Patents-Review.com
ClassID:

233419 ⎘

H05G2/008 - page 2 - CPC Classification

Classification description:

X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Recent Application in this class:
#301
20200278617
2020-09-03

Radiation source for lithography process

 #302
20200266603
2020-08-20

Laser apparatus, EUV light generating system, and electronic device manufacturing method

 #303
20200260564
2020-08-13

Target expansion rate control in an extreme ultraviolet light source

 #304
20200245443
2020-07-30

Laser source device, extreme ultraviolet lithography device and method

 #305
20200241425
2020-07-30

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

 #306
20200236769
2020-07-23

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

 #307
20200236768
2020-07-23

EUV collector contamination prevention

 #308
20200209737
2020-07-02

Lithography scanner

 #309
20200205276
2020-06-25

Generating extreme ultraviolet radiation with nanoscale antennas

 #310
20200187340
2020-06-11

Laser sustained plasma and endoscopy light source

 #311
20200178380
2020-06-04

Method and device for measuring contamination in EUV source

 #312
20200163197
2020-05-21

High brightness laser-produced plasma light source

 #313
20200154554
2020-05-14

Polarizer

 #314
20200152345
2020-05-14

Radiation system

 #315
20200150543
2020-05-14

Extreme ultraviolet light generation system

 #316
20200150445
2020-05-14

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

 #317
20200146137
2020-05-07

Residual gain monitoring and reduction for EUV drive laser

 #318
20200146136
2020-05-07

EUV LIGHT CONCENTRATING APPARATUS AND LITHOGRAPHY APPARATUS INCLUDING THE SAME

 #319
20200142311
2020-05-07

Extreme ultraviolet light generation apparatus and maintenance method

 #320
20200137864
2020-04-30

Shock wave visualization for extreme ultraviolet plasma optimization

 #321
20200137863
2020-04-30

Apparatus and method for generating an electromagnetic radiation

 #322
20200133137
2020-04-30

Extreme ultraviolet light generating apparatus

 #323
20200132300
2020-04-30

Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber

 #324
20200128657
2020-04-23

Supply system for an extreme ultraviolet light source

 #325
20200124976
2020-04-23

Radiation Source Module and Lithographic Apparatus

 #326
20200124975
2020-04-23

Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure method

 #327
20200119514
2020-04-16

Laser system, extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation method

 #328
20200107428
2020-04-02

Laser source device and extreme ultraviolet lithography device

 #329
20200107427
2020-04-02

Droplet generator assembly and method for using the same and radiation source apparatus

 #330
20200105431
2020-04-02

Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation source

 #331
20200103433
2020-04-02

Particle image velocimetry of extreme ultraviolet lithography systems

 #332
20200100350
2020-03-26

Optical system, metrology apparatus and associated method

 #333
20200089124
2020-03-19

Guiding device and associated system

 #334
20200084870
2020-03-12

Method and device for generating electromagnetic radiation by means of a laser-produced plasma

 #335
20200077501
2020-03-05

Extreme ultraviolet light generation apparatus

 #336
20200077500
2020-03-05

Laser apparatus and EUV light generating system

 #337
20200075190
2020-03-05

Apparatus and method for generating extreme ultraviolet radiation

 #338
20200068697
2020-02-27

Extreme ultraviolet light generation apparatus

 #339
20200068696
2020-02-27

Light source for lithography exposure process

 #340
20200068695
2020-02-27

Laser apparatus for generating extreme ultraviolet light

 #341
20200064184
2020-02-27

Extreme ultraviolet light sensor unit and extreme ultraviolet light generation apparatus

 #342
20200060015
2020-02-20

Apparatus and method for generating extreme ultraviolet radiation

 #343
20200060014
2020-02-20

High brightness short-wavelength radiation source (variants)

 #344
20200057381
2020-02-20

Process system and operating method thereof

 #345
20200057372
2020-02-20

Lithography system and method for exposing wafer

 #346
20200053860
2020-02-13

EUV generation device

 #347
20200045802
2020-02-06

Extreme ultraviolet light generation system

 #348
20200045801
2020-02-06

Light generation system using metal-nonmetal compound as precursor and related light generation method

