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Assignee profile:

KLA-TENCOR TECHNOLOGIES CORPORATION

City:

Milpitas, California

Country:

United States

Published Applications:

409

Last publication date:

2021-12-21

Patent Grants:

400

Last grant date:

2021-12-21

Quarterly KLA-TENCOR TECHNOLOGIES CORPORATION Patent Applications

Top Inventors for applications by KLA-TENCOR TECHNOLOGIES CORPORATION

These are the the leading inventors for applications assigned to KLA-TENCOR TECHNOLOGIES CORPORATION:

Recent patent applications by KLA-TENCOR TECHNOLOGIES CORPORATION

KLA-TENCOR TECHNOLOGIES CORPORATION based in Milpitas, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2021-12-21 ✅ Patent 11,204,330 granted on 2021-12-21
US14788700
Physics

Systems and methods for inspection of a specimen

 #2 | 2014-08-28 ✅ Patent 9,053,833 granted on 2015-06-09
US20140239805A1
Physics

DC high-voltage super-radiant free-electron based EUV source

 #3 | 2013-11-28
US20130314710A1
Physics

Methods and Systems for Determining a Critical Dimension and Overlay of a Specimen

 #4 | 2013-11-21 ✅ Patent 9,588,441 granted on 2017-03-07
US20130310966A1
Physics

Method and device for using substrate geometry to determine optimum substrate analysis sampling

 #5 | 2013-06-27 ✅ Patent 8,781,211 granted on 2014-07-15
US20130163852A1
Physics

Rotational multi-layer overlay marks, apparatus, and methods

 #6 | 2013-02-14 ✅ Patent 8,502,979 granted on 2013-08-06
US20130039460A1
Physics

Methods and systems for determining a critical dimension and overlay of a specimen

 #7 | 2013-02-07 ✅ Patent 8,422,010 granted on 2013-04-16
US20130035877A1
Physics

Methods and systems for determining a characteristic of a wafer

 #8 | 2012-06-28 ✅ Patent 8,298,335 granted on 2012-10-30
US20120160856A1
Electricity

Enclosure for controlling the environment of optical crystals

 #9 | 2012-06-21 ✅ Patent 9,182,680 granted on 2015-11-10
US20120153281A1
Physics

Apparatus and methods for determining overlay of structures having rotational or mirror symmetry

 #10 | 2011-12-22 ✅ Patent 8,831,767 granted on 2014-09-09
US20110313558A1
Performing operations; transporting

Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool

 #11 | 2011-11-24 ✅ Patent 8,139,843 granted on 2012-03-20
US20110286656A1
Physics

Methods and systems for utilizing design data in combination with inspection data

 #12 | 2011-07-28 ✅ Patent 8,355,140 granted on 2013-01-15
US20110181891A1
Physics

Systems configured to generate output corresponding to defects on a specimen

 #13 | 2011-07-28 ✅ Patent 8,711,346 granted on 2014-04-29
US20110181868A1
Physics

Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks

 #14 | 2011-07-14 ✅ Patent 8,768,665 granted on 2014-07-01
US20110172982A1
Physics

Site based quantification of substrate topography and its relation to lithography defocus and overlay

 #15 | 2011-06-16 ✅ Patent 8,092,927 granted on 2012-01-10
US20110142382A1
Chemistry; metallurgy

Shielding, particulate reducing high vacuum components

 #16 | 2011-06-16 ✅ Patent 8,213,705 granted on 2012-07-03
US20110142327A1
Physics

Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer

 #17 | 2010-12-30 ✅ Patent 8,111,399 granted on 2012-02-07
US20100328670A1
Physics

System and method for performing photothermal measurements and relaxation compensation

 #18 | 2010-12-16 ✅ Patent 8,111,384 granted on 2012-02-07
US20100318212A1
Physics

Method for measuring thermo-optically induced material phase-change response in a multiple layer thin film structure using visible and ultraviolet spectroscopy

 #19 | 2010-12-07 ✅ Patent 7,847,937 granted on 2010-12-07
US11696612
-

Optical measurment systems and methods

 #20 | 2010-12-07 ✅ Patent 7,846,266 granted on 2010-12-07
US11356879
-

Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology

 #21 | 2010-11-25 ✅ Patent 8,390,789 granted on 2013-03-05
US20100295258A1
Physics

