ASM INTERNATIONAL N.V. based in Bilthoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2011-11-03 ✅ Patent 8,293,597 granted on 2012-10-23

US20110269310A1

Electricity

Selective silicide process

#2 | 2011-10-20

US20110256718A1

Chemistry; metallurgy

THIN FILMS

#3 | 2011-06-23 ✅ Patent 9,217,200 granted on 2015-12-22

US20110146568A1

Chemistry; metallurgy

Modification of nanoimprint lithography templates by atomic layer deposition

#4 | 2011-03-31 ✅ Patent 8,309,173 granted on 2012-11-13

US20110076402A1

Chemistry; metallurgy

System for controlling the sublimation of reactants

#5 | 2010-11-16 ✅ Patent 7,833,352 granted on 2010-11-16

US10383291

Apparatus for fabrication of thin films

#6 | 2010-06-03 ✅ Patent 7,985,669 granted on 2011-07-26

US20100136776A1

Chemistry; metallurgy

Selective deposition of noble metal thin films

#7 | 2010-06-03 ✅ Patent 8,012,876 granted on 2011-09-06

US20100136772A1

Chemistry; metallurgy

Delivery of vapor precursor from solid source

#8 | 2010-01-07 ✅ Patent 7,651,873 granted on 2010-01-26

US20100003769A1

Electricity

Method relating to the accurate positioning of a semiconductor wafer

#9 | 2009-12-31

US20090325391A1

Electricity

OZONE AND TEOS PROCESS FOR SILICON OXIDE DEPOSITION

#10 | 2009-12-17 ✅ Patent 8,002,463 granted on 2011-08-23

US20090310648A1

Physics

Method and device for determining the temperature of a substrate

#11 | 2009-12-17

US20090308315A1

Chemistry; metallurgy

SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED THERMAL CHARACTERISTICS AND METHOD FOR PROVIDING THE SAME

#12 | 2009-11-26

US20090291209A1

Chemistry; metallurgy

APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION

#13 | 2009-10-13 ✅ Patent 7,601,223 granted on 2009-10-13

US10782727

Showerhead assembly and ALD methods

#14 | 2009-10-01 ✅ Patent 7,923,382 granted on 2011-04-12

US20090246931A1

Electricity

Method for forming roughened surface

#15 | 2009-08-20 ✅ Patent 8,501,637 granted on 2013-08-06

US20090209081A1

Electricity

Silicon dioxide thin films by ALD

#16 | 2009-07-30 ✅ Patent 7,971,734 granted on 2011-07-05

US20090188874A1

Electricity

Wafer boat

#17 | 2009-05-28 ✅ Patent 7,971,861 granted on 2011-07-05

US20090133632A1

Chemistry; metallurgy

Safe liquid source containers

#18 | 2009-05-26 ✅ Patent 7,537,662 granted on 2009-05-26

US10428207

Method and apparatus for depositing thin films on a surface

#19 | 2009-03-19 ✅ Patent 7,799,300 granted on 2010-09-21

US20090074964A1

Performing operations; transporting

