220385 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
Sub-classes:RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
#2MICRO-RESONATOR DESIGN IMPLEMENTING INTERNAL RESONANCE FOR MEMS APPLICATIONS
#3Microelectromechanical resonator
#4DUAL RESONATOR STRUCTURE FOR TEMPERATURE-COMPENSATED OSCILLATORS, INCLUDING RELATED APPARATUSES
#5Microelectromechanical resonator
#6Integrated Acoustic Devices
#7RESONANCE DEVICE AND MANUFACTURING METHOD FOR THE SAME
#8MICROELECTROMECHANICAL OSCILLATORS PRODUCING UNIQUE IDENTIFIERS
#9METHOD OF MANUFACTURING A PLURALITY OF MECHANICAL RESONATORS IN A MANUFACTURING WAFER
#10Microelectromechanical resonator
#11Microelectromechanical resonator
#12Micro-resonator design implementing internal resonance for MEMS applications
#13Resonator and resonance device
#14RESONATOR AND RESONANT DEVICE
#15MEMS frequency-tuning springs
#16Microelectromechanical resonator
#17Guided wave devices with selectively loaded piezoelectric layers
#18Distributed-mode beam and frame resonators for high frequency timing circuits
#19Oven controlled MEMS oscillator and system and method for calibrating the same
#20Resonator and resonance device
#21Resonance device manufacturing method
#22Bulk acoustic wave resonator
#23Frequency compensated oscillator design for process tolerances
#24Frequency compensated oscillator design for process tolerances
#25Resonance device and manufacturing method therefor
#26Acoustic resonator and method
#27MEMS device for harvesting sound energy and methods for fabricating same
#28Guided wave devices with selectively loaded piezoelectric layers
#29Guided wave devices with sensors utilizing embedded electrodes
#30Mixed domain guided wave devices utilizing embedded electrodes
#31Guided wave devices with embedded electrodes and non-embedded electrodes
#32Guided wave devices with selectively thinned piezoelectric layers
#33Microelectromechanical resonator
#34Piezoelectric vibrator and piezoelectric vibrating apparatus
#35Piezoelectric vibrator and frequency adjustment method for piezoelectric vibrator
#36Frequency compensated oscillator design for process tolerances
#37Frequency compensated oscillator design for process tolerances
#38Nano scale resonator, nano scale sensor, and fabrication method thereof
#39Devices comprising nanotubes or nanowires having alterable characteristics and related methods
#40Method of adjusting the resonance frequency of a micro-machined vibrating element
#41METHOD OF MANUFACTURING MEMS DEVICE
#42Devices comprising nanotubes for use as sensors and/or transducers, and related methods
#43Bulk-mode resonator having at least partially filled open cavities
#44Method of manufacturing MEMS device
#45Methods of forming micro-electromichanical resonators having boron-doped resonator bodies containing eutectic alloys
#46Timing oscillators and related methods
#47Sensor and transducer devices comprising carbon nanotubes, methods of making and using the same
#48Micro electro-mechanical system and method of manufacturing the same
#49Low frequency process-variation-insensitive temperature-stable micromechanical resonators
#50Process compensated micromechanical resonators
#51Resonant-oscillating-device fabrication method
#52Method and apparatus for frequency tuning of a micro-mechanical resonator
#53Breath-mode ring resonator structure, and method of designing, operating and using same
#54MEMS type oscillator, process for fabricating the same, filter, and communication unit
#55Method for adjusting the frequency of a MEMS resonator
#56Micro-resonator, band-pass filter, semiconductor device and communication apparatus
#57Method for making a tunable cantilever device
#58Capacitive vertical silicon bulk acoustic resonator
#59Method for frequency tuning of a micro-mechanical resonator
#60Micro electrical mechanical system (MEMS) tuning using focused ion beams
#61Method for adjusting the frequency of a MEMS resonator
#62Method and apparatus for frequency tuning of a micro-mechanical resonator
#63Frequency compensated oscillator design for process tolerances
#64Electromechanical resonator and method of operating same
#65Micromechanical resonator having short support beams
#66Trimming method for microresonators and microresonators made thereby
#67Tuning method for microresonators and microresonators made thereby