207466 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof; Manufacture of specific parts of devices defined in group; Making of isolation regions between components; Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
Compound semiconductor device and method of manufacturing the same
#602Semiconductor device with isolation layer, electronic device having the same, and method for fabricating the same
#603Semiconductor device and method for fabricating semiconductor device
#604Manufacturing method of semiconductor device
#605Manufacturing method for semiconductor integrated circuit device
#606Methods of forming varying depth trenches in semiconductor devices
#607Method of forming substrate contact for semiconductor on insulator (SOI) substrate
#608Semiconductor devices having a trench isolation layer and methods of fabricating the same
#609Methods of fabricating nonvolatile memory devices and related devices
#610Memory device and method of fabricating the same
#611Dummy gate structure for semiconductor devices
#612Plasma processing method
#613Semiconductor device isolation structures
#614Semiconductor device and method of manufacturing the same
#615Semiconductor device including an isolation film buried in a groove
#616Methods for fabricating semiconductor devices
#617Method, structure and design structure for customizing history effects of SOI circuits
#618Methods for epitaxially growing active regions between STI regions
#619FORMATION OF STI TRENCHES FOR LIMITING PN-JUNCTION LEAKAGE
#620METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
#621Integrated circuit devices and methods of forming memory array and peripheral circuitry isolation
#622SUBSTRATE PROCESSING METHOD
#623Integration of eNVM, RMG, and HKMG modules
#624Semiconductor device and method of manufacturing semiconductor device
#625Dummy cell pattern for improving device thermal uniformity
#626Semiconductor memory and manufacturing method of the same
#627Methods of fabricating semiconductor devices having air gaps in dielectric layers
#628Trench filling method and method of manufacturing semiconductor integrated circuit device
#629Semiconductor device and manufacturing method thereof
#630Semiconductor device and method of producing the same
#631Method of forming trench isolation
#632SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
#633Semiconductor memory device and method for manufacturing the same
#634Structure and method for forming isolation and buried plate for trench capacitor
#635Nonvolatile memory device and method for fabricating the same
#636METHOD OF ETCHING TRENCHES IN A SEMICONDUCTOR SUBSTRATE UTILIZING PULSED AND FLUOROCARBON-FREE PLASMA
#637Method for fabricating nonvolatile memory device
#638SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
#639SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
#640SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
#641Semiconductor structure and method for manufacturing the same
#642SOI device with DTI and STI
#643Semiconductor device and manufacturing method of the semiconductor device
#644Divot engineering for enhanced device performance
#645Dual-depth self-aligned isolation structure for a back gate electrode
#646Methods of forming fine patterns in integrated circuit devices
#647Semiconductor devices and methods of fabricating the same
#648Isolation structure and device structure including the same
#649Semiconductor memory device and method for manufacturing same
#650Nonvolatile semiconductor memory device and method for manufacturing the same
#651Vertical polysilicon-germanium heterojunction bipolar transistor
#652Semiconductor device and method of manufacturing the same
#653Semiconductor device and fabrication method thereof
#654Semiconductor integrated circuit device and process for manufacturing the same
#655Post CMP planarization by cluster ion beam etch
#656NAND type nonvolatile semiconductor memory device and method for manufacturing same
#657Method of manufacturing semiconductor device
#658Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture
#659METHOD FOR MANUFACTURING AN ELECTRONIC DEVICE
#660Method of forming an isolation structure and method of forming a semiconductor device
#661Methods of fabricating nonvolatile memory devices including voids between active regions and related devices
#662Multichip Packages
#663Semiconductor device and method of manufacturing semiconductor device
#664Method for forming trenches and trench isolation on a substrate
#665Mechanisms of doping oxide for forming shallow trench isolation
#666STRUCTURE AND METHOD FOR REDUCTION OF VT-W EFFECT IN HIGH-K METAL GATE DEVICES
#667Semiconductor structure and method for manufacturing the same
#668Methods and structures for customized STI structures in semiconductor devices
#669Deep well structures with single depth shallow trench isolation regions
#670Method to improve wet etch budget in FEOL integration
#671METHODS FOR FABRICATING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEVICES USING THE SAME
#672SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF
#673Methods of forming semiconductor trench and forming dual trenches, and structure for isolating devices
#674SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
#675METHOD OF FORMING ELEMENT ISOLATION LAYER
#676Method for filling a physical isolation trench and integrating a vertical channel array with a periphery circuit
#677Method of manufacturing string floating gates with air gaps in between
#678SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