Method and apparatus for removing substances from gases

#20 | 2009-03-12 ✅ Patent 8,180,594 granted on 2012-05-15

US20090070634A1

Physics

System and method for automated customizable error diagnostics

#21 | 2009-03-12 ✅ Patent 7,981,791 granted on 2011-07-19

US20090068832A1

Chemistry; metallurgy

Thin films

#22 | 2009-02-26 ✅ Patent 7,731,494 granted on 2010-06-08

US20090049754A1

Electricity

System for use in a vertical furnace

#23 | 2009-02-24 ✅ Patent 7,494,927 granted on 2009-02-24

US10394430

Method of growing electrical conductors

#24 | 2009-02-05 ✅ Patent 7,498,272 granted on 2009-03-03

US20090035949A1

Chemistry; metallurgy

Method of depositing rare earth oxide thin films

#25 | 2009-01-22 ✅ Patent 8,034,410 granted on 2011-10-11

US20090023302A1

Chemistry; metallurgy

Protective inserts to line holes in parts for semiconductor process equipment

#26 | 2008-12-25 ✅ Patent 8,099,190 granted on 2012-01-17

US20080319559A1

Electricity

Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured

#27 | 2008-12-25 ✅ Patent 7,476,420 granted on 2009-01-13

US20080318423A9

Chemistry; metallurgy

Process for producing metal oxide films at low temperatures

#28 | 2008-11-20 ✅ Patent 7,629,256 granted on 2009-12-08

US20080286981A1

Chemistry; metallurgy

In situ silicon and titanium nitride deposition

#29 | 2008-11-06 ✅ Patent 7,851,019 granted on 2010-12-14

US20080274276A1

Chemistry; metallurgy

Method for controlling the sublimation of reactants

#30 | 2008-10-02

US20080241387A1

Chemistry; metallurgy

ATOMIC LAYER DEPOSITION REACTOR

#31 | 2008-09-23 ✅ Patent 7,427,329 granted on 2008-09-23

US10410699

Temperature control for single substrate semiconductor processing reactor

#32 | 2008-09-11 ✅ Patent 7,887,101 granted on 2011-02-15

US20080217909A1

Mechanical engineering

Joint for connecting two tubes in a high-temperature environment

#33 | 2008-08-12 ✅ Patent 7,410,671 granted on 2008-08-12

US10692243

Sequential chemical vapor deposition

#34 | 2008-06-19 ✅ Patent 7,955,979 granted on 2011-06-07

US20080146042A1

Electricity

Method of growing electrical conductors

#35 | 2008-05-29

US20080124470A1

Electricity

SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PROCESSING

#36 | 2008-04-24

US20080093711A1

Electricity

DIELECTRIC LAYERS AND METHODS OF FORMING THE SAME

#37 | 2008-04-08 ✅ Patent 7,356,762 granted on 2008-04-08

US10191635

Method for the automatic generation of an interactive electronic equipment documentation package