 #349
20200045800
2020-02-06

EUV radiation source for lithography exposure process

 #350
20200044407
2020-02-06

Laser apparatus and EUV light generation system

 #351
20200041783
2020-02-06

Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source

 #352
20200037429
2020-01-30

Target measuring apparatus and extreme ultraviolet light generation apparatus

 #353
20200037428
2020-01-30

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #354
20200037427
2020-01-30

Extreme ultraviolet radiation source and cleaning method thereof

 #355
20200033739
2020-01-30

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

 #356
20200033731
2020-01-30

Target supply device, extreme ultraviolet light generation device, and target supply method

 #357
20200026179
2020-01-23

EUV radiation modification methods and systems

 #358
20200020458
2020-01-16

Radial lithographic source homogenizer

 #359
20200015343
2020-01-09

Method of purifying target material for an EUV light source

 #360
20200008290
2020-01-02

EUV light source and apparatus for lithography

 #361
20200004168
2020-01-02

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

 #362
20200004159
2020-01-02

EUV light source and apparatus for lithography

 #363
20200003414
2020-01-02

Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber

 #364
20190394865
2019-12-26

Method of operating semiconductor apparatus and semiconductor apparatus

 #365
20190387603
2019-12-19

Target trajectory metrology in an extreme ultraviolet light source

 #366
20190373709
2019-12-05

System and method for pumping laser sustained plasma with a frequency converted illumination source

 #367
20190364654
2019-11-28

Extreme ultraviolet light generation apparatus

 #368
20190358952
2019-11-28

Droplet discharge apparatus and calculation method

 #369
20190355572
2019-11-21

Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus

 #370
20190335571
2019-10-31

EUV collector contamination prevention

 #371
20190320521
2019-10-17

Extreme ultraviolet light generation apparatus

 #372
20190313519
2019-10-10

Extreme ultraviolet light generation system

 #373
20190293922
2019-09-26

Laser apparatus and extreme ultraviolet light generation system

 #374
20190293488
2019-09-26

Thomson scattering measurement system and EUV light generation system

 #375
20190289707
2019-09-19

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

 #376
20190289706
2019-09-19

System and method for extreme ultraviolet source control

 #377
20190289705
2019-09-19

Extreme ultraviolet light generation apparatus

 #378
20190289704
2019-09-19

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #379
20190277772
2019-09-12

Inspection device and inspection method

 #380
20190274210
2019-09-05

Reducing the effect of plasma on an object in an extreme ultraviolet light source

 #381
20190254152
2019-08-15

Target expansion rate control in an extreme ultraviolet light source

 #382
20190250517
2019-08-15

Target image capturing device and extreme ultraviolet light generation device

 #383
20190246486
2019-08-08

Electron beam transport system

 #384
20190239330
2019-08-01

Laser device and extreme ultraviolet light generation device using delay determination at a shutter

 #385
20190239329
2019-08-01

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #386
20190239328
2019-08-01

EUV generating device

 #387
20190237303
2019-08-01

Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator

 #388
20190235287
2019-08-01

Laser device and extreme ultraviolet light generation device

 #389
20190215940
2019-07-11

X-ray metrology system with broadband laser produced plasma illuminator

 #390
20190212657
2019-07-11

Apparatus for delivering gas and illumination source for generating high harmonic radiation

 #391
20190200443
2019-06-27

Target supply apparatus

 #392
20190200442
2019-06-27

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #393
20190174614
2019-06-06

Extreme ultraviolet light generation device

 #394
20190166680
2019-05-30

System and method for extreme ultraviolet source control

 #395
20190166679
2019-05-30

High-brightness laser produced plasma source and methods for generating radiation and mitigating debris

