248374 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor; Apparatus for crystallization from liquid or supercritical state Seed pulling
Sub-classes:FINS ON CRUCIBLE OR GUSSETS ON REFRACTORY LINING FOR FACILITATING EXCLUSION OF IMPURITIES FROM A BOULE
#2Heater assembly and single crystal puller
#3METHODS OF GROWING SINGLE CRYSTAL INGOTS USING SUSCEPTOR ASSEMBLY WITH SACRIFICE RING
#4SYSTEMS AND METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING A VAPORIZED DOPANT
#5Single crystal growth susceptor assembly with sacrifice ring
#6SYSTEMS AND METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING A VAPORIZED DOPANT
#7Ingot puller apparatus having heat shields with feet having an apex
#8Czochralski single crystal furnace for preparing monocrystalline silicon and method for preparing monocrystalline silicon
#9Systems for producing a single crystal silicon ingot using a vaporized dopant
#10Ingot puller apparatus having heat shields with voids therein
#11Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing
#12Seed lifting and rotating system for use in crystal growth
#13Seed lifting and rotating system for use in crystal growth
#14Mono-crystalline silicon growth apparatus
#15SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#16Pulling a semiconductor single crystal according to the Czochralski method and silica glass crucible suitable therefor
#17SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#18METHOD OF MAKING LARGE SURFACE AREA FILAMENTS FOR THE PRODUCTION OF POLYSILICON IN A CVD REACTOR
#19Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path
#20Device for producing a mono-crystalline sheet of semiconductor material from a molten alloy held between at least two aperture elements
#21Crystal puller for inhibiting melt contamination
#22Cooling rate control apparatus and ingot growing apparatus including same
#23Method of manufacturing a vitreous silica crucible having a transparent layer, bubble-containing layers, and a semi-transparent layer in its wall
#24Single-crystal growth apparatus
#25Method for producing a component, particularly for use in a crucible pulling method for quartz glass
#26Pulling a semiconductor single crystal according to the Czochralski method
#27Apparatus for producing SiC single crystal by solution growth method, and method for producing SiC single crystal by using the production apparatus and crucible used in the production apparatus
#28Apparatus for producing SiC single crystal and method for producing SiC single crystal
#29Apparatus for manufacturing single crystal
#30Pulling head having a magnetic drive
#31Manufacturing method of silicon single crystal having low-resistivity electrical characteristics
#32Silica glass crucible
#33Silica glass crucible and method for producing monocrystalline silicon using same
#34Single-crystal silicon pulling silica container and method for producing the same
#35Dopant feeder of ignot growing apparatus
#36Coated silica crucible having a bubble-free layer, and method of producing the same
#37Production apparatus of SiC single crystal by solution growth method, method for producing SiC single crystal using the production apparatus, and crucible used in the production apparatus
#38Continuous sapphire growth
#39REMOVABLE THERMAL CONTROL FOR RIBBON CRYSTAL PULLING FURNACES
#40Method of loading a charge of polysilicon into a crucible
#41Single crystal silicon pulling silica container and manufacturing method thereof
#42Controlled Doping Device For Single Crystal Semiconductor Material and Related Methods
#43Method for producing SiC single crystals by control of an angle formed by the meniscus and the side face of the seed crystal and production device for the method
#44Crystal holding mechanism of single crystal pulling device and method for producing single crystal ingot
#45Process for growing silicon carbide single crystal and device for the same
#46Manufacturing apparatus of SiC single crystal, jig for use in the manufacturing apparatus, and method for manufacturing SiC single crystal
#47Single crystal pulling apparatus and low heat conductive member used for single crystal pulling apparatus
#48Quartz glass crucible, method for producing the same, and method for producing silicon single crystal
#49CRUCIBLES WITH A REDUCED AMOUNT OF BUBBLES AND INGOTS AND WAFERS PRODUCED BY USE OF SUCH CRUCIBLES
#50Composite Crucible For Crystal Growth
