Millbrae, California
United States
11
2011-12-22
The entities that hold a legal rights for patent applications filed by inventor Chen Haiguang:
Haiguang Chen from Millbrae, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
#2 | 2008-08-28Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
#3 | 2008-05-13Methods and systems for detection of selected defects particularly in relatively noisy inspection data
#4 | 2007-02-13Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device
#5 | 2006-07-06Methods and systems for detecting a presence of blobs on a specimen during a polishing process
#6 | 2006-06-22Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
#7 | 2006-05-30Methods and systems for detecting a presence of blobs on a specimen during a polishing process
#8 | 2006-04-18Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
#9 | 2005-08-30Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing
#10 | 2005-04-26Systems and methods for characterizing a polishing process
#11 | 2005-03-15Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad
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