207386 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders; Closed carriers characterised by the construction of the closed carrier
SUBSTRATE STORING CONTAINER AND LID-BODY-SIDE SUBSTRATE SUPPORT PART
#2SUBSTRATE CONTAINER ADAPTER
#3WAFER CONTAINER HOUSING AND A WAFER CONTAINER TRANSFERRING METHOD
#4MAGNETIC SENSOR ASSEMBLY FOR A SUBSTRATE PROCESS STATION
#5LOADING AND UNLOADING SYSTEM, CARRYING BOAT, SUCTION CUP ASSEMBLY, AND METHOD FOR LOADING WAFERS
#6WAFER STORAGE CONTAINER
#7SEMICONDUCTOR CARRIER
#8TRANSPORT CONTAINER FOR SEMICONDUCTOR WAFER AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT
#9SEMICONDUCTOR DIE CARRIER STRUCTURE
#10SEMICONDUCTOR WORKPIECE TRANSPORT POD
#11WAFER CONTAINER AND WAFER SUPPORT
#12PACKAGING UNIT AND TRANSPORTATION CONTAINER
#13WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS
#14MODULE TRAY FOR SEMICONDUCTOR DEVICE
#15PROCESS KIT ENCLOSURE SYSTEM
#16DEVICE FOR PACKAGING WAFER CASSETTES
#17MODULE TRAY COVER AND SEMICONDUCTOR DEVICE CASE INCLUDING THE SAME
#18METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
#19MODULE RETAINER
#20GAS CURTAIN DEVICE FOR FRONT OPENING UNIFIED POD
#21Gas curtain device for front opening unified pod
#22EQUIPMENT FRONT END MODULE
#23Method for PUF generation using variations in transistor threshold voltage and subthreshold leakage current
#24VENTILATED PUCK
#25CALIBRATION POD FOR ROBOTIC WAFER CARRIER HANDLING AND CALIBRATION PERFORMED USING SAME
#26APPARATUS FOR STORING AND TRANSPORTING SEMICONDUCTOR ELEMENTS, AND METHOD OF MAKING THE SAME
#27WAFER CARRIER HAVING INSPECTION WINDOW AND OPERATING METHOD THEREOF
#28WAFER HOUSING CONTAINER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#29VALVE COVER AND SUBSTRATE CARRIER USING THE SAME
#30SUBSTRATE CARRIER HAVING INSTALLATION STRUCTURE FOR GAS DIFFUSER
#31RETICLE POD WITH BACKSIDE STATIC DISSIPATION
#32Wafer storage container
#33RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
#34SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER
#35Module tray for semiconductor device
#36CONTAINER FOR NON-RECTANGULAR RETICLE
#37SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD FOR TRANSPORTING REPLACEABLE COMPONENTS IN THE SEMICONDUCTOR MANUFACTURING EQUIPMENT
#38Latching guide structure
#39SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONTAINER
#40PERIMETER FRAME FOR SPACING RETICLE PODS
#41Semiconductor die carrier structure
#42WAFER TRANSFER CARRIER AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#43FRAME CASSETTE WITH INTERNAL COVER CASES
#44Method for PUF generation using variations in transistor threshold voltage and subthreshold leakage current
#45SUBSTRATE CONTAINER WITH BUILT-IN NEGATIVE PRESSURE CAVITY
#46Gas-inlet module and gas-inlet nozzle
#47WAFER STORAGE CONTAINER
#48FILTER MODULE
#49SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
#50Substrate retaining assembly and door device
#51Apparatus for storing and transporting semiconductor elements, and method of making the same
#52SYSTEM FOR STORING WAFER AND SYSTEM FOR MONITORING POLLUTION OF WAFER
#53SUBSTRATE CONTAINER WITH DOOR GASKET
#54Equipment front end module
#55Container for transporting semiconductor wafer
#56Wafer storage container and cap assembly used therefor
#57Container for storing wafer
#58SINGULATED DIE SHIPPING TRAY ASSEMBLY
#59Substrate storage container
#60CASSETTE HOLD DOWN
#61LOAD PORT
#62Sealed substrate carriers and systems and methods for transporting substrates
#63A STORAGE CONTAINER AND MANUFACTURING METHOD OF THE SAME
#64METHODS AND SYSTEMS HAVING CONDUCTIVE POLYMER COATING FOR ELECTROSTATIC DISCHARGE APPLICATIONS
#65Membrane diffuser for a substrate container
#66Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container
#67Substrate storage container
#68Wafer holder
#69Wafer transport box
#70WAFER TRANSPORT BOX
#71SEMICONDUCTOR CHIP CONTAINER AND FIXTURE
#72Mask pod and semiconductor device
#73Ventilated puck
#74Systems and methods for wafer pod alignment
#75Particle prevention method in reticle pod
#76Wafer storage container
#77SUBSTRATE STORAGE CONTAINER
#78Calibration pod for robotic wafer carrier handling and calibration performed using same
#79Substrate storage container
#80Component carrier with gap around component core and filled with first material in bottom portion and with second material in top portion
#81Equipment front end module
#82Substrate storage container
#83RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
#84Handle for wafer carrier
#85SUBSTRATE STORAGE CONTAINER AND FILTER UNIT
#86Equipment front end module
#87Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods
#88Adjustable device and an adjustable storage box
#89RETICLE POD PROVIDED WITH HOLDING PINS AND METHOD FOR HOLDING RETICLE
#90Reticle pod provided with optically identifiable marks and method for identifying the same
#91CONTAINER FOR ACCOMMODATING SUBSTRATE WITH EFFECTIVE HERMETIC SEALING
#92Particle prevention method in reticle pod
#93Method for containing a reticle in a pod
#94Method for PUF generation using variations in transistor threshold voltage and subthreshold leakage current
#95MANIFOLD FOR A SUBSTRATE CONTAINER
