248384 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor; Apparatus for crystallization from liquid or supercritical state; Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#2Control system and control method for diameter of single crystal ingot
#3SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#4Pulling head having a magnetic drive
#5Method and apparatus for reducing impurities in a single crystal based on ingot length
#6Manufacturing apparatus of SiC single crystal, jig for use in the manufacturing apparatus, and method for manufacturing SiC single crystal
#7Single crystal production apparatus and single crystal production method having pedestal with grooves
#8Single crystal pulling apparatus and low heat conductive member used for single crystal pulling apparatus
#9Weir method for improved single crystal growth in a continuous Czochralski process
#10Apparatus for manufacturing single crystal silicon ingot having reusable dual crucible for silicon melting
#11Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#12Crystal manufacturing
#13Procedure for in-situ determination of thermal gradients at the crystal growth front
#14Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal
#15Method and apparatus for continuous crystal growth
#16Czochralski crystal growth process furnace that maintains constant melt line orientation and method of operation
#17Methods and Systems for Characterization and Production of High Purity Polysilicon
#18Single-crystal manufacturing method and single-crystal manufacturing apparatus
#19System and method for crystal growing
#20Silicon single crystal pull-up apparatus having a sliding sample tube
#21Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt
#22Method for measuring liquid level in single crystal pulling apparatus employing CZ method
#23Single-crystal manufacturing apparatus and single-crystal manufacturing method
#24Single crystal growth method and single crystal pulling apparatus
#25Apparatus and method for producing single crystal
#26Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device
#27Crucible having a doped upper wall portion and method for making the same
#28Method for manufacturing silicon single crystal in which a crystallization temperature gradient is controlled
#29System for continuous growing of monocrystalline silicon
#30METHOD AND APPARATUS FOR GROWING HIGH QUALITY SILICON SINGLE CRYSTAL, SILICON SINGLE CRYSTAL INGOT GROWN THEREBY AND WAFER PRODUCED FROM THE SAME SINGLE CRYSTAL INGOT
#31Method for feeding arsenic dopant into a silicon crystal growing apparatus
#32APPARATUS AND METHOD FOR PULLING SILICON SINGLE CRYSTAL
#33Method and apparatus for manufacturing fused silica crucible, and the fused silica crucible
#34Device for pulling a single crystal
#35Method for manufacturing single crystal
#36METHOD AND APPARATUS FOR REFINING A MOLTEN MATERIAL
#37Procedure for in-situ determination of thermal gradients at the crystal growth front
#38Method and device for feeding arsenic dopant into a silicon crystal growing apparatus
#39Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#40Crystal-growing furnace system with emergent pressure-release arrangement
#41Crystal pulling apparatus and method for the production of heavy crystals
#42Apparatus for pulling single crystal by CZ method
#43Czochralski apparatus for growing crystals and purification method of waste salts using the same
#44Apparatus for pulling single crystal by CZ method
#45Apparatus for pulling single crystal by CZ method
#46Method and apparatus for refining a molten material
#47Seed crystal holder for growing single crystal from melt
#48Single crystal pulling apparatus
#49Crucible having a doped upper wall portion and method for making the same
#50System for continuous growing of monocrystalline silicon
#51Crystal manufacturing
#52Apparatus for growing high quality silicon single crystal ingot and growing method using the same
#53System and method for crystal growing
#54Crystal pulling apparatus and method for the production of heavy crystals
#55Cord rotating head for a crystal drawing system
#56Manufacturing equipment for polysilicon ingot
#57Melt surface position monitoring apparatus in silicon single crystal growth process
#58Apparatus for pulling single crystal by CZ method
#59Crucible or related object holder and method of manufacture
#60Method for producing silicon carbide (SiC) single crystal and silicon carbide (SiC) single crystal obtained by such method
#61Semiconductor single crystal manufacturing apparatus and graphite crucible
#62Method for preparing silicon carbide single crystal
#63Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby
#64Method for manufacturing single crystal semiconductor
#65Silicon single crystal pulling method
#66Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot
#67Apparatus for growing high quality silicon single crystal ingot and growing method using the same
#68Semiconductor single crystal manufacturing apparatus
#69Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
#70System and method for crystal growing
#71Crucible apparatus and method of solidifying a molten material
#72Method and apparatus for growing high quality silicon single crystal, silicon single crystal ingot grown thereby and wafer produced from the same single crystal ingot
#73Crucible or related object holder and method of manufacture
#74Apparatus for manufacturing semiconductor single crystal
#75Apparatus for manufacturing semiconductor single crystal
#76Method for producing a single crystal
#77Polycrystalline silicon rod and method for processing the same
#78Pulling-down apparatus and container therefor
#79Heat shielding member of silicon single crystal pulling system
#80Heat shield and crystal growth equipment
#81Apparatus and method for supplying raw material in Czochralski method
#82Manufacturing equipment of SiC single crystal and method for manufacturing SiC single crystal
#83Apparatus for pulling single crystal
#84Apparatus for pulling single crystal by CZ method
#85Method of manufacturing silicon single crystal and silicon single crystal manufactured by the method
#86Apparatus for pulling a single crystal
#87Apparatus and method for producing single crystal
#88Method and apparatus for purification of crystal material and for making crystals therefrom and use of crystals obtained thereby
#89Thermal shield
#90System for continuous growing of monocrystalline silicon
#91Non-contact orbit control system for Czochralski crystal growth
#92Heater for manufacturing a crystal
#93Active dampening orbit stopper for Czochralski crystal growth
#94Method for pulling a single crystal
#95Process for producing single crystal of compound semiconductor and crystal growing apparatus