Z-stage with dynamically driven stage mirror and chuck assembly

 #22 | 2010-11-25 ✅ Patent 8,033,190 granted on 2011-10-11
US20100294051A1
Physics

Process condition sensing wafer and data analysis system

 #23 | 2010-11-23 ✅ Patent 7,838,833 granted on 2010-11-23
US11998502
-

Apparatus and method for e-beam dark imaging with perspective control

 #24 | 2010-11-09 ✅ Patent 7,831,083 granted on 2010-11-09
US11457213
-

Image quality monitoring for substrate inspection

 #25 | 2010-11-02 ✅ Patent 7,826,072 granted on 2010-11-02
US11999814
-

Method for optimizing the configuration of a scatterometry measurement system

 #26 | 2010-10-28 ✅ Patent 8,179,530 granted on 2012-05-15
US20100271621A1
Physics

Methods and systems for determining a critical dimension and overlay of a specimen

 #27 | 2010-10-19 ✅ Patent 7,816,655 granted on 2010-10-19
US10851041
-

Reflective electron patterning device and method of using same

 #28 | 2010-09-28 ✅ Patent 7,804,248 granted on 2010-09-28
US11695425
-

Lamp with shaped wall thickness, method of making same and optical apparatus

 #29 | 2010-09-28 ✅ Patent 7,804,994 granted on 2010-09-28
US10367124
-

Overlay metrology and control method

 #30 | 2010-09-23 ✅ Patent 8,384,887 granted on 2013-02-26
US20100238433A1
Physics

Methods and systems for inspection of a specimen using different inspection parameters

 #31 | 2010-09-09 ✅ Patent 8,111,900 granted on 2012-02-07
US20100226562A1
Physics

Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

 #32 | 2010-09-07 ✅ Patent 7,792,351 granted on 2010-09-07
US12710076
-

Defect review using image segmentation

 #33 | 2010-07-13 ✅ Patent 7,755,043 granted on 2010-07-13
US11888380
-

Bright-field/dark-field detector with integrated electron energy spectrometer

 #34 | 2010-07-01 ✅ Patent 7,898,661 granted on 2011-03-01
US20100165340A1
Physics

Spectroscopic scatterometer system

 #35 | 2010-05-13
US20100119144A1
Physics

METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA

 #36 | 2010-05-11 ✅ Patent 7,716,003 granted on 2010-05-11
US11879227
-

Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction

 #37 | 2010-05-11 ✅ Patent 7,714,300 granted on 2010-05-11
US11711552
-

High-speed high-efficiency solid-state electron detector

 #38 | 2010-04-15 ✅ Patent 7,933,016 granted on 2011-04-26
US20100091284A1
Physics

Apparatus and methods for detecting overlay errors using scatterometry

 #39 | 2010-04-06 ✅ Patent 7,691,549 granted on 2010-04-06
US11675529
-

Multiple exposure lithography technique and method

 #40 | 2010-04-06 ✅ Patent 7,692,167 granted on 2010-04-06
US11588492
-

High-fidelity reflection electron beam lithography

 #41 | 2010-03-25 ✅ Patent 8,570,515 granted on 2013-10-29
US20100073688A1
Physics

Periodic patterns and technique to control misalignment between two layers

 #42 | 2010-03-23 ✅ Patent 7,684,609 granted on 2010-03-23
US11441962
-

Defect review using image segmentation

 #43 | 2010-03-02 ✅ Patent 7,671,990 granted on 2010-03-02
US11759183
-

Cross hatched metrology marks and associated method of use

 #44 | 2010-02-09 ✅ Patent 7,659,126 granted on 2010-02-09
US11625546
-

Electrical test method and apparatus

 #45 | 2010-02-02 ✅ Patent 7,654,715 granted on 2010-02-02
US11836216
-

System and method for illuminating a specimen with uniform angular and spatial distribution

 #46 | 2010-01-26 ✅ Patent 7,652,430 granted on 2010-01-26
US11224921
-

Broadband plasma light sources with cone-shaped electrode for substrate processing

 #47 | 2010-01-07 ✅ Patent 7,876,438 granted on 2011-01-25
US20100005442A1
Physics

Apparatus and methods for determining overlay and uses of same

 #48 | 2009-12-03 ✅ Patent 8,923,600 granted on 2014-12-30
US20090297019A1
Physics

Methods and systems for utilizing design data in combination with inspection data

