Solms
Germany
4
2007-10-25
The entities that hold a legal rights for patent applications filed by inventor Graf Uwe:
Uwe Graf from Solms, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for inspecting micro-structured devices on a semiconductor substrate
#2 | 2006-02-21Setting module for the illumination of an optical instrument
#3 | 2005-11-24Device and method for inspecting an object
#4 | 2005-04-12Autofocus module and method for a microscope-based system
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