Almere
Netherlands
92
2021-11-11
90
2023-11-14
These are the the leading inventors for applications assigned to ASM International N.V.:
ASM International N.V. based in Almere, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Synthesis and use of precursors for ALD of tellurium and selenium thin films
#2 | 2020-12-10 ✅ Patent 11,302,527 granted on 2022-04-12Methods for forming doped silicon oxide thin films
#3 | 2020-08-20 ✅ Patent 11,339,474 granted on 2022-05-24Atomic layer deposition apparatus and method for processing substrates using an apparatus
#4 | 2020-06-11 ✅ Patent 10,784,105 granted on 2020-09-22Methods for forming doped silicon oxide thin films
#5 | 2020-06-11 ✅ Patent 11,549,177 granted on 2023-01-10Process for passivating dielectric films
#6 | 2019-12-19 ✅ Patent 11,555,242 granted on 2023-01-17Precursors and methods for atomic layer deposition of transition metal oxides
#7 | 2019-10-03 ✅ Patent 10,858,738 granted on 2020-12-08Wafer boat cooldown device
#8 | 2019-08-29 ✅ Patent 11,072,622 granted on 2021-07-27Synthesis and use of precursors for ALD of tellurium and selenium thin films
#9 | 2019-06-13 ✅ Patent 11,056,385 granted on 2021-07-06Selective formation of metallic films on metallic surfaces
#10 | 2019-06-06 ✅ Patent 10,510,530 granted on 2019-12-17Methods for forming doped silicon oxide thin films
#11 | 2019-04-04 ✅ Patent 10,699,899 granted on 2020-06-30Atomic layer deposition of antimony oxide films
#12 | 2018-07-26 ✅ Patent 10,147,600 granted on 2018-12-04Methods for forming doped silicon oxide thin films
#13 | 2018-05-10 ✅ Patent 10,297,444 granted on 2019-05-21Enhanced thin film deposition
#14 | 2018-03-15 ✅ Patent 10,308,673 granted on 2019-06-04Synthesis and use of precursors for ALD of tellurium and selenium thin films
#15 | 2018-03-08 ✅ Patent 10,049,924 granted on 2018-08-14Selective formation of metallic films on metallic surfaces
#16 | 2017-12-07 ✅ Patent 10,043,880 granted on 2018-08-07Metal silicide, metal germanide, methods for making the same
#17 | 2017-11-23 ✅ Patent 9,875,893 granted on 2018-01-23Methods for forming doped silicon oxide thin films
#18 | 2017-09-07 ✅ Patent 10,344,378 granted on 2019-07-09Precursors and methods for atomic layer deposition of transition metal oxides
#19 | 2017-06-15 ✅ Patent 10,648,078 granted on 2020-05-12Atomic layer deposition apparatus and method for processing substrates using an apparatus
#20 | 2017-05-18 ✅ Patent 10,056,249 granted on 2018-08-21Atomic layer deposition of antimony oxide films
#21 | 2017-03-09 ✅ Patent 10,157,786 granted on 2018-12-18Selective formation of metallic films on metallic surfaces
#22 | 2017-01-19 ✅ Patent 10,553,440 granted on 2020-02-04Methods for depositing nickel films and for making nickel silicide and nickel germanide
#23 | 2016-09-29 ✅ Patent 10,738,382 granted on 2020-08-11Substrate processing apparatus
#24 | 2016-09-22 ✅ Patent 9,679,808 granted on 2017-06-13Selective formation of metallic films on metallic surfaces
#25 | 2016-09-08 ✅ Patent 9,677,173 granted on 2017-06-13Precursors and methods for atomic layer deposition of transition metal oxides
#26 | 2016-07-07 ✅ Patent 9,564,314 granted on 2017-02-07Methods for forming doped silicon oxide thin films
#27 | 2016-04-28 ✅ Patent 9,831,094 granted on 2017-11-28Enhanced thin film deposition
#28 | 2016-02-04 ✅ Patent 9,634,106 granted on 2017-04-25Doped metal germanide and methods for making the same
#29 | 2016-02-04 ✅ Patent 9,816,203 granted on 2017-11-14Crystalline strontium titanate and methods of forming the same
