Hapert
Netherlands
23
2013-01-24
The entities that hold a legal rights for patent applications filed by inventor Munnig Schmidt Robert-Han:
Robert-Han Munnig Schmidt from Hapert, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate handling apparatus and lithographic apparatus
#2 | 2011-09-15Lithographic apparatus and device manufacturing method
#3 | 2010-06-24Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
#4 | 2009-10-22Lithographic apparatus and device manufacturing method
#5 | 2009-01-01Lithographic apparatus
#6 | 2008-07-24Apparatus configured to position a workpiece
#7 | 2008-03-06Lithographic apparatus and device manufacturing method
#8 | 2007-10-18Lithographic apparatus and device manufacturing method
#9 | 2007-09-27Lithographic apparatus, radiation supply and device manufacturing method
#10 | 2007-07-12Lithographic apparatus and device manufacturing method
#11 | 2007-06-28Lithographic apparatus and device manufacturing method
#12 | 2007-06-14Lithographic apparatus and device manufacturing method using laser trimming of a multiple mirror contrast device
#13 | 2006-06-29Methods and systems for lithographic beam generation
#14 | 2006-06-29Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates
#15 | 2006-06-22Lithographic apparatus and device manufacturing method
#16 | 2006-06-08Lithographic apparatus and device manufacturing method
#17 | 2005-12-29Lithographic apparatus and device manufacturing method
#18 | 2005-09-15Lithographic positioning device and device manufacturing method
#19 | 2005-09-15Positioning device
#20 | 2005-07-21Lithographic apparatus
#21 | 2005-05-12Movable stage system, lithographic apparatus, and device manufacturing method
#22 | 2005-04-21Lithographic apparatus and device manufacturing method
#23 | 2005-02-24Lithographic apparatus and device manufacturing method
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