 #396
20190159328
2019-05-23

Chamber apparatus, target generation method, and EUV light generation apparatus

 #397
20190159327
2019-05-23

Extreme ultraviolet light generation method

 #398
20190157833
2019-05-23

Laser device, and extreme ultraviolet light generation system

 #399
20190157828
2019-05-23

Methods and systems for aligning master oscillator power amplifier systems

 #400
20190155179
2019-05-23

Radiation source for lithography process

 #401
20190155163
2019-05-23

Target generation device and extreme ultraviolet light generation device

 #402
20190150267
2019-05-16

Optical pulse generation for an extreme ultraviolet light source

 #403
20190150266
2019-05-16

Droplet generator and method of servicing extreme ultraviolet imaging tool

 #404
20190150265
2019-05-16

Light source for lithography exposure process

 #405
20190150264
2019-05-16

Droplet collection device

 #406
20190150263
2019-05-16

Apparatus and method for generating extreme ultraviolet radiation

 #407
20190150262
2019-05-16

Apparatus and method for generating extreme ultraviolet radiation

 #408
20190150261
2019-05-16

Droplet collection device

 #409
20190150260
2019-05-16

DROPLET DETECTOR AND EUV LIGHT GENERATION DEVICE

 #410
20190141826
2019-05-09

System and method for generating extreme ultraviolet light

 #411
20190137882
2019-05-09

Light source for lithography exposure process

 #412
20190116655
2019-04-18

Extreme UV light generation device

 #413
20190115203
2019-04-18

Continuous-wave laser-sustained plasma illumination source

 #414
20190113765
2019-04-18

Optical element angle adjustment device and extreme ultraviolet light generation device

 #415
20190104604
2019-04-04

Collector pellicle

 #416
20190101831
2019-04-04

Extreme ultraviolet control system for adjusting droplet illumination parameters

 #417
20190094717
2019-03-28

Light source, EUV lithography system, and method for generating EUV radiation

 #418
20190080811
2019-03-14

Method of controlling debris in an EUV light source

 #419
20190075642
2019-03-07

Chamber device and extreme ultraviolet light generating device

 #420
20190075641
2019-03-07

Laser produced plasma light source having a target material coated on a cylindrically-symmetric element

 #421
20190069386
2019-02-28

Target trajectory metrology in an extreme ultraviolet light source

 #422
20190069385
2019-02-28

Bright and clean x-ray source for x-ray based metrology

 #423
20190064084
2019-02-28

X-ray spectrometer

 #424
20190053364
2019-02-14

Laser driven lamp

 #425
20190045616
2019-02-07

Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device

 #426
20190045615
2019-02-07

Laser driven lamp

 #427
20190045614
2019-02-07

Target supply device, processing device and processing method therefor

 #428
20190037677
2019-01-31

System and method for generating extreme ultraviolet light

 #429
20190037676
2019-01-31

High power broadband illumination source

 #430
20190021159
2019-01-17

Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device

 #431
20190021158
2019-01-17

LASER-DRIVEN LIGHT SOURCE DEVICE

 #432
20190008026
2019-01-03

Tank, target generation device, and extreme-UV-light generation device

 #433
20190003981
2019-01-03

Illumination source for an inspection apparatus, inspection apparatus and inspection method

 #434
20180376575
2018-12-27

EUV light source and apparatus for lithography

 #435
20180375283
2018-12-27

Laser apparatus and extreme ultraviolet light generating system

 #436
20180375278
2018-12-27

Exteme ultraviolet radiation producing systems with driver laser systems having optical isolators

 #437
20180368243
2018-12-20

Methods and apparatus for optical metrology

 #438
20180368242
2018-12-20

Supply system for an extreme ultraviolet light source

 #439
20180364580
2018-12-20

Droplet generator for lithographic apparatus, EUV source and lithographic apparatus

 #440
20180352641
2018-12-06

Extreme ultraviolet light generating apparatus

 #441
20180351320
2018-12-06

System and method for generating extreme ultraviolet light, and laser apparatus

 #442
20180351318
2018-12-06

Laser device and laser device control method

 #443
20180348397
2018-12-06

Droplet timing sensor

 #444
20180343730
2018-11-29

Reducing the effect of plasma on an object in an extreme ultraviolet light source

 #445
20180343729
2018-11-29

Extreme ultraviolet light generating apparatus and control method for centroid of extreme ultraviolet light

 #446
20180342849
2018-11-29

Laser apparatus and extreme ultraviolet light generating system

 #447
20180341180
2018-11-29

TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION APPARATUS

 #448
20180341077
2018-11-29

Structure of connection between optical unit and optical path tube

 #449
20180330937
2018-11-15

Broadband light source including transparent portion with high hydroxide content

 #450
20180330841
2018-11-15

Apparatus for and method of controlling debris in an EUV light source

 #451
20180317309
2018-11-01

EUV source generation method and related system

 #452
20180317308
2018-11-01

Residual gain monitoring and reduction for EUV drive laser

 #453
20180314161
2018-11-01

Extreme ultraviolet light generation device

 #454
20180307146
2018-10-25

Radiation system and optical device

 #455
20180288863
2018-10-04

Target supply device and extreme ultraviolet light generating device

 #456
20180284617
2018-10-04

Extreme ultraviolet light generation device

 #457
20180279459
2018-09-27

Amplifying laser pulses having different wavelengths for EUV radiation generation

