220754 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Tuning fork resonators; Single-Ended Tuning Fork resonators with more than two fork tines
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
#2Resonator and resonance device
#3RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFACTURING METHOD
#4Resonator and resonance device
#5Resonator and resonance device
#6METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE
#7Vibrator device and method for manufacturing vibrator device
#8Resonance device
#9VIBRATOR ELEMENT
#10Resonator and resonance device including same
#11Vibration element, electronic apparatus, and vehicle
#12Resonator and resonance device
#13Micromechanical resonator having reduced size
#14Resonator and resonance device
#15Resonator and resonance device
#16Resonance device manufacturing method
#17Resonator and resonance device
#18Resonator and resonance device
#19Resonance device and manufacturing method therefor
#20Resonator and resonator device
#21Resonator and resonance device
#22Resonator and resonation device
#23Resonator, oscillator, electronic apparatus, and vehicle
#24Resonator and resonance device
#25Resonator and resonance device
#26Resonator and resonance device
#27Piezoelectric thin film and piezoelectric vibrator
#28Resonator manufacturing method
#29Resonance device
#30Method of forming capacitive MEMS sensor devices
#31Piezoelectric vibrator and piezoelectric vibration device
#32Vibration device and manufacturing method of the same
#33Vibrating device and manufacturing method therfor
#34Piezoelectric device and electronic apparatus
#35Capacitive MEMS sensor devices
#36Resonator
#37Resonator having an output electrode underneath first and second electrode arms