#96Housing case for crystal oscillator
#97Reticle transportation container
#98Semiconductor die carrier structure
#99Structure and method of reticle pod having inspection window
#100Wafer storage container
#101Substrate storage container
#102Wafer storage devices configured to measure physical properties of wafers stored therein
#103Environmental control material holder
#104Transport system
#105Substrate storing container
#106Reticle pod with window
#107Carrier FOUP and a method of placing a carrier
#108Substrate container system
#109Process kit enclosure system
#110Systems and methods for wafer pod alignment
#111Reticle compartment and diffusor plate
#112Purge connectors and modules for a substrate container
#113Reticle pod with spoiler structure
#114Apparatus for storing and transporting semiconductor elements, and method of making the same
#115Substrate storage container
#116Substrate storage container
#117Reticle transportation container
#118Pod and method for containing a reticle using the same
#119WAFER TRANSFER BOX AND WAFER AUTOMATIC TRANSFER SYSTEM
#120Container for holding and transporting reticles having a transparent window assembly
#121Sealed substrate carriers and systems and methods for transporting substrates
#122Substrate storage apparatus and apparatus for processing substrate using the same
#123Semiconductor chip holder
#124Membrane diffuser for a substrate container
#125Substrate storage apparatus, substrate storage method, and recording medium
#126Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substrates
#127Adaptive inset for wafer cassette system
#128Adaptive inset for wafer cassette system
#129Board storing container
#130Package assembly for thin wafer shipping and method of use
#131Opener apparatus
#132Semiconductor die carrier structure
#133Dummy wafer storage cassette
#134Jig for evaluating semiconductor processing chamber
#135Automated replacement of consumable parts using interfacing chambers
#136Reticle pressing unit and EUV reticle pod using same
#137Wafer storage container
#138Substrate storage container
#139Reticle compartment and diffusor plate
#140Substrate treatment apparatus
#141Method for PUF generation using variations in transistor threshold voltage and subthreshold leakage current
#142Systems and methods for wafer pod alignment
#143Systems and methods for wafer pod calibration
#144Self-contained metrology wafer carrier systems
#145Transparent halo for reduced particle generation
#146Reticle transportation container
#147Wafer container with latching mechanism for large diameter wafers
#148Apparatus for storing and transporting semiconductor elements, and method of making the same
#149Storage rack
#150Wafer container with a seal
#151Wafer shipping box and a lower retaining member thereof
#152GLASS SUBSTRATE SHIPPER
#153FLEXIBLE SUBSTRATE SHIPPER
#154Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods
#155Substrate housing container
#156Semiconductor processing apparatus and method
#157Package assembly for thin wafer shipping and method of use
#158Substrate container with enhanced containment
#159Substrate storing container
#160Purging method
#161Self-contained metrology wafer carrier systems
#162Sealed substrate carriers and systems and methods for transporting substrates
#163Universal load port for ultraviolet radiation semiconductor wafer processing machine
#164Container storage facility
#165Container storage facility
#166Electronic component transport apparatus and electronic component inspection apparatus
#167Front Opening Ring Pod
#168Transport container and transfer method for stored object
#169Rechargeable wafer carrier systems
#170Front opening ring pod
#171Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer
#172Front opening ring pod
#173HORIZONTAL SUBSTRATE CONTAINER WITH INTEGRAL CORNER SPRING FOR SUBSTRATE CONTAINMENT
#174Wafer container with shock condition protection
#175Automated replacement of consumable parts using interfacing chambers
#176Ring spacer
#177Transport device
#178Wafer shipper with purge capability
#179Substrate container, load port apparatus, and substrate treating apparatus
#180SUBSTRATE CONTAINER
#181WAFER CONTAINER WITH DOOR GUIDE AND SEAL
#182Wafer cassette
#183Method for compensating probe misplacement and probe apparatus
#184Substrate storage container
#185Adaptive inset for wafer cassette system
#186Interlocking nest wafer protector
#187Load lock solar cell transfer system
#188Micro-environment container for photovoltaic cells
#189Ambidextrous cassette and methods of using same
#190Mini-environment apparatus
#191Purge device, purge system, purge method, and control method in purge system
#192Automated replacement of consumable parts using interfacing chambers
#193Front opening ring pod
#194Method of using a wafer cassette to charge an electrostatic carrier
#195Thin wafer shipper
#196Package assembly for thin wafer shipping and method of use
#197Package assembly for thin wafer shipping and method of use
#198Wafer shipper with stacked support rings
#199Front opening wafer container with robotic flange
#200Wafer carrier
#201Structure for fastening together resin members in substrate storing container