 #458
20180279458
2018-09-27

Optical pulse generation for an extreme ultraviolet light source

 #459
20180267411
2018-09-20

Apparatus for delivering gas and illumination source for generating high harmonic radiation

 #460
20180263101
2018-09-13

TARGET GENERATION DEVICE AND EUV LIGHT GENERATION DEVICE

 #461
20180255631
2018-09-06

Extreme ultraviolet light generating apparatus using differing laser beam diameters

 #462
20180255630
2018-09-06

Calibrating apparatus and method

 #463
20180254597
2018-09-06

Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus

 #464
20180253010
2018-09-06

Extreme ultraviolet light generating apparatus

 #465
20180246422
2018-08-30

EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus

 #466
20180246414
2018-08-30

Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter

 #467
20180246338
2018-08-30

Reducing an optical power of a reflected light beam

 #468
20180242441
2018-08-23

Extreme ultraviolet light generation system

 #469
20180240562
2018-08-23

Extreme ultraviolet light generating apparatus

 #470
20180235064
2018-08-16

Extreme ultraviolet light generating apparatus

 #471
20180224748
2018-08-09

Extreme ultraviolet light generating device

 #472
20180224746
2018-08-09

Extreme ultraviolet light generating device

 #473
20180206320
2018-07-19

Modular laser-produced plasma X-ray system

 #474
20180206319
2018-07-19

MODULAR LASER-PRODUCED PLASMA X-RAY SYSTEM

 #475
20180206318
2018-07-19

Modular laser-produced plasma X-ray system

 #476
20180199422
2018-07-12

Extreme ultraviolet light generating system

 #477
20180196361
2018-07-12

Lithographic apparatus

 #478
20180184510
2018-06-28

Optical waveguide forming method and apparatus

 #479
20180184509
2018-06-28

EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS

 #480
20180177036
2018-06-21

Extreme ultraviolet light generating apparatus

 #481
20180173117
2018-06-21

Extreme ultraviolet lithography system with debris trapper on exhaust line

 #482
20180173102
2018-06-21

Extreme ultraviolet light generation device

 #483
20180172967
2018-06-21

Integrated rotary structure and fabrication method thereof

 #484
20180160520
2018-06-07

Radiation source, metrology apparatus, lithographic system and device manufacturing method

 #485
20180160519
2018-06-07

Extreme ultraviolet light generation device

 #486
20180160518
2018-06-07

Target storage device

 #487
20180160517
2018-06-07

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #488
20180157179
2018-06-07

High-brightness light source

 #489
20180146536
2018-05-24

Extreme ultraviolet light generation apparatus

 #490
20180139831
2018-05-17

Target expansion rate control in an extreme ultraviolet light source

 #491
20180139830
2018-05-17

Discharge electrodes and light source device

 #492
20180136568
2018-05-17

Illumination source for an inspection apparatus, inspection apparatus and inspection method

 #493
20180124906
2018-05-03

Extreme ultraviolet light source

 #494
20180120711
2018-05-03

Source collector apparatus, lithographic apparatus and method

 #495
20180120041
2018-05-03

Device for controlling temperature of cooling water

 #496
20180110116
2018-04-19

System and method for generating extreme ultraviolet light

 #497
20180103534
2018-04-12

Extreme ultraviolet light generation device

 #498
20180084630
2018-03-22

Device and method for generating UV or X-ray radiation by means of a plasma

 #499
20180077786
2018-03-15

Target trajectory metrology in an extreme ultraviolet light source

 #500
20180077785
2018-03-15

Extreme ultraviolet light generation device

 #501
20180073992
2018-03-15

Illumination source for an inspection apparatus, inspection apparatus and inspection method

 #502
20180063935
2018-03-01

Optical isolation module

 #503
20180034235
2018-02-01

Radiation source

 #504
20180034228
2018-02-01

Laser apparatus and extreme ultraviolet light generation apparatus

 #505
20180031982
2018-02-01

Radiation system

 #506
20180031979
2018-02-01

Radiation source

 #507
20180027642
2018-01-25

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #508
20180020532
2018-01-18

EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods

 #509
20180007771
2018-01-04

Droplet detector and extreme ultraviolet light generating apparatus

 #510
20180007770
2018-01-04

Chamber device, target generation method, and extreme ultraviolet light generation system

