Martin EBERT

City:

Fremont, California

Country:

United States

Published Applications:

Last publication date:

2023-06-29

Top Assignees for applications by Martin EBERT

The entities that hold a legal rights for patent applications filed by inventor EBERT Martin:

Therma-Wave, Inc. 4 Fremont, CA United States
TOKYO ELECTRON LIMITED 3 Tokyo, Japan
Nanometrics Incorporated 2 Milpitas, CA United States
ASML Netherlands B.V. 2 Veldhoven, Netherlands

Recent patent applications by EBERT Martin

Martin EBERT from Fremont, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-06-29

US20230207255A1

Electricity

MULTI-BEAM CHARGED PARTICLE COLUMN

#2 | 2019-03-07

US20190072859A1

Physics

Metrology method and apparatus

#3 | 2012-09-04

US12750577

Scanning focal length metrology

#4 | 2010-04-13

US11624182

Scanning focal length metrology

#5 | 2007-02-08

US20070030485A1

Physics

Multiple beam ellipsometer

#6 | 2006-06-22

US20060132773A1

Physics

Method for noise improvement in ellipsometers

#7 | 2006-04-18

US10424263

Fast wafer positioning method for optical metrology

#8 | 2006-02-16

US20060033914A1

Physics

Multiple beam ellipsometer

#9 | 2005-10-04

US10843159

Wafer chuck with integrated reference sample

#10 | 2005-10-04

US10403489

System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size

#11 | 2005-01-06

US20050002033A1

Physics

Multiple beam ellipsometer

InventorID:

2448628 ⎘