 #49 | 2009-12-01 ✅ Patent 7,627,007 granted on 2009-12-01
US11346021
-

Non-critical phase matching in CLBO to generate sub-213nm wavelengths

 #50 | 2009-11-26 ✅ Patent 7,879,627 granted on 2011-02-01
US20090291513A1
Physics

Overlay marks and methods of manufacturing such marks

 #51 | 2009-11-26
US20090290784A1
Physics

METHODS AND SYSTEMS FOR BINNING DEFECTS DETECTED ON A SPECIMEN

 #52 | 2009-11-24 ✅ Patent 7,623,228 granted on 2009-11-24
US11751559
-

Front face and edge inspection

 #53 | 2009-11-19 ✅ Patent 7,876,440 granted on 2011-01-25
US20090284744A1
Physics

Apparatus and methods for detecting overlay errors using scatterometry

 #54 | 2009-10-20 ✅ Patent 7,604,906 granted on 2009-10-20
US11231550
-

Films for prevention of crystal growth on fused silica substrates for semiconductor lithography

 #55 | 2009-10-20 ✅ Patent 7,604,449 granted on 2009-10-20
US11167539
-

Equipment front end module

 #56 | 2009-10-20 ✅ Patent 7,606,677 granted on 2009-10-20
US10986269
-

Dynamic measurement control

 #57 | 2009-10-06 ✅ Patent 7,598,492 granted on 2009-10-06
US11623576
-

Charged particle microscopy using super resolution

 #58 | 2009-10-06 ✅ Patent 7,599,051 granted on 2009-10-06
US11562374
-

Calibration of a substrate inspection tool

 #59 | 2009-09-10 ✅ Patent 8,138,498 granted on 2012-03-20
US20090224413A1
Physics

Apparatus and methods for determining overlay of structures having rotational or mirror symmetry

 #60 | 2009-08-18 ✅ Patent 7,576,317 granted on 2009-08-18
US12116890
-

Calibration standard for a dual beam (FIB/SEM) machine

 #61 | 2009-08-11 ✅ Patent 7,573,046 granted on 2009-08-11
US11728664
-

Thermal field emission electron gun with reduced arcing

 #62 | 2009-08-04 ✅ Patent 7,569,834 granted on 2009-08-04
US11550762
-

High resolution charged particle projection lens array using magnetic elements

 #63 | 2009-07-30
US20090190141A1
Physics

SYSTEM FOR MEASURING A SAMPLE WITH A LAYER CONTAINING A PERIODIC DIFFRACTING STRUCTURE

 #64 | 2009-07-28 ✅ Patent 7,566,882 granted on 2009-07-28
US11638869
-

Reflection lithography using rotating platter

 #65 | 2009-07-28 ✅ Patent 7,566,873 granted on 2009-07-28
US11638805
-

High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus

 #66 | 2009-07-14 ✅ Patent 7,560,691 granted on 2009-07-14
US11716891
-

High-resolution auger electron spectrometer

 #67 | 2009-07-14 ✅ Patent 7,561,282 granted on 2009-07-14
US11552918
-

Techniques for determining overlay and critical dimension using a single metrology tool

 #68 | 2009-07-14 ✅ Patent 7,560,939 granted on 2009-07-14
US11357374
-

Electrical defect detection using pre-charge and sense scanning with prescribed delays

 #69 | 2009-07-07 ✅ Patent 7,557,921 granted on 2009-07-07
US11250119
-

Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools

 #70 | 2009-06-25 ✅ Patent 8,817,248 granted on 2014-08-26
US20090161096A1
Physics

Simultaneous multi-spot inspection and imaging

 #71 | 2009-06-02 ✅ Patent 7,541,115 granted on 2009-06-02
US11075993
-

Use of calcium fluoride substrate for lithography masks

 #72 | 2009-05-28 ✅ Patent 7,826,071 granted on 2010-11-02
US20090135416A1
Physics

Parametric profiling using optical spectroscopic systems

 #73 | 2009-05-26 ✅ Patent 7,538,333 granted on 2009-05-26
US11460517
-

Contactless charge measurement of product wafers and control of corona generation and deposition

 #74 | 2009-05-19 ✅ Patent 7,535,563 granted on 2009-05-19
US11464567
-

Systems configured to inspect a specimen

 #75 | 2009-05-07 ✅ Patent 7,978,323 granted on 2011-07-12
US20090116004A1
Physics

