John Robinson

SYSTEM FOR AUTOMATIC DIAGNOSTICS AND MONITORING OF SEMICONDUCTOR DEFECT DIE SCREENING PERFORMANCE THROUGH OVERLAY OF DEFECT AND ELECTRICAL TEST DATA

Systems and methods for semiconductor adaptive testing using inline defect part average testing

SYSTEM AND METHOD FOR AUTOMATICALLY IDENTIFYING DEFECT-BASED TEST COVERAGE GAPS IN SEMICONDUCTOR DEVICES

Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Feed forward of metrology data in a metrology system

Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer

Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Feedforward/feedback litho process control of stress and overlay

Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation

Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability

Feedforward/feedback litho process control of stress and overlay

Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Method and system for optimizing alignment performance in a fleet of exposure tools

Use of overlay diagnostics for enhanced automatic process control

Use of overlay diagnostics for enhanced automatic process control

Use of overlay diagnostics for enhanced automatic process control