220384 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
Sub-classes:MEMS Resonator
#2Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Flexural Mode Resonator Portions
#3DUAL RESONATOR STRUCTURE FOR OVEN-CONTROLLED MEMS OSCILLATORS, INCLUDING RELATED APPARATUSES
#4DUAL RESONATOR STRUCTURE FOR TEMPERATURE-COMPENSATED OSCILLATORS, INCLUDING RELATED APPARATUSES
#5TEMPERATURE-STABLE MEMS RESONATOR
#6Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
#7Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions
#8MEMS resonator with high quality factor and its use
#9RESONANCE DEVICE, COLLECTIVE BOARD, AND MANUFACTURING METHOD FOR RESONANCE DEVICE
#10Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#11Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#12Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#13Technique for designing acoustic microwave filters using LCR-based resonator models
#14Micromechanical resonator and method for trimming micromechanical resonator
#15Micromechanical resonator and resonator system including the same
#16Amplification method using a mechanical resonator
#17Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#18Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#19Frequency compensated oscillator design for process tolerances
#20Frequency compensated oscillator design for process tolerances
#21System and method for resonator amplitude control
#22Technique for designing acoustic microwave filters using LCR-based resonator models
#23Multi-frequency excitation
#24Resonator manufacturing method
#25Method for producing a batch of acoustic wave filters
#26Technique for designing acoustic microwave filters using LCR-based resonator models
#27Bulk acoustic resonator device including temperature compensation structure comprising low acoustic impedance layer
#28Temperature compensated beam resonator
#29INTEGRATED CIRCUIT PACKAGE METHOD
#30Resonant circuit with variable frequency and impedance
#31Resonator with reduced sensitivity to climatic variations
#32Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#33Frequency compensated oscillator design for process tolerances
#34Frequency compensated oscillator design for process tolerances
#35Vibrating element, vibrator, oscillator, electronic apparatus, and moving object
#36Integrated circuit package and method
#37Microelectromechanical resonator
#38Ceramic temperature-compensated resonator
#39Micromechanical devices comprising n-type doping agents
#40Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming thereof and design structures
#41Method of manufacturing a temperature-compensated micromechanical resonator
#42Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion
#43Out-of plane MEMS resonator with static out-of-plane deflection
#44Method of manufacturing a microelectromechanical system (MEMS) resonator
#45Bulk acoustic wave resonator and method of manufacturing thereof
#46Dual-Sensor Temperature Stabilization for Integrated Electrical Component
#47At least first and second order temperature-compensated resonator
#48Micromechanical Resonator
#49MEMS resonator
#50MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
#51Micromechanical resonator
#52Manufacturing method of an array of BAW resonators with mask controlled resonant frequencies
#53Micromechanical resonator array and method for manufacturing thereof
#54Micro-electromechanical resonator geometry
#55MEMS resonators
#56Microelectromechanical resonator and a method for producing the same
#57Out-of-plane MEMS resonator with static out-of-plane deflection
#58Resonator
#59Electrostatic vibrator and electronic apparatus
#60Micromechanical resonator with enlarged portion
#61Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#62Thermocompensated mechanical resonator
#63MEMS resonator structure including regions with different densities and method
#64Bulk-mode resonator having at least partially filled open cavities
#65Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation
#66Mechanical oscillator having an optimized thermoelastic coefficient
#67ARRAY OF BAW RESONATORS WITH MASK CONTROLLED RESONANT FREQUENCIES
#68MEMS resonator having at least one resonator mode shape
#69Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#70Passive temperature compensation of silicon MEMS devices
#71BULK MODE RESONATOR
#72Resonant circuit, method of producing same, and electronic device
#73Torsional resonator and filter using this
#74Micromechanical resonator
#75Temperature Stable MEMS Resonator
#76Method for fabricating a microelectromechanical system (MEMS) resonator
#77MEMS resonator structure and method
#78Piezo-on-diamond resonators and resonator systems
#79MEMS resonator array structure
#80Low frequency process-variation-insensitive temperature-stable micromechanical resonators
#81Process compensated micromechanical resonators
#82Frequency tuning of film bulk acoustic resonators (FBAR)
#83Microelectromechanical system comprising a beam that undergoes flexural deformation
#84Micromachine and production method thereof
#85MEMS resonator array structure and method of operating and using same
#86Frequency compensated oscillator design for process tolerances
#87Techniques for adding compensating material(s) in semiconductor devices
#88Temperature stable MEMS resonator
#89Temperature stable MEMS resonator
#90MEMS resonator with co-located temperature sensor
#91MEMS resonator with colocated temperature sensor
#92Temperature stable MEMS resonator
#93Dual-resonator semiconductor die
#94Temperature stable MEMS resonator
#95Temperature stable MEMS resonator
#96Rounded and curved integrated tethers for quartz resonators
#97Laterally-doped MEMS resonator