#51Manufacturing method and manufacturing apparatus of a group III nitride crystal, utilizing a melt containing a group III metal, an alkali metal, and nitrogen
#52Producing a mono-crystalline sheet of semiconductor material
#53RIBBON CRYSTAL STRING FOR INCREASING WAFER YIELD
#54Method and Apparatus for Doping by Lane in a Multi-Lane Sheet Wafer Furnace
#55Closure for silica glass crucible, silica glass crucible and method of handling the same
#56CRUCIBLES MADE WITH THE COLD FORM PROCESS
#57Apparatus for manufacturing single crystal silicon ingot having reusable dual crucible for silicon melting
#58Feed tool for shielding a portion of a crystal puller
#59Vitreous silica crucible for pulling silicon single crystal, and method for manufacturing the same
#60CRYSTAL GROWTH APPARATUS AND METHOD
#61Growth of a uniformly doped silicon ingot by doping only the initial charge
#62Vitreous silica crucible
#63Vitreous silica crucible and method of manufacturing the same
#64Single-crystal manufacturing apparatus and single-crystal manufacturing method
#65Kyropoulos sapphire single crystal growing apparatus using elliptic crucible
#66Procedure for in-situ determination of thermal gradients at the crystal growth front
#67Vitreous silica crucible for pulling silicon single crystal and method of manufacturing the same
#68Composite crucible, method of manufacturing the same, and method of manufacturing silicon crystal
#69Vitreous silica crucible having outer, intermediate, and inner layers
#70Vitreous silica crucible
#71Vitreous silica crucible with specific ratio of transparent layer and bubble-containing layer thicknesses
#72Vitreous silica crucible
#73Vitreous silica crucible
#74Seed crystal axis for solution growth of single crystal
#75Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal
#76Eddy current thickness measurement apparatus
#77Method of evaluating silica powder, vitreous silica crucible, and method of manufacturing vitreous silica crucible
#78CRUCIBLE FOR SILICON SUITABLE FOR PRODUCING SEMICONDUCTORS
#79Crystal growth crucible lid
#80Vitreous silica crucible provided with mineralizer on its inner surface and method of manufacturing silicon ingot using same
#81QUARTZ GLASS CRUCIBLE FOR PULLING SINGLE-CRYSTAL SILICON AND PROCESS FOR PRODUCING SINGLE-CRYSTAL SILICON
#82Vitreous silica crucible having transparent layer, bubble-containing layer, and semi-transparent layer in its wall, method of manufacturing the same, and method of manufacturing silicon ingot
#83Vitreous silica crucible
#84Method and device for producing thin silicon rods
#85Method of making large surface area filaments for the production of polysilicon in a CVD reactor
#86Ribbon Crystal String for Increasing Wafer Yield
#87Single-crystal manufacturing method and single-crystal manufacturing apparatus
#88Upper heater, single crystal production apparatus, and method for producing single crystal
#89CRYSTAL GROWING APPARATUS AND CRYSTAL GROWING METHOD
#90Method for detecting diameter of single crystal, single-crystal manufacturing method by using the same and single-crystal manufacturing apparatus
#91Graphite crucible and silicon single crystal manufacturing apparatus
#92Silicon single crystal pull-up apparatus having a sliding sample tube
#93Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt
#94Method for producing a component with a layer of transparent quartz glass
#95Method for measuring liquid level in single crystal pulling apparatus employing CZ method
#96IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME
#97Method of producing single crystal silicon
#98Single-crystal manufacturing apparatus and single-crystal manufacturing method
#99Single-crystal manufacturing apparatus
#100VITREOUS SILICA CRUCIBLE AND METHOD OF MANUFACTURING THE SAME
#101SILICON SINGLE CRYSTAL PULLING APPARATUS AND MANUFACTURING METHOD OF SILICON SINGLE CRYSTAL
#102VITREOUS SILICA CRUCIBLE AND METHOD OF MANUFACTURING THE SAME
#103Silica crucible for pulling silicon single crystal and method of producing the same
#104APPARATUS FOR MANUFACTURING GROUP III NITRIDE CRYSTALS
#105VITREOUS SILICA CRUCIBLE, METHOD OF MANUFACTURING THE SAME, AND USE THEREOF
#106Vitreous silica crucible for pulling silicon single crystal
#107Vitreous silica crucible for pulling single-crystal silicon and method of manufacturing the same
#108CLOSURE FOR SILICA GLASS CRUCIBLE, SILICA GLASS CRUCIBLE AND METHOD OF HANDLING THE SAME