#679Method for isolation formation in manufacturing semiconductor device
#680Method of forming substrate contact for semiconductor on insulator (SOI) substrate
#681Formation of wells utilizing masks in manufacturing semiconductor device
#682SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME AS WELL AS SEMICONDUCTOR MEMORY AND METHOD OF MANUFACTURING THE SAME
#683Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same
#684Method of manufacturing semiconductor integrated circuit device
#685Method for forming fine pattern of semiconductor device
#686Semiconductor device having active region and dummy wirings
#687Semiconductor structure having wide and narrow deep trenches with different materials
#688Semiconductor device with trench isolation having a diffusion preventing film and manufacturing method thereof
#689Memory device and method of fabricating the same
#690Isolation structure and formation method thereof
#691Method for forming semiconductor device
#692Semiconductor device and method of fabricating the same
#693Dual trench isolation for CMOS with hybrid orientations
#694Semiconductor integrated circuit device and process for manufacturing the same
#695Method of fabricating a semiconductor device having an epitaxy region
#696Integrated circuit guard rings
#697Semiconductor device and fabrication method therefor
#698Etching solution and trench isolation structure-formation process employing the same
#699Isolation structure, non-volatile memory having the same, and method of fabricating the same
#700Vertical gated access transistor
#701Semiconductor device and method of manufacturing the same
#702Methods of fabricating semiconductor devices having various isolation regions
#703SEMICONDUCTOR DEVICE MANUFACATURING METHOD AND SILICON OXIDE FILM FORMING METHOD
#704Semiconductor device having a buried gate
#705ISOLATION METHOD IN SEMICONDUCTOR DEVICE
#706Manufacturing method for FIN-FET having floating body
#707Method of forming a shallow trench isolation embedded polysilicon resistor
#708METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
#709Semiconductor device and method of fabricating the same
#710Post CMP planarization by cluster ION beam etch
#711Semiconductor device having a high aspect ratio isolation trench and method for manufacturing the same
#712Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry
#713Isolation layer structure, method of forming the same and method of manufacturing a semiconductor device including the same
#714Shallow trench isolation extension
#715Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer
#716Scaling of bipolar transistors
#717Plasma etching method and plasma etching apparatus
#718Semiconductor device and method for fabricating the same
#719Method for manufacturing a semiconductor device comprising a guard ring between a cell region and a peripheral region
#720SEMICONDUCTOR DEVICE AND MANUFACTURING METHODS
#721Preferential dielectric gapfill
#722Integrated circuit devices including device isolation structures and methods of fabricating the same
#723METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#724System and method for providing alignment mark for high-k metal gate process
#725Integrated circuit guard rings
#726Semiconductor device and method for producing the semiconductor device
#727Dishing-free gap-filling with multiple CMPs
#728Semiconductor device and method for manufacturing the same
#729Post-planarization densification
#730Semiconductor device isolation structures
#731Method of manufacturing a semiconductor device having an active region and dummy patterns
#732SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
#733Finned semiconductor device with oxygen diffusion barrier regions, and related fabrication methods
#734Structure and method for forming isolation and buried plate for trench capacitor
#735Nonvolatile semiconductor memory device having element isolating region of trench type
#736Compact image sensor arrangement with read circuitry over pixel zones
#737Deep well structures with single depth shallow trench isolation regions
#738Method for forming trenches in a semiconductor component
#739Semiconductor devices having dual trench, methods of fabricating the same, and electronic system having the same
#740Method for fabricating semiconductor device with buried gates
#741Method for fabricating semiconductor device using spacer patterning technique
#742Multiple transistor fin heights
#743Production of isolation trenches with different sidewall dopings
#744Method of wafer-level fabrication of MEMS devices
#745SEMICONDUCTOR DEVICE WITH OXIDE DEFINE PATTERN
#746Structure and Method for Placement, Sizing and Shaping of Dummy Structures
#747Method of manufacturing semiconductor integrated circuit device
#748Isolation structure in a memory device
#749Nano imprint technique with increased flexibility with respect to alignment and feature shaping
#750Method of forming isolation layer structure and method of manufacturing a semiconductor device including the same
#751Integration of multiple gate oxides with shallow trench isolation methods to minimize divot formation
#752SEMICONDUCTOR PROCESS USING MASK OPENINGS OF VARYING WIDTHS TO FORM TWO OR MORE DEVICE STRUCTURES
#753Semiconductor device having a device isolation structure
#754Semiconductor device and fabrication method thereof
#755Semiconductor storage device and method for manufacturing the same
#756Forming inter-device STI regions and intra-device STI regions using different dielectric materials
#757Methods of fabricating field effect transistors having protruded active regions