#38 | 2008-02-14 ✅ Patent 8,230,807 granted on 2012-07-31

US20080038484A1

Performing operations; transporting

Coatings, and methods and devices for the manufacture thereof

#39 | 2008-01-10 ✅ Patent 7,749,918 granted on 2010-07-06

US20080008975A1

Chemistry; metallurgy

Method and apparatus for processing semiconductor substrates

#40 | 2008-01-03 ✅ Patent 7,691,757 granted on 2010-04-06

US20080003838A1

Chemistry; metallurgy

Deposition of complex nitride films

#41 | 2007-12-13

US20070287261A1

Electricity

TRENCH ISOLATION STRUCTURES FOR INTEGRATED CIRCUITS

#42 | 2007-10-02 ✅ Patent 7,276,774 granted on 2007-10-02

US10867826

Trench isolation structures for integrated circuits

#43 | 2007-08-16 ✅ Patent 7,485,340 granted on 2009-02-03

US20070190248A1

Chemistry; metallurgy

Production of elemental films using a boron-containing reducing agent

#44 | 2007-08-14 ✅ Patent 7,256,375 granted on 2007-08-14

US10636372

Susceptor plate for high temperature heat treatment

#45 | 2007-06-14 ✅ Patent 7,645,486 granted on 2010-01-12

US20070134887A1

Electricity

Method of manufacturing a silicon dioxide layer

#46 | 2007-05-22 ✅ Patent 7,220,669 granted on 2007-05-22

US9997396

Thin films for magnetic device

#47 | 2007-02-01 ✅ Patent 7,666,773 granted on 2010-02-23

US20070026654A1

Chemistry; metallurgy

Selective deposition of noble metal thin films

#48 | 2007-01-25 ✅ Patent 7,426,939 granted on 2008-09-23

US20070017444A1

Mechanical engineering

Rotatable valve

#49 | 2006-09-19 ✅ Patent 7,108,747 granted on 2006-09-19

US9787062

Method for growing oxide thin films containing barium and strontium

#50 | 2006-09-12 ✅ Patent 7,104,578 granted on 2006-09-12

US10361480

Two level end effector

#51 | 2006-09-12 ✅ Patent 7,105,054 granted on 2006-09-12

US9836674

Method and apparatus of growing a thin film onto a substrate

#52 | 2006-09-05 ✅ Patent 7,102,235 granted on 2006-09-05

US10737315

Conformal lining layers for damascene metallization

#53 | 2006-08-15 ✅ Patent 7,092,287 granted on 2006-08-15

US10739901

Method of fabricating silicon nitride nanodots

#54 | 2006-07-18 ✅ Patent 7,077,614 granted on 2006-07-18

US9807580

Sorting/storage device for wafers and method for handling thereof

#55 | 2006-06-20 ✅ Patent 7,063,981 granted on 2006-06-20

US10066169

Active pulse monitoring in a chemical reactor

#56 | 2006-06-13 ✅ Patent 7,060,132 granted on 2006-06-13

US10270745

Method and apparatus of growing a thin film

#57 | 2006-05-23 ✅ Patent 7,048,488 granted on 2006-05-23

US10009851

Apparatus for transferring wafer and ring

#58 | 2006-05-18 ✅ Patent 7,427,571 granted on 2008-09-23

US20060105107A1

Chemistry; metallurgy

Reactor design for reduced particulate generation

#59 | 2006-05-16 ✅ Patent 7,045,406 granted on 2006-05-16

US10430703

Method of forming an electrode with adjusted work function

#60 | 2006-05-02 ✅ Patent 7,038,284 granted on 2006-05-02

US10653737

Methods for making a dielectric stack in an integrated circuit

#61 | 2006-04-25 ✅ Patent 7,033,126 granted on 2006-04-25

US10406801

Method and apparatus for loading a batch of wafers into a wafer boat

#62 | 2006-04-13 ✅ Patent 7,749,871 granted on 2010-07-06

US20060079090A1

Chemistry; metallurgy

Method for depositing nanolaminate thin films on sensitive surfaces

#63 | 2006-04-04 ✅ Patent 7,022,184 granted on 2006-04-04

US10461893

Atomic layer CVD

#64 | 2006-03-28 ✅ Patent 7,018,478 granted on 2006-03-28

US10893027

Method of growing a thin film onto a substrate

#65 | 2006-02-28 ✅ Patent 7,006,900 granted on 2006-02-28

US10619383

Hybrid cascade model-based predictive control system

#66 | 2006-02-02 ✅ Patent 7,601,225 granted on 2009-10-13

US20060024439A2

Chemistry; metallurgy

System for controlling the sublimation of reactants

#67 | 2006-01-17 ✅ Patent 6,986,914 granted on 2006-01-17

US10242368

Metal nitride deposition by ALD with reduction pulse

#68 | 2006-01-10 ✅ Patent 6,985,788 granted on 2006-01-10

US10838510

Method and system to process semiconductor wafers

#69 | 2006-01-03 ✅ Patent 6,981,517 granted on 2006-01-03

US10864260

Gas supply system, valve assembly and method of forming reactant pulses by operating a valve assembly

#70 | 2006-01-03 ✅ Patent 6,981,832 granted on 2006-01-03

US10641807

Wafer handling system

#71 | 2005-12-13 ✅ Patent 6,975,921 granted on 2005-12-13

US10033058

Graphical representation of a wafer processing process

#72 | 2005-11-15 ✅ Patent 6,964,751 granted on 2005-11-15

US10823304

Method and device for heat treating substrates

#73 | 2005-09-29 ✅ Patent 7,241,677 granted on 2007-07-10

US20050215053A1

Electricity

Process for producing integrated circuits including reduction using gaseous organic compounds