Surface inspection system with improved capabilities

 #76 | 2009-05-07 ✅ Patent 7,755,061 granted on 2010-07-13
US20090114837A1
Electricity

Dynamic pattern generator with cup-shaped structure

 #77 | 2009-05-05 ✅ Patent 7,528,349 granted on 2009-05-05
US11532748
-

Temperature stabilization for substrate processing

 #78 | 2009-04-28 ✅ Patent 7,525,649 granted on 2009-04-28
US11875240
-

Surface inspection system using laser line illumination with two dimensional imaging

 #79 | 2009-04-28 ✅ Patent 7,525,090 granted on 2009-04-28
US11725022
-

Dynamic centering for behind-the-lens dark field imaging

 #80 | 2009-04-21 ✅ Patent 7,521,946 granted on 2009-04-21
US11277934
-

Electrical measurements on semiconductors using corona and microwave techniques

 #81 | 2009-04-16 ✅ Patent 7,671,982 granted on 2010-03-02
US20090096505A1
Physics

Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system

 #82 | 2009-04-14 ✅ Patent 7,519,153 granted on 2009-04-14
US11388298
-

X-ray metrology with diffractors

 #83 | 2009-04-07 ✅ Patent 7,514,681 granted on 2009-04-07
US11451698
-

Electrical process monitoring using mirror-mode electron microscopy

 #84 | 2009-03-26 ✅ Patent 7,767,956 granted on 2010-08-03
US20090079974A1
Physics

Methods and systems for lithography process control

 #85 | 2009-03-12
US20090067797A1
Physics

OPTICAL WAVEGUIDE RADIATION CONTROL

 #86 | 2009-03-12 ✅ Patent 7,992,877 granted on 2011-08-09
US20090067114A1
Electricity

Non contact substrate chuck

 #87 | 2009-03-05 ✅ Patent 7,873,585 granted on 2011-01-18
US20090063378A1
Physics

Apparatus and methods for predicting a semiconductor parameter across an area of a wafer

 #88 | 2009-03-05 ✅ Patent 7,656,519 granted on 2010-02-02
US20090059236A1
Physics

Wafer edge inspection

 #89 | 2009-02-26 ✅ Patent 7,541,201 granted on 2009-06-02
US20090051917A9
Physics

Apparatus and methods for determining overlay of structures having rotational or mirror symmetry

 #90 | 2009-02-17 ✅ Patent 7,493,590 granted on 2009-02-17
US11549943
-

Process window optical proximity correction

 #91 | 2009-02-12 ✅ Patent 7,663,746 granted on 2010-02-16
US20090040514A1
Physics

Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool

 #92 | 2009-02-12 ✅ Patent 7,777,875 granted on 2010-08-17
US20090040511A1
Physics

Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation

 #93 | 2009-02-10 ✅ Patent 7,488,938 granted on 2009-02-10
US11509137
-

Charge-control method and apparatus for electron beam imaging

 #94 | 2009-02-05 ✅ Patent 7,616,307 granted on 2009-11-10
US20090033931A1
Physics

Optical measurement apparatus and method

 #95 | 2009-01-29 ✅ Patent 8,058,628 granted on 2011-11-15
US20090028683A1
Mechanical engineering

Substrate processing apparatus and method

 #96 | 2009-01-08 ✅ Patent 7,945,086 granted on 2011-05-17
US20090010526A1
Electricity

Tungsten plug deposition quality evaluation method by EBACE technology

 #97 | 2009-01-08 ✅ Patent 7,697,129 granted on 2010-04-13
US20090009754A1
Physics

Systems and methods for inspecting a wafer with increased sensitivity

 #98 | 2008-12-16 ✅ Patent 7,465,922 granted on 2008-12-16
US11485542
-

Accelerating electrostatic lens gun for high-speed electron beam inspection

 #99 | 2008-12-11 ✅ Patent 7,583,386 granted on 2009-09-01
US20080304078A1
Physics

Method and apparatus for optically analyzing a surface

 #100 | 2008-11-27 ✅ Patent 7,746,462 granted on 2010-06-29
US20080291454A1
Physics

Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range

Also check out KLA-Tencor Technologies Corporation's (Milpitas, United States) applicant profile with 5 patent applications submitted.

AssigneeID:

8540 ⎘