#30 | 2016-02-04 ✅ Patent 9,783,563 granted on 2017-10-10Synthesis and use of precursors for ALD of tellurium and selenium thin films
#31 | 2016-01-07 ✅ Patent 9,502,289 granted on 2016-11-22Selective formation of metallic films on metallic surfaces
#32 | 2015-11-05 ✅ Patent 9,469,899 granted on 2016-10-18Selective deposition of noble metal thin films
#33 | 2015-09-03 ✅ Patent 9,514,934 granted on 2016-12-06Atomic layer deposition of antimony oxide films
#34 | 2015-06-11 ✅ Patent 9,646,820 granted on 2017-05-09Methods for forming conductive titanium oxide thin films
#35 | 2015-01-15 ✅ Patent 9,153,441 granted on 2015-10-06Methods for forming doped silicon oxide thin films
#36 | 2014-07-17 ✅ Patent 9,478,449 granted on 2016-10-25Floating substrate monitoring and control device, and method for the same
#37 | 2014-03-27 ✅ Patent 9,587,307 granted on 2017-03-07Enhanced deposition of noble metals
#38 | 2013-08-08 ✅ Patent 10,837,107 granted on 2020-11-17Method and apparatus for contactlessly advancing substrates
#39 | 2013-08-01 ✅ Patent 9,112,003 granted on 2015-08-18Selective formation of metallic films on metallic surfaces
#40 | 2013-07-25 ✅ Patent 8,956,971 granted on 2015-02-17Selective formation of metallic films on metallic surfaces
#41 | 2013-07-18 ✅ Patent 9,127,351 granted on 2015-09-08Enhanced thin film deposition
#42 | 2013-05-09 ✅ Patent 8,679,958 granted on 2014-03-25Methods for forming doped silicon oxide thin films
#43 | 2013-05-02 ✅ Patent 10,707,082 granted on 2020-07-07Methods for depositing thin films comprising indium nitride by atomic layer deposition
#44 | 2013-04-18 ✅ Patent 9,006,112 granted on 2015-04-14Atomic layer deposition of antimony oxide films
#45 | 2013-04-04 ✅ Patent 9,048,271 granted on 2015-06-02Modular semiconductor processing system
#46 | 2013-03-14 ✅ Patent 8,455,293 granted on 2013-06-04Method for processing solar cell substrates
#47 | 2013-02-28 ✅ Patent 9,822,447 granted on 2017-11-21Dynamic fluid valve and method for establishing the same
#48 | 2013-01-17 ✅ Patent 9,018,567 granted on 2015-04-28Wafer processing apparatus with heated, rotating substrate support
#49 | 2013-01-10 ✅ Patent 9,223,203 granted on 2015-12-29Microcontact printed films as an activation layer for selective atomic layer deposition
#50 | 2012-12-06 ✅ Patent 9,136,180 granted on 2015-09-15Process for depositing electrode with high effective work function
#51 | 2012-11-15 ✅ Patent 9,447,496 granted on 2016-09-20Nanolayer deposition process
#52 | 2012-10-25 ✅ Patent 9,129,897 granted on 2015-09-08Metal silicide, metal germanide, methods for making the same
#53 | 2012-10-25 ✅ Patent 10,513,772 granted on 2019-12-24Process for passivating dielectric films
#54 | 2012-10-11 ✅ Patent 8,940,374 granted on 2015-01-27Nanolayer deposition process
#55 | 2012-08-23 ✅ Patent 8,641,350 granted on 2014-02-04Wafer boat assembly, loading apparatus comprising such a wafer boat assembly and method for loading a vertical furnace
#56 | 2012-08-09NANOLAYER DEPOSITION USING PLASMA TREATMENT
#57 | 2012-07-26 ✅ Patent 8,501,275 granted on 2013-08-06Enhanced deposition of noble metals
#58 | 2012-07-26 ✅ Patent 8,398,773 granted on 2013-03-19Thermal processing furnace and liner for the same
#59 | 2012-06-28 ✅ Patent 8,524,322 granted on 2013-09-03Combination CVD/ALD method and source
#60 | 2012-01-19 ✅ Patent 8,652,573 granted on 2014-02-18Method of CVD-depositing a film having a substantially uniform film thickness
#61 | 2012-01-12 ✅ Patent 8,927,403 granted on 2015-01-06Selective deposition of noble metal thin films
