220752 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Tuning fork resonators Single-Ended Tuning Fork resonators
Sub-classes:Methods and devices for microelectromechanical resonators
#2Methods and devices for microelectromechanical resonators
#3Methods and devices for microelectromechanical resonators
#4Methods and devices for microelectromechanical resonators
#5Methods and devices for microelectromechanical resonators
#6Methods and devices for microelectromechanical pressure sensors
#7Micromechanical resonator
#8Resonator element, resonator, oscillator, and electronic device
#9Resonator electrode shields
#10Micromechanical resonator
#11Temperature controlled MEMS resonator and method for controlling resonator frequency
#12Temperature controlled MEMS resonator and method for controlling resonator frequency
#13Temperature controlled MEMS resonator and method for controlling resonator frequency