 #511
20170373461
2017-12-28

Laser apparatus and measurement unit

 #512
20170373460
2017-12-28

LASER-DRIVEN LIGHT SOURCE DEVICE

 #513
20170367167
2017-12-21

Beam trap, beam guide device, EUV radiation generating apparatus, and method for absorbing a beam

 #514
20170350745
2017-12-07

Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device

 #515
20170332468
2017-11-16

Laser-driven high repetition rate source of ultrashort relativistic electron bunches

 #516
20170332467
2017-11-16

Droplet dispensing device, method for providing droplets, and light source for providing UV or X-ray light

 #517
20170325325
2017-11-09

Adjusting a beam diameter and an aperture angle of a laser beam

 #518
20170322499
2017-11-09

Radiation source and lithographic apparatus

 #519
20170317464
2017-11-02

Laser apparatus and extreme ultraviolet light generation system

 #520
20170311429
2017-10-26

REDUCING THE EFFECT OF PLASMA ON AN OBJECT IN AN EXTREME ULTRAVIOLET LIGHT SOURCE

 #521
20170307979
2017-10-26

Extreme UV light generation device and target recovery apparatus

 #522
20170301526
2017-10-19

Imaging spectrometer

 #523
20170299857
2017-10-19

Beam dump apparatus, laser apparatus equipped with the beam dump apparatus, and extreme ultraviolet light generating apparatus

 #524
20170280545
2017-09-28

EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATING METHOD, AND THOMSON SCATTERING MEASUREMENT SYSTEM

 #525
20170280544
2017-09-28

Beam delivery system and control method therefor

 #526
20170280543
2017-09-28

Target supply device, processing device and processing method thefefor

 #527
20170269482
2017-09-21

Inspection method, inspection apparatus and illumination method and apparatus

 #528
20170250517
2017-08-31

Extreme ultraviolet light generating apparatus

 #529
20170247778
2017-08-31

Method and apparatus for purifying target material for EUV light source

 #530
20170241920
2017-08-24

Methods for 2-color radiography with laser-compton X-ray sources

 #531
20170238407
2017-08-17

Extreme ultraviolet light generation device

 #532
20170231075
2017-08-10

Extreme ultraviolet light generation device

 #533
20170215267
2017-07-27

Extreme ultraviolet light generation apparatus

 #534
20170215266
2017-07-27

VIBRATOR UNIT AND TARGET SUPPLY DEVICE

 #535
20170215265
2017-07-27

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #536
20170200523
2017-07-13

EUV element having barrier to hydrogen transport

 #537
20170196072
2017-07-06

System and method for generating extreme ultraviolet light employing laser pulse including pedestal

 #538
20170184981
2017-06-29

Metrology methods, metrology apparatus and device manufacturing method

 #539
20170181259
2017-06-22

Laser apparatus and extreme ultraviolet light generating apparatus

 #540
20170181258
2017-06-22

EUV LPP source with improved dose control by tracking dose over specified window

 #541
20170176879
2017-06-22

Inspection apparatus and method

 #542
20170171955
2017-06-15

Extreme ultraviolet light generation system and method of generating extreme ultraviolet light

 #543
20170164457
2017-06-08

Laser sustained plasma light source with graded absorption features

 #544
20170160646
2017-06-08

Lithographic apparatus, spectral purity filter and device manufacturing method

 #545
20170160527
2017-06-08

Elongating a travel path of a light beam by an optical delay device

 #546
20170150591
2017-05-25

Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system

 #547
20170150590
2017-05-25

System and method for electrodeless plasma ignition in laser-sustained plasma light source

 #548
20170149202
2017-05-25

Amplifying pulsed laser radiation for EUV radiation production

 #549
20170142818
2017-05-18

Plasma based light source having a target material coated on a cylindrically-symmetric element

 #550
20170142817
2017-05-18

Laser produced plasma light source having a target material coated on a cylindrically-symmetric element

