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Inventor profile of:

Eric M. Lee

City:

Austin, Texas

Country:

United States

Published Applications:

Last publication date:

2016-10-27

Top Assignees for applications by Eric M. Lee

The entities that hold a legal rights for patent applications filed by inventor Lee Eric M.:

TOKYO ELECTRON LIMITED 23 Tokyo, Japan
TOKYO ELECTRON LIMITED 7 Minato-ku, Japan
Tokyo Electron Ltd. 1 Tokyo, Japan
TOKYO ELECTRON LIMTED 1 Tokyo, Japan
AIR PRODUCTS AND CHEMICALS, INC. 1 Allentown, PA United States

Recent patent applications by Lee Eric M.

Eric M. Lee from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2016-10-27

US20160314966A1

Electricity

Multi-step system and method for curing a dielectric film

#2 | 2016-01-28

US20160027641A1

Electricity

Multi-step system and method for curing a dielectric film

#3 | 2015-06-04

US20150152556A1

Chemistry; metallurgy

METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION BY AN ELECTRIC FIELD

#4 | 2014-04-24

US20140109432A1

Electricity

Multi-step system and method for curing a dielectric film

#5 | 2013-08-22

US20130217210A1

Electricity

Method and device for controlling pattern and structure formation by an electric field

#6 | 2012-08-23

US20120213929A1

Chemistry; metallurgy

METHOD OF OPERATING FILAMENT ASSISTED CHEMICAL VAPOR DEPOSITION SYSTEM

#7 | 2011-12-15

US20110305831A1

Chemistry; metallurgy

Method for chemical vapor deposition control

#8 | 2011-12-15

US20110303145A1

Electricity

Apparatus for chemical vapor deposition control

#9 | 2011-06-02

US20110126762A1

Chemistry; metallurgy

Vapor deposition system

#10 | 2010-09-30

US20100248443A1

Electricity

Method of integrating an air gap structure with a substrate

#11 | 2010-09-30

US20100247803A1

Chemistry; metallurgy

Chemical vapor deposition method

#12 | 2010-03-18

US20100068897A1

Electricity

DIELECTRIC TREATMENT PLATFORM FOR DIELECTRIC FILM DEPOSITION AND CURING

#13 | 2010-03-18

US20100067886A1

Electricity

IR LASER OPTICS SYSTEM FOR DIELECTRIC TREATMENT MODULE

#14 | 2010-03-18

US20100065759A1

Electricity

Dielectric treatment module using scanning IR radiation source

#15 | 2010-03-18

US20100065758A1

Electricity

DIELECTRIC MATERIAL TREATMENT SYSTEM AND METHOD OF OPERATING

#16 | 2010-02-18

US20100041248A1

Electricity

Multi-step system and method for curing a dielectric film

#17 | 2009-09-10

US20090227119A1

Electricity

Method for curing a porous low dielectric constant dielectric film

#18 | 2009-09-10

US20090227118A1

Electricity

Method for removing a pore-generating material from an uncured low-k dielectric film

#19 | 2009-09-10

US20090226695A1

Electricity

METHOD FOR TREATING A DIELECTRIC FILM WITH INFRARED RADIATION

#20 | 2009-09-10

US20090226694A1

Electricity

POROUS SiCOH-CONTAINING DIELECTRIC FILM AND A METHOD OF PREPARING

#21 | 2008-03-13

US20080063809A1

Electricity

Thermal processing system for curing dielectric films

#22 | 2007-05-10

US20070105401A1

Electricity

Multi-step system and method for curing a dielectric film

#23 | 2007-04-05

US20070077782A1

Electricity

Treatment of low dielectric constant films using a batch processing system

#24 | 2007-04-05

US20070077781A1

Electricity

Plural treatment step process for treating dielectric films

#25 | 2007-04-05

US20070077353A1

Electricity

Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system

#26 | 2005-10-20

US20050230677A1

Electricity

Structure comprising tunable anti-reflective coating and method of forming thereof

#27 | 2005-08-04

US20050167839A1

Electricity

Structure comprising amorphous carbon film and method of forming thereof

#28 | 2005-05-19

US20050104150A1

Electricity

Structure comprising tunable anti-reflective coating and method of forming thereof

InventorID:

402382 ⎘