Muenchen
Germany
4
2009-03-12
The entities that hold a legal rights for patent applications filed by inventor Scheuring Gerd:
Gerd Scheuring from Muenchen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Arrangement and method for improving the measurement accuracy in the nm range for optical systems
#2 | 2008-10-23Device for Inspecting a Microscopic Component
#3 | 2007-09-06DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERSION OBJECTIVE
#4 | 2005-04-21Apparatus for measuring feature widths on masks for the semiconductor industry
3899728 ⎘