Robert J. Socha

City:

Campbell, California

Country:

United States

Published Applications:

Last publication date:

2014-06-10

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Robert J. Socha from Campbell, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Determining the gradient and Hessian of the image log slope for design rule optimization for accelerating source mask optimization (SMO)

Method, program product and apparatus for performing decomposition of a pattern for use in a DPT process

Method, program product and apparatus for performing decomposition of a pattern for use in a DPT process

Method, program product and apparatus for optimizing illumination for full-chip layer

Eigen decomposition based OPC model

InventorID:

3538164 ⎘