Espoo
Finland
18
2024-01-25
The entities that hold a legal rights for patent applications filed by inventor Tuominen Marko:
Marko Tuominen from Espoo, FI has applied for patents for these inventions. The list has both pending applications and granted patents:
Thermal atomic layer etching processes
#2 | 2023-11-23Thermal atomic layer etching processes
#3 | 2023-08-10Atomic layer etching processes
#4 | 2022-04-21Thermal atomic layer etching processes
#5 | 2022-04-21Thermal atomic layer etching processes
#6 | 2021-11-18Selective passivation and selective deposition
#7 | 2020-10-01Atomic layer etching processes
#8 | 2020-10-01Thermal atomic layer etching processes
#9 | 2019-08-08Thermal atomic layer etching processes
#10 | 2018-08-16Selective passivation and selective deposition
#11 | 2018-06-28Atomic layer etching processes
#12 | 2018-06-14Thermal atomic layer etching processes
#13 | 2018-06-14Thermal atomic layer etching processes
#14 | 2011-05-05Method of growing oxide thin films
#15 | 2010-11-02Method of growing oxide thin films
#16 | 2010-08-10Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide
#17 | 2007-07-19Method of growing oxide thin films
#18 | 2006-05-02Methods for making a dielectric stack in an integrated circuit
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