#62 | 2011-12-15 ✅ Patent 8,338,210 granted on 2012-12-25Method for processing solar cell substrates
#63 | 2011-11-24 ✅ Patent 8,633,050 granted on 2014-01-21Solar cell, and method of manufacturing the same
#64 | 2011-11-03 ✅ Patent 9,238,867 granted on 2016-01-19Apparatus and method for high-throughput atomic layer deposition
#65 | 2011-10-27 ✅ Patent 8,507,388 granted on 2013-08-13Prevention of oxidation of substrate surfaces in process chambers
#66 | 2011-10-20 ✅ Patent 8,252,703 granted on 2012-08-28Methods for forming roughened surfaces and applications thereof
#67 | 2011-05-26 ✅ Patent 9,243,330 granted on 2016-01-26Apparatus and method for high-throughput atomic layer deposition
#68 | 2011-05-26 ✅ Patent 8,242,029 granted on 2012-08-14Method for forming a silicon dioxide/metal oxide-nanolaminate with a desired wet etch rate
#69 | 2011-05-05 ✅ Patent 9,514,956 granted on 2016-12-06Method of growing oxide thin films
#70 | 2011-04-07 ✅ Patent 8,399,344 granted on 2013-03-19Method for adjusting the threshold voltage of a gate stack of a PMOS device
#71 | 2011-01-27Low Temperature ALD of Noble Metals
#72 | 2010-12-30 ✅ Patent 8,118,941 granted on 2012-02-21Semiconductor processing parts having apertures with deposited coatings and methods for forming the same
#73 | 2010-11-11 ✅ Patent 9,169,557 granted on 2015-10-27Process for producing oxide films
#74 | 2010-11-02 ✅ Patent 7,824,492 granted on 2010-11-02Method of growing oxide thin films
#75 | 2010-10-21 ✅ Patent 7,998,883 granted on 2011-08-16Process for producing zirconium oxide thin films
#76 | 2010-08-26 ✅ Patent 7,829,457 granted on 2010-11-09Protection of conductors from oxidation in deposition chambers
#77 | 2010-08-19 ✅ Patent 8,889,565 granted on 2014-11-18Selective removal of oxygen from metal-containing materials
#78 | 2010-08-19 ✅ Patent 9,127,340 granted on 2015-09-08Selective oxidation process
#79 | 2010-08-12 ✅ Patent 7,884,016 granted on 2011-02-08Liner materials and related processes for 3-D integration
#80 | 2010-08-10 ✅ Patent 7,771,533 granted on 2010-08-10Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide
#81 | 2010-06-17 ✅ Patent 7,833,906 granted on 2010-11-16Titanium silicon nitride deposition
#82 | 2010-03-23 ✅ Patent 7,682,657 granted on 2010-03-23Sequential chemical vapor deposition
#83 | 2010-01-14 ✅ Patent 8,343,583 granted on 2013-01-01Method for vaporizing non-gaseous precursor in a fluidized bed
#84 | 2010-01-14 ✅ Patent 9,175,390 granted on 2015-11-03Synthesis and use of precursors for ALD of tellurium and selenium thin films
#85 | 2009-10-01 ✅ Patent 7,923,382 granted on 2011-04-12Method for forming roughened surface
#86 | 2009-05-28 ✅ Patent 7,971,861 granted on 2011-07-05Safe liquid source containers
#87 | 2007-07-19 ✅ Patent 7,771,534 granted on 2010-08-10Method of growing oxide thin films
#88 | 2007-06-28 ✅ Patent 7,713,584 granted on 2010-05-11Process for producing oxide films
#89 | 2007-06-07 ✅ Patent 7,563,715 granted on 2009-07-21Method of producing thin films
#90 | 2007-05-31 ✅ Patent 8,048,484 granted on 2011-11-01Method for the deposition of a film by CVD or ALD
#91 | 2007-02-15 ✅ Patent 8,025,922 granted on 2011-09-27Enhanced deposition of noble metals
#92 | 2006-07-06 ✅ Patent 7,846,499 granted on 2010-12-07Method of pulsing vapor precursors in an ALD reactor
Also check out ASM International N.V.'s (Almere, Netherlands) applicant profile with 46 patent applications submitted.
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