248380 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor; Apparatus for crystallization from liquid or supercritical state; Seed pulling including details of precursor replenishment
SYSTEMS AND METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING A VAPORIZED DOPANT
#2SYSTEMS AND METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING A VAPORIZED DOPANT
#3Crystal growth doping apparatus and crystal growth doping method
#4Raw material supply unit, single-crystal silicon ingot growing apparatus comprising same and raw material supply method
#5Raw material supply unit, and apparatus comprising same for growing single-crystal silicon ingot
#6Systems for producing a single crystal silicon ingot using a vaporized dopant
#7SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#8SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#9Apparatus for manufacturing silicon single crystal and melt inlet pipe of the same
#10Liquid doping systems and methods for controlled doping of single crystal semiconductor material
#11Apparatus for manufacturing ingot
#12Method of charging raw material, method of manufacturing single crystals, and single crystal manufacturing apparatus
#13Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
#14Process for growing silicon carbide single crystal and device for the same
#15Side feed system for Czochralski growth of silicon ingots
#16Silicon ingot having uniform multiple dopants and method and apparatus for producing same
#17Feed tool for shielding a portion of a crystal puller
#18Method and apparatus for producing single crystals composed of semiconductor material
#19CRYSTAL GROWTH APPARATUS AND METHOD
#20Crystal manufacturing
#21Procedure for in-situ determination of thermal gradients at the crystal growth front
#22Method for recharging raw material polycrystalline silicon
#23METHODS FOR CROPPING A CYLINDRICAL INGOT
#24Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
#25Method for producing a single crystal composed of silicon using molten granules
#26Silicon single crystal pull-up apparatus having a sliding sample tube
#27Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt
#28Single-crystal manufacturing apparatus and single-crystal manufacturing method
#29SINGLE-CRYSTAL GROWTH APPARATUS AND RAW-MATERIAL SUPPLY METHOD
#30Single-crystal manufacturing apparatus
#31Methods for pulling a multicrystalline silicon ingot from a silicon melt
#32Pulling assemblies for pulling a multicrystalline silicon ingot from a silicon melt
#33Producing method and apparatus of silicon single crystal, and silicon single crystal ingot
#34System for continuous growing of monocrystalline silicon
#35Process and apparatus for producing a single crystal of semiconductor material
#36Method for feeding arsenic dopant into a silicon crystal growing apparatus
#37Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
#38Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus
#39Procedure for in-situ determination of thermal gradients at the crystal growth front
#40Method and device for feeding arsenic dopant into a silicon crystal growing apparatus
#41Crystal growth apparatus and method
#42Process and apparatus for producing a single crystal of semiconductor material
#43Method and apparatus for producing crystals
#44System for continuous growing of monocrystalline silicon
#45Crystal manufacturing
#46Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
#47Method for manufacturing defect-free silicon single crystal
#48Silicon casting apparatus and method of producing silicon ingot
#49Nitrogen doped silicon wafer and manufacturing method thereof
#50Method for manufacturing single crystal semiconductor
#51Mechanism for controlling melt level in single crystal pulling apparatus, method for controlling melt level in single crystal pulling apparatus, mechanism for adjusting melt level in single crystal pulling apparatus and method for adjusting melt level while pulling single crystal
#52Method for manufacturing granular silicon crystal
#53Apparatus for and method of manufacturing a single crystal rod
#54Apparatus and method for supplying raw material in Czochralski method
#55Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
#56Melter assembly and method for charging a crystal forming apparatus with molten source material
#57Systems and methods for measuring and reducing dust in granular material
#58Melter assembly and method for charging a crystal forming apparatus with molten source material
#59Device for the production of crystal rods having a defined cross-section and column-shaped polycrystallization structure by means of floating-zone continuous crystallization
#60System for continuous growing of monocrystalline silicon
#61Continuous production method for crystalline silicon and production apparatus for the same
#62Apparatus for supplying raw material