303Substrate container with pressure equalization
#304Single thin plate storage container
#305Substrate containing case
#306Wafer pod with working sheet holder
#307Carrier tape for disk components
#308Method for storing silicon substrate having silicon oxide film formed thereon
#309Protective shipper
#310Universal reticle transfer system
#311Adjustable height wafer box
#312Reticle-processing system
#313Reticle-carrying container
#314Substrate carrier having door latching and substrate clamping mechanisms
#315Clean container module
#316Storage box for wafer shipping box
#317Thin plate storage container with handled supporting member
#318Thin plate storage container and lid having at least one thin plate supporting member
#319Storage container for receiving precision substrates such as wafers
#320Integrated circuit wafer packaging system and method
#321Wafer carrier with apertured door for cleaning
#322Sputtering target transport box
#323Reduction of electric-field-induced damage in field-sensitive articles
#324Nitrogen-filling system
#325Bag
#326Wafer storage container with wafer positioning posts
#327Wafer shipper with orientation control
#328Package for storing sensor crystals and related method of use
#329Modularity of Tec-Cell, FOUP and substrate containers and carriers