#758Method of forming active region structure
#759Isolation Structure For Semiconductor Device
#760DRAM STRUCTURE WITH A LOW PARASITIC CAPACITANCE AND METHOD OF MAKING THE SAME
#761Post-planarization densification
#762Method to improve wet etch budget in FEOL integration
#763Semiconductor device and method of fabricating the same
#764Split level shallow trench isolation for area efficient body contacts in SOI MOSFETS
#765Semiconductor device and method for manufacturing same
#766Semiconductor structures and methods for forming isolation between Fin structures of FinFET devices
#767Semiconductor device having dual-STI and manufacturing method thereof
#768Method of forming a mask pattern, method of forming a minute pattern, and method of manufacturing a semiconductor device using the same
#769Semiconductor device and method of manufacturing the same
#770Method of forming active region structure
#771Manufacturing method of semiconductor device
#772Method of fabricating semiconductor device
#773Method for manufacturing non-volatile semiconductor memory device, and non-volatile semiconductor memory device
#774Leakage control in field effect transistors based on an implantation species introduced locally at the STI edge
#775Isolation regions
#776METHOD OF FORMING SHALLOW TRENCH ISOLATION STRUCTURE
#777SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
#778SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
#779CMP slurry and a polishing method using the same
#780Semiconductor component with trench isolation and corresponding production method
#781DEVICE
#782Method of forming semiconductor device
#783Scaling of bipolar transistors
#784Method for manufacturing semiconductor device and NAND-type flash memory
#785Method of manufacturing a semiconductor device including optical test pattern above a light shielding film
#786Methods of uniformly removing silicon oxide and an intermediate semiconductor device
#787Isolation structure and formation method thereof
#788Process sequence to achieve global planarity using a combination of fixed abrasive and high selectivity slurry for pre-metal dielectric CMP applications
#789Semiconductor device and its manufacturing method
#790Semiconductor device with shallow trench isolation
#791Integrated circuit devices including passive device shielding structures
#792Shallow trench isolation dummy pattern and layout method using the same
#793Dual shallow trench isolation and related applications
#794METHOD FOR FABRICATING DEVICE ISOLATION STRUCTURE
#795Methods of forming patterns for semiconductor devices
#796Semiconductor device with low buried resistance and method of manufacturing such a device
#797SEMICONDUCTOR DEVICES WITH AN AIR GAP IN TRENCH ISOLATION DIELECTRIC
#798Vertical gated access transistor
#799Method of forming patterns for semiconductor device
#800Method of manufacturing semiconductor device
#801Method for manufacturing non-volatile semiconductor memory device, and non-volatile semiconductor memory device
#802High power device isolation and integration
#803Trench formation method for releasing a thin-film substrate from a reusable semiconductor template
#804Die seal ring
#805Semiconductor devices and methods of manufacture thereof
#806Method of forming isolation structure of semiconductor device
#807Semiconductor integrated circuit device and process for manufacturing the same
#808Semiconductor device manufacturing method and silicon oxide film forming method
#809Method for manufacturing a semiconductor die with multiple depth shallow trench isolation
#810Flash memory device and method of manufacturing the same
#811Methods of forming a silicon oxide layer and methods of forming an isolation layer
#812Trench isolation comprising process having multiple gate dielectric thicknesses and integrated circuits therefrom
#813Epitaxial deposition-based processes for reducing gate dielectric thinning at trench edges and integrated circuits therefrom
#814Semiconductor devices including patterns
#815Semiconductor device and a method of manufacturing the same and designing the same
#816METHOD OF FABRICATING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
#817Method of fabricating semiconductor device and the semiconductor device
#818Method of forming a fine pattern of a semiconductor device using a double patterning technique
#819Isolation trench fill using oxide liner and nitride etch back technique with dual trench depth capability
#820Integrated circuit devices including passive device shielding structures and methods of forming the same
#821Through-via and method of forming
#822Semiconductor device having a high aspect ratio isolation trench
#823METHOD OF FABRICATING SEMICONDUCTOR MEMORY DEVICE
#824Double trench for isolation of semiconductor devices
#825Ultrathin SOI CMOS devices employing differential STI liners
#826Tunnel dielectric comprising nitrogen for use with a semiconductor device and a process for forming the device
#827Methods of forming fine patterns in integrated circuit devices
#828Method of forming patterns of semiconductor device
#829Methods of fabricating field effect transistors having protruded active regions
#830Hybrid shallow trench isolation for high-k metal gate device improvement
#831Method of forming an isolation layer, method of manufacturing a semiconductor device using the same, and semiconductor device having an isolation layer
#832Fabrication processes for forming dual depth trenches using a dry etch that deposits a polymer
#833Semiconductor device and method of manufacturing the same
