Mountain View, California
United States
19
2019-11-21
The entities that hold a legal rights for patent applications filed by inventor Chen Haiguang:
Haiguang Chen from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Process-induced distortion prediction and feedforward and feedback correction of overlay errors
#2 | 2019-09-05Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool
#3 | 2019-07-16Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool
#4 | 2018-01-09Systems and methods for effective pattern wafer surface measurement and analysis using interferometry tool
#5 | 2017-07-11Systems and methods for wafer surface feature detection and quantification
#6 | 2017-05-09Detection of selected defects in relatively noisy inspection data
#7 | 2016-11-03Hybrid phase unwrapping systems and methods for patterned wafer measurement
#8 | 2016-09-29System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking
#9 | 2016-05-31Detection of selected defects in relatively noisy inspection data
#10 | 2015-04-30Process-induced distortion prediction and feedforward and feedback correction of overlay errors
#11 | 2014-04-24Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool
#12 | 2014-04-17System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking
#13 | 2013-11-14Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools
#14 | 2013-09-12Systems and methods of advanced site-based nanotopography for wafer surface metrology
#15 | 2012-07-12Methods and systems of object based metrology for advanced wafer surface nanotopography
#16 | 2012-07-12Methods and systems for improved localized feature quantification in surface metrology tools
#17 | 2011-09-08Systems and methods for wafer edge feature detection and quantification
#18 | 2011-08-11Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer
#19 | 2010-05-04Methods and systems for detection of selected defects particularly in relatively noisy inspection data
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