220753 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Tuning fork resonators; Single-Ended Tuning Fork resonators with two fork tines, e.g. Y-beam cantilever
Vibration device and manufacturing method of the same
#2Resonation element, resonator, oscillator, electronic device and moving object
#3Resonator, oscillator, electronic apparatus, physical quantity sensor, and mobile object
#4Piezoelectric device and electronic apparatus
#5Method of manufacturing a microelectromechanical system (MEMS) resonator
#6Micromechanical resonator
#7Micromechanical resonator
#8Micromechanical resonator
#9Method for fabricating a microelectromechanical system (MEMS) resonator
#10Serrated MEMS resonators
#11Serrated MEMS resonators
#12Techniques for adding compensating material(s) in semiconductor devices
#13Temperature stable MEMS resonator
#14Temperature stable MEMS resonator
#15Temperature stable MEMS resonator
#16Temperature stable MEMS resonator