 #551
20170131129
2017-05-11

Droplet generation for a laser produced plasma light source

 #552
20170127505
2017-05-04

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION METHOD

 #553
20170122803
2017-05-04

System and method for analyzing a light beam guided by a beam guiding optical unit

 #554
20170099721
2017-04-06

Optical isolation module

 #555
20170097572
2017-04-06

Faceted EUV optical element

 #556
20170095843
2017-04-06

Apparatus for and method of active cleaning of EUV optic with RF plasma field

 #557
20170094768
2017-03-30

Targets and processes for fabricating same

 #558
20170094767
2017-03-30

Extreme ultraviolet light generation device

 #559
20170094766
2017-03-30

Extreme ultraviolet light source device

 #560
20170094765
2017-03-30

System and method for laser-sustained plasma illumination

 #561
20170094764
2017-03-30

Reduction of periodic oscillations in a source plasma chamber

 #562
20170086283
2017-03-23

EUV collector with orientation to avoid contamination

 #563
20170085054
2017-03-23

Monitoring laser beams

 #564
20170084360
2017-03-23

Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber

 #565
20170079126
2017-03-16

Extreme ultraviolet light generation apparatus

 #566
20170070024
2017-03-09

Laser apparatus, EUV light generation system, and method of controlling laser apparatus

 #567
20170064801
2017-03-02

Device for Monitoring the Alignment of a Laser Beam, and EUV Radiation Generating Apparatus having such a Device

 #568
20170064800
2017-03-02

Extreme ultraviolet light generation apparatus

 #569
20170064799
2017-03-02

Extreme UV light generator

 #570
20170063020
2017-03-02

System and method for generating extreme ultraviolet light, and laser apparatus

 #571
20170059837
2017-03-02

EUV light generator including collecting mirror having drip hole

 #572
20170059490
2017-03-02

System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter

 #573
20170055336
2017-02-23

Extreme ultraviolet light generation apparatus

 #574
20170052456
2017-02-23

Lithographic system

 #575
20170048960
2017-02-16

Systems and methods for controlling EUV energy generation using pulse intensity

 #576
20170048959
2017-02-16

Systems and methods for stabilization of droplet-plasma interaction via laser energy modulation

 #577
20170048958
2017-02-16

Stabilizing EUV light power in an extreme ultraviolet light source

 #578
20170048957
2017-02-16

Target expansion rate control in an extreme ultraviolet light source

 #579
20170048956
2017-02-16

EUV light generator apparatus having a droplet generator configured to control a droplet position using a magnetic field

 #580
20170027047
2017-01-26

Extreme ultraviolet light generation system

 #581
20170019983
2017-01-19

System and method for generating extreme ultraviolet light

 #582
20170019982
2017-01-19

METHOD, APPARATUS AND SYSTEM FOR PROVIDING MULTIPLE EUV BEAMS FOR SEMICONDUCTOR PROCESSING

 #583
20170019981
2017-01-19

Solution for EUV power increment at wafer level

 #584
20160381776
2016-12-29

High efficiency laser-sustained plasma light source

 #585
20160377986
2016-12-29

Target supply device and EUV light generation apparatus

 #586
20160377985
2016-12-29

Component for a radiation source, associated radiation source and lithographic apparatus

 #587
20160377848
2016-12-29

Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method

 #588
20160366756
2016-12-15

Method for EUV power improvement with fuel droplet trajectory stabilization

 #589
20160365694
2016-12-15

Laser apparatus and laser apparatus manufacturing method

 #590
20160353561
2016-12-01

Protecting a vacuum environment from leakage

 #591
20160351383
2016-12-01

Apparatus and a method for operating a sealed beam lamp containing an ionizable medium

 #592
20160350935
2016-12-01

MEASURING ARRANGEMENT FOR USE WHEN DETERMINING TRAJECTORIES OF FLYING OBJECTS

 #593
20160345419
2016-11-24

Extreme UV radiation light source device

 #594
20160341969
2016-11-24

Beam propagation camera and method for light beam analysis

 #595
20160341601
2016-11-24

System for generating extreme ultra violet light

 #596
20160336713
2016-11-17

Laser apparatus

 #597
20160334711
2016-11-17

Radiation source

 #598
20160330826
2016-11-10

Light source apparatus

 #599
20160323986
2016-11-03

Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method

 #600
20160323985
2016-11-03

X-ray pulse source and method for generating X-ray pulses