#109Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process
#110SYSTEMS AND METHODS FOR RECYCLING SEMICONDUCTOR MATERIAL REMOVED FROM A RAW SEMICONDUCTOR BOULE
#111REINFORCING METHOD OF SILICA GLASS SUBSTANCE AND REINFORCED SILICA GLASS CRUCIBLE
#112Crucible having a doped upper wall portion and method for making the same
#113Crucible and method for pulling a single crystal
#114Method for manufacturing silicon single crystal in which a crystallization temperature gradient is controlled
#115Apparatus for pulling silicon single crystal
#116System for continuous growing of monocrystalline silicon
#117SILICA GLASS CRUCIBLE AND METHOD OF PULLING SILICON SINGLE CYRSAL WITH SILICA GLASS CRUCIBLE
#118Process and apparatus for producing a single crystal of semiconductor material
#119Silica glass crucible
#120Surface modified quartz glass crucible, and its modification process
#121Silica crucible with pure and bubble free inner crucible layer and method of making the same
#122Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
#123Quartz Glass Crucible for Pulling Silicon Single Crystal and Method of Manufacturing Quartz Glass Crucible for Pulling Silicon Single Crystal
#124Quartz glass crucible for silicon single crystal pulling operation and process for manufacturing the same
#125Single crystal growth method and single crystal pulling apparatus for improving yield and productivity of single crystal
#126METHOD OF PROTECTING CARBONACEOUS CRUCIBLE AND SINGLE-CRYSTAL PULLING APPARATUS
#127SILICA GLASS CRUCIBLE HAVING MULTILAYERED STRUCTURE
#128Silica glass crucible for pulling up silicon single crystal, method for manufacturing thereof and method for manufacturing silicon single crystal
#129Graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible
#130Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal
#131Ribbon crystal having reduced wetting string
#132Crystal grower with integrated litz coil
#133Method and apparatus for manufacturing fused silica crucible, and the fused silica crucible
#134Apparatus for the production of silica crucible
#135Method for manufacturing single crystal
#136Crucible for a crystal pulling apparatus
#137Coil Arrangement for Crystal Pulling and Method of Forming a Crystal
#138METHOD AND APPARATUS FOR REFINING A MOLTEN MATERIAL
#139Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus
#140Procedure for in-situ determination of thermal gradients at the crystal growth front
#141Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process
#142Silica glass crucible and method for pulling up silicon single crystal using the same
#143METHOD FOR PRODUCING VITREOUS SILICA CRUCIBLE
#144Controlling a melt-solid interface shape of a growing silicon crystal using an unbalanced magnetic field and iso-rotation
#145DEVICE AND METHOD FOR PRODUCTION OF SEMICONDUCTOR GRADE SILICON
#146Crucible holding member and method for producing the same
#147SILICA GLASS CRUCIBLE AND METHOD FOR MANUFACTURING THE SAME
#148Single crystal manufacturing apparatus and method
#149High Quality Single Crystal and Method of Growing the Same
#150Silica glass crucible
#151Crystal growth apparatus and method
#152SOLIDIFICATION OF CRYSTALLINE SILICON FROM REUSABLE CRUCIBLE MOLDS
#153Crystal pulling apparatus and method for the production of heavy crystals
#154APPARATUS FOR MANUFACTURING HIGH-QUALITY SEMICONDUCTOR SINGLE CRYSTAL INGOT AND METHOD USING THE SAME
#155High-purity vitreous silica crucible used for pulling large-diameter single-crystal silicon ingot
#156Apparatus for pulling single crystal by CZ method
#157SELF-COATED SINGLE CRYSTAL, AND PRODUCTION APPARATUS AND PROCESS THEREFOR
#158Vitreous silica crucible for pulling single-crystal silicon
#159INNER CRYSTALLIZATION CRUCIBLE AND PULLING METHOD USING THE CRUCIBLE
#160Apparatus for producing single crystal silicon
#161High-purity vitreous silica crucible for pulling large-diameter single-crystal silicon ingot
#162VITREOUS SILICA CRUCIBLE
#163Method and apparatus for manufacturing an ultra low defect semiconductor single crystalline ingot
#164Process and apparatus for producing a single crystal of semiconductor material
#165Easily crystallizable vitreous silica member, vitreous silica crucible and method for manufacturing single-crystal silicon
#166Ribbon Crystal String with Extruded Refractory Material
#167Ribbon crystal string for increasing wafer yield
