Wetzlar
Germany
16
2010-11-25
The entities that hold a legal rights for patent applications filed by inventor Backhauss Henning:
Henning Backhauss from Wetzlar, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus for the optical inspection of wafers
#2 | 2007-04-05Method of detecting incomplete edge bead removal from a disk-like object
#3 | 2007-03-22Method and device for inspecting a wafer
#4 | 2007-02-20Apparatus for wafer inspection
#5 | 2007-01-18Apparatus for Inspecting a Wafer
#6 | 2006-11-23Apparatus and method for inspecting a wafer
#7 | 2005-12-22Method and system for inspecting a wafer
#8 | 2005-12-22Method and system for inspecting a wafer
#9 | 2005-08-04Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset
#10 | 2005-06-23Apparatus and method for inspection of a wafer
#11 | 2005-06-23Method for inspection of a wafer
#12 | 2005-06-09Apparatus for wafer inspection
#13 | 2005-05-12System for the detection of macrodefects
#14 | 2005-01-06Apparatus for inspection of a wafer
#15 | 2005-01-06Apparatus, method, and computer program for wafer inspection
#16 | 2005-01-06Apparatus for inspection of a wafer
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