#74 | 2005-09-29 ✅ Patent 7,405,143 granted on 2008-07-29

US20050212139A1

Electricity

Method for fabricating a seed layer

#75 | 2005-09-22 ✅ Patent 7,067,407 granted on 2006-06-27

US20050208754A1

Electricity

Method of growing electrical conductors

#76 | 2005-09-06 ✅ Patent 6,939,579 granted on 2005-09-06

US9801542

ALD reactor and method with controlled wall temperature

#77 | 2005-08-30 ✅ Patent 6,936,535 granted on 2005-08-30

US10007304

Copper interconnect structure having stuffed diffusion barrier

#78 | 2005-08-23 ✅ Patent 6,933,225 granted on 2005-08-23

US10253859

Graded thin films

#79 | 2005-08-04 ✅ Patent 7,273,819 granted on 2007-09-25

US20050170662A1

Chemistry; metallurgy

Method and apparatus for processing semiconductor substrates

#80 | 2005-07-26 ✅ Patent 6,921,712 granted on 2005-07-26

US10276663

Process for producing integrated circuits including reduction using gaseous organic compounds

#81 | 2005-06-14 ✅ Patent 6,907,362 granted on 2005-06-14

US10829023

Resource consumption calculator

#82 | 2005-06-07 ✅ Patent 6,902,395 granted on 2005-06-07

US10390505

Multilevel pedestal for furnace

#83 | 2005-06-07 ✅ Patent 6,902,647 granted on 2005-06-07

US10233895

Method of processing substrates with integrated weighing steps

#84 | 2005-06-02 ✅ Patent 6,940,047 granted on 2005-09-06

US20050115945A1

Electricity

Heat treatment apparatus with temperature control system

#85 | 2005-05-26 ✅ Patent 7,476,420 granted on 2009-01-13

US20050112874A1

Chemistry; metallurgy

Process for producing metal oxide films at low temperatures

#86 | 2005-05-26 ✅ Patent 7,018,917 granted on 2006-03-28

US20050110145A1

Electricity

Multilayer metallization

#87 | 2005-05-19 ✅ Patent 7,329,590 granted on 2008-02-12

US20050106877A1

Chemistry; metallurgy

Method for depositing nanolaminate thin films on sensitive surfaces

#88 | 2005-05-10 ✅ Patent 6,889,864 granted on 2005-05-10

US10187142

Source chemical container assembly

#89 | 2005-05-05 ✅ Patent 7,022,627 granted on 2006-04-04

US20050095873A1

Electricity

Method for the heat treatment of substrates

#90 | 2005-05-03 ✅ Patent 6,889,149 granted on 2005-05-03

US10424219

System and method for fingerprinting of semiconductor processing tools

#91 | 2005-05-03 ✅ Patent 6,887,795 granted on 2005-05-03

US10300169

Method of growing electrical conductors

#92 | 2005-04-26 ✅ Patent 6,884,465 granted on 2005-04-26

US10829894

Process for producing aluminum oxide films at low temperatures

#93 | 2005-04-26 ✅ Patent 6,884,317 granted on 2005-04-26

US9771673

Method and installation for etching a substrate

#94 | 2005-04-21 ✅ Patent 6,974,781 granted on 2005-12-13

US20050085098A1

Electricity

Reactor precoating for reduced stress and uniform CVD

#95 | 2005-04-12 ✅ Patent 6,877,250 granted on 2005-04-12

US10316218

Apparatus, method and system for the treatment of a wafer

#96 | 2005-04-05 ✅ Patent 6,876,191 granted on 2005-04-05

US10373645

Apparatus for treating wafers, provided with a sensor box

#97 | 2005-03-08 ✅ Patent 6,863,727 granted on 2005-03-08

US10110730

Method of depositing transition metal nitride thin films

#98 | 2005-03-01 ✅ Patent 6,861,334 granted on 2005-03-01

US9887199

Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition

#99 | 2005-02-22 ✅ Patent 6,858,524 granted on 2005-02-22

US10430811

Method of depositing barrier layer for metal gates

#100 | 2005-02-22 ✅ Patent 6,858,546 granted on 2005-02-22

US10067634

Method of depositing rare earth oxide thin films

AssigneeID:

199481 ⎘