Chih Hung Chen

FACET-DEPENDENT ADSORPTION FOR PLANARIZATION OF POLYCRYSTALLINE MATERIALS

#2 | 2026-05-14

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CAPACITIVE SENSOR SYSTEM FOR CHEMICAL MECHANICAL POLISHING SYSTEM AND METHOD

#3 | 2026-05-07

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PLANARIZATION PROCESS WITH LASER TREATMENT

#4 | 2026-05-07

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CHEMICAL MECHANICAL PLANARIZATION TOOL

#5 | 2026-05-07

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FOAM NOZZLE CLEANING APPARATUS AND METHOD FOR CLEANING WAFER SURFACE

#6 | 2026-04-09

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SEMICONDUCTOR DEVICE FABRICATION METHODS AND DEVICES FOR FORMING THE SAME

#7 | 2025-11-13

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Polishing Pad for Chemical Mechanical Polishing and Method

#8 | 2024-12-12

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SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICAL PLANARIZATION

#9 | 2024-11-21

US20240383093A1

APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

#10 | 2024-11-14

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HOTSPOT AVOIDANCE METHOD OF MANUFACTURING INTEGRATED CIRCUITS

#11 | 2024-10-31

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SEMICONDUCTOR DEVICE FABRICATION METHODS AND DEVICES FOR FORMING THE SAME

#12 | 2024-08-15

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CMP System and Method of Use

#13 | 2024-05-09

US20240149388A1

Temperature control in chemical mechanical polish

#14 | 2023-12-21

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APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

#15 | 2023-12-14

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Polishing Pad for Chemical Mechanical Polishing and Method

#16 | 2023-11-23

US20230375330A1

Thin film metrology

#17 | 2023-11-16

US20230364733A1

Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen

#18 | 2023-08-31

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Chemical mechanical planarization tool

#19 | 2023-08-24

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Hotspot avoidance method of manufacturing integrated circuits

#20 | 2023-03-30

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WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POLISHING

#21 | 2023-03-02

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Method for wafer backside polishing

#22 | 2023-01-19

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CHEMICAL-MECHANICAL PLANARIZATION PAD AND METHODS OF USE

#23 | 2022-12-29

US20220415665A1

System and method for removing impurities during chemical mechanical planarization

#24 | 2022-12-01

US20220382947A1

Hotspot avoidance method of manufacturing integrated circuits

#25 | 2022-10-06

US20220316861A1

Thin film metrology

#26 | 2022-09-29

US20220310404A1

Semiconductor processing tool and methods of operation

#27 | 2022-01-13

US20220012400A1

Hotspot avoidance method for manufacturing integrated circuits

#28 | 2021-11-25

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Thin film metrology

#29 | 2021-11-11

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Chemistry; metallurgy

MAGNETIC POLISHING SLURRY AND METHOD FOR POLISHING A WORKPIECE

#30 | 2021-11-04

US20210343538A1

CMP system and method of use

#31 | 2021-07-22

US20210220964A1

Chemical mechanical polishing apparatus including a multi-zone platen

#32 | 2021-04-29

US20210125881A1

Thickness sensor for conductive features

#33 | 2021-02-25

US20210053180A1

Chemical mechanical planarization tool

#34 | 2021-02-04

US20210036129A1

Semiconductor device, method, and tool of manufacture

#35 | 2021-01-21

US20210020449A1

CMP system and method of use

#36 | 2020-09-17

US20200294821A1

POST CMP CLEANING APPARATUS AND POST CMP CLEANING METHODS

#37 | 2020-03-05

US20200070301A1

Wet chemical heating system and a method of chemical mechanical polishing

#38 | 2019-12-26

US20190393107A1

Thickness sensor for conductive features

#39 | 2019-11-07

US20190337115A1

Temperature control in chemical mechanical polish

#40 | 2019-10-03

US20190305107A1

Semiconductor structure with doped contact plug and method for forming the same

#41 | 2019-07-25

US20190224810A1

Polishing pad for chemical mechanical planarization

#42 | 2019-01-31

US20190030675A1

Temperature control in chemical mechanical polish

#43 | 2018-10-04

US20180281152A1

Apparatus and method for timed dispensing various slurry components

#44 | 2018-10-04

US20180281150A1

Polishing pad having grooves on bottom surface of top layer

#45 | 2018-09-20

US20180269307A1

Semiconductor device, method, and tool of manufacture

#46 | 2018-08-28

US15475269

Method for controlling chemical mechanical polishing process

#47 | 2012-11-22

US20120294351A1

Equalizer and communication system

#48 | 2012-03-15

US20120066659A1

Methods for generating device layouts by combining an automated device layout generator with a script

#49 | 2009-04-30

US20090108944A1

Low-noise amplifier circuit including band-stop filter

#50 | 2009-04-30

US20090108943A1

Low noise amplifier

#51 | 2009-04-30

US20090108935A1

Variable gain amplifier including series-coupled cascode amplifiers

#52 | 2008-03-13

US20080061112A1

Method for soldering charge coupled device and tooling thereof

#53 | 2006-07-18

US9860971

Wafer level burn-in of SRAM

#54 | 2006-06-15

US20060128964A1

Chemistry; metallurgy

Method for preparing 2- (2-pyridylmethylsulphinyl) benzimidazoles

#55 | 2006-05-18

US20060104398A1