#168Reduced wetting string for ribbon crystal
#169Apparatus for pulling single crystal by CZ method
#170Apparatus for pulling single crystal by CZ method
#171QUARTZ GLASS CRUCIBLE, PROCESS FOR PRODUCING THE SAME, AND USE
#172Manufacturing method and manufacturing apparatus of a group III nitride crystal
#173Crucible for the crystallization of silicon
#174Method and apparatus for refining a molten material
#175Seed crystal holder for growing single crystal from melt
#176Method and device for producing semiconductor wafers of silicon
#177Crucible having a doped upper wall portion and method for making the same
#178System for continuous growing of monocrystalline silicon
#179Heat shield member and single crystal pulling device
#180Silicon single crystal pulling device and graphite member used therein
#181REINFORCING METHOD OF SILICA GLASS SUBSTANCE AND REINFORCED SILICA GLASS CRUCIBLE
#182An Apparatus for Producing a Single Crystal
#183Crystal pulling apparatus and method for the production of heavy crystals
#184Self-Coated Single Crystal, And Production Apparatus And Process Therefor
#185Cord rotating head for a crystal drawing system
#186Melt surface position monitoring apparatus in silicon single crystal growth process
#187Method and apparatus for aluminum nitride monocrystal boule growth
#188Silica glass crucible
#189Apparatus for pulling single crystal by CZ method
#190Increased polysilicon deposition in a CVD reactor
#191Crucible for the crystallization of silicon
#192Crucible or related object holder and method of manufacture
#193Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field
#194Method and apparatus for manufacturing group III nitride crystals
#195Seed and seedholder combinations for high quality growth of large silicon carbide single crystals
#196QUARTZ GLASS CRUCIBLE AND METHOD FOR TREATING SURFACE OF QUARTZ GLASS CRUCIBLE
#197Surface modified quartz glass crucible and its modification process
#198METHOD OF MANUFACTURING SILICON SINGLE CRYSTAL, SILICON SINGLE CRYSTAL AND SILICON WAFER
#199QUARTZ GLASS CRUCIBLE AND METHOD FOR TREATING SURFACE OF QUARTZ GLASS CRUCIBLE
#200QUARTZ GLASS CRUCIBLE AND METHOD FOR TREATING SURFACE OF QUARTZ GLASS CRUCIBLE
#201Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot
#202Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
#203Crucible or related object holder and method of manufacture
#204Apparatus for manufacturing semiconductor single crystal
#205Apparatus for manufacturing semiconductor single crystal
#206Method and apparatus for the production of silicon carbide crystals
#207Quartz glass crucible for pulling up silicon single crystal and method for manufacture thereof
#208Polycrystalline silicon rod and method for processing the same
#209Solidification of crystalline silicon from reusable crucible molds
#210Apparatus for manufacturing single crystal
#211Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field
#212High quality single crystal and method of growing the same
#213Apparatus and method for supplying raw material in Czochralski method
#214Method and apparatus for eliminating a display defect in a liquid crystal display device
#215Seed and seedholder combinations for high quality growth of large silicon carbide single crystals
#216Apparatus for pulling single crystal
#217Melter assembly and method for charging a crystal forming apparatus with molten source material
#218Systems and methods for measuring and reducing dust in granular material
#219Apparatus for pulling single crystal by CZ method
#220Apparatus for pulling a single crystal
#221Quartz glass crucible for pulling up silicon single crystal and method for producing the same
#222Crystal grower with integrated Litz coil
#223Method of manufacturing silicon single crystal, silicon single crystal and silicon wafer
#224Device for pulling monocrystals
#225System for continuous growing of monocrystalline silicon
#226Active dampening orbit stopper for Czochralski crystal growth
#227Continuous production method for crystalline silicon and production apparatus for the same
#228Apparatus for supplying raw material
#229Method and apparatus for manufacturing single crystal
#230Method for pulling a single crystal
#231Method to monitor and control the crystal cooling or quenching rate by measuring crystal surface temperature
#232High purity silica crucible by electrolytic refining, and its production method and pulling method