#834Semiconductor device and semiconductor device manufacturing method
#835Semiconductor device manufactured with a double shallow trench isolation process
#836PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE MEDIUM
#837Method of manufacturing a dual contact trench capacitor
#838Plasma oxidizing method, plasma processing apparatus, and storage medium
#839Cerium oxide powder, method for preparing the same, and CMP slurry comprising the same
#840Semiconductor device having a dummy portion, method for manufacturing the semiconductor device, method for manufacturing a semiconductor package having the semiconductor device
#841Semiconductor device and semiconductor device manufacturing method
#842Semiconductor device having improved oxide thickness at a shallow trench isolation edge and method of manufacture thereof
#843Method of Forming Trench of Semiconductor Device
#844INTEGRATED CIRCUIT SYSTEM EMPLOYING A MODIFIED ISOLATION STRUCTURE
#845NON-VOLATILE MEMORY AND METHOD OF MANUFACTURING THE SAME
#846Method of forming shallow trench isolation regions in devices with NMOS and PMOS regions
#847Semiconductor memory device and method of fabricating the same
#848Trench isolation method of semiconductor device using chemical mechanical polishing process
#849SEMICONDUCTOR DEVICE AND STI FORMING METHOD THEREFOR
#850Device isolation technology on semiconductor substrate
#851Method for forming vertical channel transistor of semiconductor device
#852Mask overhang reduction or elimination after substrate etch
#853Dishing-free gap-filling with multiple CMPs
#854Semiconductor integrated circuit device and method of fabricating the same
#855Semiconductor device with a trench isolation and method of manufacturing trenches in a semiconductor body
#856Semiconductor device having channel with cooling fluid and manufacturing method thereof
#857Device structures for active devices fabricated using a semiconductor-on-insulator substrate and design structures for a radiofrequency integrated circuit
#858Method of fabricating semiconductor integrated circuit device
#859Method of forming shallow trench isolation structures for integrated circuits
#860Application of different isolation schemes for logic and embedded memory
#861Isolation structure in memory device and method for fabricating the isolation structure
#862Isolation structure in memory device and method for fabricating the same
#863Method, structure and design structure for customizing history effects of SOI circuits
#864Method for manufacturing silicon wafer and silicon wafer manufactured by this method
#865Semiconductor device having first and second device isolation layers formed of different insulation materials
#866Semiconductor device comprising isolation trenches inducing different types of strain
#867Methods relating to trench-based support structures for semiconductor devices
#868Nonvolatile semiconductor memory device having element isolating region of trench type
#869Semiconductor storage device and method for manufacturing the same
#870Semiconductor device and method for manufacturing same
#871Semiconductor Device and Method for Fabricating the Same
#872Semiconductor device and method of forming the same
#873Semiconductor memory device having cavity portions
#874Methods of manufacturing trench isolation structures using selective plasma ion immersion implantation and deposition (PIIID)
#875Methods of manufacturing semiconductor devices
#876Semiconductor device and method of fabricating the same
#877SEMICONDUCTOR DEVICE USING ELEMENT ISOLATION REGION OF TRENCH ISOLATION STRUCTURE AND MANUFACTURING METHOD THEREOF
#878Semiconductor device with trench isolation structure
#879Isolation structure, non-volatile memory having the same, and method of fabricating the same
#880Sige channel epitaxial development for high-k PFET manufacturability
#881SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
#882CMP process for processing STI on two distinct silicon planes
#883Methods of manufacturing a semiconductor device using a layer suspended across a trench
#884High voltage semiconductor device, method of fabricating the same, and method of fabricating the same and a low voltage semiconductor device together on a substrate
#885Methods of forming trench isolation and methods of forming floating gate transistors
#886Method of manufacturing a semiconductor device including forming a single-crystalline semiconductor material in a first area and forming a second device isolation pattern on a second area
#887Recessed shallow trench isolation
#888Structure for a latchup robust array I/O using through wafer via
#889Integrated circuit system employing selective epitaxial growth technology
#890Semiconductor device and method of manufacturing semiconductor device including optical test pattern above a light shielding film
#891Trench isolation structure in a semiconductor device and method for fabricating the same
#892METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#893Structure and method for placement, sizing and shaping of dummy structures
#894METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#895Semiconductor structure and method of manufacture
#896Vertical gated access transistor
#897Methods of forming integrated circuit devices having ion-cured electrically insulating layers therein
#898METHOD OF FABRICATING SEMICONDUCTOR DEVICE
#899Method of fabricating semiconductor memory device in which an oxide film fills a trench in a semiconductor substrate
#900Method of manufacturing semiconductor device