#202Substrate storing container
#203Packing structure for packing substrate storing container
#204Front opening wafer container with weight ballast
#205Wafer cassette with electrostatic carrier charging scheme
#206Substrate storage container and substrate storage container mounting table
#207Method of etching and cleaning wafers
#208Structure for fastening together resin members in substrate storing container
#209Substrate storage container
#210WAFER CONTAINER WITH PARTICLE SHIELD
#211Reticle pod with cover to baseplate alignment system
#212Semiconductor device manufacturing apparatus
#213Semiconductor processing boat design with pressure sensor
#214Modular tubular susceptor
#215Method for making carton bottom
#216Methods and apparatus for large diameter wafer handling
#217Wafer shipper
#218Wafer carrier
#219Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
#220Sealed substrate carriers and systems and methods for transporting substrates
#221Wafer storing container
#222WAFER CONTAINER WITH RECESSED LATCH
#223Wafer container with latching mechanism for large diameter wafers
#224Susceptor, vapor phase growth apparatus, and method of manufacturing epitaxial wafer
#225SUBSTRATE CONTAINER HAVING LIMIT STRUCTURE
#226Reticle pod
#227Packaging for substrates and packaging unit having such packaging
#228Packing insert for disc-shaped objects
#229FRONT OPENING WAFER CONTAINER WITH WAFER CUSHION
#230Methods and apparatus for large diameter wafer handling
#231Wafer transfer pod for reducing wafer particulate contamination
#232PROCESS CAP FOR FLAT SUBSTRATES AND PLANT AND METHOD FOR ONE-SIDED TREATMENT OF FLAT SUBSTRATES
#233Coupling system
#234Front opening unified pod with latch structure
#235Reticle pod with drain structure
#236Reduced capacity carrier, transport, load port, buffer system
#237Elastic retention wheels and wafer adapter containing the same wheels
#238Large-sized front opening unified wafer POD
#239SUBSTRATE TRANSPORT CARRIER
#240Thin wafer shipper
#241Substrate storage container with gravity center adjustment member
#242Reticle pod
#243Semiconductor cleaner systems and methods
#244Semiconductor cleaner systems and methods
#245Semiconductor cleaner systems and methods
#246Semiconductor cleaner systems and methods
#247Semiconductor cleaner systems and methods
#248Wafer container
#249WAFER CONTAINER WITH STAGGERED WALL STRUCTURE
#250Wafer container
#251Pre-heat ring designs to increase deposition uniformity and substrate throughput
#252Semiconductor wafer container
#253Purging apparatus and purging method
#254Container and liner thereof
#255Device and Method for Inert Gas Cure for Leadframe or Substrate Strips
#256Wafer storage container
#257Wafer container with recessed latch
#258Wafer container with staggered wall structure
#259WAFER BOX FOR THE TRANSPORT OF SOLAR CELL WAFERS
#260REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM
#261METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING
#262Injection molding die and injection molding method
#263System for purging reticle storage
#264Wafer container with adjustable inside diameter
#265Wafer container with overlapping wall structure
#266STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
#267Reduced capacity carrier, transport, load port, buffer system
#268SUSCEPTOR, VAPOR PHASE GROWTH APPARATUS, AND METHOD OF MANUFACTURING EPITAXIAL WAFER
#269Reduction of electric-field-induced damage in field-sensitive articles
#270Reticle pod
#271Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith
#272Packing insert for disc-shaped objects
#273Shock absorbing substrate container
#274Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers
#275STORAGE APPARATUS FOR STORING SEMICONDUCTOR ELEMENT OR RETICLE
#276Sealed substrate carriers and systems and methods for transporting substrates
#277Wafer container with staggered wall structure
#278Structure for storing a substrate and semiconductor manufacturing apparatus
#279Container and liner thereof
#280Container
#281Sealed Enclosure for Transporting and Storing Semiconductor Substrates
#282METAL PHOTOMASK POD AND FILTER DEVICE THEREOF
#283Purge system for a substrate container
#284Integrated circuit wafer packaging system and method
#285Clean container having elastic positioning structure
#286Reduced capacity carrier, transport, load port, buffer system
#287Reduced capacity carrier, transport, load port, buffer system
#288Reduced capacity carrier, transport, load port, buffer system
#289Wafer carrier positioning structure
#290METHOD AND APPARATUS FOR VERTICAL WAFER TRANSPORT, BUFFER AND STORAGE
#291Wafer transportable container
#292Method for packaging contamination vulnerable articles and package therefore
#293Reduced capacity carrier, transport, load port, buffer system
#294Substrate storage container
#295Wafer storage container and apparatus
#296Packing member for packing wafer container
#297Wafer measuring fixture
#298Shock absorbing horizontal transport wafer box
#299Single thin plate storage container and shock-absorbing support members used therein
#300Transportation fixture and package for substrate rack